US8405420B2 - System comprising a semiconductor device and structure - Google Patents

System comprising a semiconductor device and structure Download PDF

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Publication number
US8405420B2
US8405420B2 US12/859,665 US85966510A US8405420B2 US 8405420 B2 US8405420 B2 US 8405420B2 US 85966510 A US85966510 A US 85966510A US 8405420 B2 US8405420 B2 US 8405420B2
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US
United States
Prior art keywords
layer
wafer
transistors
gate
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active, expires
Application number
US12/859,665
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US20110049577A1 (en
Inventor
Zvi Or-Bach
Brian Cronquist
Israel Beinglass
J. L. de Jong
Deepak C. Sekar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Monolithic 3D Inc
Original Assignee
Monolithic 3D Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Priority to US12/423,214 priority Critical patent/US8384426B2/en
Priority to US12/577,532 priority patent/US20110031997A1/en
Priority to US12/706,520 priority patent/US20110199116A1/en
Priority to US12/792,673 priority patent/US7964916B2/en
Priority to US12/847,911 priority patent/US7960242B2/en
Priority to US12/849,272 priority patent/US7986042B2/en
Application filed by Monolithic 3D Inc filed Critical Monolithic 3D Inc
Priority to US12/859,665 priority patent/US8405420B2/en
Priority claimed from US12/900,379 external-priority patent/US8395191B2/en
Priority claimed from TW099134901A external-priority patent/TWI517355B/en
Assigned to NuPGA Corporation reassignment NuPGA Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BEINGLASS, ISRAEL, CRONQUIST, BRIAN, DE JONG, J. L., SEKAR, DEEPAK C.
Priority claimed from US12/949,617 external-priority patent/US8754533B2/en
Priority claimed from US12/970,602 external-priority patent/US9711407B2/en
Priority claimed from US13/016,313 external-priority patent/US8362482B2/en
Publication of US20110049577A1 publication Critical patent/US20110049577A1/en
Assigned to MONOLITHIC 3D INC. reassignment MONOLITHIC 3D INC. CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: NuPGA Corporation
Priority claimed from US13/098,997 external-priority patent/US8669778B1/en
Priority claimed from PCT/US2011/042071 external-priority patent/WO2012015550A2/en
Priority claimed from US13/635,436 external-priority patent/US8642416B2/en
Priority claimed from US13/251,269 external-priority patent/US9099526B2/en
Priority claimed from US13/593,620 external-priority patent/US8378715B2/en
Assigned to MONOLITHIC 3D INC. reassignment MONOLITHIC 3D INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: OR-BACH, ZVI
Publication of US8405420B2 publication Critical patent/US8405420B2/en
Application granted granted Critical
Priority claimed from US15/224,929 external-priority patent/US9853089B2/en
Priority claimed from US15/409,740 external-priority patent/US9941332B2/en
Priority claimed from US15/863,924 external-priority patent/US20180122686A1/en
Priority claimed from US15/922,913 external-priority patent/US20180204835A1/en
Application status is Active legal-status Critical
Adjusted expiration legal-status Critical

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