JP6814579B2 - 研削ホイール及び研削装置 - Google Patents
研削ホイール及び研削装置 Download PDFInfo
- Publication number
- JP6814579B2 JP6814579B2 JP2016182512A JP2016182512A JP6814579B2 JP 6814579 B2 JP6814579 B2 JP 6814579B2 JP 2016182512 A JP2016182512 A JP 2016182512A JP 2016182512 A JP2016182512 A JP 2016182512A JP 6814579 B2 JP6814579 B2 JP 6814579B2
- Authority
- JP
- Japan
- Prior art keywords
- grinding
- grinding wheel
- ultrasonic
- ultrasonic vibration
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000227 grinding Methods 0.000 title claims description 230
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 238000013459 approach Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
- B24B41/047—Grinding heads for working on plane surfaces
- B24B41/0475—Grinding heads for working on plane surfaces equipped with oscillating abrasive blocks, e.g. mounted on a rotating head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/02—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
- B24B47/04—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables by mechanical gearing only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/04—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor involving a rotary work-table
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
Description
20 保持テーブル
21 保持面
30 研削送り手段
40 研削手段
45 マウント
50 研削ホイール
51 ホイール基台
52 研削砥石
53 第1の円環板
54 被装着面
55 筒体
56 第2の円環板
57 第2の円環板の開口
58 超音波発振部
59 超音波受振部
65 高周波電源
66 制御部
W ウエーハ
Claims (3)
- 環状に配設した研削砥石に超音波振動を伝達させて保持テーブルに保持されたウエーハを研削する研削ホイールであって、
研削装置のマウントに装着する環状の被装着面を有する第1の円環板と、
該第1の円環板の外周から垂下する筒体と、
該筒体の下端に外周端を連結させ中央に開口を有する第2の円環板と、
該第2の円環板の下面に環状に配設する該研削砥石と、
該第2の円環板の上面に該開口を囲繞する環状の超音波発振部と、
該第2の円環板に設けられ、該超音波発振部から該第2の円環板を介して該研削砥石に伝達された超音波振動を受振する超音波受振部と、を備え、
該超音波受振部は、研削中に該超音波発振部から該研削砥石に伝達された該超音波振動を、該第2の円環板を介して受振し、該超音波振動の振幅量を電気信号に変換して、該超音波発振部に対する高周波電力を制御する制御部に出力する、研削ホイール。 - 該超音波受振部は、該超音波発振部の径方向外側で且つ該研削砥石の径方向内側に設けられている、請求項1記載の研削ホイール。
- 保持面でウエーハを保持する保持テーブルと、
請求項1又は請求項2に記載の研削ホイールを回転可能に装着するマウントを有し該保持テーブルが保持したウエーハを研削する研削手段と、
該研削ホイールの該超音波発振部に高周波電力を供給する高周波電源と、
該保持面に対して垂直方向に該研削手段を研削送りする研削送り手段と、
研削中に該超音波受振部が受振した該超音波振動の振幅量に基づいて該高周波電源の出力を制御する該制御部と、を備える研削装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016182512A JP6814579B2 (ja) | 2016-09-20 | 2016-09-20 | 研削ホイール及び研削装置 |
TW106127554A TWI731145B (zh) | 2016-09-20 | 2017-08-15 | 磨削輪及磨削裝置 |
SG10201707093XA SG10201707093XA (en) | 2016-09-20 | 2017-08-30 | Grinding wheel and grinding apparatus |
CN201710810531.0A CN107838767B (zh) | 2016-09-20 | 2017-09-11 | 磨削磨轮和磨削装置 |
KR1020170117043A KR102260927B1 (ko) | 2016-09-20 | 2017-09-13 | 연삭 휠 및 연삭 장치 |
US15/708,277 US10639761B2 (en) | 2016-09-20 | 2017-09-19 | Grinding wheel and grinding apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016182512A JP6814579B2 (ja) | 2016-09-20 | 2016-09-20 | 研削ホイール及び研削装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018047508A JP2018047508A (ja) | 2018-03-29 |
JP6814579B2 true JP6814579B2 (ja) | 2021-01-20 |
Family
ID=61618310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016182512A Active JP6814579B2 (ja) | 2016-09-20 | 2016-09-20 | 研削ホイール及び研削装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10639761B2 (ja) |
JP (1) | JP6814579B2 (ja) |
KR (1) | KR102260927B1 (ja) |
CN (1) | CN107838767B (ja) |
SG (1) | SG10201707093XA (ja) |
TW (1) | TWI731145B (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10685863B2 (en) * | 2018-04-27 | 2020-06-16 | Semiconductor Components Industries, Llc | Wafer thinning systems and related methods |
JP2020015105A (ja) * | 2018-07-23 | 2020-01-30 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
CN110355621B (zh) * | 2019-07-17 | 2021-03-16 | 大连理工大学 | 一种用于超声加工的组合砂轮及其设计方法 |
CN110682166B (zh) * | 2019-09-05 | 2021-01-22 | 上海工程技术大学 | 一种用于超声振动磨床的超声发生装置 |
CN110722406B (zh) * | 2019-09-17 | 2021-04-20 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | 异形碲锌镉晶片轮廓修磨倒角方法 |
TWI739684B (zh) * | 2020-12-01 | 2021-09-11 | 李慧玲 | 超音波傳導研磨模組 |
JP2022117116A (ja) * | 2021-01-29 | 2022-08-10 | 株式会社ディスコ | 剥離装置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2939251A (en) * | 1957-02-18 | 1960-06-07 | Micromatic Hone Corp | High frequency honing |
JPH0722876B2 (ja) * | 1987-06-24 | 1995-03-15 | 新技術事業団 | 研削用ワークテーブル装置 |
US6264532B1 (en) * | 2000-03-28 | 2001-07-24 | Speedfam-Ipec Corporation | Ultrasonic methods and apparatus for the in-situ detection of workpiece loss |
US6467321B2 (en) * | 2000-05-30 | 2002-10-22 | Integrity Testing Laboratory, Inc. | Device for ultrasonic peening of metals |
JP2003057027A (ja) * | 2001-08-10 | 2003-02-26 | Ebara Corp | 測定装置 |
WO2008047789A1 (en) * | 2006-10-17 | 2008-04-24 | Kazumasa Ohnishi | Disklike cutting tool and cutting device |
CN101674919A (zh) * | 2007-03-07 | 2010-03-17 | 大西一正 | 研磨工具及研磨装置 |
JP5049095B2 (ja) * | 2007-10-30 | 2012-10-17 | 株式会社ディスコ | 研削ホイール |
JP2013031887A (ja) * | 2009-11-25 | 2013-02-14 | Kazumasa Onishi | 研磨具 |
CN101947749B (zh) * | 2010-09-14 | 2011-11-16 | 西安理工大学 | 一种变位自转超声波振动平面双面研磨数控机床 |
US10105836B2 (en) * | 2013-01-16 | 2018-10-23 | Mie Electronics Co., Ltd. | Processing apparatus |
JP2015013321A (ja) * | 2013-07-03 | 2015-01-22 | 株式会社ディスコ | 研削ホイール |
JP6192525B2 (ja) * | 2013-12-13 | 2017-09-06 | 株式会社ディスコ | 砥材埋め込み方法 |
JP2015202545A (ja) * | 2014-04-16 | 2015-11-16 | 株式会社ディスコ | 研削装置 |
TW201632272A (zh) * | 2015-03-04 | 2016-09-16 | 中原大學 | 超音波輔助加工感測及傳動系統 |
-
2016
- 2016-09-20 JP JP2016182512A patent/JP6814579B2/ja active Active
-
2017
- 2017-08-15 TW TW106127554A patent/TWI731145B/zh active
- 2017-08-30 SG SG10201707093XA patent/SG10201707093XA/en unknown
- 2017-09-11 CN CN201710810531.0A patent/CN107838767B/zh active Active
- 2017-09-13 KR KR1020170117043A patent/KR102260927B1/ko active IP Right Grant
- 2017-09-19 US US15/708,277 patent/US10639761B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN107838767A (zh) | 2018-03-27 |
JP2018047508A (ja) | 2018-03-29 |
TW201817544A (zh) | 2018-05-16 |
CN107838767B (zh) | 2021-10-15 |
TWI731145B (zh) | 2021-06-21 |
KR20180031574A (ko) | 2018-03-28 |
US20180079046A1 (en) | 2018-03-22 |
US10639761B2 (en) | 2020-05-05 |
SG10201707093XA (en) | 2018-04-27 |
KR102260927B1 (ko) | 2021-06-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6814579B2 (ja) | 研削ホイール及び研削装置 | |
US10361102B2 (en) | Cutting apparatus | |
US7347766B2 (en) | Cutting method and cutting apparatus | |
KR101367737B1 (ko) | 연삭 휠 | |
CN112604929A (zh) | 朗之万型超声波振子的振动激励方法以及超声波加工方法和超声波发送方法 | |
JP5259307B2 (ja) | 研削ホイール | |
JP2009285798A (ja) | サファイア基板の研削方法 | |
JP5902945B2 (ja) | 研削ホイール | |
JP2007111803A (ja) | 超音波振動切削装置 | |
JP5329264B2 (ja) | 研削ホイール | |
JP5362492B2 (ja) | 研削ホイール | |
JP5706146B2 (ja) | 研削装置 | |
JP5068147B2 (ja) | 研削ホイール | |
JP5301321B2 (ja) | 研削ホイール | |
JP6866097B2 (ja) | 研削装置 | |
JP6682252B2 (ja) | 研磨具と研磨装置 | |
JP5208630B2 (ja) | 研削ホイール | |
JP2016100557A (ja) | 研削方法 | |
JP2012125850A (ja) | 研削ホイール | |
JP2010214496A (ja) | 研磨装置 | |
JP2004345061A (ja) | モバイル型超音波加工装置および超音波加工方法 | |
JP2009226575A (ja) | 研磨具および研磨装置 | |
JPH05177526A (ja) | レンズの心取り装置 | |
WO2003095144A1 (fr) | Dispositif de rodage et procede de travail de rodage | |
JP2010205898A (ja) | 超音波振動切削装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190725 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200817 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200825 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201022 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20201201 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20201221 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6814579 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |