JP6770452B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6770452B2 JP6770452B2 JP2017013606A JP2017013606A JP6770452B2 JP 6770452 B2 JP6770452 B2 JP 6770452B2 JP 2017013606 A JP2017013606 A JP 2017013606A JP 2017013606 A JP2017013606 A JP 2017013606A JP 6770452 B2 JP6770452 B2 JP 6770452B2
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Description
近年、自動車の自動運転の実用化に向けた機能安全を見据えて、従来の3相のBLDC(ブラシレスDC)モータを、6相または12相のBLDCモータとする設計開発が行われている。BLDCモータは、自己整流型ではないため、一般的に、制御が複雑であると認識されている。そこで、6相BLDCモータでは、従来の3相(U相、V相、W相)を2組、12相BLDCモータでは、従来の3相(U相、V相、W相)を4組、保有することにより、ある1組で不具合が起きても、直ぐに不具合が顕在化しないようにしている。
図4は、本実施の形態の半導体装置(半導体パッケージ、電子装置)PKGを用いたインバータ回路INVを示す回路図である。なお、図4において、符号CPHを付した点線で囲まれた部分が、半導体チップCPH内に形成され、符号CPLを付した点線で囲まれた部分が、半導体チップCPL内に形成され、符号CPCを付した点線で囲まれた部分が、半導体チップCPC内に形成され、符号PKGを付した一点鎖線で囲まれた部分が、半導体装置PKG内に形成されている。
図5は、本実施の形態の半導体装置PKGの上面図であり、図6は、半導体装置PKGの下面図(裏面図)であり、図7〜図9は、半導体装置PKGの平面透視図であり、図110〜図13は、半導体装置PKGの断面図である。図7には、半導体装置PKGを下面側から見たときの、封止部MRを透視した平面透視図が示されている。また、図8は、図7において、更にワイヤBWおよび金属板MP1,MP2を透視(省略)したときの半導体装置PKGの下面側の平面透視図が示されている。また、図9は、図8において、更に半導体チップCPC,CPH,CPLを透視(省略)したときの半導体装置PKGの下面側の平面透視図が示されている。図6〜図9では、半導体装置PKGの向きは同じである。また、図7〜図9では、封止部MRの外周の位置を点線で示してある。また、図5〜図7のA1−A1線の位置での半導体装置PKGの断面が、図10にほぼ対応し、図5〜図7のA2−A2線の位置での半導体装置PKGの断面が、図11にほぼ対応し、図5〜図7のA3−A3線の位置での半導体装置PKGの断面が、図12にほぼ対応し、図5〜図7のA4−A4線の位置での半導体装置PKGの断面が、図13にほぼ対応している。なお、各平面図に示した符号Xは第1方向、符号Yは第1方向X(以下、X方向と称する)に直交する第2方向(以下、Y方向と称する)を示している。すなわち、X方向とY方向とは、互いに直交する方向である。
次に、上記図5〜図13に示される半導体装置PKGの製造工程(組立工程)について説明する。図14〜図22は、本実施の形態の半導体装置PKGの製造工程中の平面図または断面図である。図14〜図22のうち、図14〜図19は平面図であり、図20〜図22は断面図であるが、図20〜図22は、図19と同じ工程段階の断面図である。
図23〜図28は、半導体装置PKGの実装例を示す平面図(図23および図24)または断面図(図25〜図28)である。
本実施の形態の半導体装置PKGは、ハイサイドスイッチ用のパワーMOSFET1(第1電界効果トランジスタ)を含む半導体チップCPH(第1半導体チップ)と、ロウサイドスイッチ用のパワーMOSFET2(第2電界効果トランジスタ)を含む半導体チップCPL(第2半導体チップ)と、を備えている。半導体装置PKGは、更に、半導体チップCPH,CPLのそれぞれを制御する制御回路CLCを含む半導体チップCPC(第3半導体チップ)を備えている。半導体装置PKGは、更に、半導体チップCPHが搭載されるダイパッドDPH(第1チップ搭載部)と、半導体チップCPLが搭載されるダイパッドDPL(第2チップ搭載部)と、半導体チップCPCが搭載されるダイパッドDPC(第3チップ搭載部)と、を備えている。
LD2,LD3 リード
MR 封止部
PDHS1 パッド
PKG 半導体装置
Claims (19)
- ハイサイドスイッチ用の第1電界効果トランジスタを含み、第1主面および前記第1主面の反対側の第1裏面を有する第1半導体チップと、
ここで、前記第1半導体チップは、さらに、前記第1主面を有した第1保護膜と、前記第1保護膜から露出し、かつ、前記第1電界効果トランジスタの第1ソースと電気的に接続される第1ソース電極と、前記第1裏面上に形成され、かつ、前記第1電界効果トランジスタの第1ドレインと電気的に接続される第1ドレイン電極と、を有し、
ロウサイドスイッチ用の第2電界効果トランジスタを含み、第2主面および前記第2主面の反対側の第2裏面を有する第2半導体チップと、
ここで、前記第2半導体チップは、さらに、前記第2主面を有した第2保護膜と、前記第2保護膜から露出し、かつ、前記第2電界効果トランジスタの第2ソースと電気的に接続される第2ソース電極と、前記第2裏面上に形成され、かつ、前記第2電界効果トランジスタの第2ドレインと電気的に接続される第2ドレイン電極と、を有し、
前記第1半導体チップおよび前記第2半導体チップのそれぞれを制御する回路を含み、第3主面と、前記第3主面の反対側の第3裏面と、を有する第3半導体チップと、
前記第1半導体チップが搭載され、かつ、前記第1半導体チップの前記第1裏面と向かい合う第4主面と、前記第4主面の反対側の第4裏面と、を有する第1チップ搭載部と、
前記第2半導体チップが搭載され、かつ、前記第2半導体チップの前記第2裏面と向かい合う第5主面と、前記第5主面の反対側の第5裏面と、を有する第2チップ搭載部と、
前記第3半導体チップが搭載され、かつ、前記第3半導体チップの前記第3裏面と向かい合う第6主面と、前記第6主面の反対側の第6裏面と、を有する第3チップ搭載部と、
前記第1半導体チップの前記第1ドレイン電極に電気的に接続された第1リードと、
前記第1半導体チップの前記第1ソース電極に第1導電性接続部材を介して電気的に接続された第2リードと、
前記第2半導体チップの前記第2ドレイン電極に電気的に接続された第3リードと、
前記第2半導体チップの前記第2ソース電極に第2導電性接続部材を介して電気的に接続された第4リードと、
前記第1半導体チップと、前記第2半導体チップと、前記第3半導体チップと、前記第1導電性接続部材と、前記第2導電性接続部材と、前記第1チップ搭載部の少なくとも一部と、前記第2チップ搭載部の少なくとも一部と、前記第3チップ搭載部の少なくとも一部と、前記第1リードの一部と、前記第2リードの一部と、前記第3リードの一部と、前記第4リードの一部と、を封止する封止体と、
を備える半導体装置であって、
平面視において、前記封止体は、第1方向に沿って延在する第1辺と、前記第1方向に沿って延在し、かつ前記第1辺とは反対側に位置する第2辺と、を有し、
前記第1リードと前記第4リードとは、前記封止体の前記第1辺と交差し、
前記第2リードと前記第3リードとは、前記封止体の前記第2辺と交差し、
前記第1リードから前記第1半導体チップの前記第1電界効果トランジスタを介して前記第2リードに電流が流れ、
前記第3リードから前記第2半導体チップの前記第2電界効果トランジスタを介して前記第4リードに電流が流れ、
平面視において、前記第1辺と前記第2辺との間で、かつ、前記第1半導体チップと前記第2半導体チップとの間に、前記第3半導体チップが配置されている、半導体装置。 - 請求項1記載の半導体装置において、
平面視において、前記第1半導体チップと前記第3半導体チップと前記第2半導体チップとは、前記第1方向に沿って並んでいる、半導体装置。 - 請求項2記載の半導体装置において、
平面視において、前記第1リードと前記第2リードとは、前記第1半導体チップを間にして互いに反対側に位置し、
平面視において、前記第3リードと前記第4リードとは、前記第2半導体チップを間にして互いに反対側に位置する、半導体装置。 - 請求項1記載の半導体装置において、
前記第1リードは、前記第1チップ搭載部に一体的に連結され、
前記第3リードは、前記第2チップ搭載部に一体的に連結されている、半導体装置。 - 請求項4記載の半導体装置において、
前記第1チップ搭載部に一体的に連結され、かつ、前記封止体の前記第2辺に交差する第5リードと、
前記第2チップ搭載部に一体的に連結され、かつ、前記封止体の前記第1辺に交差する第6リードと、
を更に備える、半導体装置。 - 請求項1記載の半導体装置において、
前記封止体は、第7主面と、前記第7主面の反対側の第7裏面と、を有し、
前記第7主面から、前記第1チップ搭載部の前記第1裏面、前記第2チップ搭載部の前記第2裏面および前記第3チップ搭載部の前記第3裏面が露出している、半導体装置。 - 請求項1記載の半導体装置において、
前記第1導電性接続部材および前記第2導電性接続部材は、それぞれ金属板からなる、半導体装置。 - 請求項7記載の半導体装置において、
前記第1半導体チップの第1ドレイン電極は、導電性の第1接着層を介して前記第1チップ搭載部と電気的に接続され、
前記第2半導体チップの第2ドレイン電極は、導電性の第2接着層を介して前記第2チップ搭載部と電気的に接続されている、半導体装置。 - 請求項1記載の半導体装置において、
前記第3半導体チップは、前記第3主面を有する第3保護膜と、前記第3保護膜から露出する複数の第1パッド電極および複数の第2パッド電極と、を有しており、
前記第3半導体チップの前記複数の第1パッド電極に複数の第1ワイヤを介してそれぞれ電気的に接続された複数の第7リードと、
前記第3半導体チップの前記複数の第2パッド電極に複数の第2ワイヤを介してそれぞれ電気的に接続された複数の第8リードと、
を更に備え、
平面視において、前記複数の第7リードのそれぞれは、前記封止体の前記第1辺に交差し、前記複数の第8リードのそれぞれは、前記封止体の前記第2辺に交差し、
前記第1辺において、前記複数の第7リードは、前記第1リードと前記第4リードとの間に配置され、
前記第2辺において、前記複数の第8リードは、前記第2リードと前記第3リードとの間に配置されている、半導体装置。 - 請求項9記載の半導体装置において、
前記第1半導体チップは、前記第1保護膜から露出する複数の第3パッド電極を更に有し、
前記第2半導体チップは、前記第2保護膜から露出する複数の第4パッド電極を更に有し、
前記第3半導体チップは、前記第3保護膜から露出する複数の第5パッド電極および複数の第6パッド電極を更に有しており、
前記第1半導体チップの前記複数の第3パッド電極と前記第3半導体チップの前記複数の第5パッド電極とは、複数の第3ワイヤを介して電気的に接続され、
前記第2半導体チップの前記複数の第4パッド電極と前記第3半導体チップの前記複数の第6パッド電極とは、複数の第4ワイヤを介して電気的に接続されている、半導体装置。 - 請求項10記載の半導体装置において、
平面視において、前記第1半導体チップは、前記第3半導体チップに対向する第3辺を有し、
平面視において、前記第2半導体チップは、前記第3半導体チップに対向する第4辺を有し、
平面視において、前記第3半導体チップは、前記第1半導体チップに対向する第5辺と、前記第2半導体チップに対向する第6辺と、を有し、
前記第1半導体チップの前記第1主面において、前記複数の第3パッド電極は、前記第3辺に沿って配置され、
前記第2半導体チップの前記第2主面において、前記複数の第4パッド電極は、前記第4辺に沿って配置され、
前記第3半導体チップの前記第3主面において、前記複数の第5パッド電極は、前記第5辺に沿って配置され、かつ、前記複数の第6パッド電極は、前記第6辺に沿って配置されている、半導体装置。 - 請求項11記載の半導体装置において、
前記第1半導体チップは、温度検知用の第1ダイオードを更に含み、
前記第2半導体チップは、温度検知用の第2ダイオードを更に含み、
前記第1半導体チップにおいて、前記第1ダイオードは、前記第3辺に沿うように配置され、
前記第2半導体チップにおいて、前記第2ダイオードは、前記第4辺に沿うように配置されている、半導体装置。 - 請求項12記載の半導体装置において、
前記第1半導体チップの構造と前記第2半導体チップの構造とは、互いに同じである、半導体装置。 - 請求項11記載の半導体装置において、
前記第1半導体チップは、温度検知用の第1ダイオードを更に含み、
前記第2半導体チップは、温度検知用の第2ダイオードを更に含み、
前記第1半導体チップにおいて、前記第1ダイオードは、前記第3辺に交差する第7辺に沿うように配置され、
前記第2半導体チップにおいて、前記第2ダイオードは、前記第4辺に交差する第8辺に沿うように配置されている、半導体装置。 - 請求項14記載の半導体装置において、
前記第1半導体チップの構造と前記第2半導体チップの構造とは、互いに同じである、半導体装置。 - 請求項1記載の半導体装置において、
前記第1リードと前記第2リードと前記第3リードと前記第4リードとを、それぞれ複数有し、
複数の前記第1リードは、互いに連結され、かつ、平面視において前記封止体の前記第1辺にそれぞれ交差し、
複数の前記第2リードは、互いに連結され、かつ、平面視において前記封止体の前記第2辺にそれぞれ交差し、
複数の前記第3リードは、互いに連結され、かつ、平面視において前記封止体の前記第2辺にそれぞれ交差し、
複数の前記第4リードは、互いに連結され、かつ、平面視において前記封止体の前記第1辺にそれぞれ交差している、半導体装置。 - 請求項1記載の半導体装置において、
前記第1リードは、電源電位が供給されるリードであり、
前記第4リードは、前記電源電位よりも低い基準電位が供給されるリードである、半導体装置。 - 請求項17記載の半導体装置において、
前記半導体装置内において、前記第2リードと前記第3リードとは、導体を通じて繋がってはおらず、
前記半導体装置の外部において、前記第2リードと前記第3リードとが電気的に接続される、半導体装置。 - 請求項1記載の半導体装置において、
前記第1半導体チップ、前記第2半導体チップおよび前記第3半導体チップは、インバータ回路を形成するために用いられる、半導体装置。
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-
2017
- 2017-01-27 JP JP2017013606A patent/JP6770452B2/ja active Active
- 2017-12-08 TW TW106143041A patent/TWI762535B/zh active
- 2017-12-21 US US15/850,009 patent/US10204849B2/en active Active
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2018
- 2018-01-09 EP EP18150713.8A patent/EP3355350A1/en not_active Withdrawn
- 2018-01-24 KR KR1020180008600A patent/KR102378192B1/ko active IP Right Grant
- 2018-01-25 CN CN201810072199.7A patent/CN108364942B/zh active Active
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TWI762535B (zh) | 2022-05-01 |
JP2018121035A (ja) | 2018-08-02 |
TW201828448A (zh) | 2018-08-01 |
US20180218969A1 (en) | 2018-08-02 |
EP3355350A1 (en) | 2018-08-01 |
US10204849B2 (en) | 2019-02-12 |
KR102378192B1 (ko) | 2022-03-24 |
CN108364942B (zh) | 2023-04-18 |
KR20200067233A (ko) | 2020-06-12 |
HK1255949A1 (zh) | 2019-09-06 |
CN108364942A (zh) | 2018-08-03 |
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