JP6696842B2 - ウェーハの加工方法 - Google Patents
ウェーハの加工方法 Download PDFInfo
- Publication number
- JP6696842B2 JP6696842B2 JP2016123793A JP2016123793A JP6696842B2 JP 6696842 B2 JP6696842 B2 JP 6696842B2 JP 2016123793 A JP2016123793 A JP 2016123793A JP 2016123793 A JP2016123793 A JP 2016123793A JP 6696842 B2 JP6696842 B2 JP 6696842B2
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- JP
- Japan
- Prior art keywords
- wafer
- cutting groove
- cutting
- depth
- dividing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Dicing (AREA)
Description
30 保持テーブル
31 保持面
32 クランプ部
40 レーザー光線照射手段
42 検出手段
50 制御手段
51 記憶部
61 保持テーブル
62 切削ブレード
71 ウェーハの表面(他方の面)
72 ウェーハの裏面(一方の面)
73 樹脂膜(保護膜)
74 金属膜(機能膜)
76 切削溝
81 ウェーハの表面(一方の面)
82 ウェーハの裏面(他方の面)
83 Low−k膜(機能膜)
86 切削溝
F 環状フレーム
L 分割予定ライン
T 保護テープ
W、W1、W2 ウェーハ
Claims (1)
- 複数の分割予定ラインによって区画されて複数のデバイスが形成されたウェーハを該分割予定ラインに沿って分割するウェーハの加工方法であって、
機能膜を有する一方の面が保護テープを介して環状フレームに貼着されたウェーハを切削装置の保持テーブルに載置し、ウェーハの他方の面側から切削ブレードをウェーハ厚み方向途中まで切り込み、該分割予定ラインに沿って複数の切削溝を形成する切削溝形成ステップと、
該切削溝形成ステップを実施後、ウェーハに形成された該切削溝の深さを検出する切削溝深さ検出ステップと、
該切削溝形成ステップを実施後、該切削溝が形成されたウェーハをレーザー加工装置の保持テーブルに載置し、ウェーハの他方の面側から切削溝内に向けて、ウェーハに対して吸収性を有する波長のレーザー光線を該切削溝に沿って照射して、該機能膜と共にウェーハを複数のデバイスに分割する分割ステップと、を備え、
該レーザー加工装置の制御手段は、切削溝の深さに応じた最適なレーザー加工条件テーブルが予め記憶された記憶部を備え、
該分割ステップにおいては、該切削溝深さ検出ステップにおいて検出された切削溝の深さに応じて該記憶部のレーザー加工条件テーブルに基づきレーザー光線の加工条件を変更してウェーハを分割するウェーハの加工方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016123793A JP6696842B2 (ja) | 2016-06-22 | 2016-06-22 | ウェーハの加工方法 |
TW106115662A TWI713741B (zh) | 2016-06-22 | 2017-05-11 | 晶圓之加工方法 |
KR1020170076706A KR102282264B1 (ko) | 2016-06-22 | 2017-06-16 | 웨이퍼의 가공 방법 |
CN201710455994.XA CN107527829B (zh) | 2016-06-22 | 2017-06-16 | 晶片的加工方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016123793A JP6696842B2 (ja) | 2016-06-22 | 2016-06-22 | ウェーハの加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017228651A JP2017228651A (ja) | 2017-12-28 |
JP6696842B2 true JP6696842B2 (ja) | 2020-05-20 |
Family
ID=60748658
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016123793A Active JP6696842B2 (ja) | 2016-06-22 | 2016-06-22 | ウェーハの加工方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6696842B2 (ja) |
KR (1) | KR102282264B1 (ja) |
CN (1) | CN107527829B (ja) |
TW (1) | TWI713741B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI820177B (zh) * | 2018-09-26 | 2023-11-01 | 日商三星鑽石工業股份有限公司 | 附有金屬膜之基板的分割方法 |
JP2022177326A (ja) * | 2019-08-27 | 2022-12-01 | ローム株式会社 | 半導体素子、および半導体素子の製造方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003168655A (ja) * | 2001-12-03 | 2003-06-13 | Tokyo Seimitsu Co Ltd | ダイシング装置 |
JP2005150537A (ja) | 2003-11-18 | 2005-06-09 | Disco Abrasive Syst Ltd | 板状物の加工方法および加工装置 |
JP2008170366A (ja) * | 2007-01-15 | 2008-07-24 | Disco Abrasive Syst Ltd | チャックテーブルに保持された被加工物の計測装置およびレーザー加工機 |
JP2009302440A (ja) | 2008-06-17 | 2009-12-24 | Disco Abrasive Syst Ltd | 切削装置 |
JP5583981B2 (ja) | 2010-01-25 | 2014-09-03 | 株式会社ディスコ | レーザー加工方法 |
JP5801046B2 (ja) | 2010-12-06 | 2015-10-28 | 株式会社ディスコ | 板状物の加工方法 |
JP5980504B2 (ja) * | 2011-12-27 | 2016-08-31 | 株式会社ディスコ | ウエーハの加工方法およびレーザー加工装置 |
JP5896760B2 (ja) * | 2012-01-30 | 2016-03-30 | 株式会社ディスコ | 加工装置、及び、加工方法 |
JP6078376B2 (ja) * | 2013-02-22 | 2017-02-08 | 株式会社ディスコ | ウエーハの加工方法 |
JP6148075B2 (ja) * | 2013-05-31 | 2017-06-14 | 株式会社ディスコ | レーザー加工装置 |
JP6066854B2 (ja) * | 2013-07-30 | 2017-01-25 | 株式会社ディスコ | ウエーハの加工方法 |
JP6305013B2 (ja) * | 2013-10-28 | 2018-04-04 | 株式会社ディスコ | 加工装置 |
JP6325279B2 (ja) * | 2014-02-21 | 2018-05-16 | 株式会社ディスコ | ウエーハの加工方法 |
JP6285784B2 (ja) * | 2014-04-09 | 2018-02-28 | 株式会社ディスコ | 高さ位置検出装置 |
JP6328513B2 (ja) * | 2014-07-28 | 2018-05-23 | 株式会社ディスコ | ウエーハの加工方法 |
JP2016082162A (ja) * | 2014-10-21 | 2016-05-16 | 株式会社ディスコ | ウエーハの加工方法 |
-
2016
- 2016-06-22 JP JP2016123793A patent/JP6696842B2/ja active Active
-
2017
- 2017-05-11 TW TW106115662A patent/TWI713741B/zh active
- 2017-06-16 CN CN201710455994.XA patent/CN107527829B/zh active Active
- 2017-06-16 KR KR1020170076706A patent/KR102282264B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
JP2017228651A (ja) | 2017-12-28 |
KR20180000306A (ko) | 2018-01-02 |
KR102282264B1 (ko) | 2021-07-26 |
CN107527829A (zh) | 2017-12-29 |
TW201808509A (zh) | 2018-03-16 |
CN107527829B (zh) | 2023-06-16 |
TWI713741B (zh) | 2020-12-21 |
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