JP6676860B2 - 回路基板および回路基板組立体 - Google Patents
回路基板および回路基板組立体 Download PDFInfo
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- JP6676860B2 JP6676860B2 JP2016001025A JP2016001025A JP6676860B2 JP 6676860 B2 JP6676860 B2 JP 6676860B2 JP 2016001025 A JP2016001025 A JP 2016001025A JP 2016001025 A JP2016001025 A JP 2016001025A JP 6676860 B2 JP6676860 B2 JP 6676860B2
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- 239000010408 film Substances 0.000 claims description 48
- 239000004020 conductor Substances 0.000 claims description 47
- 239000012792 core layer Substances 0.000 claims description 33
- 239000010410 layer Substances 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 12
- 239000010409 thin film Substances 0.000 claims description 12
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 6
- 239000007769 metal material Substances 0.000 claims description 6
- 229920000052 poly(p-xylylene) Polymers 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000000758 substrate Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 238000009413 insulation Methods 0.000 description 6
- 239000010949 copper Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 239000013067 intermediate product Substances 0.000 description 2
- 229910001374 Invar Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0296—Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
- H05K1/0298—Multilayer circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49822—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0201—Thermal arrangements, e.g. for cooling, heating or preventing overheating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/111—Pads for surface mounting, e.g. lay-out
- H05K1/112—Pads for surface mounting, e.g. lay-out directly combined with via connections
- H05K1/113—Via provided in pad; Pad over filled via
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
- H05K1/185—Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4602—Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0183—Dielectric layers
- H05K2201/0195—Dielectric or adhesive layers comprising a plurality of layers, e.g. in a multilayer structure
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0364—Conductor shape
- H05K2201/0367—Metallic bump or raised conductor not used as solder bump
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/09672—Superposed layout, i.e. in different planes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
- H05K2201/09872—Insulating conformal coating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10621—Components characterised by their electrical contacts
- H05K2201/10674—Flip chip
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4602—Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
- H05K3/4608—Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated comprising an electrically conductive base or core
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
- Structure Of Printed Boards (AREA)
Description
110 コア部
111 第1コア層
112 第2コア層
113 第3コア層
114 スルーホール
120 第1導体パターン
130 絶縁膜
131 絶縁薄膜
132 機能膜
140 第2導体パターン
150 第2絶縁層
200 第1電子部品
210 外部端子
300 付加基板
400 第2電子部品
R1 リセス部
SB1 第1外部接続手段
SB2 第2外部接続手段
SB3 第3外部接続手段
TV スルービア
Claims (12)
- 第1絶縁層と、
前記第1絶縁層に備えられる第1導体パターンと、
前記第1導体パターンの外面に備えられる絶縁膜と、
前記絶縁膜の外面に備えられる第2導体パターンと、を含み、
前記絶縁膜は、前記第1導体パターンに接触する絶縁薄膜と、前記絶縁薄膜の外面に備えられて前記第2導体パターンに接触する機能膜とを含み、
前記第1絶縁層は、金属材質のコア部の表面に前記絶縁膜が備えられてなり、
前記コア部は、第1コア層、前記第1コア層の両面にそれぞれ配置され、前記第1コア層と異なる金属材質で形成される第2および第3コア層を含み、
前記第2および第3コア層は、前記第1コア層を貫通する貫通ホールを充填して互いに一体に形成される、回路基板。 - 前記絶縁薄膜は、パリレンを含む材質からなる、請求項1に記載の回路基板。
- 前記機能膜は、窒化チタンを含む材質からなる、請求項1または2に記載の回路基板。
- 前記第1導体パターンと前記第2導体パターンとの間に存在する前記絶縁膜の一部が開放されて、前記第1導体パターンと前記第2導体パターンとが連結される、請求項1から3のいずれか1項に記載の回路基板。
- 前記第1絶縁層を貫通するスルービアと、
一面が前記スルービアの下面に接触する第1下部導体パターンと、を含み、
前記スルービアの上面は、前記第1導体パターンの少なくとも一部に接触する、請求項4に記載の回路基板。 - 前記コア部には、一面から他面の方向に引き込まれたリセス部が備えられる、請求項4に記載の回路基板。
- 一面に露出する第1外部接続手段および第2外部接続手段が備えられた付加基板と、
前記第1外部接続手段に外部端子が連結されるように前記付加基板に実装される第1電子部品と、
前記第1電子部品および前記付加基板の上部に備えられ、前記第2外部接続手段に電気的に連結され、前記第1電子部品の上面が接触する回路基板と、を含み、
前記回路基板は、
前記第1電子部品の少なくとも一部が挿入されるリセス部が備えられたコア部と、
一面が前記コア部を貫通するスルービアの下面に接触し、他面は前記第2外部接続手段に連結される第1下部導体パターンと、
前記コア部の上面に一面が接触する第1絶縁膜と、
前記第1絶縁膜の他面に一面が接触する第1導体パターンと、
前記第1導体パターンの他面に一面が接触する第2絶縁膜と、
前記第2絶縁膜の他面に一面が接触する第2導体パターンと、を含み、
前記第2絶縁膜は、前記第1導体パターンに接触する絶縁薄膜と、前記絶縁薄膜の外面に備えられて前記第2導体パターンに接触する機能膜とを含み、
前記コア部は、金属材からなり、
前記第1電子部品の外面の少なくとも一部は、前記リセス部の内壁に直接接触して前記コア部を構成する金属材に直接接触する、回路基板組立体。 - 前記絶縁薄膜は、パリレンを含む材質からなり、前記機能膜は、窒化チタンを含む材質からなる、請求項7に記載の回路基板組立体。
- 前記第1絶縁膜は、前記コア部に一面が接触するパリレン膜および前記パリレン膜に一面が接触し、他面には前記第1導体パターンの一面が接触する窒化チタン膜からなる、請求項8に記載の回路基板組立体。
- 前記第1導体パターンの少なくとも一部は、一面が前記スルービアの上面に接触する、請求項7から9のいずれか1項に記載の回路基板組立体。
- 前記第2導体パターンの少なくとも一部は、前記第2絶縁膜を貫通して前記第1導体パターンに接触する、請求項7から10のいずれか1項に記載の回路基板組立体。
- 前記回路基板には、前記第2導体パターンと電気的に連結される第3外部接続手段がさらに備えられ、
前記第3外部接続手段に接触する第2電子部品をさらに含む、請求項7から11のいずれか1項に記載の回路基板組立体。
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KR1020150025778A KR102295103B1 (ko) | 2015-02-24 | 2015-02-24 | 회로기판 및 회로기판 조립체 |
KR10-2015-0025778 | 2015-02-24 |
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JP6676860B2 true JP6676860B2 (ja) | 2020-04-08 |
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US (1) | US9992865B2 (ja) |
JP (1) | JP6676860B2 (ja) |
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DE112015007068T5 (de) | 2015-10-29 | 2018-09-13 | Intel Corporation | Alternative oberflächen für leitende kontaktinselschichten von siliziumbrücken für halbleitergehäuse |
JP6680712B2 (ja) | 2017-03-10 | 2020-04-15 | キオクシア株式会社 | 半導体装置 |
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JPS50133780A (ja) * | 1974-04-08 | 1975-10-23 | ||
JP3645129B2 (ja) * | 1999-06-25 | 2005-05-11 | Necエレクトロニクス株式会社 | 半導体装置の製造方法 |
DE60044974D1 (de) * | 1999-08-12 | 2010-10-28 | Ibiden Co Ltd | Mehrschichtige leiterplatte und leiterplatten-herstellungsmethode |
JP3849573B2 (ja) * | 2001-05-22 | 2006-11-22 | 株式会社日立製作所 | 電子装置 |
JP4899269B2 (ja) * | 2001-08-09 | 2012-03-21 | 株式会社村田製作所 | 電子部品ユニットおよびその製造方法 |
KR20040060919A (ko) * | 2001-08-24 | 2004-07-06 | 엠씨엔씨 리서치 앤드 디벨럽먼트 인스티튜트 | 관통 바이어형 수직 상호접속부, 관통 바이어형 히트 싱크및 관련 제작 방법 |
JP4509622B2 (ja) * | 2003-03-26 | 2010-07-21 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP2005216952A (ja) * | 2004-01-27 | 2005-08-11 | Matsushita Electric Ind Co Ltd | 回路基板の製造方法、回路基板の製造装置、および回路基板 |
TW200731886A (en) * | 2005-06-13 | 2007-08-16 | Ibiden Co Ltd | Printed wiring board |
JP2007027683A (ja) * | 2005-06-15 | 2007-02-01 | Ngk Spark Plug Co Ltd | 配線基板及びその製造方法 |
JP6222909B2 (ja) | 2011-10-07 | 2017-11-01 | キヤノン株式会社 | 積層型半導体装置、プリント回路板、及びプリント配線板の接合構造 |
KR101939236B1 (ko) * | 2011-11-10 | 2019-01-16 | 삼성전자 주식회사 | 기판 및 이를 포함하는 전자 장치 |
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US20160249457A1 (en) | 2016-08-25 |
KR102295103B1 (ko) | 2021-08-31 |
JP2016157924A (ja) | 2016-09-01 |
US9992865B2 (en) | 2018-06-05 |
KR20160103370A (ko) | 2016-09-01 |
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