JP6557701B2 - 半導体装置パッケージ及びその製造方法 - Google Patents
半導体装置パッケージ及びその製造方法 Download PDFInfo
- Publication number
- JP6557701B2 JP6557701B2 JP2017091536A JP2017091536A JP6557701B2 JP 6557701 B2 JP6557701 B2 JP 6557701B2 JP 2017091536 A JP2017091536 A JP 2017091536A JP 2017091536 A JP2017091536 A JP 2017091536A JP 6557701 B2 JP6557701 B2 JP 6557701B2
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- Prior art keywords
- semiconductor device
- isolation layer
- device package
- interconnect layer
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H10W70/093—
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- H10W70/09—
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- H10W70/60—
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- H10W90/00—
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- H10W90/701—
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/14—Structural association of two or more printed circuits
- H05K1/144—Stacked arrangements of planar printed circuit boards
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/13—Moulding and encapsulation; Deposition techniques; Protective layers
- H05K2203/1305—Moulding and encapsulation
- H05K2203/1316—Moulded encapsulation of mounted components
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/284—Applying non-metallic protective coatings for encapsulating mounted components
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- H10W70/095—
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- H10W70/611—
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- H10W70/635—
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- H10W70/6523—
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- H10W72/01—
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- H10W72/01204—
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- H10W72/01223—
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- H10W72/01225—
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- H10W74/117—
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- H10W74/142—
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Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662334861P | 2016-05-11 | 2016-05-11 | |
| US62/334,861 | 2016-05-11 | ||
| US201662352299P | 2016-06-20 | 2016-06-20 | |
| US62/352,299 | 2016-06-20 | ||
| US15/453,656 | 2017-03-08 | ||
| US15/453,656 US10049893B2 (en) | 2016-05-11 | 2017-03-08 | Semiconductor device with a conductive post |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017204635A JP2017204635A (ja) | 2017-11-16 |
| JP2017204635A5 JP2017204635A5 (enExample) | 2018-10-18 |
| JP6557701B2 true JP6557701B2 (ja) | 2019-08-07 |
Family
ID=60294752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017091536A Active JP6557701B2 (ja) | 2016-05-11 | 2017-05-02 | 半導体装置パッケージ及びその製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US10049893B2 (enExample) |
| JP (1) | JP6557701B2 (enExample) |
| CN (2) | CN107424970B (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3449502B1 (en) | 2016-04-26 | 2021-06-30 | Linear Technology LLC | Mechanically-compliant and electrically and thermally conductive leadframes for component-on-package circuits |
| US10049893B2 (en) * | 2016-05-11 | 2018-08-14 | Advanced Semiconductor Engineering, Inc. | Semiconductor device with a conductive post |
| JP2019040924A (ja) * | 2017-08-22 | 2019-03-14 | 新光電気工業株式会社 | 配線基板及びその製造方法と電子装置 |
| US10741482B2 (en) * | 2017-12-29 | 2020-08-11 | Advanced Semiconductor Engineering, Inc. | Semiconductor device package |
| US10497635B2 (en) | 2018-03-27 | 2019-12-03 | Linear Technology Holding Llc | Stacked circuit package with molded base having laser drilled openings for upper package |
| US11735570B2 (en) * | 2018-04-04 | 2023-08-22 | Intel Corporation | Fan out packaging pop mechanical attach method |
| TWI672791B (zh) * | 2018-05-07 | 2019-09-21 | 財團法人工業技術研究院 | 晶片封裝結構及其製造方法 |
| US11410977B2 (en) | 2018-11-13 | 2022-08-09 | Analog Devices International Unlimited Company | Electronic module for high power applications |
| US11477559B2 (en) * | 2019-07-31 | 2022-10-18 | Advanced Semiconductor Engineering, Inc. | Semiconductor device package and acoustic device having the same |
| US11235404B2 (en) * | 2020-03-21 | 2022-02-01 | International Business Machines Corporation | Personalized copper block for selective solder removal |
| US12501548B2 (en) | 2020-05-26 | 2025-12-16 | Lg Innotek Co., Ltd. | Package substrate |
| US11844178B2 (en) | 2020-06-02 | 2023-12-12 | Analog Devices International Unlimited Company | Electronic component |
| US11476128B2 (en) | 2020-08-25 | 2022-10-18 | Advanced Semiconductor Engineering, Inc. | Semiconductor device package and method of manufacturing the same |
| CN117199053A (zh) * | 2022-06-01 | 2023-12-08 | 长鑫存储技术有限公司 | 封装结构及其制作方法、半导体器件 |
| WO2025121102A1 (ja) * | 2023-12-04 | 2025-06-12 | 株式会社村田製作所 | 回路モジュール |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3361881B2 (ja) * | 1994-04-28 | 2003-01-07 | 株式会社東芝 | 半導体装置とその製造方法 |
| US5912510A (en) * | 1996-05-29 | 1999-06-15 | Motorola, Inc. | Bonding structure for an electronic device |
| JP4564113B2 (ja) * | 1998-11-30 | 2010-10-20 | 株式会社東芝 | 微粒子膜形成方法 |
| TW464927B (en) * | 2000-08-29 | 2001-11-21 | Unipac Optoelectronics Corp | Metal bump with an insulating sidewall and method of fabricating thereof |
| US6683375B2 (en) * | 2001-06-15 | 2004-01-27 | Fairchild Semiconductor Corporation | Semiconductor die including conductive columns |
| US20030006062A1 (en) * | 2001-07-06 | 2003-01-09 | Stone William M. | Interconnect system and method of fabrication |
| JP2003069181A (ja) * | 2001-08-28 | 2003-03-07 | Mitsubishi Electric Corp | 電子機器装置及びその製造方法 |
| TWI245402B (en) * | 2002-01-07 | 2005-12-11 | Megic Corp | Rod soldering structure and manufacturing process thereof |
| US7749886B2 (en) * | 2006-12-20 | 2010-07-06 | Tessera, Inc. | Microelectronic assemblies having compliancy and methods therefor |
| DE102009010885B4 (de) * | 2009-02-27 | 2014-12-31 | Advanced Micro Devices, Inc. | Metallisierungssystem eines Halbleiterbauelements mit Metallsäulen mit einem kleineren Durchmesser an der Unterseite und Herstellungsverfahren dafür |
| US8383457B2 (en) * | 2010-09-03 | 2013-02-26 | Stats Chippac, Ltd. | Semiconductor device and method of forming interposer frame over semiconductor die to provide vertical interconnect |
| WO2011148658A1 (ja) * | 2010-05-24 | 2011-12-01 | シャープ株式会社 | 走査信号線駆動回路およびそれを備えた表示装置 |
| US8580607B2 (en) * | 2010-07-27 | 2013-11-12 | Tessera, Inc. | Microelectronic packages with nanoparticle joining |
| TWI538071B (zh) * | 2010-11-16 | 2016-06-11 | 星科金朋有限公司 | 具連接結構之積體電路封裝系統及其製造方法 |
| US8610285B2 (en) * | 2011-05-30 | 2013-12-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | 3D IC packaging structures and methods with a metal pillar |
| US8535983B2 (en) * | 2011-06-02 | 2013-09-17 | Infineon Technologies Ag | Method of manufacturing a semiconductor device |
| US20130099371A1 (en) | 2011-10-21 | 2013-04-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor package having solder jointed region with controlled ag content |
| TW201401456A (zh) * | 2012-06-19 | 2014-01-01 | 矽品精密工業股份有限公司 | 基板結構與封裝結構 |
| JP6137309B2 (ja) | 2013-05-21 | 2017-05-31 | 株式会社村田製作所 | モジュール |
| TWI517318B (zh) | 2013-06-14 | 2016-01-11 | 日月光半導體製造股份有限公司 | 具金屬柱組之基板及具金屬柱組之封裝結構 |
| TWI567902B (zh) | 2013-06-14 | 2017-01-21 | 日月光半導體製造股份有限公司 | 具定位組之基板組 |
| US9478485B2 (en) * | 2013-06-28 | 2016-10-25 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of stacking semiconductor die on a fan-out WLCSP |
| US9653442B2 (en) * | 2014-01-17 | 2017-05-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated circuit package and methods of forming same |
| JP6458801B2 (ja) * | 2014-06-27 | 2019-01-30 | ソニー株式会社 | 半導体装置およびその製造方法 |
| US10049893B2 (en) * | 2016-05-11 | 2018-08-14 | Advanced Semiconductor Engineering, Inc. | Semiconductor device with a conductive post |
-
2017
- 2017-03-08 US US15/453,656 patent/US10049893B2/en active Active
- 2017-04-28 CN CN201710299264.5A patent/CN107424970B/zh active Active
- 2017-04-28 CN CN201910779348.8A patent/CN110571158B/zh active Active
- 2017-05-02 JP JP2017091536A patent/JP6557701B2/ja active Active
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2018
- 2018-08-13 US US16/102,527 patent/US10446411B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20170330870A1 (en) | 2017-11-16 |
| US10446411B2 (en) | 2019-10-15 |
| CN107424970A (zh) | 2017-12-01 |
| JP2017204635A (ja) | 2017-11-16 |
| CN110571158B (zh) | 2021-12-21 |
| US10049893B2 (en) | 2018-08-14 |
| CN110571158A (zh) | 2019-12-13 |
| US20180350626A1 (en) | 2018-12-06 |
| CN107424970B (zh) | 2019-09-20 |
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