JP6546719B2 - 接触検査装置 - Google Patents

接触検査装置 Download PDF

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Publication number
JP6546719B2
JP6546719B2 JP2014022683A JP2014022683A JP6546719B2 JP 6546719 B2 JP6546719 B2 JP 6546719B2 JP 2014022683 A JP2014022683 A JP 2014022683A JP 2014022683 A JP2014022683 A JP 2014022683A JP 6546719 B2 JP6546719 B2 JP 6546719B2
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JP
Japan
Prior art keywords
contact
terminals
axial direction
inspection
tip
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Active
Application number
JP2014022683A
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English (en)
Japanese (ja)
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JP2015148561A5 (enExample
JP2015148561A (ja
Inventor
剛 村本
剛 村本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
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Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP2014022683A priority Critical patent/JP6546719B2/ja
Priority to TW103145004A priority patent/TWI561824B/zh
Publication of JP2015148561A publication Critical patent/JP2015148561A/ja
Publication of JP2015148561A5 publication Critical patent/JP2015148561A5/ja
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JP2014022683A 2014-02-07 2014-02-07 接触検査装置 Active JP6546719B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014022683A JP6546719B2 (ja) 2014-02-07 2014-02-07 接触検査装置
TW103145004A TWI561824B (en) 2014-02-07 2014-12-23 Contact inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014022683A JP6546719B2 (ja) 2014-02-07 2014-02-07 接触検査装置

Publications (3)

Publication Number Publication Date
JP2015148561A JP2015148561A (ja) 2015-08-20
JP2015148561A5 JP2015148561A5 (enExample) 2017-02-16
JP6546719B2 true JP6546719B2 (ja) 2019-07-17

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ID=53892010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014022683A Active JP6546719B2 (ja) 2014-02-07 2014-02-07 接触検査装置

Country Status (2)

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JP (1) JP6546719B2 (enExample)
TW (1) TWI561824B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6890921B2 (ja) 2015-10-21 2021-06-18 株式会社日本マイクロニクス プローブカード及び接触検査装置
JP6704733B2 (ja) * 2016-01-08 2020-06-03 株式会社日本マイクロニクス プローブ、プローブカード及び接触検査装置
CN110036300B (zh) 2016-11-30 2020-03-06 日本电产理德股份有限公司 接触端子、检查夹具和检查装置
JP6969930B2 (ja) * 2017-08-24 2021-11-24 株式会社日本マイクロニクス プローブ
CN108490242B (zh) * 2018-04-02 2020-03-27 国网江苏省电力有限公司徐州供电分公司 一种新型验电装置
DE102022119935A1 (de) * 2022-08-08 2024-02-08 Ingun Prüfmittelbau Gmbh Prüfstiftvorrichtung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2030089U (zh) * 1988-05-24 1989-01-04 李牧 螺旋刃活检针
JPH0817500A (ja) * 1994-06-30 1996-01-19 Advantest Corp Ｂｇａｉｃ用ソケット及びこれに用いるスプリングピン
JP3851464B2 (ja) * 1999-03-04 2006-11-29 株式会社日立製作所 マニピュレータおよびそれを用いたプローブ装置、試料作製装置
TWM249021U (en) * 2002-10-15 2004-11-01 Autmwell Entpr Co Ltd Contact terminal structure of seat for IC testing
DE102005022482A1 (de) * 2005-05-11 2006-11-16 Dr. Johannes Heidenhain Gmbh Antaststift und damit ausgestattetes Tastsystem
US7601009B2 (en) * 2006-05-18 2009-10-13 Centipede Systems, Inc. Socket for an electronic device
TWM328566U (en) * 2006-07-04 2008-03-11 Yu-Shen Chen Conductive complex tips spring probe contact unit
US7491069B1 (en) * 2008-01-07 2009-02-17 Centipede Systems, Inc. Self-cleaning socket for microelectronic devices
JP5208619B2 (ja) * 2008-08-25 2013-06-12 日置電機株式会社 プローブおよびプローブユニット
JP5255459B2 (ja) * 2009-01-06 2013-08-07 日本電子材料株式会社 コンタクトプローブ
JP2010281583A (ja) * 2009-06-02 2010-12-16 Nidec-Read Corp 検査用治具
EP2725364A1 (en) * 2011-06-22 2014-04-30 Meiko Electronics Co., Ltd. Spiral probe and manufacturing method for same
JP5821432B2 (ja) * 2011-09-05 2015-11-24 日本電産リード株式会社 接続端子及び接続治具

Also Published As

Publication number Publication date
TWI561824B (en) 2016-12-11
TW201538984A (zh) 2015-10-16
JP2015148561A (ja) 2015-08-20

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