JP6518330B2 - 配列基板及びその配列基板の断線補修方法 - Google Patents
配列基板及びその配列基板の断線補修方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 52
- 238000000034 method Methods 0.000 title claims description 32
- 239000010410 layer Substances 0.000 claims description 86
- 238000002161 passivation Methods 0.000 claims description 55
- 239000012044 organic layer Substances 0.000 claims description 45
- 238000003466 welding Methods 0.000 claims description 8
- 229910010272 inorganic material Inorganic materials 0.000 claims description 5
- 239000011147 inorganic material Substances 0.000 claims description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 18
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136259—Repairing; Defects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133345—Insulating layers
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1248—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136259—Repairing; Defects
- G02F1/136263—Line defects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/121—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode common or background
Description
2 共通電極線
4 ゲート電極走査線
5 開口部
6 有機層
7 ゲート電極絶縁層
8 第一不動態化層
9 第二不動態化層
10 基板
11 断線部分
20 切断箇所
21 クローズドループ
22 連結回路
Claims (5)
- 配列基板の断線補修方法であって、
前記配列基板は、
基板10と、
前記基板10上において、第1方向に延在し、かつ、前記第1方向に直交する第2方向に間隔をあけて複数本設けられたゲート電極走査線4と、
前記基板10上に設けられた共通電極線2と、
前記ゲート電極走査線4と前記共通電極線2との上に設けられたゲート電極絶縁層7と、
前記ゲート電極絶縁層7上に設けられ、前記第2方向に延在し、かつ、前記第1方向に間隔をあけて複数本設けられたソースドレイン電極データ線1と、
前記ソースドレイン電極データ線1の上に設けられた第一不動態化層8と、
前記第一不動態化層8に設けられた有機層6と、
前記第一不動態化層8と前記有機層6との上に設けられた第二不動態化層9と、からなり、
前記共通電極線2は、
複数個のクローズドループ21と、
複数本の連結回路22と、からなり、
各前記クローズドループ21は、隣り合う二本の前記ゲート電極走査線4の間にあって、かつ、前記ゲート電極絶縁層7を間にして前記ソースドレイン電極データ線1の直下にあり、
各前記クローズドループ21は、閉じた矩形状のループ配線であって、
各前記クローズドループ21は、
前記第1方向に平行であって前記第2方向に互いに離間した第1辺配線および第2辺配線と、
前記第2方向に平行であって前記第1方向に互いに離間し、前記第1辺配線の端点と前記第2辺配線の端点とを繋ぐ第3辺配線および第4辺配線と、を有し、
平面視したときに、前記第1辺配線および前記第2辺配線は前記ソースドレイン電極データ線1に重なり、かつ、前記第3辺配線と前記第4辺配線とは前記ソースドレイン電極データ線1を間にして反対側にあり、
各前記連結回路22は、前記第1方向に平行な配線であり、かつ、隣り合う二本の前記ゲート電極走査線4の間にあって、互いに隣り合う二つの前記クローズドループ21同士を連結しており、
前記有機層6は、平面視したときに前記クローズドループ21と前記ソースドレイン電極データ線1とが交差する点の直上に対応する位置ごとに一つの通り穴5を有し、
前記通り穴5の部分において前記有機層を介さずに前記ソースドレイン電極データ線1の直上に前記第一不動態化層8と前記第二不動態化層9とが堆積していて、この箇所を開口部5とし、
当該配列基板の断線補修方法は、
前記ソースドレイン電極データ線1の断線位置を検出し、
平面視したときに前記断線位置を内側に含む前記クローズドループ21を特定し、当該クローズドループ21の前記第1辺配線と前記第2辺配線とを特定するとともに当該第1辺配線および当該第2辺配線の直上にある前記開口部5にレーザー熔接を行って前記ソースドレイン電極データ線1と当該クローズドループ21を継ぎ合わせ、さらに、当該クローズドループ21の両側にある前記連結回路22をレーザーで切断し、当該クローズドループ21を用いて前記ソースドレイン電極データ線1の断線位置をバイパスし、
前記ソースドレイン電極データ線1の断線修復を達成する
ことを特徴とする配列基板の断線補修方法。 - 請求項1に記載の配列基板の断線補修方法において、
前記開口部の大きさは7μm×7μmである
ことを特徴とする配列基板の断線補修方法。 - 請求項1に記載の配列基板の断線補修方法において、
前記有機層は色レジスト層または平坦層である
ことを特徴とする配列基板の断線補修方法。 - 請求項1に記載の配列基板の断線補修方法において、
前記第一不動態化層と前記第二不動態化層は無機材料からなる
ことを特徴とする配列基板の断線補修方法。 - 請求項1に記載の配列基板の断線補修方法において、
前記有機層の厚さは前記第一不動態化層と前記第二不動態化層の厚さより厚い
ことを特徴とする配列基板の断線補修方法。
Applications Claiming Priority (3)
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CN201510042169.8 | 2015-01-27 | ||
CN201510042169.8A CN104516133B (zh) | 2015-01-27 | 2015-01-27 | 阵列基板及该阵列基板的断线修补方法 |
PCT/CN2015/075674 WO2016119303A1 (zh) | 2015-01-27 | 2015-04-01 | 阵列基板及该阵列基板的断线修补方法 |
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JP6518330B2 true JP6518330B2 (ja) | 2019-05-22 |
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US (1) | US9568793B2 (ja) |
JP (1) | JP6518330B2 (ja) |
KR (1) | KR101947295B1 (ja) |
CN (1) | CN104516133B (ja) |
GB (1) | GB2546043B (ja) |
WO (1) | WO2016119303A1 (ja) |
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CN104597640B (zh) * | 2015-02-12 | 2017-06-27 | 深圳市华星光电技术有限公司 | 阵列基板及其断线修补方法 |
CN104898333B (zh) * | 2015-06-17 | 2017-07-28 | 合肥鑫晟光电科技有限公司 | 一种阵列基板及其线不良维修方法、显示装置 |
CN105425433B (zh) * | 2015-11-10 | 2018-10-30 | 深圳市华星光电技术有限公司 | 具有亮点缺陷的像素的修复方法、阵列基板及液晶面板 |
CN105467706B (zh) * | 2016-01-15 | 2018-10-26 | 武汉华星光电技术有限公司 | 阵列基板结构及阵列基板断线修复方法 |
CN105527736B (zh) * | 2016-02-15 | 2019-01-18 | 京东方科技集团股份有限公司 | 一种阵列基板及其修复方法、显示面板和显示装置 |
CN105549281B (zh) * | 2016-03-16 | 2018-09-04 | 京东方科技集团股份有限公司 | 阵列基板及修复方法、显示面板和显示装置 |
CN106773427A (zh) * | 2017-03-10 | 2017-05-31 | 京东方科技集团股份有限公司 | 数据线维修方法和阵列基板 |
CN106950774A (zh) | 2017-05-12 | 2017-07-14 | 京东方科技集团股份有限公司 | 阵列基板及其制作方法和维修方法、显示装置 |
CN108594551A (zh) * | 2018-04-28 | 2018-09-28 | 京东方科技集团股份有限公司 | 阵列基板及其数据线断路的修复方法和显示装置 |
CN110376809A (zh) * | 2019-06-11 | 2019-10-25 | 惠科股份有限公司 | 断线修复结构、显示面板及断线修复方法 |
CN110634730B (zh) * | 2019-09-27 | 2021-08-13 | 扬州扬杰电子科技股份有限公司 | 一种沟槽肖特基多晶硅沉积后栅氧中断返工方法 |
CN110824796B (zh) * | 2019-10-29 | 2022-03-01 | Tcl华星光电技术有限公司 | 阵列基板及其修补方法 |
CN111796721B (zh) * | 2020-07-20 | 2024-04-26 | 京东方科技集团股份有限公司 | 一种显示面板、显示装置及显示面板的制作方法 |
CN113764436B (zh) * | 2021-09-03 | 2022-12-06 | 深圳市华星光电半导体显示技术有限公司 | 阵列基板的修补方法及修补装置 |
CN114675455A (zh) * | 2022-03-18 | 2022-06-28 | Tcl华星光电技术有限公司 | 阵列基板及其信号线断线修复方法 |
CN114755866A (zh) * | 2022-04-28 | 2022-07-15 | 深圳市华星光电半导体显示技术有限公司 | 阵列基板及该阵列基板的异常修补方法、显示面板 |
WO2023245408A1 (zh) * | 2022-06-21 | 2023-12-28 | 京东方科技集团股份有限公司 | 显示基板、显示背板、显示面板 |
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CN104298035A (zh) * | 2014-09-23 | 2015-01-21 | 京东方科技集团股份有限公司 | 阵列基板、阵列基板的数据线断线的修复方法、显示装置 |
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- 2015-04-01 KR KR1020177012280A patent/KR101947295B1/ko active IP Right Grant
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GB2546043A (en) | 2017-07-05 |
CN104516133A (zh) | 2015-04-15 |
GB2546043B (en) | 2021-03-10 |
WO2016119303A1 (zh) | 2016-08-04 |
GB201706052D0 (en) | 2017-05-31 |
JP2018508818A (ja) | 2018-03-29 |
US9568793B2 (en) | 2017-02-14 |
US20160363829A1 (en) | 2016-12-15 |
CN104516133B (zh) | 2017-12-29 |
KR20170066573A (ko) | 2017-06-14 |
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