JP6387375B2 - 半導体基板 - Google Patents

半導体基板 Download PDF

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Publication number
JP6387375B2
JP6387375B2 JP2016141782A JP2016141782A JP6387375B2 JP 6387375 B2 JP6387375 B2 JP 6387375B2 JP 2016141782 A JP2016141782 A JP 2016141782A JP 2016141782 A JP2016141782 A JP 2016141782A JP 6387375 B2 JP6387375 B2 JP 6387375B2
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Prior art keywords
interface
single crystal
sic
atoms
layer
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JP2016141782A
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Japanese (ja)
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JP2018014372A (ja
JP2018014372A5 (enExample
Inventor
功 今岡
功 今岡
孝則 村崎
孝則 村崎
下　俊久
俊久 下
英次 内田
英次 内田
章行 南
章行 南
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Sicoxs Corp
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Sicoxs Corp
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Priority to JP2016141782A priority Critical patent/JP6387375B2/ja
Application filed by Sicoxs Corp filed Critical Sicoxs Corp
Priority to CN201780044382.XA priority patent/CN109478495B/zh
Priority to KR1020197004382A priority patent/KR102035122B1/ko
Priority to EP17830936.5A priority patent/EP3489990B1/en
Priority to PCT/JP2017/025600 priority patent/WO2018016417A1/ja
Priority to US16/319,053 priority patent/US10680068B2/en
Publication of JP2018014372A publication Critical patent/JP2018014372A/ja
Publication of JP2018014372A5 publication Critical patent/JP2018014372A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/185—Joining of semiconductor bodies for junction formation
    • H01L21/187—Joining of semiconductor bodies for junction formation by direct bonding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H10D62/832—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
    • H10D62/8325—Silicon carbide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/185—Joining of semiconductor bodies for junction formation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02373—Group 14 semiconducting materials
    • H01L21/02378—Silicon carbide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02587—Structure
    • H01L21/0259—Microstructure
    • H01L21/02595—Microstructure polycrystalline
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02587—Structure
    • H01L21/0259—Microstructure
    • H01L21/02598—Microstructure monocrystalline
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/40—Crystalline structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01006—Carbon [C]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01007—Nitrogen [N]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01014—Silicon [Si]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01015—Phosphorus [P]

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Recrystallisation Techniques (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP2016141782A 2016-07-19 2016-07-19 半導体基板 Active JP6387375B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2016141782A JP6387375B2 (ja) 2016-07-19 2016-07-19 半導体基板
KR1020197004382A KR102035122B1 (ko) 2016-07-19 2017-07-13 반도체 기판
EP17830936.5A EP3489990B1 (en) 2016-07-19 2017-07-13 Semiconductor substrate
PCT/JP2017/025600 WO2018016417A1 (ja) 2016-07-19 2017-07-13 半導体基板
CN201780044382.XA CN109478495B (zh) 2016-07-19 2017-07-13 半导体基板
US16/319,053 US10680068B2 (en) 2016-07-19 2017-07-13 Semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016141782A JP6387375B2 (ja) 2016-07-19 2016-07-19 半導体基板

Publications (3)

Publication Number Publication Date
JP2018014372A JP2018014372A (ja) 2018-01-25
JP2018014372A5 JP2018014372A5 (enExample) 2018-03-08
JP6387375B2 true JP6387375B2 (ja) 2018-09-05

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JP2016141782A Active JP6387375B2 (ja) 2016-07-19 2016-07-19 半導体基板

Country Status (6)

Country Link
US (1) US10680068B2 (enExample)
EP (1) EP3489990B1 (enExample)
JP (1) JP6387375B2 (enExample)
KR (1) KR102035122B1 (enExample)
CN (1) CN109478495B (enExample)
WO (1) WO2018016417A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021060515A1 (ja) 2019-09-27 2021-04-01 東海カーボン株式会社 多結晶ＳｉＣ成形体及びその製造方法
WO2021060518A1 (ja) 2019-09-27 2021-04-01 東海カーボン株式会社 多結晶ＳｉＣ成形体
WO2021060516A1 (ja) 2019-09-27 2021-04-01 東海カーボン株式会社 多結晶ＳｉＣ成形体
WO2024048239A1 (ja) 2022-08-29 2024-03-07 株式会社サイコックス 半導体基板および半導体基板の製造方法

Families Citing this family (14)

* Cited by examiner, † Cited by third party
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WO2020195196A1 (ja) 2019-03-27 2020-10-01 日本碍子株式会社 ＳｉＣ複合基板及び半導体デバイス用複合基板
JP7177248B2 (ja) 2019-03-27 2022-11-22 日本碍子株式会社 ＳｉＣ複合基板及び半導体デバイス用複合基板
EP4044212B1 (en) * 2019-11-14 2024-02-14 Huawei Digital Power Technologies Co., Ltd. Semiconductor substrate, manufacturing method therefor, and semiconductor device
JP7400389B2 (ja) * 2019-11-21 2023-12-19 住友金属鉱山株式会社 炭化珪素多結晶膜、炭化珪素多結晶膜の製造方法および炭化珪素多結晶膜の成膜装置
JP7512761B2 (ja) * 2020-08-19 2024-07-09 住友金属鉱山株式会社 基板接合装置
FR3123759B1 (fr) * 2021-06-03 2023-06-23 Soitec Silicon On Insulator Procede de fabrication d’une structure semi-conductrice comprenant une couche utile en carbure de silicium aux proprietes electriques ameliorees
CN113658849B (zh) * 2021-07-06 2025-02-21 华为技术有限公司 复合衬底及其制备方法、半导体器件、电子设备
FR3130296B1 (fr) * 2021-12-14 2023-11-03 Soitec Silicon On Insulator Procede de fabrication d’une structure semi-conductrice comprenant un substrat de carbure de silicium polycristallin et une couche active de carbure de silicium monocristallin
CN114864424A (zh) * 2022-05-09 2022-08-05 中国科学院上海微系统与信息技术研究所 一种碳化硅衬底的制备方法及碳化硅衬底
CN114864529B (zh) * 2022-05-18 2024-07-19 北京青禾晶元半导体科技有限责任公司 一种碳化硅复合基板及其制造方法与应用
JP2024025064A (ja) * 2022-08-10 2024-02-26 株式会社サイコックス ＳｉＣ単結晶転写用複合基板、ＳｉＣ単結晶転写用複合基板の製造方法、およびＳｉＣ接合基板の製造方法
CN115662881B (zh) * 2022-12-21 2023-03-17 青禾晶元(天津)半导体材料有限公司 一种复合碳化硅衬底及其制备方法
FR3153930B1 (fr) * 2023-10-04 2025-10-03 Soitec Silicon On Insulator Structure semi-conductrice a base de carbure de silicium pour applications de puissance et procede de fabrication associe
WO2025164650A1 (ja) * 2024-02-01 2025-08-07 ローム株式会社 半導体装置の製造方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6328796B1 (en) * 1999-02-01 2001-12-11 The United States Of America As Represented By The Secretary Of The Navy Single-crystal material on non-single-crystalline substrate
US6563133B1 (en) * 2000-08-09 2003-05-13 Ziptronix, Inc. Method of epitaxial-like wafer bonding at low temperature and bonded structure
EP1901345A1 (en) * 2006-08-30 2008-03-19 Siltronic AG Multilayered semiconductor wafer and process for manufacturing the same
JP4906451B2 (ja) * 2006-09-15 2012-03-28 コバレントマテリアル株式会社 ＳｉＣ焼結体の接合体、ＳｉＣ焼結体の接合体の接合方法
JP5213096B2 (ja) 2007-03-23 2013-06-19 学校法人関西学院 単結晶炭化ケイ素の液相エピタキシャル成長方法、単結晶炭化ケイ素基板の製造方法、及び単結晶炭化ケイ素基板
JP5446148B2 (ja) 2008-07-02 2014-03-19 富士電機株式会社 炭化珪素半導体装置の製造方法
JP5389627B2 (ja) 2008-12-11 2014-01-15 信越化学工業株式会社 ワイドバンドギャップ半導体を積層した複合基板の製造方法
JP5455595B2 (ja) 2008-12-11 2014-03-26 信越化学工業株式会社 貼り合わせウェーハの製造方法
JP5420968B2 (ja) 2009-05-07 2014-02-19 信越化学工業株式会社 貼り合わせウェーハの製造方法
JP5464544B2 (ja) * 2009-05-12 2014-04-09 学校法人関西学院 エピタキシャル成長層付き単結晶ＳｉＣ基板、炭素供給フィード基板、及び炭素ナノ材料付きＳｉＣ基板
KR20120022952A (ko) 2009-10-13 2012-03-12 스미토모덴키고교가부시키가이샤 탄화규소 기판의 제조 방법 및 탄화규소 기판
CN102449734A (zh) 2009-10-30 2012-05-09 住友电气工业株式会社 制造碳化硅衬底的方法和碳化硅衬底
JP5540349B2 (ja) * 2009-12-02 2014-07-02 学校法人関西学院 半導体ウエハの製造方法
JP5624777B2 (ja) 2010-03-05 2014-11-12 昭和電工株式会社 炭化珪素種結晶の固定方法及び炭化珪素単結晶の製造方法
JP2011246315A (ja) 2010-05-28 2011-12-08 Sumitomo Electric Ind Ltd 炭化珪素基板およびその製造方法
JP5477302B2 (ja) 2011-01-06 2014-04-23 株式会社デンソー 炭化珪素半導体基板の製造方法および炭化珪素半導体装置の製造方法
JP6156252B2 (ja) * 2014-05-16 2017-07-05 株式会社豊田自動織機 半導体基板の製造方法および半導体基板
EP3168862B1 (en) * 2014-07-10 2022-07-06 Sicoxs Corporation Semiconductor substrate and semiconductor substrate production method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021060515A1 (ja) 2019-09-27 2021-04-01 東海カーボン株式会社 多結晶ＳｉＣ成形体及びその製造方法
WO2021060518A1 (ja) 2019-09-27 2021-04-01 東海カーボン株式会社 多結晶ＳｉＣ成形体
WO2021060516A1 (ja) 2019-09-27 2021-04-01 東海カーボン株式会社 多結晶ＳｉＣ成形体
KR20220068992A (ko) 2019-09-27 2022-05-26 도까이 카본 가부시끼가이샤 다결정 SiC 성형체 및 그 제조 방법
KR20220074864A (ko) 2019-09-27 2022-06-03 도까이 카본 가부시끼가이샤 다결정 SiC 성형체
WO2024048239A1 (ja) 2022-08-29 2024-03-07 株式会社サイコックス 半導体基板および半導体基板の製造方法

Also Published As

Publication number Publication date
JP2018014372A (ja) 2018-01-25
US10680068B2 (en) 2020-06-09
WO2018016417A1 (ja) 2018-01-25
EP3489990B1 (en) 2021-05-26
KR20190021475A (ko) 2019-03-05
CN109478495A (zh) 2019-03-15
KR102035122B1 (ko) 2019-10-22
CN109478495B (zh) 2020-10-02
US20200006493A1 (en) 2020-01-02
EP3489990A4 (en) 2020-01-15
EP3489990A1 (en) 2019-05-29

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