JP6360586B1 - Cmp装置のウエハ保持用の弾性膜 - Google Patents
Cmp装置のウエハ保持用の弾性膜 Download PDFInfo
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Abstract
【解決手段】CMP装置のウエハ保持用の弾性膜10は、弾性材料で形成された膜本体11と、そのウエハ保持側の表面を被覆するように設けられたコーティング層12とを有する。コーティング層12は、高分子バインダと、その高分子バインダに分散した非金属粒子とを含む。
【選択図】図1
Description
後述の各試験に用いる以下の実施例1〜3及び比較例1〜5の試験片を作製した。
プレス成形によりシリコーンゴム製の基材を作製した。また、高分子バインダーベース材の液状縮合硬化型シリコーンゴム(KE12、信越化学工業社製)を100質量部対し、非金属粒子のPTFE粉末(ルブロンL-2、ダイキン工業社製、平均粒子径3.5μm)を82.5質量部、触媒のCAT-RMを0.9質量部混合し、これを有機溶剤に添加して固形分濃度を10質量%としたコーティング液を調製した。
コーティング回数を多くしてコーティング層の膜厚を10μmとしたことを除いて実施例1と同様の方法で得た試験片を実施例2とした。
実施例2で液状縮合硬化型シリコーンゴム100質量部に対し、帯電防止剤(CIL−312、日本カーリット社製)を3.8質量部加えたことを除いて実施例2と同様の方法で得た試験片を実施例3とした。
基材にコーティングを施さない試験片を比較例1とした
<比較例2>
基材に膜厚が0.5μmのパリレンコーティング層を蒸着により成膜した試験片を比較例2とした。
基材に膜厚が0.5μmのダイヤモンドライクカーボンコーティング層を蒸着により成膜した試験片を比較例3とした。
基材にフッ素系コーティング剤(MK−2 AGCセイミケミカル社製)用いて膜厚10μmのコーティング層を成膜した試験片を比較例4とした。
基材にシリコーン系コーティング剤(HS−4 タナック社製)用いて膜厚10μmのコーティング層を成膜した試験片を比較例5とした。
基材にフッ素変性シリコーン系コーティング剤(SAT−1000P シンコー技研社製)用いて膜厚10μmのコーティング層を成膜した試験片を比較例6とした。
<摺動性>
実施例1〜3及び比較例1〜6の長さ100mm、幅50mm、及び厚さ2mmのシート状の試験片を準備し、表面性測定機(HEIDON TYPE:14 新東科学社製)を用いてそれぞれのコーティング層の静止摩擦係数を求めた。具体的には、コーティング層の表面をメタノールで洗浄した後に温度20℃及び湿度40%の雰囲気下で乾燥させた試験片を表面性測定機のステージにセットし、SUS304製の測定子の直径10mmの球面に形成された先端をコーティング層に当接させて0.98Nの荷重をかけ、移動速度75mm/minで測定子をコーティング層上を摺動させた。そして、このとき測定される摩擦力から静止摩擦係数を算出した。この静止摩擦係数が小さい程、摺動性が高いということになる。
実施例1〜3及び比較例1〜6の内径14.5mm及び線径4.0mmのV−15サイズのO-リング状の試験片を準備し、それぞれの粘着性として試験治具への固着力を求めた。具体的には、試験片をSUS304製の2枚の板状の試験治具で挟持して25%圧縮して固定し、その状態で温度175℃及び24時間の加熱処理を施すのに続いて室温で8時間冷却した後、2枚の試験治具を1mm/minの速度で引き離すと共に、そのときの引き離し力をロードセルで測定し、その最大値を固着力とした。この固着力が低い程、粘着性が低いということになる。
実施例1〜3及び比較例1〜6の長さ100mm、幅50mm、及び厚さ2mmのシート状の試験片を準備し、接触角計(DMo-501 協和界面科学社製)を用いてそれぞれのコーティング層の純水との接触角を測定した。試験片は、コーティング層の表面をメタノールで洗浄した後に温度20℃及び湿度40%の雰囲気下で乾燥させたものを用いた。この接触角が大きい程、撥水性が高いということになる。
実施例1〜3及び比較例1〜6のシート状の試験片について、スラスト摩耗試験を行った。具体的には、コーティング層の表面に、S45C製のリング状の試験治具の算術平均粗さ(Ra)が1.0±0.5μmの端面を当接させ、室温下、試験治具を0.5m/sec(417rpm)の回転速度で回転させ、また、このとき試験治具で試験片を10Nの荷重で5分間圧縮した後、5分当たり10Nで荷重を60Nまで上昇させた。そして、試験前後の摩耗減量を算出した。この摩耗減量が小さい程、耐摩耗性が高いということになる。
実施例1〜3及び比較例1〜6のシート状の試験片について、マイクロゴム硬度計(MD-1capa 高分子計器社製)を用いてそれぞれのコーティング層のショアAに相当する硬度を測定した。
実施例1〜3及び比較例2〜6のシート状の試験片について、80%伸張させたときのコーティング層の表面を顕微鏡で100倍に拡大して観察し、クラックの有無を確認した。コーティング層にクラックが認められなければ、コーティング層の基材への密着性が高いということになる。
実施例1〜3及び比較例1〜6のシート状の試験片について、JISL1094:2014に規定されたA法(半減期測定法)に準じて耐電圧の初期値を測定した。この耐電圧が低い程、帯電防止性が高いということになる。
表1は試験結果を示す。
S ウエハ
P 研磨パッド
10 弾性膜
11 膜本体
11a 円形部
11b 筒状部
11c 環状部
12 コーティング層
Claims (7)
- CMP装置のウエハ保持用の弾性膜であって、
弾性材料で形成された膜本体と、前記膜本体のウエハ保持側の表面を被覆するように設けられたコーティング層と、を有し、
前記コーティング層は、高分子バインダと、前記高分子バインダに分散した非金属粒子と、を含む弾性膜。 - 請求項1に記載された弾性膜において、
前記高分子バインダがシリコーンゴムで形成されている弾性膜。 - 請求項2に記載された弾性膜において、
前記高分子バインダを形成する前記シリコーンゴムが液状シリコーンゴムである弾性膜。 - 請求項3に記載された弾性膜において、
前記液状シリコーンゴムが縮合重合型のものであって、その反応機構がアルコール型又はアセトン型のものである弾性膜。 - 請求項1乃至4のいずれかに記載された弾性膜において、
前記非金属粒子が熱可塑性樹脂又は熱硬化性樹脂で構成されている弾性膜。 - 請求項5に記載された弾性膜において、
前記非金属粒子がフッ素系樹脂で構成されている弾性膜。 - 請求項6に記載された弾性膜において、
前記非金属粒子を構成する前記フッ素系樹脂がポリテトラフルオロエチレンである弾性膜。
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CN201880024397.4A CN110520971B (zh) | 2017-04-13 | 2018-03-19 | Cmp装置的晶圆保持用的弹性膜 |
EP18784515.1A EP3611758B1 (en) | 2017-04-13 | 2018-03-19 | Wafer-retaining elastic film of cmp device |
SG11201909484U SG11201909484UA (en) | 2017-04-13 | 2018-03-19 | Wafer-retaining elastic film of cmp device |
US16/604,094 US20210277272A1 (en) | 2017-04-13 | 2018-03-19 | Wafer-retaining elastic film of cmp device |
KR1020197030891A KR102575999B1 (ko) | 2017-04-13 | 2018-03-19 | Cmp 장치의 웨이퍼 유지용 탄성막 |
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JP2021030409A (ja) * | 2019-08-29 | 2021-03-01 | 株式会社荏原製作所 | 弾性膜、および基板保持装置 |
KR20210061273A (ko) * | 2019-11-19 | 2021-05-27 | 가부시키가이샤 에바라 세이사꾸쇼 | 기판을 보유 지지하기 위한 톱링 및 기판 처리 장치 |
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