JP7061144B2 - 弾性膜 - Google Patents
弾性膜 Download PDFInfo
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- JP7061144B2 JP7061144B2 JP2020018163A JP2020018163A JP7061144B2 JP 7061144 B2 JP7061144 B2 JP 7061144B2 JP 2020018163 A JP2020018163 A JP 2020018163A JP 2020018163 A JP2020018163 A JP 2020018163A JP 7061144 B2 JP7061144 B2 JP 7061144B2
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- Japan
- Prior art keywords
- rubber layer
- layer
- polishing head
- elastic film
- rigid body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
11 膜本体
111 内側ゴム層
112 外側ゴム層
113 中間剛体層
12 筒状部
13 環状部
20 CMP装置
21 研磨ヘッド
22 研磨パッド
23 密閉空間
W 半導体ウエハ
Claims (3)
- CMP装置の研磨ヘッドに取り付けられて前記研磨ヘッドとの間に単一の密閉空間を形成するウエハ保持用の弾性膜であって、
研磨ヘッド取付側に設けられたゴム製の内側ゴム層と、
ウエハ保持側に設けられたゴム製の外側ゴム層と、
前記内側ゴム層と前記外側ゴム層との間に設けられ前記内側ゴム層及び前記外側ゴム層よりも剛性の高い材料で形成された中間剛体層と、
を備えた円盤状の膜本体を有し、
前記膜本体の全領域に前記中間剛体層が設けられ且つ前記膜本体の側面に前記中間剛体層が露出している弾性膜。 - 請求項1に記載された弾性膜において、
前記内側ゴム層及び前記外側ゴム層が同一の架橋ゴムで形成されている弾性膜。 - 請求項1又は2に記載された弾性膜において、
前記中間剛体層が樹脂又は金属で形成されている弾性膜。
Priority Applications (1)
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JP2020018163A JP7061144B2 (ja) | 2020-02-05 | 2020-02-05 | 弾性膜 |
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JP2020018163A JP7061144B2 (ja) | 2020-02-05 | 2020-02-05 | 弾性膜 |
Publications (2)
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JP2021122896A JP2021122896A (ja) | 2021-08-30 |
JP7061144B2 true JP7061144B2 (ja) | 2022-04-27 |
Family
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Family Applications (1)
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JP2020018163A Active JP7061144B2 (ja) | 2020-02-05 | 2020-02-05 | 弾性膜 |
Country Status (1)
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JP (1) | JP7061144B2 (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013111717A (ja) | 2011-11-30 | 2013-06-10 | Ebara Corp | 弾性膜 |
JP2018182064A (ja) | 2017-04-13 | 2018-11-15 | 三菱電線工業株式会社 | Cmp装置のウエハ保持用の弾性膜 |
-
2020
- 2020-02-05 JP JP2020018163A patent/JP7061144B2/ja active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013111717A (ja) | 2011-11-30 | 2013-06-10 | Ebara Corp | 弾性膜 |
JP2018182064A (ja) | 2017-04-13 | 2018-11-15 | 三菱電線工業株式会社 | Cmp装置のウエハ保持用の弾性膜 |
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JP2021122896A (ja) | 2021-08-30 |
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