JP6353831B2 - 角度分解反射率測定における走査および回折の光計測からのアルゴリズム的除去 - Google Patents

角度分解反射率測定における走査および回折の光計測からのアルゴリズム的除去 Download PDF

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JP6353831B2
JP6353831B2 JP2015520409A JP2015520409A JP6353831B2 JP 6353831 B2 JP6353831 B2 JP 6353831B2 JP 2015520409 A JP2015520409 A JP 2015520409A JP 2015520409 A JP2015520409 A JP 2015520409A JP 6353831 B2 JP6353831 B2 JP 6353831B2
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scanning
angle
scan
test pattern
resolved
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JP2015524555A5 (enExample
JP2015524555A (ja
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アムノン マナッセン
アムノン マナッセン
アンディ ヒル
アンディ ヒル
ダニエル カンデル
ダニエル カンデル
イラン セラ
イラン セラ
オハッド バッシャール
オハッド バッシャール
バラク ブリンゴルツ
バラク ブリンゴルツ
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KLA Corp
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KLA Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/104—Mechano-optical scan, i.e. object and beam moving

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2015520409A 2012-06-26 2013-06-25 角度分解反射率測定における走査および回折の光計測からのアルゴリズム的除去 Active JP6353831B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261664477P 2012-06-26 2012-06-26
US61/664,477 2012-06-26
US201361764435P 2013-02-13 2013-02-13
US61/764,435 2013-02-13
PCT/US2013/047691 WO2014004564A1 (en) 2012-06-26 2013-06-25 Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology

Related Child Applications (1)

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JP2018111107A Division JP6628835B2 (ja) 2012-06-26 2018-06-11 角度分解反射率測定における走査および回折の光計測からのアルゴリズム的除去

Publications (3)

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JP2015524555A JP2015524555A (ja) 2015-08-24
JP2015524555A5 JP2015524555A5 (enExample) 2016-08-04
JP6353831B2 true JP6353831B2 (ja) 2018-07-04

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JP2015520409A Active JP6353831B2 (ja) 2012-06-26 2013-06-25 角度分解反射率測定における走査および回折の光計測からのアルゴリズム的除去
JP2018111107A Active JP6628835B2 (ja) 2012-06-26 2018-06-11 角度分解反射率測定における走査および回折の光計測からのアルゴリズム的除去
JP2019219052A Active JP7046898B2 (ja) 2012-06-26 2019-12-03 角度分解反射率測定における走査および回折の光計測からのアルゴリズム的除去

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JP2019219052A Active JP7046898B2 (ja) 2012-06-26 2019-12-03 角度分解反射率測定における走査および回折の光計測からのアルゴリズム的除去

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US (3) US9958385B2 (enExample)
EP (1) EP2865003A1 (enExample)
JP (3) JP6353831B2 (enExample)
KR (3) KR102231730B1 (enExample)
TW (2) TWI629448B (enExample)
WO (1) WO2014004564A1 (enExample)

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TWI609169B (zh) 2017-12-21
KR20210033063A (ko) 2021-03-25
KR20210080592A (ko) 2021-06-30
US10533940B2 (en) 2020-01-14
KR102330743B1 (ko) 2021-11-23
KR20150036214A (ko) 2015-04-07
KR102231730B1 (ko) 2021-03-24
JP6628835B2 (ja) 2020-01-15
US20150116717A1 (en) 2015-04-30
TW201418661A (zh) 2014-05-16
TWI629448B (zh) 2018-07-11
WO2014004564A1 (en) 2014-01-03
US20190094142A1 (en) 2019-03-28
KR102330741B1 (ko) 2021-11-23
US20180106723A1 (en) 2018-04-19
JP2015524555A (ja) 2015-08-24
JP7046898B2 (ja) 2022-04-04
TW201408988A (zh) 2014-03-01
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US9958385B2 (en) 2018-05-01
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