JP6338813B2 - ジャイロセンサー及びそれを用いた電子機器 - Google Patents

ジャイロセンサー及びそれを用いた電子機器 Download PDF

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Publication number
JP6338813B2
JP6338813B2 JP2012084617A JP2012084617A JP6338813B2 JP 6338813 B2 JP6338813 B2 JP 6338813B2 JP 2012084617 A JP2012084617 A JP 2012084617A JP 2012084617 A JP2012084617 A JP 2012084617A JP 6338813 B2 JP6338813 B2 JP 6338813B2
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mass
driving
driving mass
drive
island
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Japanese (ja)
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JP2013213754A5 (enExample
JP2013213754A (ja
Inventor
誠 古畑
誠 古畑
田中　悟
悟 田中
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2012084617A priority Critical patent/JP6338813B2/ja
Priority to US13/849,089 priority patent/US8899112B2/en
Priority to CN201310116379.8A priority patent/CN103363980B/zh
Publication of JP2013213754A publication Critical patent/JP2013213754A/ja
Publication of JP2013213754A5 publication Critical patent/JP2013213754A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2012084617A 2012-04-03 2012-04-03 ジャイロセンサー及びそれを用いた電子機器 Active JP6338813B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012084617A JP6338813B2 (ja) 2012-04-03 2012-04-03 ジャイロセンサー及びそれを用いた電子機器
US13/849,089 US8899112B2 (en) 2012-04-03 2013-03-22 Gyro sensor and electronic device including the same
CN201310116379.8A CN103363980B (zh) 2012-04-03 2013-04-03 陀螺传感器及使用了该陀螺传感器的电子设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012084617A JP6338813B2 (ja) 2012-04-03 2012-04-03 ジャイロセンサー及びそれを用いた電子機器

Publications (3)

Publication Number Publication Date
JP2013213754A JP2013213754A (ja) 2013-10-17
JP2013213754A5 JP2013213754A5 (enExample) 2015-05-21
JP6338813B2 true JP6338813B2 (ja) 2018-06-06

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Family Applications (1)

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JP2012084617A Active JP6338813B2 (ja) 2012-04-03 2012-04-03 ジャイロセンサー及びそれを用いた電子機器

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US (1) US8899112B2 (enExample)
JP (1) JP6338813B2 (enExample)
CN (1) CN103363980B (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8534127B2 (en) 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
US9097524B2 (en) * 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
JP2014134481A (ja) 2013-01-11 2014-07-24 Seiko Epson Corp 物理量センサー、電子機器、及び移動体
JP6195051B2 (ja) 2013-03-04 2017-09-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
JP6288413B2 (ja) 2013-10-11 2018-03-07 三菱重工業株式会社 ステンレス部材の熱処理方法、及びステンレス鍛造品の製造方法。
JP2016099269A (ja) * 2014-11-25 2016-05-30 セイコーエプソン株式会社 ジャイロセンサー、電子機器、および移動体
US9702889B2 (en) * 2015-06-17 2017-07-11 Richtek Technology Corporation Micro-electro-mechanical system (MEMS) device
JP6597099B2 (ja) * 2015-09-15 2019-10-30 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
US10119834B2 (en) 2015-12-10 2018-11-06 Panasonic Corporation MEMS sensor with voltage sensing of movable mass
CN113075837B (zh) * 2017-11-23 2022-04-12 核心光电有限公司 摄影机及制法、移动电子设备及减小凸起占用空间的方法
JP7192437B2 (ja) * 2018-11-28 2022-12-20 セイコーエプソン株式会社 慣性センサー、電子機器および移動体

Family Cites Families (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE68922929T2 (de) * 1988-03-23 1996-02-22 Fujitsu Ltd., Kawasaki, Kanagawa Photokathoden-Bildprojektionsapparat für die Mustergestaltung auf einer Halbleitervorrichtung.
US5503018A (en) * 1992-12-08 1996-04-02 Alliedsignal Inc. Tunnel current sensor with force relief protection
DE4414237A1 (de) 1994-04-23 1995-10-26 Bosch Gmbh Robert Mikromechanischer Schwinger eines Schwingungsgyrometers
DE19526903B4 (de) * 1995-07-22 2005-03-10 Bosch Gmbh Robert Drehratensensor
US5600065A (en) * 1995-10-25 1997-02-04 Motorola, Inc. Angular velocity sensor
US6250156B1 (en) * 1996-05-31 2001-06-26 The Regents Of The University Of California Dual-mass micromachined vibratory rate gyroscope
JPH112526A (ja) * 1997-06-13 1999-01-06 Mitsubishi Electric Corp 振動型角速度センサ
JPH11173851A (ja) * 1997-12-08 1999-07-02 Murata Mfg Co Ltd 角速度センサ
JP2000046560A (ja) * 1998-07-31 2000-02-18 Aisin Seiki Co Ltd 角速度センサ
DE19930779B4 (de) * 1999-07-03 2010-05-06 Robert Bosch Gmbh Mikromechanisches Bauelement
DE10051973A1 (de) * 2000-10-20 2002-05-02 Bosch Gmbh Robert Mikromechanisches Bauelement
JP3512004B2 (ja) 2000-12-20 2004-03-29 トヨタ自動車株式会社 力学量検出装置
JP2002228680A (ja) 2001-02-02 2002-08-14 Denso Corp 容量式力学量センサ
DE10108197A1 (de) 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
DE10108196A1 (de) * 2001-02-21 2002-10-24 Bosch Gmbh Robert Drehratensensor
US6928872B2 (en) 2001-04-27 2005-08-16 Stmicroelectronics S.R.L. Integrated gyroscope of semiconductor material with at least one sensitive axis in the sensor plane
JP4134853B2 (ja) * 2003-09-05 2008-08-20 株式会社デンソー 容量式力学量センサ装置
DE10350037A1 (de) 2003-10-27 2005-05-25 Robert Bosch Gmbh Drehratensensor
JP2005326310A (ja) * 2004-05-14 2005-11-24 Hosiden Corp 振動センサ
US7518493B2 (en) * 2005-12-01 2009-04-14 Lv Sensors, Inc. Integrated tire pressure sensor system
JP4887034B2 (ja) * 2005-12-05 2012-02-29 日立オートモティブシステムズ株式会社 慣性センサ
US7461552B2 (en) * 2006-10-23 2008-12-09 Custom Sensors & Technologies, Inc. Dual axis rate sensor
US8042396B2 (en) 2007-09-11 2011-10-25 Stmicroelectronics S.R.L. Microelectromechanical sensor with improved mechanical decoupling of sensing and driving modes
US7677099B2 (en) * 2007-11-05 2010-03-16 Invensense Inc. Integrated microelectromechanical systems (MEMS) vibrating mass Z-axis rate sensor
DE102007054505B4 (de) * 2007-11-15 2016-12-22 Robert Bosch Gmbh Drehratensensor
JP2009156603A (ja) * 2007-12-25 2009-07-16 Panasonic Corp 複合センサ
US20090315644A1 (en) * 2008-06-19 2009-12-24 Honeywell International Inc. High-q disk nano resonator device and method of fabricating the same
JP2010135771A (ja) * 2008-11-07 2010-06-17 Semiconductor Energy Lab Co Ltd 半導体装置及び当該半導体装置の作製方法
CN101740631B (zh) * 2008-11-07 2014-07-16 株式会社半导体能源研究所 半导体装置及该半导体装置的制造方法
IT1391973B1 (it) * 2008-11-26 2012-02-02 St Microelectronics Rousset Giroscopio microelettromeccanico mono o biassiale con aumentata sensibilita' al rilevamento di velocita' angolari
IT1391972B1 (it) * 2008-11-26 2012-02-02 St Microelectronics Rousset Giroscopio microelettromeccanico con movimento di azionamento rotatorio e migliorate caratteristiche elettriche
ITTO20090489A1 (it) * 2008-11-26 2010-12-27 St Microelectronics Srl Circuito di lettura per un giroscopio mems multi-asse avente direzioni di rilevamento inclinate rispetto agli assi di riferimento, e corrispondente giroscopio mems multi-asse
DE102009000345A1 (de) * 2009-01-21 2010-07-22 Robert Bosch Gmbh Drehratensensor
US8256290B2 (en) * 2009-03-17 2012-09-04 Minyao Mao Tri-axis angular rate sensor
US9201091B2 (en) * 2009-04-14 2015-12-01 Atlantic Inertial Systems Limited Accelerometer control systems
US8710599B2 (en) * 2009-08-04 2014-04-29 Fairchild Semiconductor Corporation Micromachined devices and fabricating the same
US8534127B2 (en) * 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
CN101759136B (zh) * 2009-12-25 2011-08-31 紫光股份有限公司 一种全解耦振动式微机械陀螺
DE102010000811A1 (de) * 2010-01-12 2011-07-14 Robert Bosch GmbH, 70469 Mikromechanischer Drehratensensor mit zwei sensitiven Achsen und gekoppelten Detektionsmoden
EP2392897B1 (en) * 2010-01-12 2014-06-11 Sony Corporation Angular velocity sensor, electronic device, and method for detecting angular velocity
US8377799B2 (en) * 2010-03-31 2013-02-19 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing SOI substrate
JP5350339B2 (ja) * 2010-08-12 2013-11-27 株式会社日立製作所 微小電気機械システムおよびその製造方法

Also Published As

Publication number Publication date
JP2013213754A (ja) 2013-10-17
US8899112B2 (en) 2014-12-02
CN103363980B (zh) 2017-05-31
US20130255377A1 (en) 2013-10-03
CN103363980A (zh) 2013-10-23

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