CN103363980B - 陀螺传感器及使用了该陀螺传感器的电子设备 - Google Patents

陀螺传感器及使用了该陀螺传感器的电子设备 Download PDF

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Publication number
CN103363980B
CN103363980B CN201310116379.8A CN201310116379A CN103363980B CN 103363980 B CN103363980 B CN 103363980B CN 201310116379 A CN201310116379 A CN 201310116379A CN 103363980 B CN103363980 B CN 103363980B
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mass
driving
face
driving mass
gyrosensor
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CN103363980A (zh
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古畑诚
田中悟
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Seiko Epson Corp
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Seiko Epson Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
CN201310116379.8A 2012-04-03 2013-04-03 陀螺传感器及使用了该陀螺传感器的电子设备 Active CN103363980B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012084617A JP6338813B2 (ja) 2012-04-03 2012-04-03 ジャイロセンサー及びそれを用いた電子機器
JP2012-084617 2012-04-03

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CN103363980A CN103363980A (zh) 2013-10-23
CN103363980B true CN103363980B (zh) 2017-05-31

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US (1) US8899112B2 (enExample)
JP (1) JP6338813B2 (enExample)
CN (1) CN103363980B (enExample)

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US9097524B2 (en) 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
US8534127B2 (en) 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
JP2014134481A (ja) 2013-01-11 2014-07-24 Seiko Epson Corp 物理量センサー、電子機器、及び移動体
JP6195051B2 (ja) 2013-03-04 2017-09-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
JP6288413B2 (ja) 2013-10-11 2018-03-07 三菱重工業株式会社 ステンレス部材の熱処理方法、及びステンレス鍛造品の製造方法。
JP2016099269A (ja) * 2014-11-25 2016-05-30 セイコーエプソン株式会社 ジャイロセンサー、電子機器、および移動体
US9702889B2 (en) * 2015-06-17 2017-07-11 Richtek Technology Corporation Micro-electro-mechanical system (MEMS) device
JP6597099B2 (ja) * 2015-09-15 2019-10-30 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
US10119834B2 (en) * 2015-12-10 2018-11-06 Panasonic Corporation MEMS sensor with voltage sensing of movable mass
KR102104761B1 (ko) * 2017-11-23 2020-04-27 코어포토닉스 리미티드 컴팩트 폴디드 카메라 구조
JP7192437B2 (ja) * 2018-11-28 2022-12-20 セイコーエプソン株式会社 慣性センサー、電子機器および移動体

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US20130255377A1 (en) 2013-10-03
JP2013213754A (ja) 2013-10-17
CN103363980A (zh) 2013-10-23
JP6338813B2 (ja) 2018-06-06
US8899112B2 (en) 2014-12-02

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