JP6325797B2 - 磁界検出センサ - Google Patents
磁界検出センサ Download PDFInfo
- Publication number
- JP6325797B2 JP6325797B2 JP2013231743A JP2013231743A JP6325797B2 JP 6325797 B2 JP6325797 B2 JP 6325797B2 JP 2013231743 A JP2013231743 A JP 2013231743A JP 2013231743 A JP2013231743 A JP 2013231743A JP 6325797 B2 JP6325797 B2 JP 6325797B2
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- Prior art keywords
- magnetic field
- bias
- output
- time
- impedance element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000001514 detection method Methods 0.000 title claims description 64
- 230000004069 differentiation Effects 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 18
- 230000010355 oscillation Effects 0.000 claims description 13
- 230000005415 magnetization Effects 0.000 claims description 12
- 230000000694 effects Effects 0.000 claims description 6
- 239000010409 thin film Substances 0.000 description 17
- 239000010408 film Substances 0.000 description 8
- 230000000630 rising effect Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- AOWKSNWVBZGMTJ-UHFFFAOYSA-N calcium titanate Chemical compound [Ca+2].[O-][Ti]([O-])=O AOWKSNWVBZGMTJ-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000075 oxide glass Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/063—Magneto-impedance sensors; Nanocristallin sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0017—Means for compensating offset magnetic fields or the magnetic flux to be measured; Means for generating calibration magnetic fields
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0023—Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0023—Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration
- G01R33/0041—Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration using feed-back or modulation techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/028—Electrodynamic magnetometers
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
Description
10…発振回路
12…磁気インピーダンス素子
12a…非磁性基板
12b…磁性薄膜(磁性膜)
12c,12d…電極
14…負帰還バイアスコイル(バイアスコイル)
16…計装アンプ
18…第1アンプ
20…第1微分回路
22…第2アンプ
24…第2微分回路
26…コンパレータ
28…フリップフロップ回路
30…マイコン(演算部)
32…フィルタ
34…第3アンプ
36…大電流出力アンプ
38…加算器
R…抵抗
Claims (2)
- 磁気インピーダンス効果を利用した磁気インピーダンス素子と、
前記磁気インピーダンス素子にバイアス磁界を印加するためのバイアスコイルと、
前記磁気インピーダンス素子に交流電流を印加する発振回路と、
前記磁気インピーダンス素子の出力を微分する微分回路と、
前記微分回路から出力されるトリガ波形に基づいて、ハイ出力又はロウ出力するフリップフロップ回路と、
前記フリップフロップ回路から出力される前記ハイ出力の継続時間に基づいて、外部磁界を検出する演算部とを備え、
前記磁気インピーダンス素子に交流電流を印加して得られる出力から外部磁界を検出するものであり、
前記磁気インピーダンス素子は、非磁性基板と、前記非磁性基板の表面に形成された磁性膜と、を有し、当該磁気インピーダンス素子の長手方向が磁界の検出方向とされ、前記磁性膜の磁化容易軸が前記磁界の検出方向と同方向となるように磁気異方性がつけられており、
前記演算部は、前記磁気インピーダンス素子にバイアス磁界を印加するための矩形波状となる交流バイアス周波数の信号の立下り時においてリセット信号を前記フリップフロップ回路に送信し、当該リセット信号が送信されてから最初の前記ハイ出力の継続時間に基づいて、外部磁界を検出する
ことを特徴とする磁界検出センサ。 - 前記バイアスコイルは、磁気インピーダンス素子にバイアス磁界を印加すると共に、前記演算部により検出された外部磁界と逆方向の磁界である負帰還磁界を印加する単一の負帰還バイアスコイルにより構成されている
ことを特徴とする請求項1に記載の磁界検出センサ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013231743A JP6325797B2 (ja) | 2013-11-08 | 2013-11-08 | 磁界検出センサ |
DE112014005099.7T DE112014005099T5 (de) | 2013-11-08 | 2014-10-29 | Magnetfeld-Erfassungssensor |
PCT/JP2014/078820 WO2015068629A1 (ja) | 2013-11-08 | 2014-10-29 | 磁界検出センサ |
US15/144,019 US9791522B2 (en) | 2013-11-08 | 2016-05-02 | Magnetic field detection sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013231743A JP6325797B2 (ja) | 2013-11-08 | 2013-11-08 | 磁界検出センサ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2015092144A JP2015092144A (ja) | 2015-05-14 |
JP2015092144A5 JP2015092144A5 (ja) | 2016-06-16 |
JP6325797B2 true JP6325797B2 (ja) | 2018-05-16 |
Family
ID=53041409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013231743A Active JP6325797B2 (ja) | 2013-11-08 | 2013-11-08 | 磁界検出センサ |
Country Status (4)
Country | Link |
---|---|
US (1) | US9791522B2 (ja) |
JP (1) | JP6325797B2 (ja) |
DE (1) | DE112014005099T5 (ja) |
WO (1) | WO2015068629A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6500273B2 (ja) * | 2015-04-28 | 2019-04-17 | 株式会社大都技研 | 遊技台 |
JP6370768B2 (ja) | 2015-11-26 | 2018-08-08 | 矢崎総業株式会社 | 磁界検出センサ |
CN105676151B (zh) * | 2016-01-18 | 2018-06-22 | 华东师范大学 | 一种负反馈式磁场传感器 |
FR3054323A1 (fr) * | 2016-07-25 | 2018-01-26 | Centre National De La Recherche Scientifique | Capteur de champ magnetique |
JP6870960B2 (ja) | 2016-11-18 | 2021-05-12 | 矢崎総業株式会社 | 磁界検出センサ |
JP2018091643A (ja) | 2016-11-30 | 2018-06-14 | 矢崎総業株式会社 | 磁界検出センサ |
JP6661570B2 (ja) * | 2017-05-11 | 2020-03-11 | 矢崎総業株式会社 | 磁界検出センサ |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3096413B2 (ja) | 1995-11-02 | 2000-10-10 | キヤノン電子株式会社 | 磁気検出素子、磁気センサー、地磁気検出型方位センサー、及び姿勢制御用センサー |
JP4233161B2 (ja) | 1998-12-10 | 2009-03-04 | ミネベア株式会社 | 磁気センサ |
JP2001116814A (ja) * | 1999-10-22 | 2001-04-27 | Canon Electronics Inc | 磁気インピーダンス素子 |
US6653831B2 (en) * | 2001-11-20 | 2003-11-25 | Gentex Corporation | Magnetometer having a dynamically adjustable bias setting and electronic vehicle compass incorporating the same |
JP4735930B2 (ja) * | 2004-08-23 | 2011-07-27 | Necトーキン株式会社 | 磁界検出方法及び装置 |
JP5540180B2 (ja) * | 2007-12-14 | 2014-07-02 | 国立大学法人東北大学 | 磁界検出素子および磁界検出装置 |
JP2014071061A (ja) * | 2012-10-01 | 2014-04-21 | Fujikura Ltd | 信号処理用半導体集積回路、及び磁界検出装置 |
US9261571B2 (en) * | 2013-08-15 | 2016-02-16 | Texas Instruments Incorporated | Fluxgate magnetic sensor readout apparatus |
-
2013
- 2013-11-08 JP JP2013231743A patent/JP6325797B2/ja active Active
-
2014
- 2014-10-29 WO PCT/JP2014/078820 patent/WO2015068629A1/ja active Application Filing
- 2014-10-29 DE DE112014005099.7T patent/DE112014005099T5/de active Pending
-
2016
- 2016-05-02 US US15/144,019 patent/US9791522B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2015092144A (ja) | 2015-05-14 |
US9791522B2 (en) | 2017-10-17 |
WO2015068629A1 (ja) | 2015-05-14 |
DE112014005099T5 (de) | 2016-09-01 |
US20160245879A1 (en) | 2016-08-25 |
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