JP6290117B2 - 接液処理装置および接液処理方法 - Google Patents

接液処理装置および接液処理方法 Download PDF

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JP6290117B2
JP6290117B2 JP2015026284A JP2015026284A JP6290117B2 JP 6290117 B2 JP6290117 B2 JP 6290117B2 JP 2015026284 A JP2015026284 A JP 2015026284A JP 2015026284 A JP2015026284 A JP 2015026284A JP 6290117 B2 JP6290117 B2 JP 6290117B2
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liquid
substrate
nozzle
ethyl lactate
anisotropy
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Japanese (ja)
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JP2016066044A5 (enExample
JP2016066044A (ja
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西部　幸伸
幸伸 西部
磯　明典
明典 磯
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Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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Priority to CN201510097408.XA priority Critical patent/CN104898324B/zh
Priority to TW104107224A priority patent/TWI604896B/zh
Publication of JP2016066044A publication Critical patent/JP2016066044A/ja
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JP2015026284A 2014-03-07 2015-02-13 接液処理装置および接液処理方法 Active JP6290117B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201510097408.XA CN104898324B (zh) 2014-03-07 2015-03-05 接液处理装置、接液处理方法、基板处理装置及基板处理方法
TW104107224A TWI604896B (zh) 2014-03-07 2015-03-06 A wet processing apparatus, a wet processing method, a substrate processing apparatus and a substrate processing method

Applications Claiming Priority (4)

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JP2014044601 2014-03-07
JP2014044601 2014-03-07
JP2014201213 2014-09-30
JP2014201213 2014-09-30

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JP2017173573A Division JP6623198B2 (ja) 2014-03-07 2017-09-08 接液処理装置、接液処理方法、基板処理装置および基板処理方法

Publications (3)

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JP2016066044A JP2016066044A (ja) 2016-04-28
JP2016066044A5 JP2016066044A5 (enExample) 2017-04-20
JP6290117B2 true JP6290117B2 (ja) 2018-03-07

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JP2015026284A Active JP6290117B2 (ja) 2014-03-07 2015-02-13 接液処理装置および接液処理方法
JP2017173573A Active JP6623198B2 (ja) 2014-03-07 2017-09-08 接液処理装置、接液処理方法、基板処理装置および基板処理方法

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JP2017173573A Active JP6623198B2 (ja) 2014-03-07 2017-09-08 接液処理装置、接液処理方法、基板処理装置および基板処理方法

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JP (2) JP6290117B2 (enExample)
TW (1) TWI604896B (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106672627B (zh) * 2017-01-22 2019-05-21 深圳市华星光电技术有限公司 一种传送基板的滚轮

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1144877A (ja) * 1997-07-24 1999-02-16 Nec Kagoshima Ltd 基板洗浄装置
JP2000279900A (ja) * 1999-03-30 2000-10-10 Matsushita Electric Ind Co Ltd 化学処理装置
JP2005157196A (ja) * 2003-11-28 2005-06-16 Optrex Corp 液晶表示素子の基板洗浄方法およびその装置
JP2006255556A (ja) * 2005-03-16 2006-09-28 Sharp Corp 液処理装置および液晶表示装置
JP2007011100A (ja) * 2005-07-01 2007-01-18 Seiko Epson Corp 電気光学装置用基板の洗浄装置、電気光学装置用基板の洗浄方法、及び電気光学装置の製造方法
JP5060835B2 (ja) * 2006-07-26 2012-10-31 芝浦メカトロニクス株式会社 基板の処理装置
KR100854624B1 (ko) * 2007-08-13 2008-08-27 (주) 디바이스이엔지 배향막 인쇄 수지판 세정장치
JP5630808B2 (ja) * 2010-03-26 2014-11-26 住友精密工業株式会社 搬送式基板処理装置における節水型洗浄システム
KR101951507B1 (ko) * 2011-09-15 2019-02-22 닛산 가가쿠 가부시키가이샤 액정 배향막의 제조 방법, 액정 배향막, 및 액정 표시 소자
JP6347917B2 (ja) * 2013-05-27 2018-06-27 株式会社ジャパンディスプレイ 液晶表示装置およびその製造方法

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JP2017211681A (ja) 2017-11-30
TWI604896B (zh) 2017-11-11
JP2016066044A (ja) 2016-04-28
JP6623198B2 (ja) 2019-12-18
TW201607616A (zh) 2016-03-01

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