JP6245559B2 - 窒化物半導体装置およびその製造方法 - Google Patents
窒化物半導体装置およびその製造方法 Download PDFInfo
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- JP6245559B2 JP6245559B2 JP2014540837A JP2014540837A JP6245559B2 JP 6245559 B2 JP6245559 B2 JP 6245559B2 JP 2014540837 A JP2014540837 A JP 2014540837A JP 2014540837 A JP2014540837 A JP 2014540837A JP 6245559 B2 JP6245559 B2 JP 6245559B2
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- nitride semiconductor
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Description
B1項〜B32項の少なくとも1項に記載した特徴に対して、A1項〜A25項の少なくとも1項に記載した特徴を組み合わせてもよい。すなわち、B1項〜B32項の特徴とA1項〜A25項の特徴とを任意に組み合わせた窒化物半導体装置を構成することができる。
本発明の実施形態について詳細に説明してきたが、これらは本発明の技術的内容を明らかにするために用いられた具体例に過ぎず、本発明はこれらの具体例に限定して解釈されるべきではなく、本発明の範囲は添付の請求の範囲によってのみ限定される。
103 電子走行層
104 電子供給層
105 パッシベーション膜
106 ソース電極
107 ドレイン電極
108 ゲート電極
109 リセス
109a 底部
109b 側壁部
110 ゲート絶縁膜
111 熱酸化膜
111a 底部被覆部
111b 側壁被覆部
115 二次元電子ガス
DR 素子領域
1 基板
2 バッファ層
3 電子走行層
4 電子供給層
5 キャップ層
6 ソース電極
7 ドレイン電極
8 ゲート電極
9 パッシベーション膜
10 ゲート絶縁膜
11 二次元電子ガス
12 層間絶縁膜
13 素子分離層
16 ソース配線膜
17 ドレイン配線膜
18 ゲート配線膜
21 AlNバッファ層
22 AlGaNバッファ層
221 第1AlGaN層(高アルミニウム組成)
222 第2AlGaN層(低アルミニウム組成)
Claims (47)
- 窒化物半導体からなる電子走行層と、
前記電子走行層上に形成され、前記電子走行層とは組成の異なる窒化物半導体からなり、表面から前記電子走行層に達するリセスを有する電子供給層と、
前記リセス内で露出する前記電子走行層の表面に形成され、膜中の酸素濃度が、膜厚方向に対して勾配を有している熱酸化膜と、
前記熱酸化膜に接するように前記リセス内に埋め込まれたゲート絶縁膜と、
前記ゲート絶縁膜上に形成され、前記熱酸化膜および前記ゲート絶縁膜を挟んで前記電子走行層に対向するゲート電極と、
前記ゲート電極を挟むように間隔を開けて前記電子供給層上に設けられたソース電極およびドレイン電極と、
を含む窒化物半導体装置。 - 前記熱酸化膜がGaおよびOを含む、請求項1に記載の窒化物半導体装置。
- 前記熱酸化膜中の酸素濃度は、前記ゲート絶縁膜との界面において最大であり、前記電子走行層に向かうに従って小さくなる、請求項1または2に記載の窒化物半導体装置。
- 窒化物半導体からなる電子走行層と、
前記電子走行層上に形成され、前記電子走行層とは組成の異なる窒化物半導体からなり、表面から前記電子走行層に達するリセスを有する電子供給層と、
前記リセス内で露出する前記電子走行層の表面に形成された熱酸化膜と、
前記熱酸化膜に接するように前記リセス内に埋め込まれたゲート絶縁膜と、
前記ゲート絶縁膜上に形成され、前記熱酸化膜および前記ゲート絶縁膜を挟んで前記電子走行層に対向するゲート電極と、
前記ゲート電極を挟むように間隔を開けて前記電子供給層上に設けられたソース電極およびドレイン電極と、
を含み、
前記熱酸化膜中の酸素濃度は、前記ゲート絶縁膜との界面において最大であり、前記電子走行層に向かうに従って小さくなる、窒化物半導体装置。 - 前記熱酸化膜中の最大酸素濃度は、1020cm−3以下である、請求項1〜4のいずれか一項に記載の窒化物半導体装置。
- 前記熱酸化膜の膜厚が前記ゲート絶縁膜の膜厚よりも小さい、請求項1〜5のいずれか一項に記載の窒化物半導体装置。
- 前記ゲート絶縁膜の膜厚が前記熱酸化膜の膜厚のほぼ2倍である、請求項1〜6のいずれか一項に記載の窒化物半導体装置。
- 前記熱酸化膜の膜厚が1nm〜100nmである、請求項1〜7のいずれか一項に記載の窒化物半導体装置。
- 前記熱酸化膜が前記リセス内で露出する前記電子走行層の表面に形成された第1部分と、前記リセス内で露出する前記電子供給層の表面に形成された第2部分とを含み、前記第1部分と前記第2部分との膜厚が異なっている、請求項1〜8のいずれか一項に記載の窒化物半導体装置。
- 窒化物半導体からなる電子走行層と、
前記電子走行層上に形成され、前記電子走行層とは組成の異なる窒化物半導体からなり、表面から前記電子走行層に達するリセスを有する電子供給層と、
前記リセス内で露出する前記電子走行層の表面に形成された熱酸化膜と、
前記熱酸化膜に接するように前記リセス内に埋め込まれたゲート絶縁膜と、
前記ゲート絶縁膜上に形成され、前記熱酸化膜および前記ゲート絶縁膜を挟んで前記電子走行層に対向するゲート電極と、
前記ゲート電極を挟むように間隔を開けて前記電子供給層上に設けられたソース電極およびドレイン電極と、
を含み、
前記熱酸化膜が前記リセス内で露出する前記電子走行層の表面に形成された第1部分と、前記リセス内で露出する前記電子供給層の表面に形成された第2部分とを含み、前記第1部分と前記第2部分との膜厚が異なっている、窒化物半導体装置。 - 前記ゲート絶縁膜の比誘電率が、前記電子供給層の比誘電率よりも高い、請求項1〜10のいずれか一項に記載の窒化物半導体装置。
- 前記ゲート絶縁膜が、ALD法によって形成された絶縁膜である、請求項1〜11のいずれか一項に記載の窒化物半導体装置。
- 前記ゲート絶縁膜が、Al2O3からなる、請求項1〜12のいずれか一項に記載の窒化物半導体装置。
- 前記ゲート絶縁膜は、前記リセスの最底部において、膜厚のほぼ半分が前記電子走行層および前記電子供給層の界面よりも前記電子走行層側に位置している、請求項1〜13のいずれか一項に記載の窒化物半導体装置。
- 前記ゲート絶縁膜の膜厚が、5nm〜50nmである、請求項1〜14のいずれか一項に記載の窒化物半導体装置。
- 前記電子走行層の膜厚が、50nm〜2000nmである、請求項1〜15のいずれか一項に記載の窒化物半導体装置。
- 前記電子走行層がGaNからなり、前記電子供給層がAlGaNからなる、請求項1〜16のいずれか一項に記載の窒化物半導体装置。
- 基板と、
前記基板上に形成され、窒化物半導体からなる電子走行層と、
前記電子走行層上に形成され、前記電子走行層とは組成の異なる窒化物半導体からなる電子供給層と、
前記基板と前記電子走行層との間に介在され、アルミニウム組成が相対的に高い高アルミニウム組成領域と、前記高アルミニウム組成領域よりもアルミニウム組成が低く、かつ前記高アルミニウム組成領域よりも前記電子走行層に近い領域に配置された低アルミニウム組成領域とを有するAlGaN層バッファ層と、
前記電子走行層の厚さ方向に対して傾斜した方向からのイオン注入によって結晶欠陥を引き起こして高抵抗化した高抵抗層からなり、前記電子供給層および前記電子走行層を貫通して前記AlGaNバッファ層に達する素子分離層と、を含む、窒化物半導体装置。 - 前記AlGaNバッファ層は、前記基板から前記電子走行層に向かう層厚方向に関して、前記電子走行層に近づくほどアルミニウム組成が小さくなるようにアルミニウム組成を調整したAlGaN層である、請求項18に記載の窒化物半導体装置。
- 前記AlGaNバッファ層が、第1アルミニウム組成の第1アルミニウム組成AlGaN層と、前記第1アルミニウム組成AlGaN層よりも前記電子走行層側に積層され、前記第1アルミニウム組成よりも小さな第2アルミニウム組成の第2アルミニウム組成AlGaN層とを含み、前記高アルミニウム組成領域が前記第1アルミニウム組成AlGaN層を含み、前記低アルミニウム組成領域が前記第2アルミニウム組成AlGaN層を含む、請求項18または19に記載の窒化物半導体装置。
- 前記AlGaNバッファ層と前記基板との間に介在されたAlNバッファ層をさらに含む、請求項18〜20のいずれか一項に記載の窒化物半導体装置。
- 前記素子分離層が、素子領域を取り囲むように形成されている、請求項18〜21のいずれか一項に記載の窒化物半導体装置。
- 前記素子分離層の上に配置された配線をさらに含む、請求項18〜22のいずれか一項に記載の窒化物半導体装置。
- 前記素子分離層が、複数の素子領域を分離するように形成されており、
前記複数の素子領域にそれぞれ形成された複数の素子の間を接続する素子間配線をさらに含む、請求項18〜23のいずれか一項に記載の窒化物半導体装置。 - 前記複数の素子領域にそれぞれ形成された複数の素子が異なる機能を有する2以上の素子を含む、請求項24に記載の窒化物半導体装置。
- 前記複数の素子領域にそれぞれ形成された複数の素子が共通の機能を有する2つ以上の素子を含む、請求項24または25に記載の窒化物半導体装置。
- 前記素子間配線によって接続された複数の素子の素子領域を取り囲むように前記素子分離層が形成されている、請求項24〜26のいずれか一項に記載の窒化物半導体装置。
- 前記素子分離層が、質量数が10より小さく2より大きい元素を材料とするイオンの注入によって形成された高抵抗層である、請求項18〜27のいずれか一項に記載の窒化物半導体装置。
- 前記素子分離層が、ヘリウムイオンの注入によって形成された高抵抗層である、請求項18〜27のいずれか一項に記載の窒化物半導体装置。
- 前記素子分離層が、複数の加速エネルギーを用いたイオン注入によって形成された高抵抗層である、請求項18〜29のいずれか一項に記載の窒化物半導体装置。
- 前記イオン注入方向の前記電子走行層の厚さ方向に対する傾斜角が5〜10度である、請求項18〜30のいずれか一項に記載の窒化物半導体装置。
- 前記電子走行層がGaNからなり、前記電子供給層がAlGaNからなる、請求項18〜31のいずれか一項に記載の窒化物半導体装置。
- 前記電子走行層が400nm以上の厚さのGaN層である、請求項18〜32のいずれか一項に記載の窒化物半導体装置。
- 前記電子供給層上に間隔を開けて配置されたソース電極およびドレイン電極と、
前記ソース電極および前記ドレイン電極の間において前記電子走行層に対向するように配置されたゲート電極と、
をさらに含む、請求項18〜33のいずれか一項に記載の窒化物半導体装置。 - 前記ゲート電極が、前記素子分離層とともに、前記ソース電極を取り囲むように形成されている、請求項34に記載の窒化物半導体装置。
- 前記ソース電極、前記ドレイン電極および前記ゲート電極を覆う層間絶縁膜と、
前記層間絶縁膜を貫通するソースコンタクト孔を介して前記ソース電極に接続され、前記層間絶縁膜上に配置されたソース配線膜と、
前記層間絶縁膜を貫通するドレインコンタクト孔を介して前記ドレイン電極に接続され、前記層間絶縁膜上に配置されたドレイン配線膜と、をさらに含み、
前記ソース配線膜と前記ドレイン配線膜とが、前記層間絶縁膜上で櫛歯状に噛み合うパターンに形成されている、請求項34または35に記載の窒化物半導体装置。 - 前記配線が、前記ゲート電極に接続されたゲート配線を含む、請求項23に係る、請求項34〜36のいずれか一項に記載の窒化物半導体装置。
- 基板上に、アルミニウム組成が基板に近い領域において相対的に高く、基板から遠い領域において相対的に低くなるようにAlGaN結晶をエピタキシャル成長させてAlGaNバッファ層を形成する工程と、
前記AlGaNバッファ層上に、窒化物半導体をエピタキシャル成長させて電子走行層を形成する工程と、
前記電子走行層上に、前記電子走行層とは異なる組成の窒化物半導体層をエピタキシャル成長させて電子供給層を形成する工程と、
前記電子供給層、前記電子走行層および前記AlGaNバッファ層に前記基板の主面に対して傾斜した方向からイオン注入して結晶構造を破壊することにより、前記電子供給層および前記電子走行層を貫通して前記AlGaNバッファ層に到達する高抵抗の素子分離層を形成する工程と、
を含む、窒化物半導体装置の製造方法。 - 前記AlGaNバッファ層を形成する工程が、第1アルミニウム組成の第1アルミニウム組成AlGaN層を形成する工程と、前記第1アルミニウム組成AlGaN層よりも上に前記第1アルミニウム組成よりも小さな第2アルミニウム組成の第2アルミニウム組成AlGaN層を形成する工程とを含む、請求項38に記載の窒化物半導体装置の製造方法。
- 前記AlGaNバッファ層を形成する工程の前に、前記基板上にAlNバッファ層を形成する工程をさらに含み、前記AlNバッファ層の上に前記AlGaNバッファ層が形成される、請求項38または39に記載の窒化物半導体装置の製造方法。
- 前記素子分離層が、素子領域を取り囲むように形成される、請求項38〜40のいずれか一項に記載の窒化物半導体装置の製造方法。
- 前記素子分離層が、複数の素子領域を分離するように形成され、
前記複数の素子領域にそれぞれ形成された素子間を接続する素子間配線を形成する工程をさらに含む、請求項38〜41のいずれか一項に記載の窒化物半導体装置の製造方法。 - 前記イオン注入を、質量数が10より小さく2より大きい元素を材料とするイオンを用いて行う、請求項38〜42のいずれか一項に記載の窒化物半導体装置の製造方法。
- 前記イオン注入を、ヘリウムイオンを用いて行う、請求項38〜42のいずれか一項に記載の窒化物半導体装置の製造方法。
- 前記イオン注入を、複数の加速エネルギーを用いて行う、請求項38〜44のいずれか一項に記載の窒化物半導体装置の製造方法。
- 前記イオン注入を、前記基板の主面の法線方向に対して5〜10度傾斜した方向から行う、請求項38〜45のいずれか一項に記載の窒化物半導体装置の製造方法。
- 前記電子走行層を形成する工程が、厚さ400nm以上のGaN層をエピタキシャル成長させる工程を含む、請求項38〜46のいずれか一項に記載の窒化物半導体装置の製造方法。
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