JP6212720B2 - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP6212720B2 JP6212720B2 JP2015537550A JP2015537550A JP6212720B2 JP 6212720 B2 JP6212720 B2 JP 6212720B2 JP 2015537550 A JP2015537550 A JP 2015537550A JP 2015537550 A JP2015537550 A JP 2015537550A JP 6212720 B2 JP6212720 B2 JP 6212720B2
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Description
以下、第1の実施形態に係る半導体装置ついて、図1を参照しながら説明する。
以下、第1の実施形態に係る半導体装置の製造方法について、図2A〜図2Hを参照しながら説明する。
以下、第2の実施形態に係る半導体装置ついて、図3を参照しながら説明する。
以下、第2の実施形態に係る半導体装置の製造方法について、図4A〜図4Fを参照しながら説明する。なお、第1の実施形態に係る製造方法と同一の工程については、簡略化して説明する。
102,202 第2基板
111,211,311 第1基板本体
112,212,313 第1配線層
113,213 第1表面層
115,125,312,322 トランジスタ
121,221,321 第2基板本体
122,323 第2配線層
123,223 第2表面層
131,231 第1表面膜
132,232 第2表面膜
133,234 第1電極
134 第1層間膜
135 第1導電膜
136,146 コンタクトプラグ
137,237,302a 第1シールリング
141,241 第3表面膜
142,242 第4表面膜
143,244 第2電極
144 第2層間膜
145 第2導電膜
147,247,302b 第2シールリング
150,250,302 シールリング
151 保護膜
152,262 電極パッド
153,263 貫通電極
233 第5表面膜
243 第6表面膜
251,252 開口部
253 絶縁膜
Claims (13)
- 第1基板本体を有し、前記第1基板本体の第1主面上に第1素子が形成された第1基板及び第2基板本体を有し、前記第2基板本体の第2主面上に第2素子が形成された第2基板を備え、前記第1基板と前記第2基板が、前記第1主面と前記第2主面を互いに対向させて接合された半導体装置であって、
前記第1基板は、前記第1主面上の最上層として設けられた絶縁膜である第1表面膜と、前記第1表面膜の第1開口部に配置された第1電極と、前記第1表面膜の第2開口部に配置された絶縁膜である第2表面膜と、前記第2表面膜の下に設けられた第1シールリングとを有し、
前記第2基板は、前記第2主面上の最上層として設けられた絶縁膜である第3表面膜と、前記第3表面膜の第3開口部に配置された第2電極と、前記第3表面膜の第4開口部に配置された絶縁膜である第4表面膜と、前記第4表面膜の下に設けられた第2シールリングとを有し、
前記第1電極と前記第2電極とは、互いに対向するように配置されて直接接合し、
前記第1表面膜と前記第3表面膜とは、互いに対向するように配置されて直接接合し、
前記第2表面膜と前記第4表面膜とは、互いに対向するように配置されて直接接合しており、
前記第2表面膜の底面は、前記第1シールリングと直接に接続し、
前記第4表面膜の底面は、前記第2シールリングと直接に接続しており、
前記第1シールリング、第2表面膜、第4表面膜及び第2シールリングによって構成されるシールリングは、前記第1基板及び第2基板の間で連続している半導体装置。 - 前記第2表面膜及び前記第4表面膜は、前記第1表面膜及び前記第3表面膜と比べてヤング率が高い請求項1に記載の半導体装置。
- 前記第2表面膜及び前記第4表面膜は、前記第1表面膜及び前記第3表面膜と比べて耐透水性が高い請求項1に記載の半導体装置。
- 前記第1シールリング及び前記第2シールリングは、金属材料から構成されている請求項1に記載の半導体装置。
- 前記第1シールリング及び前記第2シールリングは、絶縁性材料から構成されている請求項1に記載の半導体装置。
- 前記第2表面膜及び前記第4表面膜のうちの少なくとも一方は、窒化シリコン又は炭窒化シリコンから構成されている請求項1に記載の半導体装置。
- 前記第1表面膜及び前記第3表面膜は酸化シリコンから構成され、前記第2表面膜及び前記第4表面膜は窒化シリコンから構成されている請求項1に記載の半導体装置。
- 前記第1電極及び前記第2電極のうちの少なくとも一方は、銅、アルミニウム、ニッケル又はタングステンを含む金属材料から構成されている請求項1に記載の半導体装置。
- 前記第1開口部及び前記第3開口部の短辺方向の開口幅は、0.1μm以上且つ1μm以下であり、
前記第2開口部及び前記第4開口部の短辺方向の開口幅は、1μm以上且つ10μm以下である請求項1に記載の半導体装置。 - 前記第1電極の側面と前記第1表面膜の側面との間に、前記第2表面膜と同一の材料からなる第5表面膜が形成され、
前記第2電極の側面と前記第3表面膜の側面との間に、前記第4表面膜と同一の材料からなる第6表面膜が形成されている請求項1に記載の半導体装置。 - 平面視において、
前記第1開口部の短辺方向の開口幅は、前記第2開口部の短辺方向の開口幅よりも大きく、
前記第3開口部の短辺方向の開口幅は、前記第4開口部の短辺方向の開口幅よりも大きい請求項10に記載の半導体装置。 - 第1基板本体を有し、前記第1基板本体の第1主面上に第1素子が形成された第1基板及び第2基板本体を有し、前記第2基板本体の第2主面上に第2素子が形成された第2基板を備え、前記第1基板と前記第2基板が、前記第1主面と前記第2主面を互いに対向させて接合された半導体装置の製造方法であって、
前記第1主面上に第1シールリングを含む第1配線層を形成し、且つ、前記第2主面上に第2シールリングを含む第2配線層を形成する工程(a)と、
前記第1主面上の最上層として絶縁膜である第1表面膜を形成し、且つ、前記第2主面上の最上層として絶縁膜である第2表面膜を形成する工程(b)と、
前記第1表面膜における前記第1シールリングの上方に第1開口部を設け、前記第1開口部に前記第1シールリングと直接に接続される絶縁膜である第3表面膜を形成し、且つ、前記第2表面膜における前記第2シールリングの上方に第2開口部を設け、前記第2開口部に前記第2シールリングと直接に接続される絶縁膜である第4表面膜を形成する工程(c)と、
前記第1表面膜の所定の領域に第3開口部を設け、前記第3開口部に第1導電膜を配置して第1電極を形成し、且つ、前記第2表面膜の所定の領域に第4開口部を設け、前記第4開口部に第2導電膜を配置して第2電極を形成する工程(d)と、
前記工程(c)及び工程(d)よりも後に、前記第1表面膜と前記第2表面膜とが対向し、前記第3表面膜と前記第4表面膜とが対向し、前記第1電極と前記第2電極とが対向するように、前記第1基板と前記第2基板とを接合する工程(e)とを備え、
前記工程(e)において、前記第1基板において、前記第1表面膜、前記第3表面膜及び前記第1電極の各表面が面一となるように平坦化し、且つ、前記第2基板において、前記第2表面膜、前記第4表面膜及び前記第2電極の各表面が面一となるように平坦化し、その後、前記第1主面と前記第2主面とを対向させて前記第1基板と前記第2基板を直接接合する半導体装置の製造方法。 - 第1基板本体を有し、前記第1基板本体の第1主面上に第1素子が形成された第1基板及び第2基板本体を有し、前記第2基板本体の第2主面上に第2素子が形成された第2基板を備え、前記第1基板と前記第2基板が、前記第1主面と前記第2主面を互いに対向させて接合された半導体装置の製造方法であって、
前記第1主面上に第1シールリングを含む第1配線層を形成し、且つ、前記第2主面上に第2シールリングを含む第2配線層を形成する工程(a)と、
前記第1主面上の最上層として絶縁膜である第1表面膜を形成し、且つ、前記第2主面上の最上層として絶縁膜である第2表面膜を形成する工程(b)と、
前記第1表面膜における前記第1シールリングの上方に第1開口部を設けると共に前記第1表面膜の所定の領域に、平面視において短辺方向の開口幅が前記第1開口部よりも大きい第2開口部を設け、且つ、前記第2表面膜における前記第2シールリングの上方に第3開口部を設けると共に前記第2表面膜の所定の領域に、平面視において短辺方向の開口幅が前記第3開口部よりも大きい第4開口部を設ける工程(c)と、
前記工程(c)よりも後に、前記第1表面膜の上に第1絶縁膜を前記第1開口部に形成すると共に前記第2開口部の底面上から側面上に沿うように形成し、前記第1絶縁膜をエッチバックすることにより、前記第1開口部に配置された第3表面膜と前記第2開口部の壁面上にのみ配置された第4表面膜とを形成し、且つ、前記第2表面膜の上に第2絶縁膜を、前記第3開口部に形成すると共に前記第4開口部の底面上から側面上に沿うように形成し、前記第2絶縁膜をエッチバックすることにより、前記第3開口部に配置された第5表面膜と前記第4開口部の側面上にのみ配置された第6表面膜とを形成する工程(d)と、
前記工程(d)よりも後に、前記第1表面膜の上に第1導電膜を配置して、前記第2開口部に第1電極を形成し、且つ、前記第2表面膜上に第2導電膜を配置して、前記第4開口部に第2電極を形成する工程(e)と、
前記工程(e)よりも後に、前記第1表面膜と前記第2表面膜とが対向し、前記第3表面膜と前記第5表面膜とが対向し、前記第4表面膜と前記第6表面膜とが対向し、前記第1電極と前記第2電極とが対向するように、前記第1基板と前記第2基板とを接合する工程(f)とを備え、
前記工程(f)において、前記第1基板において、前記第1表面膜、前記第3表面膜、前記第4表面膜及び前記第1電極の各表面が面一となるように平坦化し、前記第2基板において、前記第2表面膜、前記第5表面膜、前記第6表面膜及び前記第2電極の各表面が面一となるように平坦化し、その後、前記第1主面と前記第2主面とを対向させて前記第1基板と前記第2基板を直接接合する半導体装置の製造方法。
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