JP6190692B2 - 産業用ロボット - Google Patents

産業用ロボット Download PDF

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Publication number
JP6190692B2
JP6190692B2 JP2013219102A JP2013219102A JP6190692B2 JP 6190692 B2 JP6190692 B2 JP 6190692B2 JP 2013219102 A JP2013219102 A JP 2013219102A JP 2013219102 A JP2013219102 A JP 2013219102A JP 6190692 B2 JP6190692 B2 JP 6190692B2
Authority
JP
Japan
Prior art keywords
arm
hand
screw
support member
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013219102A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015080828A5 (enExample
JP2015080828A (ja
Inventor
矢澤　隆之
隆之 矢澤
荒川　洋
洋 荒川
真志 藤原
真志 藤原
陽介 高瀬
陽介 高瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Instruments Corp
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Priority to JP2013219102A priority Critical patent/JP6190692B2/ja
Priority to TW103120380A priority patent/TW201515787A/zh
Priority to KR1020140079469A priority patent/KR101642573B1/ko
Priority to CN201410366154.2A priority patent/CN104552301B/zh
Publication of JP2015080828A publication Critical patent/JP2015080828A/ja
Publication of JP2015080828A5 publication Critical patent/JP2015080828A5/ja
Application granted granted Critical
Publication of JP6190692B2 publication Critical patent/JP6190692B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
JP2013219102A 2013-10-22 2013-10-22 産業用ロボット Active JP6190692B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013219102A JP6190692B2 (ja) 2013-10-22 2013-10-22 産業用ロボット
TW103120380A TW201515787A (zh) 2013-10-22 2014-06-12 產業用機器人
KR1020140079469A KR101642573B1 (ko) 2013-10-22 2014-06-27 산업용 로봇
CN201410366154.2A CN104552301B (zh) 2013-10-22 2014-07-29 工业用机器人

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013219102A JP6190692B2 (ja) 2013-10-22 2013-10-22 産業用ロボット

Publications (3)

Publication Number Publication Date
JP2015080828A JP2015080828A (ja) 2015-04-27
JP2015080828A5 JP2015080828A5 (enExample) 2016-10-27
JP6190692B2 true JP6190692B2 (ja) 2017-08-30

Family

ID=53011723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013219102A Active JP6190692B2 (ja) 2013-10-22 2013-10-22 産業用ロボット

Country Status (4)

Country Link
JP (1) JP6190692B2 (enExample)
KR (1) KR101642573B1 (enExample)
CN (1) CN104552301B (enExample)
TW (1) TW201515787A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6616606B2 (ja) * 2015-07-13 2019-12-04 日本電産サンキョー株式会社 産業用ロボット
JP6869137B2 (ja) 2017-07-28 2021-05-12 日本電産サンキョー株式会社 産業用ロボット
JP6902422B2 (ja) 2017-07-28 2021-07-14 日本電産サンキョー株式会社 産業用ロボット
JP6869136B2 (ja) 2017-07-28 2021-05-12 日本電産サンキョー株式会社 産業用ロボット

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04323115A (ja) * 1991-04-19 1992-11-12 Hitachi Electron Eng Co Ltd ワーク搬送機構
JP3484067B2 (ja) * 1998-02-20 2004-01-06 平田機工株式会社 ロボット装置
JP2000298186A (ja) * 1999-04-15 2000-10-24 Hitachi Denshi Ltd 位置決めステージ
US7066707B1 (en) * 2001-08-31 2006-06-27 Asyst Technologies, Inc. Wafer engine
JP2004106105A (ja) * 2002-09-18 2004-04-08 Seiko Instruments Inc 搬送ロボット
KR100479494B1 (ko) * 2002-09-18 2005-03-30 삼성전자주식회사 기판 반송 로봇
CN1895974A (zh) * 2005-07-15 2007-01-17 日本电产三协株式会社 基板搬出搬入方法及基板搬出搬入系统
JP4694436B2 (ja) * 2006-07-28 2011-06-08 株式会社ダイヘン 搬送ロボット
JP2008074550A (ja) * 2006-09-21 2008-04-03 Murata Mach Ltd スカラーアーム
CN101627467B (zh) * 2007-03-02 2011-04-27 株式会社大亨 搬送装置
JP4955447B2 (ja) * 2007-04-26 2012-06-20 株式会社ダイヘン 搬送装置
JP5006409B2 (ja) * 2007-12-05 2012-08-22 平田機工株式会社 基板搬送装置及び基板搬送装置の制御方法
JP5083339B2 (ja) * 2010-02-04 2012-11-28 東京エレクトロン株式会社 基板搬送装置及び基板搬送方法並びに記憶媒体
KR101291811B1 (ko) * 2011-06-08 2013-07-31 주식회사 나온테크 하이브리드 진공 로봇 이송장치
JP2013184237A (ja) * 2012-03-06 2013-09-19 Sumitomo Heavy Ind Ltd 平面研削盤

Also Published As

Publication number Publication date
TW201515787A (zh) 2015-05-01
KR101642573B1 (ko) 2016-07-25
CN104552301B (zh) 2017-04-12
TWI562873B (enExample) 2016-12-21
KR20150046715A (ko) 2015-04-30
JP2015080828A (ja) 2015-04-27
CN104552301A (zh) 2015-04-29

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