CN104552301B - 工业用机器人 - Google Patents

工业用机器人 Download PDF

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Publication number
CN104552301B
CN104552301B CN201410366154.2A CN201410366154A CN104552301B CN 104552301 B CN104552301 B CN 104552301B CN 201410366154 A CN201410366154 A CN 201410366154A CN 104552301 B CN104552301 B CN 104552301B
Authority
CN
China
Prior art keywords
hand
arm
supporting member
motor
drive mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201410366154.2A
Other languages
English (en)
Chinese (zh)
Other versions
CN104552301A (zh
Inventor
矢泽隆之
荒川洋
藤原真志
高濑阳介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Instruments Corp
Original Assignee
Sankyo Seiki Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sankyo Seiki Manufacturing Co Ltd filed Critical Sankyo Seiki Manufacturing Co Ltd
Publication of CN104552301A publication Critical patent/CN104552301A/zh
Application granted granted Critical
Publication of CN104552301B publication Critical patent/CN104552301B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
CN201410366154.2A 2013-10-22 2014-07-29 工业用机器人 Active CN104552301B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013-219102 2013-10-22
JP2013219102A JP6190692B2 (ja) 2013-10-22 2013-10-22 産業用ロボット

Publications (2)

Publication Number Publication Date
CN104552301A CN104552301A (zh) 2015-04-29
CN104552301B true CN104552301B (zh) 2017-04-12

Family

ID=53011723

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410366154.2A Active CN104552301B (zh) 2013-10-22 2014-07-29 工业用机器人

Country Status (4)

Country Link
JP (1) JP6190692B2 (enExample)
KR (1) KR101642573B1 (enExample)
CN (1) CN104552301B (enExample)
TW (1) TW201515787A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6616606B2 (ja) * 2015-07-13 2019-12-04 日本電産サンキョー株式会社 産業用ロボット
JP6902422B2 (ja) 2017-07-28 2021-07-14 日本電産サンキョー株式会社 産業用ロボット
JP6869137B2 (ja) 2017-07-28 2021-05-12 日本電産サンキョー株式会社 産業用ロボット
JP6869136B2 (ja) 2017-07-28 2021-05-12 日本電産サンキョー株式会社 産業用ロボット

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04323115A (ja) * 1991-04-19 1992-11-12 Hitachi Electron Eng Co Ltd ワーク搬送機構
JP3484067B2 (ja) * 1998-02-20 2004-01-06 平田機工株式会社 ロボット装置
JP2000298186A (ja) * 1999-04-15 2000-10-24 Hitachi Denshi Ltd 位置決めステージ
US7066707B1 (en) * 2001-08-31 2006-06-27 Asyst Technologies, Inc. Wafer engine
KR100479494B1 (ko) * 2002-09-18 2005-03-30 삼성전자주식회사 기판 반송 로봇
JP2004106105A (ja) * 2002-09-18 2004-04-08 Seiko Instruments Inc 搬送ロボット
CN1895974A (zh) * 2005-07-15 2007-01-17 日本电产三协株式会社 基板搬出搬入方法及基板搬出搬入系统
JP4694436B2 (ja) * 2006-07-28 2011-06-08 株式会社ダイヘン 搬送ロボット
JP2008074550A (ja) * 2006-09-21 2008-04-03 Murata Mach Ltd スカラーアーム
US8203101B2 (en) * 2007-03-02 2012-06-19 Daihen Corporation Conveying device
JP4955447B2 (ja) * 2007-04-26 2012-06-20 株式会社ダイヘン 搬送装置
WO2009072199A1 (ja) * 2007-12-05 2009-06-11 Hirata Corporation 基板搬送装置及び基板搬送装置の制御方法
JP5083339B2 (ja) * 2010-02-04 2012-11-28 東京エレクトロン株式会社 基板搬送装置及び基板搬送方法並びに記憶媒体
KR101291811B1 (ko) * 2011-06-08 2013-07-31 주식회사 나온테크 하이브리드 진공 로봇 이송장치
JP2013184237A (ja) * 2012-03-06 2013-09-19 Sumitomo Heavy Ind Ltd 平面研削盤

Also Published As

Publication number Publication date
JP2015080828A (ja) 2015-04-27
CN104552301A (zh) 2015-04-29
KR101642573B1 (ko) 2016-07-25
TW201515787A (zh) 2015-05-01
TWI562873B (enExample) 2016-12-21
KR20150046715A (ko) 2015-04-30
JP6190692B2 (ja) 2017-08-30

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