JP2015080828A5 - - Google Patents

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Publication number
JP2015080828A5
JP2015080828A5 JP2013219102A JP2013219102A JP2015080828A5 JP 2015080828 A5 JP2015080828 A5 JP 2015080828A5 JP 2013219102 A JP2013219102 A JP 2013219102A JP 2013219102 A JP2013219102 A JP 2013219102A JP 2015080828 A5 JP2015080828 A5 JP 2015080828A5
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JP
Japan
Prior art keywords
screw
arm
male screw
male
female
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013219102A
Other languages
English (en)
Japanese (ja)
Other versions
JP6190692B2 (ja
JP2015080828A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2013219102A priority Critical patent/JP6190692B2/ja
Priority claimed from JP2013219102A external-priority patent/JP6190692B2/ja
Priority to TW103120380A priority patent/TW201515787A/zh
Priority to KR1020140079469A priority patent/KR101642573B1/ko
Priority to CN201410366154.2A priority patent/CN104552301B/zh
Publication of JP2015080828A publication Critical patent/JP2015080828A/ja
Publication of JP2015080828A5 publication Critical patent/JP2015080828A5/ja
Application granted granted Critical
Publication of JP6190692B2 publication Critical patent/JP6190692B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013219102A 2013-10-22 2013-10-22 産業用ロボット Active JP6190692B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013219102A JP6190692B2 (ja) 2013-10-22 2013-10-22 産業用ロボット
TW103120380A TW201515787A (zh) 2013-10-22 2014-06-12 產業用機器人
KR1020140079469A KR101642573B1 (ko) 2013-10-22 2014-06-27 산업용 로봇
CN201410366154.2A CN104552301B (zh) 2013-10-22 2014-07-29 工业用机器人

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013219102A JP6190692B2 (ja) 2013-10-22 2013-10-22 産業用ロボット

Publications (3)

Publication Number Publication Date
JP2015080828A JP2015080828A (ja) 2015-04-27
JP2015080828A5 true JP2015080828A5 (enExample) 2016-10-27
JP6190692B2 JP6190692B2 (ja) 2017-08-30

Family

ID=53011723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013219102A Active JP6190692B2 (ja) 2013-10-22 2013-10-22 産業用ロボット

Country Status (4)

Country Link
JP (1) JP6190692B2 (enExample)
KR (1) KR101642573B1 (enExample)
CN (1) CN104552301B (enExample)
TW (1) TW201515787A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6616606B2 (ja) * 2015-07-13 2019-12-04 日本電産サンキョー株式会社 産業用ロボット
JP6869137B2 (ja) 2017-07-28 2021-05-12 日本電産サンキョー株式会社 産業用ロボット
JP6902422B2 (ja) 2017-07-28 2021-07-14 日本電産サンキョー株式会社 産業用ロボット
JP6869136B2 (ja) 2017-07-28 2021-05-12 日本電産サンキョー株式会社 産業用ロボット

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04323115A (ja) * 1991-04-19 1992-11-12 Hitachi Electron Eng Co Ltd ワーク搬送機構
JP3484067B2 (ja) * 1998-02-20 2004-01-06 平田機工株式会社 ロボット装置
JP2000298186A (ja) * 1999-04-15 2000-10-24 Hitachi Denshi Ltd 位置決めステージ
US7066707B1 (en) * 2001-08-31 2006-06-27 Asyst Technologies, Inc. Wafer engine
JP2004106105A (ja) * 2002-09-18 2004-04-08 Seiko Instruments Inc 搬送ロボット
KR100479494B1 (ko) * 2002-09-18 2005-03-30 삼성전자주식회사 기판 반송 로봇
CN1895974A (zh) * 2005-07-15 2007-01-17 日本电产三协株式会社 基板搬出搬入方法及基板搬出搬入系统
JP4694436B2 (ja) * 2006-07-28 2011-06-08 株式会社ダイヘン 搬送ロボット
JP2008074550A (ja) * 2006-09-21 2008-04-03 Murata Mach Ltd スカラーアーム
CN101627467B (zh) * 2007-03-02 2011-04-27 株式会社大亨 搬送装置
JP4955447B2 (ja) * 2007-04-26 2012-06-20 株式会社ダイヘン 搬送装置
JP5006409B2 (ja) * 2007-12-05 2012-08-22 平田機工株式会社 基板搬送装置及び基板搬送装置の制御方法
JP5083339B2 (ja) * 2010-02-04 2012-11-28 東京エレクトロン株式会社 基板搬送装置及び基板搬送方法並びに記憶媒体
KR101291811B1 (ko) * 2011-06-08 2013-07-31 주식회사 나온테크 하이브리드 진공 로봇 이송장치
JP2013184237A (ja) * 2012-03-06 2013-09-19 Sumitomo Heavy Ind Ltd 平面研削盤

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