JP6181594B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6181594B2 JP6181594B2 JP2014088306A JP2014088306A JP6181594B2 JP 6181594 B2 JP6181594 B2 JP 6181594B2 JP 2014088306 A JP2014088306 A JP 2014088306A JP 2014088306 A JP2014088306 A JP 2014088306A JP 6181594 B2 JP6181594 B2 JP 6181594B2
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- semiconductor device
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- semiconductor layer
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- 239000004065 semiconductor Substances 0.000 title claims description 85
- 230000015556 catabolic process Effects 0.000 claims description 41
- 239000004020 conductor Substances 0.000 claims description 10
- 230000005684 electric field Effects 0.000 description 18
- 238000000034 method Methods 0.000 description 7
- 239000002019 doping agent Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 210000000746 body region Anatomy 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- Electrodes Of Semiconductors (AREA)
Description
Claims (5)
- 半導体層と、
前記半導体層の第1主面上に設けられている第1電極と、
前記半導体層の前記第1主面とは反対側の第2主面上に設けられている第2電極と、を備え、
前記半導体層は、
電流の流れる活性部と、
平面視したときに、前記活性部の周囲を囲むように前記第1主面側に設けられている複数の終端耐圧構造が形成されている終端部と、を有し、
前記終端部は、複数の直線範囲と、前記直線範囲と前記直線範囲の間に配置されているコーナー範囲と、を含み、
最内周の前記終端耐圧構造は、前記直線範囲に設けられている直線部分のみで構成される、半導体装置。 - 全ての前記終端耐圧構造の各々は、前記直線範囲に設けられている直線部分のみで構成される、請求項1に記載の半導体装置。
- 前記終端部は、前記コーナー範囲の前記第1主面側に設けられているリサーフ領域をさらに含む、請求項2に記載の半導体装置。
- 前記終端耐圧構造は、ガードリングである、請求項1〜3のいずれか一項に記載の半導体装置。
- 前記終端耐圧構造は、前記第1主面から深さ方向に沿って伸びるトレンチ内に設けられており、導体部とその導体部を被覆する絶縁部を有する、請求項1〜3のいずれか一項に記載の半導体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014088306A JP6181594B2 (ja) | 2014-04-22 | 2014-04-22 | 半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014088306A JP6181594B2 (ja) | 2014-04-22 | 2014-04-22 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015207702A JP2015207702A (ja) | 2015-11-19 |
JP6181594B2 true JP6181594B2 (ja) | 2017-08-16 |
Family
ID=54604279
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014088306A Active JP6181594B2 (ja) | 2014-04-22 | 2014-04-22 | 半導体装置 |
Country Status (1)
Country | Link |
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JP (1) | JP6181594B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019179897A (ja) * | 2018-03-30 | 2019-10-17 | サンケン電気株式会社 | 半導体装置 |
JP7000240B2 (ja) * | 2018-04-18 | 2022-01-19 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0677237A (ja) * | 1992-05-27 | 1994-03-18 | Nec Corp | プレーナ型ダイオードの製造方法 |
JPH09283754A (ja) * | 1996-04-16 | 1997-10-31 | Toshiba Corp | 高耐圧半導体装置 |
JP5129943B2 (ja) * | 2006-10-19 | 2013-01-30 | 株式会社豊田中央研究所 | 半導体装置 |
US8564105B2 (en) * | 2010-02-16 | 2013-10-22 | Sansha Electric Manufacturing Co., Ltd. | Pin diode |
JP6012172B2 (ja) * | 2011-12-13 | 2016-10-25 | 新電元工業株式会社 | 半導体装置 |
JP5783893B2 (ja) * | 2011-12-16 | 2015-09-24 | 三菱電機株式会社 | 半導体装置 |
JP2013179251A (ja) * | 2012-02-09 | 2013-09-09 | Renesas Electronics Corp | 半導体装置 |
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2014
- 2014-04-22 JP JP2014088306A patent/JP6181594B2/ja active Active
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JP2015207702A (ja) | 2015-11-19 |
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