JP6129784B2 - Ｉｉｉ族窒化物基板の製造方法 - Google Patents

Ｉｉｉ族窒化物基板の製造方法 Download PDF

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Publication number
JP6129784B2
JP6129784B2 JP2014108255A JP2014108255A JP6129784B2 JP 6129784 B2 JP6129784 B2 JP 6129784B2 JP 2014108255 A JP2014108255 A JP 2014108255A JP 2014108255 A JP2014108255 A JP 2014108255A JP 6129784 B2 JP6129784 B2 JP 6129784B2
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Japan
Prior art keywords
seed crystal
substrate
adhesive
group iii
iii nitride
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JP2014108255A
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Japanese (ja)
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JP2015224143A (ja
JP2015224143A5 (OSRAM
Inventor
丈洋 吉田
丈洋 吉田
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Sumitomo Chemical Co Ltd
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Sumitomo Chemical Co Ltd
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Priority to JP2014108255A priority Critical patent/JP6129784B2/ja
Priority to US15/313,764 priority patent/US10053796B2/en
Priority to PCT/JP2015/064771 priority patent/WO2015182520A1/ja
Priority to TW104116799A priority patent/TW201607662A/zh
Publication of JP2015224143A publication Critical patent/JP2015224143A/ja
Publication of JP2015224143A5 publication Critical patent/JP2015224143A5/ja
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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/18—Epitaxial-layer growth characterised by the substrate
    • C30B25/186—Epitaxial-layer growth characterised by the substrate being specially pre-treated by, e.g. chemical or physical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/18—Epitaxial-layer growth characterised by the substrate
    • C30B25/20—Epitaxial-layer growth characterised by the substrate the substrate being of the same materials as the epitaxial layer
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C30B29/403—AIII-nitrides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C30B29/403—AIII-nitrides
    • C30B29/406—Gallium nitride
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Optics & Photonics (AREA)
  • Inorganic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Dicing (AREA)
  • Laser Beam Processing (AREA)
  • Chemical Vapour Deposition (AREA)
JP2014108255A 2014-05-26 2014-05-26 Ｉｉｉ族窒化物基板の製造方法 Active JP6129784B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2014108255A JP6129784B2 (ja) 2014-05-26 2014-05-26 Ｉｉｉ族窒化物基板の製造方法
US15/313,764 US10053796B2 (en) 2014-05-26 2015-05-22 Method for manufacturing group III nitride substrate formed of a group III nitride crystal
PCT/JP2015/064771 WO2015182520A1 (ja) 2014-05-26 2015-05-22 Ｉｉｉ族窒化物基板の製造方法
TW104116799A TW201607662A (zh) 2014-05-26 2015-05-26 Ｉｉｉ族氮化物基板之製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014108255A JP6129784B2 (ja) 2014-05-26 2014-05-26 Ｉｉｉ族窒化物基板の製造方法

Related Child Applications (2)

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JP2016182169A Division JP2017024984A (ja) 2016-09-16 2016-09-16 Ｉｉｉ族窒化物基板の製造方法
JP2016182170A Division JP6130039B2 (ja) 2016-09-16 2016-09-16 Ｉｉｉ族窒化物基板の製造方法

Publications (3)

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JP2015224143A JP2015224143A (ja) 2015-12-14
JP2015224143A5 JP2015224143A5 (OSRAM) 2016-11-10
JP6129784B2 true JP6129784B2 (ja) 2017-05-17

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US (1) US10053796B2 (OSRAM)
JP (1) JP6129784B2 (OSRAM)
TW (1) TW201607662A (OSRAM)
WO (1) WO2015182520A1 (OSRAM)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6466195B2 (ja) * 2015-02-17 2019-02-06 古河機械金属株式会社 Ｉｉｉ族窒化物半導体基板およびｉｉｉ族窒化物半導体基板の製造方法
US10364510B2 (en) 2015-11-25 2019-07-30 Sciocs Company Limited Substrate for crystal growth having a plurality of group III nitride seed crystals arranged in a disc shape
JP6203460B1 (ja) 2016-03-08 2017-09-27 株式会社サイオクス 窒化物結晶基板
JP6731590B2 (ja) * 2016-05-02 2020-07-29 国立大学法人大阪大学 窒化物結晶基板の製造方法
DE102016117912A1 (de) * 2016-09-22 2018-03-22 Nexwafe Gmbh Verfahren zum Anordnen mehrerer Saatsubstrate an einem Trägerelement und Trägerelement mit Saatsubstraten
JP6735647B2 (ja) * 2016-09-29 2020-08-05 株式会社サイオクス 窒化物結晶基板の製造方法
JP6901844B2 (ja) * 2016-12-02 2021-07-14 株式会社サイオクス 窒化物結晶基板の製造方法および結晶成長用基板
JP6781054B2 (ja) * 2017-01-20 2020-11-04 株式会社サイオクス 窒化物結晶基板および窒化物結晶基板の製造方法
JP6827330B2 (ja) * 2017-01-20 2021-02-10 株式会社サイオクス Ｉｉｉ族窒化物基板の製造方法
JP7046496B2 (ja) * 2017-03-28 2022-04-04 古河機械金属株式会社 Ｉｉｉ族窒化物半導体基板の製造方法、ｉｉｉ族窒化物半導体基板、及び、バルク結晶
JPWO2022191003A1 (OSRAM) * 2021-03-09 2022-09-15
CN113634900A (zh) * 2021-07-21 2021-11-12 上海理工大学 一种使用增材制造技术制备镍基合金定向双晶的方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0967199A (ja) 1995-08-30 1997-03-11 Sumitomo Electric Ind Ltd Ｉｉ−ｖｉ族化合物半導体単結晶バルクの作製方法
JP4061700B2 (ja) 1998-03-19 2008-03-19 株式会社デンソー 単結晶の製造方法
JP4117156B2 (ja) 2002-07-02 2008-07-16 日本電気株式会社 Ｉｉｉ族窒化物半導体基板の製造方法
FR2852974A1 (fr) * 2003-03-31 2004-10-01 Soitec Silicon On Insulator Procede de fabrication de cristaux monocristallins
JP4915128B2 (ja) * 2005-04-11 2012-04-11 日亜化学工業株式会社 窒化物半導体ウエハ及びその製造方法
JP5332168B2 (ja) * 2006-11-17 2013-11-06 住友電気工業株式会社 Ｉｉｉ族窒化物結晶の製造方法
JP2008133151A (ja) 2006-11-28 2008-06-12 Sumitomo Electric Ind Ltd 結晶成長方法、結晶基板、および半導体デバイス
JP4844470B2 (ja) * 2007-05-09 2011-12-28 パナソニック株式会社 種結晶の固定方法
US20120000415A1 (en) * 2010-06-18 2012-01-05 Soraa, Inc. Large Area Nitride Crystal and Method for Making It
WO2010140564A1 (ja) * 2009-06-01 2010-12-09 三菱化学株式会社 窒化物半導体結晶およびその製造方法
JP5447289B2 (ja) * 2009-08-19 2014-03-19 三菱化学株式会社 窒化物半導体結晶およびその製造方法
JP5757068B2 (ja) * 2010-08-02 2015-07-29 住友電気工業株式会社 ＧａＮ結晶の成長方法
JP2012041206A (ja) * 2010-08-13 2012-03-01 Furukawa Co Ltd サセプタおよび種結晶の成長方法
JP5620762B2 (ja) * 2010-09-09 2014-11-05 古河機械金属株式会社 Ｉｉｉ族窒化物半導体基板およびｉｉｉ族窒化物半導体基板の製造方法
JP5732288B2 (ja) * 2011-03-18 2015-06-10 学校法人 名城大学 自立基板の製造方法
JP2014047097A (ja) 2012-08-30 2014-03-17 Mitsubishi Chemicals Corp 窒化物半導体結晶の製造方法
JP2013230971A (ja) 2013-05-22 2013-11-14 Hitachi Cable Ltd Ｌｄ用ｉｉｉ族窒化物半導体基板及びそれを用いたｌｄ用ｉｉｉ族窒化物半導体エピタキシャル基板

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US10053796B2 (en) 2018-08-21
JP2015224143A (ja) 2015-12-14
TW201607662A (zh) 2016-03-01
US20170247813A1 (en) 2017-08-31
WO2015182520A1 (ja) 2015-12-03

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