JP6095291B2 - 加熱式回転基板支持体を有するウエハ処理装置 - Google Patents
加熱式回転基板支持体を有するウエハ処理装置 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 138
- 238000012545 processing Methods 0.000 title claims description 22
- 238000010438 heat treatment Methods 0.000 claims description 31
- 238000006243 chemical reaction Methods 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 20
- 239000011810 insulating material Substances 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 13
- 238000009413 insulation Methods 0.000 claims description 6
- 239000012212 insulator Substances 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 38
- 230000008569 process Effects 0.000 description 11
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 9
- 230000007246 mechanism Effects 0.000 description 7
- 230000017525 heat dissipation Effects 0.000 description 5
- 230000033001 locomotion Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000012530 fluid Substances 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 229910000953 kanthal Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
- F27B17/0016—Chamber type furnaces
- F27B17/0025—Especially adapted for treating semiconductor wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
10 反応管
12 反応室
14 反応空間
16 断熱スリーブ
18 電気抵抗コイル
20 フランジ
22 中心炉開口部
24 ウエハボート
26 ウエハ収容スロット
28 ウエハ
30 基板支持体アセンブリ
32 基板支持体/台座
34 支持面
36 円筒容器
36a 容器の底壁
36b 容器の側壁、
36c 容器の天壁
37 容器の駆動軸
37a 容器の駆動軸を通る軸方向通路
37b 容器の駆動軸を通る半径方向通路
38 断熱材
39 支持板
39a 支持軸
40 断熱材を通る中空軸
42 ドアプレート
44a ドアプレートと容器との間の軸受
44b 容器とヒータブッシングとの間の軸受
46 弾性Oリング
50 ヒータ
52 ヒータの接続部
54 ヒータの放熱/発熱部
56 プラグ
L 中心軸
Claims (8)
- 半導体基板処理装置(1)であって、
基板支持体アセンブリ(30)を備え、
前記基板支持体アセンブリ(30)は、
基板または基板担持体(24)をその上に支持するための外側の支持面(34)を画成する基板支持体(32)と、
前記基板支持体(32)の内部に配設され、前記支持面(34)の真下に前記支持面(34)にほぼ平行に延在する放熱部(54)を備えたヒータ(50)と、
を備え、
前記基板支持体(32)は、
前記支持面(34)が前記ヒータ(50)の前記放熱部(54)に対して回転可能であるように、前記支持面(34)を貫通延在する回転軸(L)の周りに回転可能に取り付けられ、
前記基板支持体アセンブリ(30)は、
前記半導体基板処理装置(1)の反応空間(14)を密閉するためのドアプレート(42)を含む基部アセンブリをさらに備え、
前記基板支持体(32)は、
前記基部アセンブリに対して前記回転軸(L)の周りの前記基板支持体の回転を容易にする第1の軸受(44a)を介して、前記基部アセンブリ(42)に接続され、
前記ヒータ(50)は、
前記回転軸(L)に対して回転不能に取り付けられ、
前記ヒータに対する前記回転軸(L)の周りの前記基板支持体の回転を容易にする第2の軸受(44b)を介して、前記基板支持体(32)に接続され、
前記基板支持体(32)は、
底壁(36a)と、ジャケット形側壁(36b)と、天壁(36c)とを含み、
好ましくは、略円筒の容器(36)を画成するために前記底壁(36a)と、前記ジャケット形側壁(36b)と、前記天壁(36c)とは相互に連結され、
前記天壁(36c)の外面は、
前記基板支持体の前記支持面(34)を画成し、
前記容器(36)は、
前記ヒータ(50)の少なくとも前記放熱部(54)を収容し、
前記底壁(36a)は、
下方に突出して前記底壁を貫通延在する通路(37a)を画成する駆動軸(37)を備え、
前記第1の軸受(44a)は、
前記第2の軸受(44b)と水平になるように、前記駆動軸(37)の外周に係合し、
前記第2の軸受(44b)は、
前記駆動軸(37)の内周に係合し、
前記容器の前記底壁(36a)と前記ヒータ(50)の前記放熱部(54)との間に配設される断熱材(38)が少なくとも部分的に充填され、
前記断熱材(38)は、
前記ヒータ(50)と固定された定置関係で配設され、
前記半導体基板処理装置(1)は、
前記底壁(36a)に隣接してはいるが前記底壁(36a)から離れた前記容器(36)内の位置に配設された支持板(39)をさらに備え、
前記支持板(39)は、
前記支持板から下方に突出して、前記容器(36)の前記底壁(36a)から突出した前記駆動軸(37)と同軸に、前記駆動軸(37)内を通る支持軸(39a)を備え、
前記断熱材(38)は、
前記支持板(39)の上に支持されることを特徴とする装置(1)。 - 前記第1の軸受および前記第2の軸受は円形の同軸球溝を画成するころ軸受であることを特徴とする請求項1に記載の装置。
- 前記ヒータ(50)は、
エネルギーを前記放熱部(54)に伝達するために前記放熱部(54)に接続され、かつ前記放熱部(54)から前記断熱材(38)を介して前記支持軸(39a)内まで延在する接続部(52)を含み、
前記ヒータの前記接続部(52)は前記断熱材(38)に埋め込まれ、
前記ヒータの前記放熱部(54)は前記断熱材(38)の上に載っていることを特徴とする請求項1または請求項2に記載の装置。 - 前記断熱材(38)は、前記容器(36)と定置関係で配設されることを特徴とする請求項1に記載の装置。
- 前記容器(36)の前記底壁(36a)から突出した前記駆動軸(37)は、
前記回転軸(L)に沿って前記断熱材(38)を貫通延在する細長い中空軸(40)と位置合わせされ、
前記ヒータ(50)は、
エネルギーを前記放熱部(54)に伝達するための接続部(52)を含み、
前記接続部(52)は前記放熱部(54)に接続して前記放熱部(54)を支持するために前記駆動軸の内側から前記中空軸(40)を通って自由に延在することを特徴とする請求項4に記載の装置。 - 前記ヒータ(50)の前記放熱部(54)は、
独立に制御可能な発熱帯を少なくとも2つ備え、前記発熱帯は前記支持面(34)のそれぞれ異なる部分の下に延在することを特徴とする請求項1から請求項5のいずれか一項に記載の装置。 - 前記半導体基板処理装置(1)は、
縦型加熱炉であり、前記反応空間(14)を画成する反応室(12)と、前記基板支持体アセンブリ(30)を少なくとも部分的に前記反応室に収容しうる開口部(22)とをさらに備え、
前記基板支持体アセンブリが収容された状態において、その上に支持された基板(28)または基板担持体(24)は前記反応空間内に収容され、前記基板支持体アセンブリ(30)は前記開口部(22)をほぼ密閉するようになっていることを特徴とする請求項1から請求項6のいずれか一項に記載の装置。 - 請求項1から請求項7のいずれか一項に記載の半導体基板処理装置(1)を設けるステップと、
少なくとも1つの基板(28)を設け、前記少なくとも1つの基板を、場合によっては基板担持体(24)を介して、前記基板支持体(32)の前記支持面(34)の上に支持するステップと、
同時に
前記ヒータの前記放熱部(54)に放熱させるように前記ヒータ(50)を加熱することと、
前記基板支持体(32)の前記支持面(34)の上に支持されている前記少なくとも1つの基板(28)をその下の前記ヒータの前記放熱部(54)に対して回転させるように、前記基板支持体(32)をその回転軸(L)の周りに回転させることと、
を行うステップと、
を含むことを特徴とする方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US13/181,791 US9018567B2 (en) | 2011-07-13 | 2011-07-13 | Wafer processing apparatus with heated, rotating substrate support |
US13/181,791 | 2011-07-13 |
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JP2013021336A JP2013021336A (ja) | 2013-01-31 |
JP6095291B2 true JP6095291B2 (ja) | 2017-03-15 |
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US (1) | US9018567B2 (ja) |
JP (1) | JP6095291B2 (ja) |
KR (1) | KR101944432B1 (ja) |
TW (1) | TWI541923B (ja) |
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