JP6082255B2 - セラミックス部品及びその製造方法 - Google Patents

セラミックス部品及びその製造方法 Download PDF

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Publication number
JP6082255B2
JP6082255B2 JP2013007145A JP2013007145A JP6082255B2 JP 6082255 B2 JP6082255 B2 JP 6082255B2 JP 2013007145 A JP2013007145 A JP 2013007145A JP 2013007145 A JP2013007145 A JP 2013007145A JP 6082255 B2 JP6082255 B2 JP 6082255B2
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JP
Japan
Prior art keywords
ceramic substrate
ceramic
coating layer
piezoelectric
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013007145A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014138144A5 (enExample
JP2014138144A (ja
Inventor
政之 植谷
政之 植谷
仁樹 服部
仁樹 服部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to JP2013007145A priority Critical patent/JP6082255B2/ja
Priority to US14/153,472 priority patent/US9950965B2/en
Priority to EP14151044.6A priority patent/EP2757606B1/en
Priority to CN201410018974.2A priority patent/CN103943773A/zh
Publication of JP2014138144A publication Critical patent/JP2014138144A/ja
Publication of JP2014138144A5 publication Critical patent/JP2014138144A5/ja
Application granted granted Critical
Publication of JP6082255B2 publication Critical patent/JP6082255B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/02—Forming enclosures or casings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/081—Shaping or machining of piezoelectric or electrostrictive bodies by coating or depositing using masks, e.g. lift-off
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
    • H10N30/088—Shaping or machining of piezoelectric or electrostrictive bodies by machining by cutting or dicing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/057—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by stacking bulk piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
    • Y10T156/1082—Partial cutting bonded sandwich [e.g., grooving or incising]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/23—Sheet including cover or casing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/23—Sheet including cover or casing
    • Y10T428/232—Encased layer derived from inorganic settable ingredient
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/23—Sheet including cover or casing
    • Y10T428/239—Complete cover or casing

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ceramic Capacitors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2013007145A 2013-01-18 2013-01-18 セラミックス部品及びその製造方法 Active JP6082255B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013007145A JP6082255B2 (ja) 2013-01-18 2013-01-18 セラミックス部品及びその製造方法
US14/153,472 US9950965B2 (en) 2013-01-18 2014-01-13 Ceramic element and method of manufacturing the same
EP14151044.6A EP2757606B1 (en) 2013-01-18 2014-01-14 Ceramic element and method of manufacturing the same
CN201410018974.2A CN103943773A (zh) 2013-01-18 2014-01-15 陶瓷部件及其制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013007145A JP6082255B2 (ja) 2013-01-18 2013-01-18 セラミックス部品及びその製造方法

Publications (3)

Publication Number Publication Date
JP2014138144A JP2014138144A (ja) 2014-07-28
JP2014138144A5 JP2014138144A5 (enExample) 2015-11-05
JP6082255B2 true JP6082255B2 (ja) 2017-02-15

Family

ID=49917625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013007145A Active JP6082255B2 (ja) 2013-01-18 2013-01-18 セラミックス部品及びその製造方法

Country Status (4)

Country Link
US (1) US9950965B2 (enExample)
EP (1) EP2757606B1 (enExample)
JP (1) JP6082255B2 (enExample)
CN (1) CN103943773A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI610472B (zh) 2014-05-12 2018-01-01 松下知識產權經營股份有限公司 壓電元件與電纜基板之連接方法、附有電纜基板之壓電元件及使用其之噴墨頭
US11081639B2 (en) * 2016-05-19 2021-08-03 Konica Minolta, Inc. Piezoelectric element manufacturing method
CN111095489B (zh) * 2017-09-12 2023-11-28 日本碍子株式会社 芯片部件的制造方法
WO2019093092A1 (ja) * 2017-11-09 2019-05-16 株式会社村田製作所 圧電部品、センサおよびアクチュエータ

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3946290A (en) * 1973-10-09 1976-03-23 Tdk Electronics Co. Ltd. High tension ceramic condenser
US4916000A (en) * 1987-07-13 1990-04-10 Allied-Signal Inc. Ballistic-resistant composite article
JP2599478B2 (ja) * 1990-02-20 1997-04-09 松下電器産業株式会社 チップ型電子部品
US5750264A (en) * 1994-10-19 1998-05-12 Matsushita Electric Industrial Co., Inc. Electronic component and method for fabricating the same
US6617762B2 (en) 2000-08-03 2003-09-09 Nec Tokin Ceramics Corporation Microactuator device with a countermeasure for particles on a cut face thereof
WO2009099438A1 (en) 2008-02-05 2009-08-13 Morgan Advanced Ceramics, Inc. Encapsulation coating to reduce particle shedding
US20120183716A1 (en) * 2008-05-20 2012-07-19 Jordan Robert F Moldable ballistic armor panel
JP4948554B2 (ja) 2009-02-16 2012-06-06 日本発條株式会社 ヘッドサスペンション
US8399059B2 (en) 2009-07-27 2013-03-19 Cts Corporation Encapsulated ceramic element and method of making the same
JP5522533B2 (ja) * 2010-05-27 2014-06-18 三菱マテリアル株式会社 表面実装型電子部品およびその製造方法
JP5951597B2 (ja) 2011-03-31 2016-07-13 日本碍子株式会社 セラミックス素子の製造方法
JP5845668B2 (ja) * 2011-07-08 2016-01-20 Tdk株式会社 圧電素子及び圧電素子の製造方法

Also Published As

Publication number Publication date
EP2757606A1 (en) 2014-07-23
CN103943773A (zh) 2014-07-23
EP2757606B1 (en) 2016-11-30
US9950965B2 (en) 2018-04-24
JP2014138144A (ja) 2014-07-28
US20140202629A1 (en) 2014-07-24

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