JP5893225B2 - 半導体素子およびその製造方法、ならびに半導体装置 - Google Patents
半導体素子およびその製造方法、ならびに半導体装置 Download PDFInfo
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- JP5893225B2 JP5893225B2 JP2015531361A JP2015531361A JP5893225B2 JP 5893225 B2 JP5893225 B2 JP 5893225B2 JP 2015531361 A JP2015531361 A JP 2015531361A JP 2015531361 A JP2015531361 A JP 2015531361A JP 5893225 B2 JP5893225 B2 JP 5893225B2
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- film
- protective film
- electrode
- semiconductor element
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- 239000004065 semiconductor Substances 0.000 title claims description 190
- 238000004519 manufacturing process Methods 0.000 title claims description 50
- 230000001681 protective effect Effects 0.000 claims description 238
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 163
- 238000007747 plating Methods 0.000 claims description 83
- 230000002093 peripheral effect Effects 0.000 claims description 65
- 238000000034 method Methods 0.000 claims description 55
- 239000010931 gold Substances 0.000 claims description 41
- 229910000679 solder Inorganic materials 0.000 claims description 25
- 239000010410 layer Substances 0.000 claims description 21
- 238000005530 etching Methods 0.000 claims description 7
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 239000011241 protective layer Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 239000002356 single layer Substances 0.000 claims description 2
- 230000000994 depressogenic effect Effects 0.000 claims 1
- 230000013011 mating Effects 0.000 claims 1
- 239000000463 material Substances 0.000 description 32
- 238000010438 heat treatment Methods 0.000 description 28
- 239000000758 substrate Substances 0.000 description 28
- 229920001721 polyimide Polymers 0.000 description 21
- 239000004642 Polyimide Substances 0.000 description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 16
- 230000000694 effects Effects 0.000 description 11
- 230000007797 corrosion Effects 0.000 description 7
- 238000005260 corrosion Methods 0.000 description 7
- 238000004380 ashing Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 238000005406 washing Methods 0.000 description 6
- 230000008602 contraction Effects 0.000 description 5
- 238000007772 electroless plating Methods 0.000 description 5
- 238000004528 spin coating Methods 0.000 description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910004205 SiNX Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- 238000010828 elution Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000012779 reinforcing material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 1
Classifications
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Description
子を準備する工程と、電極の表面上において開口部を有し、電極の少なくとも端部を覆う保護膜を形成する工程と、開口部において電極上に第1めっき膜を形成する工程と、第1めっき膜において電極と接する面と反対側に位置する面上に第2めっき膜を形成する工程と、第2めっき膜上にはんだ層を形成する工程とを備え、保護膜を形成する工程は、開口部の側壁から開口部内に向けて延びる側縁部を形成する工程を含み、側縁部を形成する工程では、第1の主面に対して垂直な方向に延びる表面部分を有し、表面部分が第1めっき膜において表面部分よりも側壁側に位置する部分と接触することにより第1めっき膜と嵌合する嵌合部を形成する。はんだ層を形成する工程では、側縁部と、側縁部上に形成されている第2めっき膜の外周面と、側壁とに接するはんだ層が形成される。
以下、本発明の実施の形態1について説明する。まず、図1を参照して、実施の形態1に係る半導体素子10の構成を説明する。半導体素子10は、半導体基板1上に所定のデバイス構造が形成された半導体素子である。半導体素子10は、外部と熱的に接続されている熱拡散板2と、外部と電気的に接続されているリードフレーム3との間に挟まれるように配置されている。半導体基板1はリードフレーム3と対向する第1の主面1Aと、第1の主面1Aと反対側に位置して熱拡散板2と対向する第2の主面1Bとを有している。第1の主面1Aには電極5が形成されており、電極5はリードフレーム3とはんだ4等を介して接合されている。第2の主面2Bには裏面電極(図示しない)が形成されており、該裏面電極ははんだ4を介して熱拡散板2と接合されている。
次に、実施の形態2に係る半導体素子およびその製造方法について説明する。図6を参照して、実施の形態2に係る半導体素子は、基本的には実施の形態1に係る半導体素子と同様の構成を備えるが、表面部分60Aが側縁部60上に形成されている凸状部分60Cの1つの面として形成されている点で異なる。
次に、実施の形態3に係る半導体素子およびその製造方法について説明する。実施の形態3に係る半導体素子は、基本的には実施の形態1に係る半導体素子と同様の構成を備えるが、表面部分60Aが側縁部60上に形成されている凹状部分60Fの1つの面として形成されている点で異なる。
次に、図12および図13を参照して、実施の形態4に係る半導体素子およびその製造方法について説明する。図12は、実施の形態4に係る半導体素子における保護膜6の開口端部の構成を示す断面図であり、図13は、図12中領域XIIIの部分拡大図である。実施の形態4に係る半導体素子は、基本的には実施の形態1に係る半導体素子と同様の構成を備えるが、保護膜6が無機膜の積層構造として構成されていておらず、無機膜の単層構造として形成されている点で異なる。すなわち、実施の形態4に係る半導体素子の製造方法は、基本的には実施の形態1に係る半導体素子の製造方法と同様の構成を備えるが、保護膜6を形成する工程(S20)において下層保護膜61a,61bに相当する保護膜6のみが形成される点で異なる。言い換えると、実施の形態4における保護膜6は、実施の形態1〜実施の形態3に係る側縁部60に相当するものとして形成される。
保護膜6を構成する材料は、たとえばポリイミドである。ポリイミドをスピンコート法により第1の主面1A上に塗布した後、たとえば加熱温度120℃で加熱時間3分の加熱処理を行って乾燥させる。その後、写真製版加工を利用して、電極5の表面上に開口部を有し、少なくとも電極5の端部が覆われているように保護膜をパターニングする。
実施の形態4に係る半導体素子について、Au膜8形成後にNi膜7の局部腐食の有無を評価した。
Claims (12)
- 第1の主面を有し、
前記第1の主面上に形成されている電極と、
前記電極の表面上において開口部を有し、前記電極の少なくとも端部を覆うように形成されている保護膜と、
前記開口部において前記電極上に形成されている第1めっき膜と、
前記第1めっき膜の前記電極と接する面と反対側に位置する面上に形成されている第2めっき膜と、
前記第2めっき膜上に形成されているはんだ層とを備え、
前記保護膜は、前記開口部の側壁から前記開口部内に向けて延びる側縁部を含み、
前記側縁部は、前記第1めっき膜と嵌合している嵌合部を有し、
前記嵌合部は前記第1の主面に対して垂直な方向に延びる表面部分を有し、前記表面部分が前記第1めっき膜において前記表面部分よりも前記側壁側に位置する部分と接触することにより前記第1めっき膜と嵌合し、
前記はんだ層は、前記側縁部と、前記側縁部上に形成されている前記第2めっき膜の外周面と、前記側壁とに接している、半導体素子。 - 前記嵌合部は、前記側縁部のうち前記開口部の内側に位置する部分であり、前記開口部の側壁側に位置する部分より厚みが厚くなっている、請求項1に記載の半導体素子。
- 前記側縁部は、上方に突出している凸状部分を有し、
前記表面部分は前記凸状部分の1つの面として形成されている、請求項1または請求項2に記載の半導体素子。 - 前記側縁部は、下方に陥没している凹状部分を有し、
前記表面部分は前記凹状部分の1つの面として形成されている、請求項1または請求項2に記載の半導体素子。 - 前記保護膜は1つの樹脂層からなる単層構造を有している、請求項1〜4のいずれか1項に記載の半導体素子。
- 前記保護膜は複数の樹脂層が積層した積層構造を有している、請求項1〜4のいずれか1項に記載の半導体素子。
- 前記電極はアルミニウムを含み、
前記第1めっき膜はニッケルを含み、
前記第2めっき膜は金を含む、請求項5または請求項6に記載の半導体素子。 - 請求項1〜請求項7のいずれか1項に記載の半導体素子を備える、半導体装置。
- 第1の主面上に電極が形成されている半導体素子を準備する工程と、
前記電極の表面上において開口部を有し、前記電極の少なくとも端部を覆う保護膜を形成する工程と、
前記開口部において前記電極上に第1めっき膜を形成する工程と、
前記第1めっき膜において前記電極と接する面と反対側に位置する面上に第2めっき膜を形成する工程と、
前記第2めっき膜上にはんだ層を形成する工程とを備え、
前記保護膜を形成する工程は、前記開口部の側壁から前記開口部内に向けて延びる側縁部を形成する工程を含み、
前記側縁部を形成する工程では、前記第1の主面に対して垂直な方向に延びる表面部分を有し、前記表面部分が前記第1めっき膜において前記表面部分よりも前記側壁側に位置する部分と接触することにより前記第1めっき膜と嵌合する嵌合部を形成し、
前記はんだ層を形成する工程では、前記側縁部と、前記側縁部上に形成されている前記第2めっき膜の外周面と、前記側壁とに接する前記はんだ層が形成される、半導体素子の製造方法。 - 前記側縁部を形成する工程では、上方に突出している凸状部分または下方に陥没している凹状部分を有する前記側縁部が形成され、
前記表面部分は前記凸状部分または前記凹状部分の1つの面として形成される、請求項9に記載の半導体素子の製造方法。 - 前記側縁部を形成する工程では、前記保護膜を部分的にエッチングすることにより前記嵌合部を形成する、請求項9に記載の半導体素子の製造方法。
- 第1の主面を有し、
前記第1の主面上に形成されている電極と、
前記電極の表面上において開口部を有し、前記電極の少なくとも端部を覆うように形成されている保護膜と、
前記開口部において前記電極上に形成されている第1めっき膜とを備え、
前記保護膜は、前記第1の主面と交差する方向に延びる内周側傾斜部分と外周側傾斜部分と、膜厚が最も厚い部分である保護膜頂点部分とを有し、
前記内周側傾斜部分は、前記外周側傾斜部分と比べて前記開口部の内側に位置し、前記保護膜頂点部分を挟んで前記外周側傾斜部分と連なるように形成されており、
前記保護膜は前記外周側傾斜部分の少なくとも一部において前記第1めっき膜と面接触することにより前記第1めっき膜と嵌合している、半導体素子。
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