JP6059565B2 - 吸着反転装置 - Google Patents

吸着反転装置 Download PDF

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Publication number
JP6059565B2
JP6059565B2 JP2013050446A JP2013050446A JP6059565B2 JP 6059565 B2 JP6059565 B2 JP 6059565B2 JP 2013050446 A JP2013050446 A JP 2013050446A JP 2013050446 A JP2013050446 A JP 2013050446A JP 6059565 B2 JP6059565 B2 JP 6059565B2
Authority
JP
Japan
Prior art keywords
suction
substrate
adsorption
reversing device
suction plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2013050446A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014176969A (ja
Inventor
慎太郎 亀井
慎太郎 亀井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Priority to JP2013050446A priority Critical patent/JP6059565B2/ja
Priority to TW103102242A priority patent/TWI602669B/zh
Priority to KR1020140016344A priority patent/KR102138151B1/ko
Priority to CN201410055089.1A priority patent/CN104044917B/zh
Publication of JP2014176969A publication Critical patent/JP2014176969A/ja
Application granted granted Critical
Publication of JP6059565B2 publication Critical patent/JP6059565B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
    • B65G47/244—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles by turning them about an axis substantially perpendicular to the conveying plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Registering Or Overturning Sheets (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP2013050446A 2013-03-13 2013-03-13 吸着反転装置 Expired - Fee Related JP6059565B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013050446A JP6059565B2 (ja) 2013-03-13 2013-03-13 吸着反転装置
TW103102242A TWI602669B (zh) 2013-03-13 2014-01-22 Adsorption reversal device
KR1020140016344A KR102138151B1 (ko) 2013-03-13 2014-02-13 흡착 반전 장치
CN201410055089.1A CN104044917B (zh) 2013-03-13 2014-02-18 吸附反转装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013050446A JP6059565B2 (ja) 2013-03-13 2013-03-13 吸着反転装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2016223726A Division JP6271683B2 (ja) 2016-11-17 2016-11-17 吸着反転装置

Publications (2)

Publication Number Publication Date
JP2014176969A JP2014176969A (ja) 2014-09-25
JP6059565B2 true JP6059565B2 (ja) 2017-01-11

Family

ID=51498381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013050446A Expired - Fee Related JP6059565B2 (ja) 2013-03-13 2013-03-13 吸着反転装置

Country Status (4)

Country Link
JP (1) JP6059565B2 (zh)
KR (1) KR102138151B1 (zh)
CN (1) CN104044917B (zh)
TW (1) TWI602669B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017074784A (ja) * 2016-11-17 2017-04-20 三星ダイヤモンド工業株式会社 吸着反転装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7085743B2 (ja) * 2018-01-31 2022-06-17 三星ダイヤモンド工業株式会社 基板反転装置
CN108529225B (zh) * 2018-03-28 2019-11-19 东莞市银泰玻璃有限公司 一种玻璃加工的夹持设备
CN115928995A (zh) * 2022-12-13 2023-04-07 德才装饰股份有限公司 一种建筑面板贴附装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147344U (zh) * 1988-03-30 1989-10-12
JPH03256677A (ja) * 1990-03-02 1991-11-15 Sony Corp 薄片吸着保持装置
JPH0639697B2 (ja) * 1990-11-30 1994-05-25 株式会社芝浦製作所 基板のローディング装置
DE10000013A1 (de) * 2000-01-03 2001-07-12 Hilti Ag Saugbohrer
CN1486285B (zh) * 2001-01-17 2013-01-16 三星宝石工业株式会社 划线分断设备及其系统
WO2005028172A1 (ja) * 2003-09-24 2005-03-31 Mitsuboshi Diamond Industrial Co., Ltd. 基板分断システム、基板製造装置および基板分断方法
JP4739024B2 (ja) * 2003-12-04 2011-08-03 三星ダイヤモンド工業株式会社 基板加工方法、基板加工装置および基板搬送機構、基板分離装置
JP2006027795A (ja) * 2004-07-14 2006-02-02 Toshiba Corp 吸着装置、ならびに板状部材の搬送方法、液晶表示装置の製造方法
JP2006245079A (ja) * 2005-03-01 2006-09-14 Yaskawa Electric Corp アライナー装置
US7513716B2 (en) * 2006-03-09 2009-04-07 Seiko Epson Corporation Workpiece conveyor and method of conveying workpiece
JP4876640B2 (ja) * 2006-03-09 2012-02-15 セイコーエプソン株式会社 ワーク搬送装置およびワーク搬送方法
JP2007238292A (ja) * 2006-03-09 2007-09-20 Seiko Epson Corp ワーク搬送装置
KR20090070658A (ko) * 2007-12-27 2009-07-01 세메스 주식회사 기판 반전 로봇, 상기 로봇을 가지는 기판 반전 유닛과기판 처리 장치, 그리고 기판 반전 방법
JP2010001049A (ja) * 2008-06-20 2010-01-07 Sharp Corp ガラス基板反転装置およびこれを用いたガラス基板反転方法
JP5349881B2 (ja) * 2008-09-24 2013-11-20 三星ダイヤモンド工業株式会社 スクライブ装置および基板分断システム
JP4660586B2 (ja) * 2008-12-02 2011-03-30 オリンパス株式会社 基板搬送装置、及び、基板搬送方法
US8973742B2 (en) * 2010-04-26 2015-03-10 Joy Mm Delaware, Inc. Chain tension sensor
CN102050564A (zh) * 2009-10-30 2011-05-11 孙月卫 切割液晶显示器单元母板的方法及其自动化切割系统
CN202487546U (zh) * 2012-03-21 2012-10-10 常州亿晶光电科技有限公司 自动焊接后太阳能电池串的自动吸附转移装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017074784A (ja) * 2016-11-17 2017-04-20 三星ダイヤモンド工業株式会社 吸着反転装置

Also Published As

Publication number Publication date
KR102138151B1 (ko) 2020-07-27
KR20140113333A (ko) 2014-09-24
JP2014176969A (ja) 2014-09-25
CN104044917A (zh) 2014-09-17
TW201434604A (zh) 2014-09-16
TWI602669B (zh) 2017-10-21
CN104044917B (zh) 2018-06-19

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