JP6057032B2 - 炭化珪素半導体装置の製造方法 - Google Patents
炭化珪素半導体装置の製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 137
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 132
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 131
- 238000004519 manufacturing process Methods 0.000 title claims description 35
- 238000000034 method Methods 0.000 title claims description 29
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 53
- 238000010438 heat treatment Methods 0.000 claims description 37
- 125000004432 carbon atom Chemical group C* 0.000 claims description 35
- 229910052759 nickel Inorganic materials 0.000 claims description 25
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 23
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 claims description 19
- 230000015572 biosynthetic process Effects 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 12
- 229910021334 nickel silicide Inorganic materials 0.000 claims description 12
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 150000002815 nickel Chemical group 0.000 claims description 6
- 238000001556 precipitation Methods 0.000 claims description 4
- 229910021332 silicide Inorganic materials 0.000 claims 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 1
- 239000010410 layer Substances 0.000 description 24
- 229910052782 aluminium Inorganic materials 0.000 description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 10
- 239000007790 solid phase Substances 0.000 description 10
- 238000004544 sputter deposition Methods 0.000 description 9
- 125000004429 atom Chemical group 0.000 description 8
- 229910052799 carbon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 238000000151 deposition Methods 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- PEUPIGGLJVUNEU-UHFFFAOYSA-N nickel silicon Chemical compound [Si].[Ni] PEUPIGGLJVUNEU-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 239000007772 electrode material Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000005477 sputtering target Methods 0.000 description 4
- 238000010030 laminating Methods 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000007429 general method Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- BVDKLOSQZNHXSI-UHFFFAOYSA-N [Si].[Ni].[C] Chemical compound [Si].[Ni].[C] BVDKLOSQZNHXSI-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000008570 general process Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/048—Making electrodes
- H01L21/0485—Ohmic electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/6606—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
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- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
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Description
実施の形態にかかる炭化珪素半導体装置の製造方法について、炭化珪素(SiC)半導体からなる半導体部(SiC半導体部)と表面電極膜とのオーミックコンタクトを形成する方法を説明する。図1は、実施の形態にかかる炭化珪素半導体装置の製造方法の概要を示すフローチャートである。図2は、実施の形態にかかる炭化珪素半導体装置の製造途中の状態を示す断面図である。図2には、n型SiC半導体部1上に第1,2電極膜2,3を順に積層してなる表面電極膜4を形成した直後の状態を示す。n型SiC半導体部1とは、例えば、n型SiC半導体からなるn型の半導体基板(以下、SiC基板とする)、SiC基板上に積層されたn型SiC半導体層、またはSiC基板の表面層に設けられたn型SiC領域である。表面電極膜4は、n型SiC半導体部1を有する炭化珪素半導体素子(炭化珪素半導体装置)のおもて面電極として形成してもよいし、裏面電極として形成してもよい。
2 第1電極膜(ニッケル膜)
3 第2電極膜(第2固相状態のニッケルシリサイド(NiSi)膜)
Claims (7)
- n型の炭化珪素半導体部と、前記炭化珪素半導体部の表面に形成された表面電極膜とのオーミックコンタクトを形成する炭化珪素半導体装置の製造方法であって、
前記炭化珪素半導体部の表面に、前記表面電極膜としてニッケルからなる第1電極膜を形成する第1形成工程と、
前記第1電極膜の表面に、前記表面電極膜としてニッケルシリサイドからなる第2電極膜を形成する第2形成工程と、
熱処理により前記炭化珪素半導体部のシリコン原子と前記第1電極膜のニッケル原子とを反応させて前記第1電極膜をシリサイド化することで、前記炭化珪素半導体部と前記表面電極膜とのオーミックコンタクトを形成する熱処理工程と、
を含み、
前記第1形成工程では、前記熱処理工程で前記第1電極膜をシリサイド化する際に前記炭化珪素半導体部から遊離し前記表面電極膜側に拡散する炭素原子が前記第2電極膜の内部に取り込み可能な少ない含有率となる薄厚に前記第1電極膜を形成することを特徴とする炭化珪素半導体装置の製造方法。 - 前記第2形成工程では、前記熱処理工程で前記第2電極膜の内部に取り込まれる前記炭素原子の、前記表面電極膜の表面への析出を抑制可能な厚さの前記第2電極膜を形成することを特徴とする請求項1に記載の炭化珪素半導体装置の製造方法。
- 前記第2形成工程では、前記熱処理工程で前記炭化珪素半導体部との反応を抑制可能な組成で前記第2電極膜を形成することを特徴とする請求項1に記載の炭化珪素半導体装置の製造方法。
- 前記第2電極膜は、ニッケル原子を60atm%およびシリコン原子を40atm%の含有率と、ニッケル原子を70atm%およびシリコン原子を30atm%の含有率との間の範囲の組成であることを特徴とする請求項1に記載の炭化珪素半導体装置の製造方法。
- 前記第2形成工程では、前記熱処理工程でシリサイド化された前記第1電極膜の組成とほぼ等しい組成で前記第2電極膜を形成することを特徴とする請求項1に記載の炭化珪素半導体装置の製造方法。
- 前記第1電極膜の厚さは、5nm以上10nm以下であることを特徴とする請求項1に記載の炭化珪素半導体装置の製造方法。
- 前記第2電極膜の厚さは、80nm以上であることを特徴とする請求項1〜6のいずれか一つに記載の炭化珪素半導体装置の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2014151279 | 2014-07-24 | ||
JP2014151279 | 2014-07-24 | ||
PCT/JP2015/066078 WO2016013305A1 (ja) | 2014-07-24 | 2015-06-03 | 炭化珪素半導体装置の製造方法 |
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JP6057032B2 true JP6057032B2 (ja) | 2017-01-11 |
JPWO2016013305A1 JPWO2016013305A1 (ja) | 2017-04-27 |
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US (1) | US9793121B2 (ja) |
JP (1) | JP6057032B2 (ja) |
CN (1) | CN105874566B (ja) |
DE (1) | DE112015000247T5 (ja) |
WO (1) | WO2016013305A1 (ja) |
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CN109994376B (zh) * | 2017-12-30 | 2021-10-15 | 无锡华润微电子有限公司 | 碳化硅衬底上形成的欧姆接触结构及其形成方法 |
CN111276395A (zh) * | 2020-02-19 | 2020-06-12 | 华芯威半导体科技(北京)有限责任公司 | 一种碳化硅器件原料的制造方法及使用该原料制备的碳化硅器件 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2002217129A (ja) * | 2001-01-18 | 2002-08-02 | New Japan Radio Co Ltd | シリコンカーバイド半導体装置の製造方法 |
JP2006024880A (ja) * | 2004-06-09 | 2006-01-26 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2006332358A (ja) * | 2005-05-26 | 2006-12-07 | Denso Corp | 炭化珪素半導体装置およびその製造方法 |
JP2010103229A (ja) * | 2008-10-22 | 2010-05-06 | Sumitomo Electric Ind Ltd | 炭化珪素半導体装置およびその製造方法 |
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US20110233560A1 (en) | 2010-03-16 | 2011-09-29 | Advanced Interconnect Materials, Llc | Electrode for silicon carbide, silicon carbide semiconductor element, silicon carbide semiconductor device and method for forming electrode for silicon carbide |
US9553063B2 (en) * | 2010-11-16 | 2017-01-24 | Mitsubishi Electric Corporation | Semiconductor element, semiconductor device and method for manufacturing semiconductor element |
JP2013219150A (ja) | 2012-04-06 | 2013-10-24 | National Institute Of Advanced Industrial & Technology | 炭化珪素半導体装置のオーミック電極の製造方法 |
JP6051573B2 (ja) | 2012-04-17 | 2016-12-27 | 富士電機株式会社 | 半導体装置の製造方法 |
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- 2015-06-03 CN CN201580003475.9A patent/CN105874566B/zh not_active Expired - Fee Related
- 2015-06-03 WO PCT/JP2015/066078 patent/WO2016013305A1/ja active Application Filing
- 2015-06-03 DE DE112015000247.2T patent/DE112015000247T5/de not_active Withdrawn
- 2015-06-03 JP JP2016535832A patent/JP6057032B2/ja active Active
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2016
- 2016-07-01 US US15/200,105 patent/US9793121B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002217129A (ja) * | 2001-01-18 | 2002-08-02 | New Japan Radio Co Ltd | シリコンカーバイド半導体装置の製造方法 |
JP2006024880A (ja) * | 2004-06-09 | 2006-01-26 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2006332358A (ja) * | 2005-05-26 | 2006-12-07 | Denso Corp | 炭化珪素半導体装置およびその製造方法 |
JP2010103229A (ja) * | 2008-10-22 | 2010-05-06 | Sumitomo Electric Ind Ltd | 炭化珪素半導体装置およびその製造方法 |
Also Published As
Publication number | Publication date |
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US20160314973A1 (en) | 2016-10-27 |
JPWO2016013305A1 (ja) | 2017-04-27 |
DE112015000247T5 (de) | 2016-09-08 |
WO2016013305A1 (ja) | 2016-01-28 |
CN105874566A (zh) | 2016-08-17 |
CN105874566B (zh) | 2019-04-05 |
US9793121B2 (en) | 2017-10-17 |
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