JP6021819B2 - レーザ加工機用ステージ装置 - Google Patents

レーザ加工機用ステージ装置 Download PDF

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Publication number
JP6021819B2
JP6021819B2 JP2013542790A JP2013542790A JP6021819B2 JP 6021819 B2 JP6021819 B2 JP 6021819B2 JP 2013542790 A JP2013542790 A JP 2013542790A JP 2013542790 A JP2013542790 A JP 2013542790A JP 6021819 B2 JP6021819 B2 JP 6021819B2
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Japan
Prior art keywords
stage
guide rail
servo motor
stator
linear servo
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JP2013542790A
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English (en)
Japanese (ja)
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JPWO2013069156A1 (ja
Inventor
西脇　靖樹
靖樹 西脇
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Nippon Sharyo Ltd
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Nippon Sharyo Ltd
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Publication of JPWO2013069156A1 publication Critical patent/JPWO2013069156A1/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Machine Tool Units (AREA)
  • Linear Motors (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2013542790A 2011-11-11 2011-11-11 レーザ加工機用ステージ装置 Active JP6021819B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2011/076078 WO2013069156A1 (ja) 2011-11-11 2011-11-11 レーザ加工機用ステージ装置

Publications (2)

Publication Number Publication Date
JPWO2013069156A1 JPWO2013069156A1 (ja) 2015-04-02
JP6021819B2 true JP6021819B2 (ja) 2016-11-09

Family

ID=48288813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013542790A Active JP6021819B2 (ja) 2011-11-11 2011-11-11 レーザ加工機用ステージ装置

Country Status (5)

Country Link
JP (1) JP6021819B2 (zh)
CN (1) CN103930236B (zh)
HK (1) HK1199631A1 (zh)
SG (1) SG11201401234UA (zh)
WO (1) WO2013069156A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6410649B2 (ja) * 2015-03-27 2018-10-24 日本車輌製造株式会社 レーザ加工機およびレーザ加工機用ワーク治具
DE102016209649A1 (de) * 2015-07-08 2017-01-12 Heidelberger Druckmaschinen Aktiengesellschaft Vorrichtung zum Bedrucken von mehrdimensionalen Objekten
CN108213803A (zh) * 2018-03-27 2018-06-29 深圳市牧激科技有限公司 钣金切割机
CN109586505B (zh) * 2018-11-08 2021-02-09 徐州锋通信息科技有限公司 一种便捷使用的移动式操作台
CN112934599A (zh) * 2021-01-25 2021-06-11 广东立迪智能科技有限公司 一种多阀体涂胶设备

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03251072A (ja) * 1990-02-26 1991-11-08 Sharp Corp 直線駆動装置
JP2825323B2 (ja) * 1990-07-05 1998-11-18 三菱電機株式会社 ボイスコイル型リニアモータ
JPH07136985A (ja) * 1993-11-11 1995-05-30 Bando Kiko Kk 板状体の切断装置
JPH1080787A (ja) * 1996-09-06 1998-03-31 Amada Co Ltd レーザ加工機における駆動方法およびその装置
JP3639681B2 (ja) * 1996-11-18 2005-04-20 キヤノン株式会社 ステージ装置およびこれを用いた露光装置
JPH10277769A (ja) * 1997-04-07 1998-10-20 Amada Co Ltd レーザ加工機の駆動方法およびその装置
JP2000158256A (ja) * 1998-11-26 2000-06-13 Matsuura Machinery Corp 複合加工装置
JP2003311580A (ja) * 2002-04-17 2003-11-05 Amada Eng Center Co Ltd 工作機械の軌道保護ジャバラ支持装置
JP2004050272A (ja) * 2002-07-23 2004-02-19 Amada Eng Center Co Ltd 加工用移動体およびレーザ加工機
JP4335747B2 (ja) * 2003-07-18 2009-09-30 住友重機械工業株式会社 テーブルコータ機用ステージ装置
CN201073718Y (zh) * 2006-10-10 2008-06-18 深圳市大族激光科技股份有限公司 激光切割机装置
CN200988130Y (zh) * 2006-12-14 2007-12-12 江苏富力数控机床有限公司 直线电机驱动的数控激光切割机
JP4643685B2 (ja) * 2008-06-04 2011-03-02 株式会社日立ハイテクインスツルメンツ 駆動ステージ及びそれを用いたチップマウンタ
CN201516538U (zh) * 2009-09-24 2010-06-30 苏州苏大维格光电科技股份有限公司 双光学头激光并行加工的光刻系统

Also Published As

Publication number Publication date
WO2013069156A1 (ja) 2013-05-16
JPWO2013069156A1 (ja) 2015-04-02
CN103930236B (zh) 2015-12-16
HK1199631A1 (zh) 2015-07-10
SG11201401234UA (en) 2014-09-26
CN103930236A (zh) 2014-07-16

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