JP2012519078A - 短ストロークステージ用たわみガイド軸受 - Google Patents
短ストロークステージ用たわみガイド軸受 Download PDFInfo
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- JP2012519078A JP2012519078A JP2011552188A JP2011552188A JP2012519078A JP 2012519078 A JP2012519078 A JP 2012519078A JP 2011552188 A JP2011552188 A JP 2011552188A JP 2011552188 A JP2011552188 A JP 2011552188A JP 2012519078 A JP2012519078 A JP 2012519078A
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- Prior art keywords
- lens
- axis
- processing system
- laser processing
- flexure
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/035—Aligning the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/008—Systems with a plurality of bearings, e.g. four carriages supporting a slide on two parallel rails
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0618—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via porous material
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
- G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S33/00—Geometrical instruments
- Y10S33/21—Geometrical instruments with laser
Abstract
【解決手段】ビーム軸に沿いかつレンズを透過して伝播して、支持部に置かれた目標試料の作業表面にレーザビームが入射するレーザ加工システム。レンズはレーザビームの焦域を形成する。支持部は、レーザビームと目標試料を互いに対して作業表面の選択した位置に移動させる多軸位置決めシステムに動作可能に接続されている。アッセンブリは、レンズを支持し、輸送力に応じて、ビーム軸に沿ってレンズの移動を案内して作業表面に対してレーザビームの焦域を調節する少なくとも1つのたわみ部を有している。
【選択図】図5A
Description
Claims (12)
- レーザビームが、ビーム軸に沿いかつレンズを透過して伝播し、支持部に置かれた目標試料の作業表面上に入射し、前記レンズが、前記レーザビームの焦点域を形成し、前記支持部が、前記レーザビームと前記目標試料とを互いに対して前記作業表面の選択された位置に移動させる多軸位置決めシステムに動作可能に接続されたレーザ加工システムであって、
前記レンズを支持し、推進力に応じて、前記ビーム軸に沿って前記レンズの移動を案内して、前記作業表面に対して前記レーザビームの前記焦点域を調節する少なくとも1つのたわみ部を有するアッセンブリを備えることを特徴とするレーザ加工システム。 - 前記少なくとも1つのたわみ部は、互いに同一である複数のたわみ部をさらに備えることを特徴とする請求項1に記載のレーザ加工システム。
- 前記複数のたわみ部は、前記レンズを支持し、水平方向において互いに垂直に延びるX軸およびY軸に沿ったハウジングの反対側の平行な垂直方向に延びるZ軸方向に位置することを特徴とする請求項2に記載のレーザ加工システム。
- 前記少なくとも1つのたわみ部は、垂直方向に延びるZ軸に沿った短いストロークの移動を可能にしつつ、グループとして動作して、水平方向に互いに垂直に延びるX軸及びY軸に沿った移動に対して前記レンズを支持する複数のたわみ部をさらに備えることを特徴とする請求項1に記載のレーザ加工システム。
- 前記少なくとも1つのたわみ部は、垂直方向に延びる断面積が縮小された第1と第2の平行な細長い水平方向に延びるビームの少なくとも1つのセットを有する前記たわみ部の一対のビーム部をさらに備え、
前記平行な細長いビームの各セットが、前記推進力に応じてZ軸方向への移動を可能にすることを特徴とする請求項1に記載のレーザ加工システム。 - 前記少なくとも1つのたわみ部は、断面積が拡大された第1と第2の垂直方向に延びる細長い支持部材の少なくとも1つのセットを有する前記たわみ部の指示部をさらに備え、
前記第1と第2の細長い支持部材が、互いに垂直方向に離隔し、前記第1と第2の支持部材の間に延びた前記第1と第2の平行な細長いビームと互いに接続されることを特徴とする請求項5に記載のレーザ加工システム。 - 前記少なくとも1つのたわみ部は、垂直方向に延びる断面積が縮小された少なくとも第3と第4の平行な細長い水平方向に延びるビームを有する第2の一対のビーム部をさらに備え、
前記平行な細長い各セットが、前記推進力に応じて、Z軸方向の移動を可能にすることを特徴とする請求項6に記載のレーザ加工システム。 - 前記少なくとも1つのたわみ部は、断面積が拡大された第3と第4の支持部材の少なくとも1つのセットを有する前記たわみ部の第2の指示部をさらに備え、
前記第3と第4の支持部材が、互いに対して対向する関係の垂直方向に離隔したL字状構成であり、前記支持部材の対応する1つから延びる細長いビームの1つを通して互いに接続され、各ビームが、前記第2の支持部材の対向端に接続されることを特徴とする請求項7に記載のレーザ加工システム。 - 前記ビーム軸に沿った移動を案内され、前記レンズに動作可能に接続されて、前記推進力を加えて前記ビーム軸に沿って前記レンズを移動させ、これにより前記作業表面に対して前記レーザビームの前記点焦域を調節する移動自在部材を含むレンズフォーサをさらに備えることを特徴とする請求項1または2に記載のレーザ加工システム。
- 前記レンズフォーサは、前記移動自在部材の移動を制御する音声コイルアクチュエータを備えることを特徴とする請求項9に記載のレーザ加工システム。
- 前記レンズフェーサと前記レンズの間でバッファとして動作して、前記レンズフェーサの前記移動自在部材により前記レンズに加えられた前記案内移動から、前記レンズフェーサの前記移動自在部材の案内移動を分離する分離たわみ装置をさらに備えることを特徴とする請求項9に記載のレーザ加工システム。
- 前記分離たわみ装置は、前記ビーム軸に沿って硬く、前記ビーム軸を横断する平面において弾性を有することを特徴とする請求項11に記載のレーザ加工システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US12/394,966 | 2009-02-27 | ||
US12/394,966 US7886449B2 (en) | 2007-02-20 | 2009-02-27 | Flexure guide bearing for short stroke stage |
PCT/US2010/025551 WO2010099420A2 (en) | 2009-02-27 | 2010-02-26 | Flexure guide bearing for short stroke stage |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012519078A true JP2012519078A (ja) | 2012-08-23 |
JP2012519078A5 JP2012519078A5 (ja) | 2013-04-18 |
Family
ID=42666228
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011552188A Pending JP2012519078A (ja) | 2009-02-27 | 2010-02-26 | 短ストロークステージ用たわみガイド軸受 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7886449B2 (ja) |
JP (1) | JP2012519078A (ja) |
KR (1) | KR20110136822A (ja) |
CN (1) | CN102333615A (ja) |
TW (1) | TW201039953A (ja) |
WO (1) | WO2010099420A2 (ja) |
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2009
- 2009-02-27 US US12/394,966 patent/US7886449B2/en not_active Expired - Fee Related
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2010
- 2010-02-26 KR KR1020117022582A patent/KR20110136822A/ko not_active Application Discontinuation
- 2010-02-26 CN CN2010800094812A patent/CN102333615A/zh active Pending
- 2010-02-26 JP JP2011552188A patent/JP2012519078A/ja active Pending
- 2010-02-26 TW TW099105727A patent/TW201039953A/zh unknown
- 2010-02-26 WO PCT/US2010/025551 patent/WO2010099420A2/en active Application Filing
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JP2008068308A (ja) * | 2006-09-15 | 2008-03-27 | Keyence Corp | レーザ加工装置 |
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JP2019525730A (ja) * | 2016-06-12 | 2019-09-12 | 三生国健薬業(上海)股▲ふん▼有限公司Sunshine Guojian Pharmaceut Ical(Shanghai)Co.,Ltd | 抗ヒトインターロイキン−17aモノクローナル抗体、その製造方法及び用途 |
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KR20110136822A (ko) | 2011-12-21 |
TW201039953A (en) | 2010-11-16 |
CN102333615A (zh) | 2012-01-25 |
US20090161238A1 (en) | 2009-06-25 |
WO2010099420A3 (en) | 2010-10-28 |
US7886449B2 (en) | 2011-02-15 |
WO2010099420A2 (en) | 2010-09-02 |
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