JP6014036B2 - ２つの半導体デバイスでガスまたは液体セルを形成するための電子顕微鏡サンプルホルダ - Google Patents

２つの半導体デバイスでガスまたは液体セルを形成するための電子顕微鏡サンプルホルダ Download PDF

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JP6014036B2
JP6014036B2 JP2013523277A JP2013523277A JP6014036B2 JP 6014036 B2 JP6014036 B2 JP 6014036B2 JP 2013523277 A JP2013523277 A JP 2013523277A JP 2013523277 A JP2013523277 A JP 2013523277A JP 6014036 B2 JP6014036 B2 JP 6014036B2
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sample holder
sample
pocket
holder
microelectronic
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JP2013535795A (ja
JP2013535795A5 (enExample
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ダミアノ，ジュニア，ジョン
ピー． ナッカシ，デイビッド
ピー． ナッカシ，デイビッド
イー． ミック，ステフェン
イー． ミック，ステフェン
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プロトチップス，インコーポレイテッド
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/29—Reflection microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002—Controlling environment of sample
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002—Controlling environment of sample
    • H01J2237/2003—Environmental cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2007—Holding mechanisms

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2013523277A 2010-08-02 2011-08-02 ２つの半導体デバイスでガスまたは液体セルを形成するための電子顕微鏡サンプルホルダ Active JP6014036B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US36977210P 2010-08-02 2010-08-02
US61/369,772 2010-08-02
PCT/US2011/046282 WO2012018827A2 (en) 2010-08-02 2011-08-02 Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices

Related Child Applications (1)

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JP2016185328A Division JP2016219442A (ja) 2010-08-02 2016-09-23 ２つの半導体デバイスでガスまたは液体セルを形成するための電子顕微鏡サンプルホルダ

Publications (3)

Publication Number Publication Date
JP2013535795A JP2013535795A (ja) 2013-09-12
JP2013535795A5 JP2013535795A5 (enExample) 2014-09-18
JP6014036B2 true JP6014036B2 (ja) 2016-10-25

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JP2013523277A Active JP6014036B2 (ja) 2010-08-02 2011-08-02 ２つの半導体デバイスでガスまたは液体セルを形成するための電子顕微鏡サンプルホルダ
JP2016185328A Pending JP2016219442A (ja) 2010-08-02 2016-09-23 ２つの半導体デバイスでガスまたは液体セルを形成するための電子顕微鏡サンプルホルダ
JP2018018442A Active JP6532558B2 (ja) 2010-08-02 2018-02-05 ２つの半導体デバイスでガスまたは液体セルを形成するための電子顕微鏡サンプルホルダおよびサンプルを結像する方法

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JP2016185328A Pending JP2016219442A (ja) 2010-08-02 2016-09-23 ２つの半導体デバイスでガスまたは液体セルを形成するための電子顕微鏡サンプルホルダ
JP2018018442A Active JP6532558B2 (ja) 2010-08-02 2018-02-05 ２つの半導体デバイスでガスまたは液体セルを形成するための電子顕微鏡サンプルホルダおよびサンプルを結像する方法

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US (5) US8829469B2 (enExample)
EP (1) EP2601669B1 (enExample)
JP (3) JP6014036B2 (enExample)
DK (1) DK2601669T3 (enExample)
WO (1) WO2012018827A2 (enExample)

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JP6014036B2 (ja) 2010-08-02 2016-10-25 プロトチップス，インコーポレイテッド ２つの半導体デバイスでガスまたは液体セルを形成するための電子顕微鏡サンプルホルダ
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US9666409B2 (en) 2017-05-30
US20170278670A1 (en) 2017-09-28
JP2018085349A (ja) 2018-05-31
US8829469B2 (en) 2014-09-09
EP2601669B1 (en) 2017-04-05
US10043633B2 (en) 2018-08-07
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WO2012018827A3 (en) 2012-05-03
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US20150162164A1 (en) 2015-06-11
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US9324539B2 (en) 2016-04-26
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