JP5960384B2 - 静電チャック用基板及び静電チャック - Google Patents

静電チャック用基板及び静電チャック Download PDF

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Publication number
JP5960384B2
JP5960384B2 JP2010207515A JP2010207515A JP5960384B2 JP 5960384 B2 JP5960384 B2 JP 5960384B2 JP 2010207515 A JP2010207515 A JP 2010207515A JP 2010207515 A JP2010207515 A JP 2010207515A JP 5960384 B2 JP5960384 B2 JP 5960384B2
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Prior art keywords
electrode layer
substrate
electrostatic chuck
electrode
electrode layers
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JP2010207515A
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English (en)
Japanese (ja)
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JP2011119654A (ja
JP2011119654A5 (enExample
Inventor
忠義 吉川
忠義 吉川
晃樹 玉川
晃樹 玉川
直人 渡部
直人 渡部
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Shinko Electric Industries Co Ltd
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Shinko Electric Industries Co Ltd
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Priority to JP2010207515A priority Critical patent/JP5960384B2/ja
Priority to US12/910,493 priority patent/US8441772B2/en
Priority to KR1020100103213A priority patent/KR101731017B1/ko
Publication of JP2011119654A publication Critical patent/JP2011119654A/ja
Publication of JP2011119654A5 publication Critical patent/JP2011119654A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
JP2010207515A 2009-10-26 2010-09-16 静電チャック用基板及び静電チャック Active JP5960384B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010207515A JP5960384B2 (ja) 2009-10-26 2010-09-16 静電チャック用基板及び静電チャック
US12/910,493 US8441772B2 (en) 2009-10-26 2010-10-22 Substrate for electrostatic chuck and electrostatic chuck
KR1020100103213A KR101731017B1 (ko) 2009-10-26 2010-10-22 정전 척용 기판 및 정전 척

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009245268 2009-10-26
JP2009245268 2009-10-26
JP2010207515A JP5960384B2 (ja) 2009-10-26 2010-09-16 静電チャック用基板及び静電チャック

Publications (3)

Publication Number Publication Date
JP2011119654A JP2011119654A (ja) 2011-06-16
JP2011119654A5 JP2011119654A5 (enExample) 2013-07-18
JP5960384B2 true JP5960384B2 (ja) 2016-08-02

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JP2010207515A Active JP5960384B2 (ja) 2009-10-26 2010-09-16 静電チャック用基板及び静電チャック

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US (1) US8441772B2 (enExample)
JP (1) JP5960384B2 (enExample)
KR (1) KR101731017B1 (enExample)

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Publication number Publication date
US20110096461A1 (en) 2011-04-28
JP2011119654A (ja) 2011-06-16
KR101731017B1 (ko) 2017-04-27
KR20110046301A (ko) 2011-05-04
US8441772B2 (en) 2013-05-14

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