WO2018163935A1 - ウエハ支持台 - Google Patents
ウエハ支持台 Download PDFInfo
- Publication number
- WO2018163935A1 WO2018163935A1 PCT/JP2018/007542 JP2018007542W WO2018163935A1 WO 2018163935 A1 WO2018163935 A1 WO 2018163935A1 JP 2018007542 W JP2018007542 W JP 2018007542W WO 2018163935 A1 WO2018163935 A1 WO 2018163935A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electrode
- zone
- heater
- electrodes
- wafer
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
- H01J37/32724—Temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
Definitions
- the present invention relates to a wafer support.
- Patent Document 1 discloses, as this type of wafer support, a circular RF electrode and an annular RF electrode embedded in a ceramic base so that the depths from the wafer mounting surface are different from each other. It is disclosed. A flat plate upper electrode is disposed at a position facing the wafer placement surface of the wafer support. Then, plasma is generated by applying high-frequency power between the parallel plate electrodes composed of the plate upper electrode and the RF electrodes of the wafer support. Patent Document 1 describes that when plasma is generated, the plasma density distribution can be satisfactorily controlled by applying different high-frequency powers to the circular conducting RF electrode and the annular RF electrode.
- the distance between the flat plate upper electrode and the circular RF electrode and the distance between the flat plate upper electrode and the annular RF electrode are different, and the dielectric between the wafer mounting surface and the circular RF electrode.
- the thickness of the layer (ceramic substrate) and the thickness of the dielectric layer between the wafer mounting surface and the annular RF electrode are also different. Therefore, it has been difficult to control the plasma density distribution well.
- the present invention has been made to solve such problems, and an object thereof is to make it possible to easily control the density distribution of plasma.
- the wafer support of the present invention employs the following configuration.
- the wafer support of the present invention is A wafer support base in which an RF electrode and a heater electrode are embedded in this order from the wafer mounting surface side inside a disk-shaped ceramic substrate having a wafer mounting surface,
- the RF electrode is constituted by a plurality of RF zone electrodes formed for each zone on the same plane,
- the plurality of RF zone electrodes and the heater electrode are respectively independent of a plurality of RF zone electrode conductors and heater electrode conductors provided on the outside of the surface of the ceramic substrate opposite to the wafer mounting surface. It is connected, Is.
- the plurality of RF zone electrodes and heater electrodes are independent of the plurality of RF zone electrode conductors and heater electrode conductors provided outside the surface of the ceramic substrate opposite to the wafer mounting surface. Connected. Therefore, different high frequency power can be supplied for each RF zone electrode, and the plasma density distribution can be controlled well.
- the RF electrode is composed of a plurality of RF zone electrodes formed for each zone on the same plane. For this reason, the distance between the flat plate upper electrode disposed above the wafer support and each RF zone electrode is the same, and the thickness of the ceramic substrate (dielectric layer) between the wafer mounting surface and each RF zone electrode is the same. The thickness is the same. Therefore, it is possible to easily control the plasma density distribution to be good.
- the shape and number of RF zone electrodes can be determined arbitrarily.
- the RF electrode includes, as the plurality of RF zone electrodes, a circular electrode concentric with the ceramic substrate, or an electrode obtained by dividing the circular electrode into a plurality of parts, and further outside the circular electrode.
- the ceramic base and one or more concentric annular electrodes or an electrode obtained by dividing at least one of the annular electrodes into a plurality of parts may be included. Since the density distribution of the plasma is often different between the inner peripheral portion and the outer peripheral portion of the ceramic substrate, the circular electrode (or electrode obtained by dividing the circular electrode into a plurality of portions) and one or more circular electrodes (or circular electrodes) Is preferably divided into a plurality of divided electrodes).
- the RF zone electrode may be provided with a circular electrode concentric with the ceramic substrate, and one or more annular electrodes concentric with the ceramic substrate outside the circular electrode.
- a pair of semicircular electrodes obtained by dividing a ceramic base and a concentric circular electrode into halves, and one or more annular electrodes concentric with the ceramic base may be provided outside both the semicircular electrodes.
- the annular electrode may be divided into a plurality.
- the wafer support of the present invention includes a hollow ceramic shaft joined to a central region of the surface of the ceramic base opposite to the wafer mounting surface, and the plurality of RF zone electrode conductors and heater electrodes A conductor is disposed inside the ceramic shaft, and among the plurality of RF zone electrodes, the one provided at a position outside the central region where the ceramic shaft is projected onto the ceramic substrate is the RF zone electrode corresponding to itself.
- the jumper may be provided on a plane that is farther from the wafer mounting surface than the plane on which the RF electrode is provided, inside the ceramic substrate.
- the RF zone electrode of the position remove
- two or more RF zone electrodes among the plurality of RF zone electrodes are provided at positions deviating from the central region, and the jumpers provided for the two or more RF zone electrodes are provided on the same plane. It may be done.
- the thickness of the ceramic substrate is reduced compared to the case where each jumper is provided at a different depth.
- the jumper may be provided on the same plane as the heater electrode in a non-contact state with the heater electrode. In this way, the thickness of the ceramic substrate can be reduced.
- the heater electrode is composed of a plurality of heater zone electrodes that are the same as or different from the number of the RF zone electrodes, and the heater electrode conductor is provided on each of the plurality of heater zone electrodes. You may be comprised by the conductor for heater zone electrodes connected independently. In this way, since different electric power can be supplied for each heater zone electrode, variations in film forming property for each zone can be compensated and adjusted by adjusting the heater temperature.
- at least one heater zone electrode may be arranged in a gap between the RF zone electrodes when the ceramic substrate is viewed from the wafer mounting surface. When the RF power to be applied is increased, it is advantageous to increase the gap interval to suppress RF interference.
- the plasma density decreases in the gap portion where no RF electrode exists, and the in-plane plasma density becomes nonuniform. There is. Therefore, by arranging the heater zone electrode in the gap region, it is possible to compensate and adjust the film forming variation caused by the nonuniformity of the plasma density by adjusting the temperature distribution, that is, the heater temperature.
- the plurality of RF zone electrodes and the plurality of heater zone electrodes may be arranged to coincide with each other when the ceramic substrate is viewed from the wafer mounting surface. If it carries out like this, each RF zone electrode can be individually temperature-controlled by the heater zone electrode corresponding to it.
- FIG. 1 is a perspective view showing a schematic configuration of a plasma generator 10.
- FIG. 2 is a cross-sectional view taken along the line AA in FIG. BB sectional drawing of FIG.
- FIG. The perspective view which shows arrangement
- FIG. The perspective view which shows arrangement
- FIG. 1 is a perspective view of the plasma generator 10
- FIG. 2 is a cross-sectional view taken along the line AA of FIG. 1
- FIG. 3 is a cross-sectional view taken along the line BB of FIG. FIG.
- the plasma generator 10 includes a wafer support 20 and an upper electrode 50.
- the wafer support 20 is used to support and heat a wafer W that is subjected to CVD or etching using plasma, and is attached to the inside of a semiconductor process chamber (not shown).
- the wafer support 20 includes a ceramic base 22 and a hollow ceramic shaft 29.
- the ceramic substrate 22 is a disk-shaped member made of ceramic (for example, made of alumina or aluminum nitride) as shown in FIG.
- the ceramic substrate 22 includes a wafer placement surface 22a on which the wafer W can be placed.
- a ceramic shaft 29 is joined to the center of the surface (back surface) 22b of the ceramic base 22 opposite to the wafer mounting surface 22a.
- the RF electrode 23, the jumper 27, and the heater electrode 30 are embedded in the ceramic base 22 so as to be separated from each other.
- the RF electrode 23, the jumper 27, and the heater electrode 30 are embedded in this order from the side closer to the wafer mounting surface 22a.
- the RF electrode 23 is provided in parallel to the wafer placement surface 22a (including the case of being substantially parallel, the same applies hereinafter).
- the RF electrode 23 includes a first RF zone electrode 24 provided in a zone inside a circle 21 (see FIG. 3) having a predetermined radius (here, half or more of the radius of the ceramic substrate 22) from the center of the ceramic substrate 22, and the circle. 21 and a second RF zone electrode 25 provided in the outer zone.
- the first RF zone electrode 24 is a circular electrode that is concentric with the ceramic substrate 22.
- the second RF zone electrode 25 is an annular electrode that is provided outside the first RF zone electrode 24 and is concentric with the ceramic substrate 22.
- the first RF zone electrode 24 is provided so as to overlap with a circular central region 22c (a two-dot chain line in FIGS. 2 and 3) in which the ceramic shaft 29 is projected onto the ceramic base 22, but the second RF zone electrode 25 is , Provided at a position deviating from the central region 22c.
- the first and second RF zone electrodes 24 and 25 are both made of a conductive mesh sheet.
- the first RF zone electrode 24 has an electrode terminal 24a connected to the center of the back surface.
- the electrode terminal 24 a is provided so as to be exposed to the outside from the back surface 22 b of the ceramic substrate 22.
- the first RF zone electrode 24 is connected to the first RF zone electrode conductor 34 via the electrode terminal 24a.
- the first RF zone electrode conductor 34 is connected to the first AC power supply 44 through the hollow interior of the ceramic shaft 29 and the lower opening.
- the second RF zone electrode 25 is connected to the second RF zone electrode conductor 35 corresponding to itself (second RF zone electrode 25) via a jumper 27.
- the upper ends of the cylindrical internal terminals 25a and 25a are connected to two points slightly deviated from the diameter direction on the back surface of the second RF zone electrode 25.
- the jumper 27 is a conductive and belt-like mesh sheet parallel to the wafer mounting surface 22 a, and the electrode terminal 24 a and the first RF zone electrode conductor between the RF electrode 23 and the heater electrode 30 in the ceramic substrate 22. 34 is arranged so as not to interfere with.
- the jumper 27 has an electrode terminal 27a connected to the center of the back surface.
- the electrode terminal 27 a is provided so as to be exposed to the outside from the back surface 22 b of the ceramic substrate 22.
- the jumper 27 is connected to the second RF zone electrode conductor 35 through the electrode terminal 27a.
- the second RF zone electrode conductor 35 is connected to the second AC power supply 45 through the hollow interior of the ceramic shaft 29 and the lower opening.
- the heater electrode 30 is provided in parallel with the wafer placement surface 22a.
- the heater electrode 30 is within a circle having a diameter slightly smaller than the diameter of the ceramic substrate 22, and one of the two electrode terminals 30a and 30b disposed near the center of the circle is within the circle.
- the coil is wired to the other electrode terminal 30b in the manner of one-stroke writing over almost the entire surface.
- Each electrode terminal 30a, 30b is connected to the power supply 48 via the wiring members 38, 38 (heater electrode conductor).
- the material of the RF electrode 23, the jumper 27, and the heater electrode 30 may be the same or different. Although it will not specifically limit if it has electroconductivity as a material, For example, Mo, W, Nb, Mo compound, W compound, or Nb compound is mentioned. Among these, those having a small difference in thermal expansion coefficient from the ceramic substrate 22 are preferable.
- the ceramic shaft 29 is a cylindrical member made of the same ceramic as the ceramic substrate 22.
- the upper end surface of the ceramic shaft 29 is joined to the back surface 22b of the ceramic base 22 by diffusion bonding or TCB (Thermalcompressionbonding).
- TCB refers to a known method in which a metal bonding material is sandwiched between two members to be bonded, and the two members are pressure bonded while heated to a temperature equal to or lower than the solidus temperature of the metal bonding material.
- the upper electrode 50 is fixed to an upper position (for example, a ceiling surface of a chamber not shown) facing the wafer mounting surface 22a of the ceramic substrate 22.
- the upper electrode 50 is connected to the ground.
- the plasma generator 10 is placed in a chamber (not shown), and the wafer W is placed on the wafer placement surface 22a. Then, high frequency power is supplied from the first AC power supply 44 to the first RF zone electrode 24, and high frequency power is supplied from the second AC power supply 45 to the second RF zone electrode 25. By doing so, plasma is generated between the parallel plate electrodes composed of the upper electrode 50 and the RF electrode 23 embedded in the ceramic substrate 22, and the wafer W is subjected to CVD film formation or etching using the plasma.
- the temperature of the wafer W is obtained based on a detection signal of a thermocouple (not shown), and the voltage applied to the heater electrode 30 is controlled so that the temperature becomes a set temperature (for example, 350 ° C. or 300 ° C.).
- the first and second RF zone electrodes 24 and 25 have different high frequency powers (for example, different wattage powers at the same frequency, different wattage powers at different frequencies, or different frequencies). Different wattage power, etc.) can be supplied, and the plasma density distribution can be well controlled.
- the first and second RF zone electrodes 24 and 25 are formed on the same plane. Therefore, the distance between the upper electrode 50 disposed above the wafer support 20 and each RF zone electrode 24, 25 is the same, and the ceramic between the wafer mounting surface 22a and each RF zone electrode 24, 25 is the same.
- the substrate 22 has the same thickness (the thickness of the dielectric layer). Therefore, it is possible to easily control the plasma density distribution to be good.
- the RF electrode 23 is connected to the inner peripheral circular electrode (first RF zone electrode 24) and the outer peripheral side as described above. It is preferable to divide it into an annular electrode (second RF zone electrode 25).
- the second RF zone electrode 25 deviated from the central region 22 c where the ceramic shaft 29 is projected on the ceramic base 22 is wired to the RF zone electrode conductor 35 corresponding to the second RF zone electrode 25 using the jumper 27. be able to.
- the RF electrode 23 is configured by the first and second RF zone electrodes 24 and 25 on the same plane, but the RF electrode may be configured by three or more RF zone electrodes on the same plane.
- FIG. 5 shows an example in which the RF electrode 123 is composed of first to third RF zone electrodes 124 to 126 on the same plane.
- the same components as those in the above-described embodiment are denoted by the same reference numerals.
- the wiring members 38 and 38 and the power source 48 of the heater 30 are omitted.
- the first RF zone electrode 124 is a circular electrode concentric with the ceramic base 22, and the second and third RF zone electrodes 125 and 126 are circular electrodes concentric with the ceramic base 22.
- the first RF zone electrode 124 is provided so as to overlap with a circular central region 22 c (a two-dot chain line in FIGS. 2 and 3) in which the ceramic shaft 29 is projected onto the ceramic base 22.
- the first RF zone electrode 124 is connected to the first RF zone electrode conductor 134 via the electrode terminal 124 a connected to the center of the back surface, and is further connected to the first AC power supply 144.
- the second and third RF zone electrodes 125 and 126 are provided at positions away from the central region 22c.
- the second RF zone electrode 125 is connected to the jumper 127 via two internal terminals 125a.
- the jumper 127 is connected to the second RF zone electrode conductor 135 via the electrode terminal 127a and further connected to the second AC power source 145.
- the third RF zone electrode 126 is connected to the jumper 128 via two internal terminals 126a.
- the jumper 128 is connected to the third RF zone electrode conductor 136 via the electrode terminal 128a and further connected to the third AC power source 146. Yes.
- the two jumpers 127 and 128 are provided on the same plane.
- the plane on which the two jumpers 127 and 128 are provided is located between the plane on which the RF electrode 123 is provided and the plane on which the heater electrode 30 is provided.
- the same effects as those of the above-described embodiment can be obtained.
- the plasma density distribution can be controlled better.
- the jumpers 127 and 128 are provided on the same plane, the thickness of the ceramic base 22 is reduced compared to the case where the jumpers 127 and 128 are provided at different depths. When the thickness of the ceramic substrate 22 is reduced, the heat capacity thereof is reduced, so that the temperature adjustment of the ceramic substrate 22 and thus the temperature of the wafer can be quickly performed.
- the jumper 27 and the heater electrode 30 are provided at different depths of the ceramic base 22, but the jumper 27 and the heater electrode 30 are on the same plane in the ceramic base 22 as shown in FIG. It may be provided.
- the same components as those in the above-described embodiment are denoted by the same reference numerals.
- the wiring members 38 and 38 and the power supply 48 of the heater 30 are omitted. In this way, the thickness of the ceramic substrate 22 can be further reduced.
- the heater electrode 130 of FIG. 7 includes a first heater zone electrode 131 provided in a circular zone inside a circle 133 having a predetermined radius (for example, half or more of the radius of the ceramic substrate 22) from the center of the ceramic substrate 22,
- the second heater zone electrode 132 is provided in the annular zone outside the circle 133.
- the first heater zone electrode 131 consists of one electrode terminal 131a of the two electrode terminals 131a and 131b arranged near the center of the ceramic substrate 22 and the other electrode terminal in the manner of one stroke over almost the entire surface of the circular zone.
- a coil is wired up to 131b.
- Each electrode terminal 131a, 131b is connected to the 1st power supply 141 via the wiring member.
- the second heater zone electrode 132 extends from one electrode terminal 132a of the two electrode terminals 132a and 132b disposed near the center of the ceramic substrate 22 to the annular zone and then substantially the entire surface of the annular zone.
- the coil is wired in the manner of one stroke, and returned to the other electrode terminal 132b.
- Each electrode terminal 132a, 132b is connected to the 2nd power supply 142 via the wiring member.
- the first and second RF zones when the ceramic substrate 22 is viewed from the wafer mounting surface 22a may be disposed in the gap G between the electrodes 24 and 25.
- the RF power to be applied is increased, it is advantageous to reduce the RF interference by increasing the gap G.
- the plasma density is reduced in the gap G where the RF electrode is not present, and the in-plane plasma density is reduced. May be uniform.
- the first RF zone electrode 24 is the first when the ceramic substrate 22 is viewed from the wafer mounting surface W as shown in FIG.
- the first heater zone electrode 131 may be arranged so that the second RF zone electrode 25 coincides with the second heater zone electrode 132. In this way, the temperature of each of the RF zone electrodes 24 and 25 can be individually controlled by the heater zone electrodes 131 and 132 corresponding thereto.
- the RF electrode 23 is composed of the first RF zone electrode 24 that is a circular electrode and the second RF zone electrode 25 that is an annular electrode, but the second RF zone electrode 25 that is an annular electrode is divided into a plurality of parts.
- an AC power supply may be individually connected to each divided electrode, or the first RF zone electrode 24 that is a circular electrode may be divided into a plurality of parts and an AC power supply may be individually connected to each divided electrode.
- FIG. 10 illustrates a case where the second RF zone electrode 25 constituting the RF electrode 23 is divided into three arc-shaped electrodes 251 to 253.
- FIG. 11 illustrates a case where the second RF zone electrode 25 constituting the RF electrode 23 is divided into three arc-shaped electrodes 251 to 253 and the first RF zone electrode 24 is further divided into two semicircular electrodes 241 and 242. .
- the two internal terminals 25a, 25a for connecting the second RF zone electrode 25 and the jumper 27 are provided at positions slightly deviated from the diameter of the ceramic base 22, but are provided on the diameter of the ceramic base 22. Also good. In that case, as shown in FIG. 12, the jumper 27 may be bent so that the jumper 27 does not interfere with the electrode terminal 24a.
- the second RF zone electrode 25 and the jumper 27 are connected via the internal terminals 25a and 25a. However, even if the second RF zone electrode 25 and the jumper 27 are connected via the single internal terminal 25a. Good. In this way, the length of the jumper 27 can be made to be the same length (shortened) as the radius of the ceramic substrate 22.
- the first and second RF zone electrodes 24 and 25 and the jumper 27 are all formed of a conductive mesh sheet.
- the first and second RF zone electrodes 24 and 25 and the jumper 27 are not particularly limited to the mesh sheet.
- a sheet (such as a metal foil) may be used.
- the wafer W may be attracted to the wafer mounting surface 22a by applying a voltage to the RF electrode 23.
- an electrostatic electrode may be further embedded in the ceramic substrate 22, and the wafer W may be attracted to the wafer mounting surface 22a by applying a voltage to the electrostatic electrode.
- the method for manufacturing the wafer support 20 is not particularly limited thereto, and the wafer support 20 is formed by another known manufacturing method. It may be manufactured.
- the wafer support 20 may be manufactured according to the manufacturing method described in Japanese Patent Application Laid-Open No. 2012-89694.
- the present invention can be used when plasma processing a wafer.
- Plasma generator 20 Wafer support, 21 yen, 22 Ceramic substrate, 22a Wafer mounting surface, 22b Back surface, 22c Central region, 23 RF electrode, 24 1st RF zone electrode, 24a electrode terminal, 25 2nd RF zone electrode, 25a internal terminal, 27 jumper, 27a electrode terminal, 29 ceramic shaft, 30 heater electrode, 30a, 30b electrode terminal, 34 first RF zone electrode conductor, 35 second RF zone electrode conductor, 38 wiring member, 44 first AC power supply 45 second AC power supply, 48 power supply, 50 upper electrode, 123 RF electrode, 124 first RF zone electrode, 124a electrode terminal, 125 second RF zone electrode, 125a internal terminal, 126 third RF zone electrode, 126a internal terminal, 127, 128 , 127a, 128a electrode terminal, 130 heater electrode, 131 first heater zone electrode, 131a, 131b electrode terminal, 132 second heater zone electrode, 132a, 132b electrode terminal, 133 yen, 134 first RF zone electrode conductor, 135 2
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
ウエハ載置面を有する円板状のセラミック基体の内部にRF電極とヒータ電極とが前記ウエハ載置面側からこの順に埋設されたウエハ支持台であって、
前記RF電極は、同一平面上のゾーンごとに形成された複数のRFゾーン電極によって構成され、
前記複数のRFゾーン電極及び前記ヒータ電極は、前記セラミック基体の前記ウエハ載置面とは反対側の面の外側に設けられた複数のRFゾーン電極用導体及びヒータ電極用導体にそれぞれ独立して接続されている、
ものである。
Claims (8)
- ウエハ載置面を有する円板状のセラミック基体の内部にRF電極とヒータ電極とが前記ウエハ載置面側からこの順に埋設されたウエハ支持台であって、
前記RF電極は、同一平面上のゾーンごとに形成された複数のRFゾーン電極によって構成され、
前記複数のRFゾーン電極及び前記ヒータ電極は、前記セラミック基体の前記ウエハ載置面とは反対側の面の外側に設けられた複数のRFゾーン電極用導体及びヒータ電極用導体にそれぞれ独立して接続されている、
ウエハ支持台。 - 前記RF電極は、前記複数のRFゾーン電極として、前記セラミック基体と同心円状の円形電極か前記円形電極を複数に分割した電極を含み、更に、前記円形電極の外側に前記セラミック基体と同心円の1以上の円環電極か前記円環電極の少なくとも1つを複数に分割した電極とを含む、
請求項1に記載のウエハ支持台。 - 請求項1又は2に記載のウエハ支持台であって、
前記セラミック基体の前記ウエハ載置面とは反対側の面の中央領域に接合された中空のセラミックシャフト
を備え、
前記複数のRFゾーン電極用導体及び前記ヒータ電極用導体は前記セラミックシャフトの内部に配置され、
前記複数のRFゾーン電極のうち前記セラミック基体に前記セラミックシャフトを投影した中央領域から外れた位置に設けられたものは、自身に対応する前記RFゾーン電極用導体とジャンパを介して接続され、
前記ジャンパは、前記セラミック基体の内部であって前記RF電極が設けられた平面よりも前記ウエハ載置面から離れた平面上に設けられている、
ウエハ支持台。 - 前記複数のRFゾーン電極のうち2以上のRFゾーン電極が前記中央領域から外れた位置に設けられており、
前記2以上のRFゾーン電極ごとに設けられる前記ジャンパは同一平面上に設けられている、
請求項3に記載のウエハ支持台。 - 前記ジャンパは、前記ヒータ電極と同一平面に前記ヒータ電極と非接触な状態で設けられている、
請求項3又は4に記載のウエハ支持台。 - 前記ヒータ電極は、前記RFゾーン電極の数と同数又は異なる数の複数のヒータゾーン電極によって構成され、
前記ヒータ電極用導体は、前記複数のヒータゾーン電極のそれぞれに独立して接続されるヒータゾーン電極用導体によって構成されている、
請求項1~5のいずれか1項に記載のウエハ支持台。 - 前記セラミック基体を前記ウエハ載置面から見たときに前記RFゾーン電極同士の間のギャップには少なくとも1つの前記ヒータゾーン電極が配置されている、
請求項6に記載のウエハ支持台。 - 前記セラミック基体を前記ウエハ載置面から見たときに前記複数のRFゾーン電極と前記複数のヒータゾーン電極とが一致するように配置されている、
請求項6に記載のウエハ支持台。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020197024977A KR102225236B1 (ko) | 2017-03-06 | 2018-02-28 | 웨이퍼 지지대 |
CN201880009006.1A CN110235237B (zh) | 2017-03-06 | 2018-02-28 | 晶圆支撑台 |
JP2019504504A JP6754890B2 (ja) | 2017-03-06 | 2018-02-28 | ウエハ支持台 |
US16/526,049 US11476096B2 (en) | 2017-03-06 | 2019-07-30 | Wafer support table |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201762467430P | 2017-03-06 | 2017-03-06 | |
US62/467,430 | 2017-03-06 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US16/526,049 Continuation US11476096B2 (en) | 2017-03-06 | 2019-07-30 | Wafer support table |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2018163935A1 true WO2018163935A1 (ja) | 2018-09-13 |
Family
ID=63447556
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2018/007542 WO2018163935A1 (ja) | 2017-03-06 | 2018-02-28 | ウエハ支持台 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11476096B2 (ja) |
JP (1) | JP6754890B2 (ja) |
KR (1) | KR102225236B1 (ja) |
CN (1) | CN110235237B (ja) |
TW (1) | TWI763790B (ja) |
WO (1) | WO2018163935A1 (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2018179891A1 (ja) * | 2017-03-28 | 2020-02-06 | 住友電気工業株式会社 | ウエハ保持体 |
WO2020075576A1 (ja) * | 2018-10-11 | 2020-04-16 | 日本発條株式会社 | ステージ、成膜装置、および膜加工装置 |
JP2020064841A (ja) * | 2018-10-11 | 2020-04-23 | 日本発條株式会社 | ステージ、成膜装置、および膜加工装置 |
WO2020129754A1 (ja) * | 2018-12-20 | 2020-06-25 | 日本碍子株式会社 | セラミックヒータ |
JPWO2021024858A1 (ja) * | 2019-08-08 | 2021-02-11 | ||
WO2021126857A1 (en) * | 2019-12-17 | 2021-06-24 | Applied Materials, Inc. | Multi-zone electrostatic chuck |
WO2022004210A1 (ja) * | 2020-06-29 | 2022-01-06 | 住友大阪セメント株式会社 | ウエハ支持装置 |
TWI818342B (zh) * | 2021-02-10 | 2023-10-11 | 日商日本碍子股份有限公司 | 陶瓷加熱器 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11289355B2 (en) * | 2017-06-02 | 2022-03-29 | Lam Research Corporation | Electrostatic chuck for use in semiconductor processing |
KR20240050466A (ko) | 2018-01-31 | 2024-04-18 | 램 리써치 코포레이션 | 정전 척 (electrostatic chuck, ESC) 페데스탈 전압 분리 |
US11086233B2 (en) | 2018-03-20 | 2021-08-10 | Lam Research Corporation | Protective coating for electrostatic chucks |
US11688586B2 (en) * | 2018-08-30 | 2023-06-27 | Tokyo Electron Limited | Method and apparatus for plasma processing |
CN115769354A (zh) * | 2020-06-03 | 2023-03-07 | 朗姆研究公司 | 用于高效率传热的单块式基座 |
KR20230078792A (ko) * | 2020-10-01 | 2023-06-02 | 램 리써치 코포레이션 | 연장된 정전 척 (electrostatic chuck) 전극을 갖는 고온 페데스탈 |
WO2022146667A1 (en) | 2020-12-29 | 2022-07-07 | Mattson Technology, Inc. | Electrostatic chuck assembly for plasma processing apparatus |
CN114975053A (zh) | 2021-05-28 | 2022-08-30 | 北京屹唐半导体科技股份有限公司 | 用于等离子体处理设备的静电吸盘组件 |
JP2023088622A (ja) * | 2021-12-15 | 2023-06-27 | 日本碍子株式会社 | ウエハ載置台 |
JP7478767B2 (ja) * | 2022-03-03 | 2024-05-07 | 日本碍子株式会社 | セラミックヒータ |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003160874A (ja) * | 2001-09-11 | 2003-06-06 | Sumitomo Electric Ind Ltd | 被処理物保持体、半導体製造装置用サセプタおよび処理装置 |
JP2005197391A (ja) * | 2004-01-06 | 2005-07-21 | Ibiden Co Ltd | プラズマ発生装置用電極埋設部材 |
WO2005093806A1 (ja) * | 2004-03-26 | 2005-10-06 | Hitachi Kokusai Electric Inc. | 半導体製造装置および半導体装置の製造方法 |
JP2011119654A (ja) * | 2009-10-26 | 2011-06-16 | Shinko Electric Ind Co Ltd | 静電チャック用基板及び静電チャック |
US20120103970A1 (en) * | 2010-05-13 | 2012-05-03 | Applied Materials, Inc. | Heater with independent center zone control |
WO2016080502A1 (ja) * | 2014-11-20 | 2016-05-26 | 住友大阪セメント株式会社 | 静電チャック装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005018992A (ja) * | 2003-06-23 | 2005-01-20 | Ibiden Co Ltd | プラズマ発生装置用電極埋設部材 |
US7618494B2 (en) * | 2003-08-18 | 2009-11-17 | Tokyo Electron Limited | Substrate holding structure and substrate processing device |
US20070044914A1 (en) * | 2005-08-30 | 2007-03-01 | Katsuji Matano | Vacuum processing apparatus |
JP2009054871A (ja) * | 2007-08-28 | 2009-03-12 | Tokyo Electron Ltd | 載置台構造及び処理装置 |
JP5896595B2 (ja) * | 2010-10-20 | 2016-03-30 | ラム リサーチ コーポレーションLam Research Corporation | 2層rf構造のウエハ保持体 |
US20120164834A1 (en) * | 2010-12-22 | 2012-06-28 | Kevin Jennings | Variable-Density Plasma Processing of Semiconductor Substrates |
US20150194326A1 (en) | 2014-01-07 | 2015-07-09 | Applied Materials, Inc. | Pecvd ceramic heater with wide range of operating temperatures |
US10950477B2 (en) * | 2015-08-07 | 2021-03-16 | Applied Materials, Inc. | Ceramic heater and esc with enhanced wafer edge performance |
-
2018
- 2018-02-28 JP JP2019504504A patent/JP6754890B2/ja active Active
- 2018-02-28 CN CN201880009006.1A patent/CN110235237B/zh active Active
- 2018-02-28 WO PCT/JP2018/007542 patent/WO2018163935A1/ja active Application Filing
- 2018-02-28 KR KR1020197024977A patent/KR102225236B1/ko active IP Right Grant
- 2018-03-02 TW TW107107047A patent/TWI763790B/zh active
-
2019
- 2019-07-30 US US16/526,049 patent/US11476096B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003160874A (ja) * | 2001-09-11 | 2003-06-06 | Sumitomo Electric Ind Ltd | 被処理物保持体、半導体製造装置用サセプタおよび処理装置 |
JP2005197391A (ja) * | 2004-01-06 | 2005-07-21 | Ibiden Co Ltd | プラズマ発生装置用電極埋設部材 |
WO2005093806A1 (ja) * | 2004-03-26 | 2005-10-06 | Hitachi Kokusai Electric Inc. | 半導体製造装置および半導体装置の製造方法 |
JP2011119654A (ja) * | 2009-10-26 | 2011-06-16 | Shinko Electric Ind Co Ltd | 静電チャック用基板及び静電チャック |
US20120103970A1 (en) * | 2010-05-13 | 2012-05-03 | Applied Materials, Inc. | Heater with independent center zone control |
WO2016080502A1 (ja) * | 2014-11-20 | 2016-05-26 | 住友大阪セメント株式会社 | 静電チャック装置 |
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7184034B2 (ja) | 2017-03-28 | 2022-12-06 | 住友電気工業株式会社 | ウエハ保持体 |
JPWO2018179891A1 (ja) * | 2017-03-28 | 2020-02-06 | 住友電気工業株式会社 | ウエハ保持体 |
WO2020075576A1 (ja) * | 2018-10-11 | 2020-04-16 | 日本発條株式会社 | ステージ、成膜装置、および膜加工装置 |
JP2020064841A (ja) * | 2018-10-11 | 2020-04-23 | 日本発條株式会社 | ステージ、成膜装置、および膜加工装置 |
KR102558722B1 (ko) | 2018-12-20 | 2023-07-24 | 엔지케이 인슐레이터 엘티디 | 세라믹 히터 |
WO2020129754A1 (ja) * | 2018-12-20 | 2020-06-25 | 日本碍子株式会社 | セラミックヒータ |
KR20210045473A (ko) * | 2018-12-20 | 2021-04-26 | 엔지케이 인슐레이터 엘티디 | 세라믹 히터 |
US11895742B2 (en) | 2018-12-20 | 2024-02-06 | Ngk Insulators, Ltd. | Ceramic heater |
JP6775099B1 (ja) * | 2018-12-20 | 2020-10-28 | 日本碍子株式会社 | セラミックヒータ |
CN111656860B (zh) * | 2018-12-20 | 2022-05-27 | 日本碍子株式会社 | 陶瓷加热器 |
CN111656860A (zh) * | 2018-12-20 | 2020-09-11 | 日本碍子株式会社 | 陶瓷加热器 |
JPWO2021024858A1 (ja) * | 2019-08-08 | 2021-02-11 | ||
WO2021024858A1 (ja) * | 2019-08-08 | 2021-02-11 | 日本碍子株式会社 | 半導体製造装置用部材 |
US11996313B2 (en) | 2019-08-08 | 2024-05-28 | Ngk Insulators, Ltd. | Member for semiconductor manufacturing apparatus |
JP7331107B2 (ja) | 2019-08-08 | 2023-08-22 | 日本碍子株式会社 | 半導体製造装置用部材 |
US11270903B2 (en) | 2019-12-17 | 2022-03-08 | Applied Materials, Inc. | Multi zone electrostatic chuck |
WO2021126857A1 (en) * | 2019-12-17 | 2021-06-24 | Applied Materials, Inc. | Multi-zone electrostatic chuck |
KR20230043781A (ko) | 2020-06-29 | 2023-03-31 | 스미토모 오사카 세멘토 가부시키가이샤 | 웨이퍼 지지 장치 |
WO2022004210A1 (ja) * | 2020-06-29 | 2022-01-06 | 住友大阪セメント株式会社 | ウエハ支持装置 |
TWI818342B (zh) * | 2021-02-10 | 2023-10-11 | 日商日本碍子股份有限公司 | 陶瓷加熱器 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2018163935A1 (ja) | 2019-12-26 |
JP6754890B2 (ja) | 2020-09-16 |
US11476096B2 (en) | 2022-10-18 |
KR102225236B1 (ko) | 2021-03-10 |
KR20190109496A (ko) | 2019-09-25 |
US20190355556A1 (en) | 2019-11-21 |
TW201836058A (zh) | 2018-10-01 |
CN110235237A (zh) | 2019-09-13 |
TWI763790B (zh) | 2022-05-11 |
CN110235237B (zh) | 2023-12-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2018163935A1 (ja) | ウエハ支持台 | |
JP6773917B2 (ja) | ウエハ支持台 | |
JP5962833B2 (ja) | 静電チャック | |
TW202121619A (zh) | 用於基板支撐件的整合電極和接地平面 | |
KR101929278B1 (ko) | 정전 척 | |
CN108376635B (zh) | 晶圆支承台 | |
WO2019065710A1 (ja) | 静電チャック装置 | |
WO2018159687A1 (ja) | ウエハ加熱装置 | |
WO2020153086A1 (ja) | セラミックヒータ | |
WO2020153071A1 (ja) | セラミックヒータ | |
JP2022120251A (ja) | ウエハ支持台 | |
KR102021353B1 (ko) | 정전척의 에지 링 | |
JP7202326B2 (ja) | セラミックヒータ | |
JP2023087447A (ja) | ウエハ載置台 | |
WO2018135270A1 (ja) | 試料保持具 | |
KR20120009572A (ko) | 세라믹 히터 | |
JP2019096522A (ja) | 絶縁構造 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 18763917 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2019504504 Country of ref document: JP Kind code of ref document: A |
|
ENP | Entry into the national phase |
Ref document number: 20197024977 Country of ref document: KR Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 18763917 Country of ref document: EP Kind code of ref document: A1 |