JP5941588B2 - 接合材およびそれを用いた接合方法 - Google Patents

接合材およびそれを用いた接合方法 Download PDF

Info

Publication number
JP5941588B2
JP5941588B2 JP2015168573A JP2015168573A JP5941588B2 JP 5941588 B2 JP5941588 B2 JP 5941588B2 JP 2015168573 A JP2015168573 A JP 2015168573A JP 2015168573 A JP2015168573 A JP 2015168573A JP 5941588 B2 JP5941588 B2 JP 5941588B2
Authority
JP
Japan
Prior art keywords
copper
bonding material
mass
bonding
joining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015168573A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016053216A (ja
JP2016053216A5 (https=
Inventor
圭一 遠藤
圭一 遠藤
宏昌 三好
宏昌 三好
公一 本村
公一 本村
哲 栗田
哲 栗田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dowa Electronics Materials Co Ltd
Original Assignee
Dowa Electronics Materials Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dowa Electronics Materials Co Ltd filed Critical Dowa Electronics Materials Co Ltd
Priority to EP15838051.9A priority Critical patent/EP3189914B1/en
Priority to PCT/JP2015/004401 priority patent/WO2016035314A1/ja
Priority to MYPI2017700499A priority patent/MY182241A/en
Priority to CN201580046686.0A priority patent/CN107249787B/zh
Priority to US15/506,823 priority patent/US10821558B2/en
Priority to KR1020177008601A priority patent/KR102359193B1/ko
Priority to TW104128611A priority patent/TWI642511B/zh
Priority to JP2016061187A priority patent/JP6900150B2/ja
Publication of JP2016053216A publication Critical patent/JP2016053216A/ja
Publication of JP2016053216A5 publication Critical patent/JP2016053216A5/ja
Application granted granted Critical
Publication of JP5941588B2 publication Critical patent/JP5941588B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550°C
    • B23K35/302—Cu as the principal constituent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05—Metallic powder characterised by the size or surface area of the particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/10—Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/008—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression characterised by the composition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/06—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools
    • B22F7/08—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools with one or more parts not made from powder
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/16—Making metallic powder or suspensions thereof using chemical processes
    • B22F9/18—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds
    • B22F9/24—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from liquid metal compounds, e.g. solutions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • B23K1/0016—Soldering of electronic components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/008—Soldering within a furnace
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/19—Soldering, e.g. brazing, or unsoldering taking account of the properties of the materials to be soldered
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • B23K20/023—Thermo-compression bonding
    • B23K20/026—Thermo-compression bonding with diffusion of soldering material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/16—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating with interposition of special material to facilitate connection of the parts, e.g. material for absorbing or producing gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/22—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded
    • B23K20/233—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded without ferrous layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering or brazing
    • B23K35/0244—Powders, particles or spheres; Preforms made therefrom
    • B23K35/025—Pastes, creams or slurries
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/36—Selection of non-metallic compositions, e.g. coatings or fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K5/00—Gas flame welding
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C9/00—Alloys based on copper
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20—Conductive material dispersed in non-conductive organic material
    • H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/06—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools
    • B22F7/062—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools involving the connection or repairing of preformed parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/42—Printed circuits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/08—Non-ferrous metals or alloys
    • B23K2103/12—Copper or alloys thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/013—Manufacture or treatment of die-attach connectors
    • H10W72/01365—Thermally treating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07331—Connecting techniques
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07331—Connecting techniques
    • H10W72/07332—Compression bonding, e.g. thermocompression bonding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07341—Controlling the bonding environment, e.g. atmosphere composition or temperature
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H10W72/321—Structures or relative sizes of die-attach connectors
    • H10W72/325—Die-attach connectors having a filler embedded in a matrix
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H10W72/351—Materials of die-attach connectors
    • H10W72/352—Materials of die-attach connectors comprising metals or metalloids, e.g. solders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H10W72/351—Materials of die-attach connectors
    • H10W72/353—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/736—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Composite Materials (AREA)
  • Physics & Mathematics (AREA)
  • Dispersion Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Powder Metallurgy (AREA)
  • Conductive Materials (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
JP2015168573A 2014-09-01 2015-08-28 接合材およびそれを用いた接合方法 Active JP5941588B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
KR1020177008601A KR102359193B1 (ko) 2014-09-01 2015-08-31 접합재 및 그것을 사용한 접합 방법
MYPI2017700499A MY182241A (en) 2014-09-01 2015-08-31 Bonding material and bonding method using same
CN201580046686.0A CN107249787B (zh) 2014-09-01 2015-08-31 粘合材料和使用所述粘合材料的粘合方法
US15/506,823 US10821558B2 (en) 2014-09-01 2015-08-31 Bonding material and bonding method using same
EP15838051.9A EP3189914B1 (en) 2014-09-01 2015-08-31 Bonding material and bonding method using same
TW104128611A TWI642511B (zh) 2014-09-01 2015-08-31 接合材及使用其之接合方法
PCT/JP2015/004401 WO2016035314A1 (ja) 2014-09-01 2015-08-31 接合材およびそれを用いた接合方法
JP2016061187A JP6900150B2 (ja) 2014-09-01 2016-03-25 接合材およびそれを用いた接合方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014176724 2014-09-01
JP2014176724 2014-09-01

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2016061187A Division JP6900150B2 (ja) 2014-09-01 2016-03-25 接合材およびそれを用いた接合方法

Publications (3)

Publication Number Publication Date
JP2016053216A JP2016053216A (ja) 2016-04-14
JP2016053216A5 JP2016053216A5 (https=) 2016-06-02
JP5941588B2 true JP5941588B2 (ja) 2016-06-29

Family

ID=55744886

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2015168573A Active JP5941588B2 (ja) 2014-09-01 2015-08-28 接合材およびそれを用いた接合方法
JP2016061187A Active JP6900150B2 (ja) 2014-09-01 2016-03-25 接合材およびそれを用いた接合方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2016061187A Active JP6900150B2 (ja) 2014-09-01 2016-03-25 接合材およびそれを用いた接合方法

Country Status (4)

Country Link
US (1) US10821558B2 (https=)
JP (2) JP5941588B2 (https=)
CN (1) CN107249787B (https=)
TW (1) TWI642511B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5941588B2 (ja) * 2014-09-01 2016-06-29 Ｄｏｗａエレクトロニクス株式会社 接合材およびそれを用いた接合方法
JP2020038896A (ja) * 2018-09-04 2020-03-12 古河電気工業株式会社 接合構造体及び接合構造体の製造方法
CN115989105A (zh) * 2020-09-30 2023-04-18 株式会社大阪曹達 导电性粘接剂
JP7766900B2 (ja) 2021-02-05 2025-11-11 株式会社マテリアル・コンセプト 銅ペースト
JP7827833B2 (ja) * 2022-03-30 2026-03-10 三井金属株式会社 接合体の製造方法及び被接合体の接合方法
WO2026018783A1 (ja) * 2024-07-16 2026-01-22 三井金属株式会社 接合用組成物、接合構造体の製造方法、及び被接合体の仮固定方法

Family Cites Families (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2606132A (en) * 1950-04-15 1952-08-05 Glidden Co Copper brazing compositions
JPS6040890B2 (ja) * 1977-05-30 1985-09-13 大陽酸素株式会社 ガス中の水素、一酸化炭素や酸素などを除去する除去剤
JP2788510B2 (ja) * 1989-10-27 1998-08-20 第一工業製薬株式会社 銅ペースト組成物
JP3350949B2 (ja) * 1992-02-20 2002-11-25 株式会社村田製作所 導電性ペースト
JP4001438B2 (ja) * 1999-05-31 2007-10-31 三井金属鉱業株式会社 複合銅微粉末の製造方法
DE10033583A1 (de) * 2000-07-11 2002-01-24 Bayer Ag Superparamagnetische Perlpolymerisate
JP4146119B2 (ja) * 2001-12-04 2008-09-03 Ｊｆｅミネラル株式会社 導電ペースト用銅合金粉
JP4145127B2 (ja) * 2002-11-22 2008-09-03 三井金属鉱業株式会社 フレーク銅粉及びそのフレーク銅粉の製造方法並びにそのフレーク銅粉を用いた導電性ペースト
TWI310570B (en) * 2004-07-30 2009-06-01 Jfe Mineral Co Ltd Ultrafine metal powder slurry
JP4859362B2 (ja) * 2004-11-04 2012-01-25 三井金属鉱業株式会社 フレークニッケル粉及びその製造方法並びに導電性ペースト
WO2007004415A1 (ja) * 2005-07-01 2007-01-11 Murata Manufacturing Co., Ltd. 多層セラミック基板およびその製造方法ならびに多層セラミック基板作製用複合グリーンシート
TW200714163A (en) * 2005-09-16 2007-04-01 Murata Manufacturing Co Ceramic multilayer substrate and process for producing the same
TW200726549A (en) * 2005-09-20 2007-07-16 Nihon Handa Co Ltd Paste metal particle composition, process for solidifying the same, process for jointing metal substrates, and process for preparing circuit board
JP4362742B2 (ja) 2005-09-22 2009-11-11 ニホンハンダ株式会社 ペースト状金属粒子組成物の固化方法、金属製部材の接合方法およびプリント配線板の製造方法
EP2012352A4 (en) * 2006-04-24 2012-07-25 Murata Manufacturing Co ELECTRONIC COMPONENT, ELECTRONIC COMPONENT DEVICE THEREFOR AND METHOD OF MANUFACTURING THEREOF
JP5011225B2 (ja) * 2008-07-09 2012-08-29 ニホンハンダ株式会社 金属製部材用接合剤、金属製部材接合体の製造方法、金属製部材接合体、および電気回路接続用バンプの製造方法
JP4685145B2 (ja) * 2008-09-10 2011-05-18 ニホンハンダ株式会社 金属製部材接合体の製造方法および金属製部材接合体
JP5824201B2 (ja) 2009-09-11 2015-11-25 Ｄｏｗａエレクトロニクス株式会社 接合材およびそれを用いた接合方法
TWI415139B (zh) * 2009-11-02 2013-11-11 Ind Tech Res Inst 一種導電組成物及其形成方法
US10046418B2 (en) * 2010-03-18 2018-08-14 Furukawa Electric Co., Ltd. Electrically conductive paste, and electrically conducive connection member produced using the paste
WO2012059990A1 (ja) * 2010-11-04 2012-05-10 相田化学工業株式会社 装飾金属焼結物品の製造方法および装飾金属焼結物品
JP2012182111A (ja) * 2011-02-28 2012-09-20 Samsung Electro-Mechanics Co Ltd 導電性金属ペースト組成物及びその製造方法
JP5830302B2 (ja) * 2011-08-11 2015-12-09 古河電気工業株式会社 加熱接合用材料、加熱接合用シート体、及び加熱接合用成形体
KR20130031414A (ko) * 2011-09-21 2013-03-29 삼성전기주식회사 저온소성용 도전성 페이스트 조성물
JP5606421B2 (ja) * 2011-10-27 2014-10-15 株式会社日立製作所 銅ナノ粒子を用いた焼結性接合材料及びその製造方法及び電子部材の接合方法
US9717149B2 (en) * 2011-11-03 2017-07-25 Ceramtec Gmbh Circuit board made of AIN with copper structures
JP5088761B1 (ja) * 2011-11-14 2012-12-05 石原薬品株式会社 銅微粒子分散液、導電膜形成方法及び回路基板
KR20130064659A (ko) * 2011-12-08 2013-06-18 제일모직주식회사 태양전지 전극용 페이스트 조성물 및 이로부터 제조된 전극
JP2013206765A (ja) 2012-03-29 2013-10-07 Tanaka Kikinzoku Kogyo Kk ダイボンド用導電性ペースト及び該導電性ペーストによるダイボンド方法
WO2013147235A1 (ja) * 2012-03-30 2013-10-03 荒川化学工業株式会社 導電ペースト、硬化物、電極、及び電子デバイス
WO2014080662A1 (ja) * 2012-11-26 2014-05-30 三井金属鉱業株式会社 銅粉及びその製造方法
US20140287158A1 (en) * 2013-03-21 2014-09-25 Intrinsiq Materials, Inc. Performance of conductive copper paste using copper flake
JP6032110B2 (ja) * 2013-04-17 2016-11-24 株式会社豊田中央研究所 金属ナノ粒子材料、それを含有する接合材料、およびそれを用いた半導体装置
JP5535375B2 (ja) * 2013-06-12 2014-07-02 古河電気工業株式会社 接続シート
US9190188B2 (en) * 2013-06-13 2015-11-17 E I Du Pont De Nemours And Company Photonic sintering of polymer thick film copper conductor compositions
JP5993812B2 (ja) * 2013-07-10 2016-09-14 富士フイルム株式会社 導電膜の製造方法
KR20150134728A (ko) * 2014-05-22 2015-12-02 주식회사 동진쎄미켐 전도성 조성물
US10456870B2 (en) * 2014-08-27 2019-10-29 Heraeus Deutschland GmbH & Co. KG Method for producing a soldered connection
US20170252801A1 (en) * 2014-08-28 2017-09-07 Ishihara Sangyo Kaisha, Ltd. Metallic copper particles, and production method therefor
JP5941588B2 (ja) * 2014-09-01 2016-06-29 Ｄｏｗａエレクトロニクス株式会社 接合材およびそれを用いた接合方法
US20170278589A1 (en) * 2014-12-03 2017-09-28 Hitachi, Ltd. Metal oxide particles for bonding, sintering binder including same, process for producing metal oxide particles for bonding, and method for bonding electronic components
US10625344B2 (en) * 2015-03-05 2020-04-21 Osaka University Method for producing copper particles, copper particles, and copper paste
US9637647B2 (en) * 2015-08-13 2017-05-02 E I Du Pont De Nemours And Company Photonic sintering of a polymer thick film copper conductor composition

Also Published As

Publication number Publication date
CN107249787B (zh) 2020-12-01
US10821558B2 (en) 2020-11-03
JP6900150B2 (ja) 2021-07-07
JP2016053216A (ja) 2016-04-14
TWI642511B (zh) 2018-12-01
JP2016153530A (ja) 2016-08-25
US20170252874A1 (en) 2017-09-07
TW201613714A (en) 2016-04-16
CN107249787A (zh) 2017-10-13

Similar Documents

Publication Publication Date Title
JP5941588B2 (ja) 接合材およびそれを用いた接合方法
CN103608140B (zh) 接合材料及使用该接合材料制成的接合体
CN109789482B (zh) 接合材料及使用该接合材料的接合方法
CN102958631B (zh) 低温烧结性接合材料及使用该接合材料的接合方法
JP5992961B2 (ja) 接合材およびそれを用いた接合方法
JP2018165387A (ja) 接合材およびそれを用いた接合体
TWI717502B (zh) 接合材及使用其之接合方法
KR20190103155A (ko) 접합재 및 이것을 이용한 접합 방법
WO2016035314A1 (ja) 接合材およびそれを用いた接合方法
KR102354209B1 (ko) 접합재 및 그것을 사용한 접합 방법
JP2017101264A (ja) 接合材およびそれを用いた接合方法
JP2018172764A (ja) 金属粒子凝集体とその製造方法、ペースト状金属粒子組成物および接合体の製造方法
JP2020164894A (ja) 接合材、接合材の製造方法、接合方法、半導体装置
JP7487011B2 (ja) 接合材、接合材の製造方法及び接合方法
WO2026034277A1 (ja) 酸化銀ペースト、該酸化銀ペーストを用いた半導体デバイスの製造方法
JP2018206826A (ja) 接合材、接合体および接合方法
TW202339873A (zh) 銀微粒子組成物
JP2023092937A (ja) 銀ペースト、および、接合体の製造方法
JP2022049054A (ja) 導電体作製方法、金属ペースト及び導電体

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160302

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20160302

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20160302

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20160323

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20160427

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20160520

R150 Certificate of patent or registration of utility model

Ref document number: 5941588

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250