JP5895504B2 - 撮像パネルおよび撮像処理システム - Google Patents

撮像パネルおよび撮像処理システム Download PDF

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Publication number
JP5895504B2
JP5895504B2 JP2011274780A JP2011274780A JP5895504B2 JP 5895504 B2 JP5895504 B2 JP 5895504B2 JP 2011274780 A JP2011274780 A JP 2011274780A JP 2011274780 A JP2011274780 A JP 2011274780A JP 5895504 B2 JP5895504 B2 JP 5895504B2
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Japan
Prior art keywords
light receiving
light
wiring layer
unit
receiving unit
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JP2011274780A
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English (en)
Japanese (ja)
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JP2013124976A5 (enExample
JP2013124976A (ja
Inventor
大鳥居　英
英 大鳥居
典久 代田
典久 代田
治夫 富樫
治夫 富樫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
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Sony Corp
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Publication date
Priority to JP2011274780A priority Critical patent/JP5895504B2/ja
Application filed by Sony Corp filed Critical Sony Corp
Priority to PCT/JP2012/082436 priority patent/WO2013089209A2/en
Priority to US14/362,240 priority patent/US9164182B2/en
Priority to KR1020147015137A priority patent/KR102090343B1/ko
Priority to CN201280060473.XA priority patent/CN103988306B/zh
Priority to TW101146436A priority patent/TWI491058B/zh
Publication of JP2013124976A publication Critical patent/JP2013124976A/ja
Publication of JP2013124976A5 publication Critical patent/JP2013124976A5/ja
Priority to US14/818,518 priority patent/US9651683B2/en
Application granted granted Critical
Publication of JP5895504B2 publication Critical patent/JP5895504B2/ja
Priority to US15/450,524 priority patent/US10663604B2/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2006—Measuring radiation intensity with scintillation detectors using a combination of a scintillator and photodetector which measures the means radiation intensity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2018—Scintillation-photodiode combinations
    • G01T1/20185—Coupling means between the photodiode and the scintillator, e.g. optical couplings using adhesives with wavelength-shifting fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2018—Scintillation-photodiode combinations
    • G01T1/20188—Auxiliary details, e.g. casings or cooling
    • G01T1/2019—Shielding against direct hits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/202—Measuring radiation intensity with scintillation detectors the detector being a crystal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/202—Measuring radiation intensity with scintillation detectors the detector being a crystal
    • G01T1/2023—Selection of materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/24—Measuring radiation intensity with semiconductor detectors
    • G01T1/247—Detector read-out circuitry
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/189—X-ray, gamma-ray or corpuscular radiation imagers
    • H10F39/1898—Indirect radiation image sensors, e.g. using luminescent members
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/811—Interconnections
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Light Receiving Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP2011274780A 2011-12-15 2011-12-15 撮像パネルおよび撮像処理システム Active JP5895504B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2011274780A JP5895504B2 (ja) 2011-12-15 2011-12-15 撮像パネルおよび撮像処理システム
US14/362,240 US9164182B2 (en) 2011-12-15 2012-12-07 Image pickup panel and image pickup processing system
KR1020147015137A KR102090343B1 (ko) 2011-12-15 2012-12-07 촬상 패널
CN201280060473.XA CN103988306B (zh) 2011-12-15 2012-12-07 图像拾取面板和图像拾取处理系统
PCT/JP2012/082436 WO2013089209A2 (en) 2011-12-15 2012-12-07 Image pickup panel and image pickup processing system
TW101146436A TWI491058B (zh) 2011-12-15 2012-12-10 影像拾取面板及影像拾取處理系統
US14/818,518 US9651683B2 (en) 2011-12-15 2015-08-05 Image pickup panel and image pickup processing system
US15/450,524 US10663604B2 (en) 2011-12-15 2017-03-06 Image pickup panel and image pickup processing system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011274780A JP5895504B2 (ja) 2011-12-15 2011-12-15 撮像パネルおよび撮像処理システム

Publications (3)

Publication Number Publication Date
JP2013124976A JP2013124976A (ja) 2013-06-24
JP2013124976A5 JP2013124976A5 (enExample) 2014-12-04
JP5895504B2 true JP5895504B2 (ja) 2016-03-30

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JP2011274780A Active JP5895504B2 (ja) 2011-12-15 2011-12-15 撮像パネルおよび撮像処理システム

Country Status (6)

Country Link
US (3) US9164182B2 (enExample)
JP (1) JP5895504B2 (enExample)
KR (1) KR102090343B1 (enExample)
CN (1) CN103988306B (enExample)
TW (1) TWI491058B (enExample)
WO (1) WO2013089209A2 (enExample)

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Also Published As

Publication number Publication date
US9651683B2 (en) 2017-05-16
CN103988306A (zh) 2014-08-13
CN103988306B (zh) 2017-03-08
US9164182B2 (en) 2015-10-20
US20140326892A1 (en) 2014-11-06
TWI491058B (zh) 2015-07-01
US20170219722A1 (en) 2017-08-03
KR102090343B1 (ko) 2020-03-17
WO2013089209A2 (en) 2013-06-20
US20160033655A1 (en) 2016-02-04
US10663604B2 (en) 2020-05-26
JP2013124976A (ja) 2013-06-24
WO2013089209A3 (en) 2013-08-15
TW201330303A (zh) 2013-07-16
KR20140113638A (ko) 2014-09-24

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