JP5856103B2 - 積み重ねられたパッケージ間のワイヤボンド相互接続を有する半導体マルチパッケージモジュール - Google Patents
積み重ねられたパッケージ間のワイヤボンド相互接続を有する半導体マルチパッケージモジュール Download PDFInfo
- Publication number
- JP5856103B2 JP5856103B2 JP2013123601A JP2013123601A JP5856103B2 JP 5856103 B2 JP5856103 B2 JP 5856103B2 JP 2013123601 A JP2013123601 A JP 2013123601A JP 2013123601 A JP2013123601 A JP 2013123601A JP 5856103 B2 JP5856103 B2 JP 5856103B2
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- package
- die
- substrate
- stacked
- metal layer
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Classifications
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- H01L25/105—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers the devices being of a type provided for in group H01L27/00
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Description
図1は積み重ねられたマルチパッケージモジュール(「MPM」)のボトムパッケージとして用いることができ、産業界でよく確立された標準的なボールグリッドアレイ(「BGA」)パッケージの構造を例示する断面図である。BGAは、一般的に10のように示され、少なくとも1つの金属レイヤを有する基板12の上に取り付けられたダイス14を有している。様々な基板形式のいずれかが用いられ、例えば、1−2の金属レイヤをラミネートしたもの、4−8の金属レイヤを有する基板構造、1−2の金属レイヤを有するフレキシブルポリイミドテープまたはセラミックマルチレイヤ基板が含まれる。図1の例によって示された基板12は、2つの金属レイヤ121,123を有し、適当な回路構成を提供すべくパターンがそれぞれ形成され、バイアス122を経由して互いに接続されている。ダイスは、所定の箇所で基板表面に図1の13で示されるダイス接着エポキシとして一般的に参照される接着剤を用いて取り付けられる。そして、図1の構成において、例え、ダイス接着表面が使用時において特定の方位が必要でなくても、ダイスが取り付けられた基板上の表面は、「上側」表面として参照され、当該表面上のの金属レイヤは、「上側」金属レイヤとして参照される。
単に平面のヒートスプレッダをドロップインモールド処理したり、トップパッケージダイスの上側表面またはトップパッケージ上のスペーサの上側表面に接着剤を適用し、当該接着剤の上に平面のヒートスプレッダを取り付けたりすることにより挿入する。
に記載されているような公知技術によって形成してもよい。パッケージ相互間のz軸相互接続ワイヤボンドは、トップ基板の上側金属レイヤ上のパッド上側表面に溶着または圧着し、そしてそこから下方に向けてワイヤを引き、ボトム基板の上側金属レイヤ上のパッド上に溶融することにより形成しているものとして図5Aに例として示されている。好ましくは、ワイヤボンドは逆の方向に形成することができる。即ち、ボトム基板の上側金属レイヤ上のパッド上側表面に溶着または圧着し、そしてそこから上方に向けてワイヤを引き、トップ基板の上側金属レイヤ上のパッド上に溶融させることにより形成することができる。好ましくは、パッケージ相互間のz軸相互接続のワイヤボンドの構成の選択は、積み重ねられた基板の縁部とそれらの接続面との幾何学的な配置に従って決定される。
トップパッケージ基板、413 接着剤、414 ダイス、415,427 はんだマスク、416 ワイヤボンド、417 モールディングコンパウンド、418 はんだボール、419 ボトムパッケージ上側表面、421,423 金属レイヤ、422 バイアス、424 ボトムパッケージz軸相互接続パッド、426 カプセル体の縁部、500 トップパッケージ、501 縁部、503,513 接着剤、507 モジュールカプセル体、512 トップパッケージ基板、514 ダイス、515,527 はんだマスク、516,518 ワイヤボンド、517 モールディングコンパウンド、519 トップパッケージ上側表面、521,523 金属レイヤ、522 バイアス、524 トップパッケージz軸相互接続パッド、525 上側表面、526 カプセル体の縁部。
Claims (6)
- マルチパッケージモジュールの形成方法であって、
第1ダイスと、第1基板と、前記第1基板上に形成された第1金属レイヤとを有する第1パッケージを供給する工程と、
前記第1ダイスを覆い該第1ダイスから前記第1基板上に突出する第2基板と、第2ダイスと、前記第2基板上に形成された第2金属レイヤと、前記第2ダイスと前記第2金属レイヤとを電気的に接続する第1ワイヤボンドとを有する第2パッケージを供給する工程と、
前記第1パッケージの上に前記第2パッケージを積み重ねる工程と、
前記第1パッケージの前記第1金属レイヤと前記第2パッケージの前記第2金属レイヤとの間に第2ワイヤボンドによって電気的相互接続を形成する工程とを含み、
前記第1パッケージは、前記第1金属レイヤと前記第1パッケージの前記第1ダイスとを電気的に相互接続する第3ワイヤボンドとを有しており、
前記方法は、
第1モールドコンパウンドによって前記第1ワイヤボンドをカプセル化する工程と、
第2モールドコンパウンドによって前記第2ワイヤボンドをカプセル化する工程と、
第3モールドコンパウンドによって前記第3ワイヤボンドをカプセル化する工程とをさらに含む、方法。 - 前記第2パッケージと、前記第1ワイヤボンドと、前記第2ワイヤボンドとを覆うよう前記第1基板上にヒートスプレッダを供給する工程をさらに含む、請求項1に記載の方法。
- 前記第1金属レイヤは、前記第1基板の側縁部まで延びており、
前記第2金属レイヤは、前記第1モールドコンパウンドに部分的に覆われているとともに前記第2基板の側縁部まで延びている、請求項1に記載の方法。 - 第1ダイスと、第1基板と、前記第1基板上に形成された第1金属レイヤとを有する第1パッケージと、
前記第1パッケージの上に積み重ねられるとともに、前記第1ダイスを覆い該第1ダイスから前記第1基板上に突出する第2基板と、第2ダイスと、前記第2基板上に形成される第2金属レイヤと、前記第2ダイスと前記第2金属レイヤとを電気的に相互接続する第1ワイヤボンドとを有する第2パッケージと、
前記第1金属レイヤと前記第2金属レイヤとを電気的に相互接続する第2ワイヤボンドとを含み、
前記第1パッケージは、前記第1金属レイヤと前記第1パッケージの前記第1ダイスとを電気的に相互接続する第3ワイヤボンドとを有しており、
前記第1ワイヤボンドは第1モールドコンパウンドによって覆われ、
前記第2ワイヤボンドは第2モールドコンパウンドによって覆われ、
前記第3ワイヤボンドは第3モールドコンパウンドによって覆われている、マルチパッケージモジュール。 - 前記第2パッケージと、前記第1ワイヤボンドと、前記第2ワイヤボンドとを覆うよう前記第1基板上に供給されたヒートスプレッダをさらに含む、請求項4に記載のマルチパッケージモジュール。
- 前記第3モールドコンパウンドは前記第1金属レイヤを部分的に覆い、
前記第1金属レイヤは、前記第1基板の側縁部まで延びており、
前記第2金属レイヤは、前記第1モールドコンパウンドに部分的に覆われているとともに前記第2基板の側縁部まで延びている、請求項4または5に記載のマルチパッケージモジュール。
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US41159002P | 2002-09-17 | 2002-09-17 | |
US60/411,590 | 2002-09-17 | ||
US10/632,568 US7205647B2 (en) | 2002-09-17 | 2003-08-02 | Semiconductor multi-package module having package stacked over ball grid array package and having wire bond interconnect between stacked packages |
US10/632,550 | 2003-08-02 | ||
US10/632,549 US7064426B2 (en) | 2002-09-17 | 2003-08-02 | Semiconductor multi-package module having wire bond interconnect between stacked packages |
US10/632,550 US6972481B2 (en) | 2002-09-17 | 2003-08-02 | Semiconductor multi-package module including stacked-die package and having wire bond interconnect between stacked packages |
US10/632,552 US20040061213A1 (en) | 2002-09-17 | 2003-08-02 | Semiconductor multi-package module having package stacked over die-up flip chip ball grid array package and having wire bond interconnect between stacked packages |
US10/632,552 | 2003-08-02 | ||
US10/632,551 | 2003-08-02 | ||
US10/632,553 US7053476B2 (en) | 2002-09-17 | 2003-08-02 | Semiconductor multi-package module having package stacked over die-down flip chip ball grid array package and having wire bond interconnect between stacked packages |
US10/632,568 | 2003-08-02 | ||
US10/632,553 | 2003-08-02 | ||
US10/632,549 | 2003-08-02 | ||
US10/632,551 US6838761B2 (en) | 2002-09-17 | 2003-08-02 | Semiconductor multi-package module having wire bond interconnect between stacked packages and having electrical shield |
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US7394148B2 (en) | 2005-06-20 | 2008-07-01 | Stats Chippac Ltd. | Module having stacked chip scale semiconductor packages |
SG130055A1 (en) | 2005-08-19 | 2007-03-20 | Micron Technology Inc | Microelectronic devices, stacked microelectronic devices, and methods for manufacturing microelectronic devices |
SG130066A1 (en) | 2005-08-26 | 2007-03-20 | Micron Technology Inc | Microelectronic device packages, stacked microelectronic device packages, and methods for manufacturing microelectronic devices |
JP5522561B2 (ja) * | 2005-08-31 | 2014-06-18 | マイクロン テクノロジー, インク. | マイクロ電子デバイスパッケージ、積重ね型マイクロ電子デバイスパッケージ、およびマイクロ電子デバイスを製造する方法 |
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JP2005539403A (ja) | 2005-12-22 |
JP5602685B2 (ja) | 2014-10-08 |
AU2003272405A8 (en) | 2004-04-08 |
KR20050044925A (ko) | 2005-05-13 |
JP2011181971A (ja) | 2011-09-15 |
EP1547141A2 (en) | 2005-06-29 |
EP1547141A4 (en) | 2010-02-24 |
JP2013211589A (ja) | 2013-10-10 |
AU2003272405A1 (en) | 2004-04-08 |
TW201017853A (en) | 2010-05-01 |
TWI469301B (zh) | 2015-01-11 |
JP4800625B2 (ja) | 2011-10-26 |
TW200419765A (en) | 2004-10-01 |
TWI378548B (en) | 2012-12-01 |
WO2004027823A3 (en) | 2004-05-21 |
TWI329918B (en) | 2010-09-01 |
KR101166575B1 (ko) | 2012-07-18 |
TW201131731A (en) | 2011-09-16 |
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