JP5812151B2 - 窒化物基板の製造方法 - Google Patents
窒化物基板の製造方法 Download PDFInfo
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- JP5812151B2 JP5812151B2 JP2014101578A JP2014101578A JP5812151B2 JP 5812151 B2 JP5812151 B2 JP 5812151B2 JP 2014101578 A JP2014101578 A JP 2014101578A JP 2014101578 A JP2014101578 A JP 2014101578A JP 5812151 B2 JP5812151 B2 JP 5812151B2
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- 150000004767 nitrides Chemical class 0.000 title claims description 324
- 239000000758 substrate Substances 0.000 title claims description 232
- 238000004519 manufacturing process Methods 0.000 title claims description 28
- 239000013078 crystal Substances 0.000 claims description 184
- 238000005520 cutting process Methods 0.000 claims description 78
- 238000000034 method Methods 0.000 claims description 48
- 238000000227 grinding Methods 0.000 claims description 10
- 238000005498 polishing Methods 0.000 claims description 9
- 230000007423 decrease Effects 0.000 claims description 6
- 238000005121 nitriding Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 26
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 20
- 238000010438 heat treatment Methods 0.000 description 18
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 17
- 239000004065 semiconductor Substances 0.000 description 16
- 230000000052 comparative effect Effects 0.000 description 15
- 239000002994 raw material Substances 0.000 description 13
- 238000002441 X-ray diffraction Methods 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 11
- 229910002601 GaN Inorganic materials 0.000 description 10
- 239000007789 gas Substances 0.000 description 9
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 7
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 6
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 5
- 229910010271 silicon carbide Inorganic materials 0.000 description 5
- 238000005092 sublimation method Methods 0.000 description 5
- 239000006061 abrasive grain Substances 0.000 description 4
- 229910003460 diamond Inorganic materials 0.000 description 4
- 239000010432 diamond Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000000859 sublimation Methods 0.000 description 4
- 230000008022 sublimation Effects 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- XOYLJNJLGBYDTH-UHFFFAOYSA-M chlorogallium Chemical compound [Ga]Cl XOYLJNJLGBYDTH-UHFFFAOYSA-M 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000013598 vector Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229910002704 AlGaN Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000002050 diffraction method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 238000007716 flux method Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02021—Edge treatment, chamfering
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
- C30B29/406—Gallium nitride
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02013—Grinding, lapping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02387—Group 13/15 materials
- H01L21/02389—Nitrides
Description
図6(A)および(B)は、本実施の形態における窒化物結晶を概略的に示す断面図である。図7は、本実施の形態における窒化物結晶の製造に使用可能な成長装置である。図6(A)、(B)および図7に示すように、まず、窒化物結晶22を成長させる。この窒化物結晶22は、窒化物基板10を製造するためのインゴットである。本実施の形態では、たとえば昇華法により窒化物結晶22を成長させる。
図17および図18は、半径r、中心Oの円弧の一部として近似できるような(曲率半径rで、曲率半径の中心Oの)表面22aを持つ、直径2Rの窒化物結晶を、およそのa軸方向から見た模式図である。ここでは簡単化のために窒化物結晶の厚みを無視する。
図24および図25を参照して、m面のオフ角がβ1からβ2(β1<β2)の範囲にあるような窒化物基板を切り出す方法を考える。図24および図25は、切断平面V3を考察するための模式図である。
図26を参照して、上述した切断方法1および2において簡単化のために無視していた窒化物結晶の厚みの影響を考える。図26は、切断平面V4を考察するための模式図である。
主面が(0001)面である2インチのSiC基板を準備し、これを下地基板21として、昇華法によりAlN単結晶を成長した。
主面が(111)面である3インチのGaAs基板を準備し、このGaAs基板の表面の全体を薄いマスクによって被覆した。マスクの材料はGaNがその上に直接に成長しないような性質を持つものとして、SiO2(二酸化ケイ素)を使用した。このマスクに窓を形成し、この窓を通してGaNをHVPE法によりエピタキシャル成長させた。
本発明例2と同様のHVPE炉で成長したGaN単結晶を用意し、同様に得られたGaN単結晶の表面と裏面との両方で、結晶性が100秒程度であること、反り形状をX線回折を用いて確認した(表1参照)。
本発明例1と同様の反り形状のAlN単結晶を用意し、本発明例1〜3とは異なる切断方法である、表1に記載の切断平面に沿ってワイヤーソーで切断した。切断後に本発明例1と同様に研削・研磨を行なった。
Claims (6)
- 表面と、前記表面と反対側の裏面とを含む窒化物結晶をc軸方向に成長させる工程と、
前記窒化物結晶から、窒化物基板を切り出す工程とを備え、
前記切り出す工程では、前記窒化物結晶の前記表面および前記裏面を通り、かつ前記窒化物結晶の前記表面および前記裏面の曲率半径の中心を結んだ線分を通らない平面に沿って、前記窒化物結晶から前記窒化物基板を切り出す、窒化物基板の製造方法。 - 前記切り出す工程では、第1の領域と、前記第1の領域を取り囲む、前記窒化物基板のエッジからの距離が2mm以内である第2の領域とを有する表面を含み、前記窒化物基板の表面に直交する軸と、m軸またはa軸とのなすオフ角が前記第2の領域の第1の点で最小値をとるように前記窒化物基板を切り出す、請求項1に記載の窒化物基板の製造方法。
- 前記切り出す工程では、前記オフ角が前記第2の領域の第2の点で最大値をとり、かつ前記第2の点から前記第1の点にかけて前記オフ角が単調減少するように、前記窒化物基板を切り出す、請求項2に記載の窒化物基板の製造方法。
- 前記切り出す工程では、a面またはm面からc軸方向に傾斜した平面と平行な前記平面に沿って前記窒化物結晶から前記窒化物基板を切り出す、請求項1から請求項3のいずれか1項に記載の窒化物基板の製造方法。
- 前記切り出す工程後に、前記窒化物基板の表面の研磨および研削の少なくとも一方を行なう工程をさらに備えた、請求項1から請求項4のいずれか1項に記載の窒化物基板の製造方法。
- 前記切り出す工程では、複数枚の前記窒化物基板を切り出す、請求項1から請求項5のいずれか1項に記載の窒化物基板の製造方法。
Priority Applications (1)
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JP2014101578A JP5812151B2 (ja) | 2008-09-01 | 2014-05-15 | 窒化物基板の製造方法 |
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JP2008223809 | 2008-09-01 | ||
JP2008223809 | 2008-09-01 | ||
JP2014101578A JP5812151B2 (ja) | 2008-09-01 | 2014-05-15 | 窒化物基板の製造方法 |
Related Parent Applications (1)
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JP2010526740A Division JPWO2010024285A1 (ja) | 2008-09-01 | 2009-08-26 | 窒化物基板の製造方法および窒化物基板 |
Publications (2)
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JP2014141413A JP2014141413A (ja) | 2014-08-07 |
JP5812151B2 true JP5812151B2 (ja) | 2015-11-11 |
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JP2010526740A Pending JPWO2010024285A1 (ja) | 2008-09-01 | 2009-08-26 | 窒化物基板の製造方法および窒化物基板 |
JP2014101578A Active JP5812151B2 (ja) | 2008-09-01 | 2014-05-15 | 窒化物基板の製造方法 |
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JP2010526740A Pending JPWO2010024285A1 (ja) | 2008-09-01 | 2009-08-26 | 窒化物基板の製造方法および窒化物基板 |
Country Status (6)
Country | Link |
---|---|
US (2) | US8829658B2 (ja) |
EP (1) | EP2322698A4 (ja) |
JP (2) | JPWO2010024285A1 (ja) |
CN (1) | CN102137960B (ja) |
TW (1) | TW201016905A (ja) |
WO (1) | WO2010024285A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6328557B2 (ja) * | 2012-09-11 | 2018-05-23 | 株式会社トクヤマ | 窒化アルミニウム基板およびiii族窒化物積層体 |
CN113684539A (zh) * | 2016-12-27 | 2021-11-23 | 住友化学株式会社 | Iii族氮化物层叠体的制造方法、检查方法、以及iii族氮化物层叠体 |
TW202130863A (zh) * | 2019-12-24 | 2021-08-16 | 日商德山股份有限公司 | Iii族氮化物單晶基板及其製造方法 |
Family Cites Families (16)
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JPH10335750A (ja) | 1997-06-03 | 1998-12-18 | Sony Corp | 半導体基板および半導体装置 |
US20110163323A1 (en) * | 1997-10-30 | 2011-07-07 | Sumitomo Electric Industires, Ltd. | GaN SINGLE CRYSTAL SUBSTRATE AND METHOD OF MAKING THE SAME |
JP2005340747A (ja) * | 2003-11-04 | 2005-12-08 | Hitachi Cable Ltd | Iii−v族窒化物系半導体基板及びその製造方法、iii−v族窒化物系半導体デバイス、iii−v族窒化物系半導体基板のロット |
US7118813B2 (en) | 2003-11-14 | 2006-10-10 | Cree, Inc. | Vicinal gallium nitride substrate for high quality homoepitaxy |
JP4337560B2 (ja) * | 2004-01-22 | 2009-09-30 | 住友電気工業株式会社 | 単結晶窒化ガリウム基板を製造する方法、窒化ガリウム基板、および窒化物半導体エピタクシャル基板 |
JP4581490B2 (ja) * | 2004-05-31 | 2010-11-17 | 日立電線株式会社 | Iii−v族窒化物系半導体自立基板の製造方法、及びiii−v族窒化物系半導体の製造方法 |
JP4691911B2 (ja) | 2004-06-11 | 2011-06-01 | 日立電線株式会社 | Iii−v族窒化物系半導体自立基板の製造方法 |
JP4915128B2 (ja) * | 2005-04-11 | 2012-04-11 | 日亜化学工業株式会社 | 窒化物半導体ウエハ及びその製造方法 |
JP4792802B2 (ja) * | 2005-04-26 | 2011-10-12 | 住友電気工業株式会社 | Iii族窒化物結晶の表面処理方法 |
JP4696935B2 (ja) | 2006-01-27 | 2011-06-08 | 日立電線株式会社 | Iii−v族窒化物系半導体基板及びiii−v族窒化物系発光素子 |
JP2007277053A (ja) | 2006-04-07 | 2007-10-25 | Sumitomo Electric Ind Ltd | 転位の検出方法、転位数の測定方法、転位密度の測定方法、GaN結晶基板および転位密度の算出方法 |
KR100809209B1 (ko) | 2006-04-25 | 2008-02-29 | 삼성전기주식회사 | 비극성 m면 질화물 반도체 제조방법 |
JP5129527B2 (ja) | 2006-10-02 | 2013-01-30 | 株式会社リコー | 結晶製造方法及び基板製造方法 |
JP5332168B2 (ja) | 2006-11-17 | 2013-11-06 | 住友電気工業株式会社 | Iii族窒化物結晶の製造方法 |
JP2007189221A (ja) | 2006-12-21 | 2007-07-26 | Sharp Corp | 窒化物半導体基板、窒化物半導体レーザ素子、窒化物半導体基板の製造方法、および窒化物半導体レーザ素子の製造方法 |
JP2008285364A (ja) * | 2007-05-17 | 2008-11-27 | Sumitomo Electric Ind Ltd | GaN基板、それを用いたエピタキシャル基板及び半導体発光素子 |
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2009
- 2009-08-26 EP EP09809936.9A patent/EP2322698A4/en not_active Withdrawn
- 2009-08-26 US US13/061,307 patent/US8829658B2/en not_active Expired - Fee Related
- 2009-08-26 JP JP2010526740A patent/JPWO2010024285A1/ja active Pending
- 2009-08-26 CN CN2009801341903A patent/CN102137960B/zh not_active Expired - Fee Related
- 2009-08-26 WO PCT/JP2009/064852 patent/WO2010024285A1/ja active Application Filing
- 2009-09-01 TW TW098129414A patent/TW201016905A/zh unknown
-
2014
- 2014-05-15 JP JP2014101578A patent/JP5812151B2/ja active Active
- 2014-08-18 US US14/461,838 patent/US20140357067A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
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CN102137960B (zh) | 2013-12-11 |
CN102137960A (zh) | 2011-07-27 |
TW201016905A (en) | 2010-05-01 |
EP2322698A1 (en) | 2011-05-18 |
US20140357067A1 (en) | 2014-12-04 |
JP2014141413A (ja) | 2014-08-07 |
WO2010024285A1 (ja) | 2010-03-04 |
US8829658B2 (en) | 2014-09-09 |
JPWO2010024285A1 (ja) | 2012-01-26 |
EP2322698A4 (en) | 2015-07-08 |
US20110156213A1 (en) | 2011-06-30 |
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