JP5795735B2 - チャネル領域への減少させられたオフセットを有する埋め込みSi/Ge材質を伴うトランジスタ - Google Patents
チャネル領域への減少させられたオフセットを有する埋め込みSi/Ge材質を伴うトランジスタ Download PDFInfo
- Publication number
- JP5795735B2 JP5795735B2 JP2011528256A JP2011528256A JP5795735B2 JP 5795735 B2 JP5795735 B2 JP 5795735B2 JP 2011528256 A JP2011528256 A JP 2011528256A JP 2011528256 A JP2011528256 A JP 2011528256A JP 5795735 B2 JP5795735 B2 JP 5795735B2
- Authority
- JP
- Japan
- Prior art keywords
- cavity
- forming
- protective layer
- semiconductor
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000463 material Substances 0.000 title claims description 45
- 238000000034 method Methods 0.000 claims description 131
- 239000004065 semiconductor Substances 0.000 claims description 113
- 230000008569 process Effects 0.000 claims description 96
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 43
- 239000010703 silicon Substances 0.000 claims description 43
- 229910045601 alloy Inorganic materials 0.000 claims description 42
- 239000000956 alloy Substances 0.000 claims description 42
- 239000011241 protective layer Substances 0.000 claims description 42
- 238000005530 etching Methods 0.000 claims description 40
- 239000010410 layer Substances 0.000 claims description 36
- 125000006850 spacer group Chemical group 0.000 claims description 35
- 229910052710 silicon Inorganic materials 0.000 claims description 28
- 230000001939 inductive effect Effects 0.000 claims description 19
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims description 18
- 230000008021 deposition Effects 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 12
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 11
- 229910052732 germanium Inorganic materials 0.000 claims description 10
- 230000003647 oxidation Effects 0.000 claims description 7
- 238000007254 oxidation reaction Methods 0.000 claims description 7
- 239000000377 silicon dioxide Substances 0.000 claims description 6
- 235000012239 silicon dioxide Nutrition 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 description 33
- 238000000151 deposition Methods 0.000 description 19
- 229910000676 Si alloy Inorganic materials 0.000 description 16
- 229910000927 Ge alloy Inorganic materials 0.000 description 13
- 239000007772 electrode material Substances 0.000 description 13
- 239000002019 doping agent Substances 0.000 description 11
- 230000009467 reduction Effects 0.000 description 8
- 239000002210 silicon-based material Substances 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 230000001965 increasing effect Effects 0.000 description 7
- 238000003631 wet chemical etching Methods 0.000 description 7
- 230000006399 behavior Effects 0.000 description 6
- 238000002955 isolation Methods 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 238000013459 approach Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 239000003989 dielectric material Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 239000002800 charge carrier Substances 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 229910001339 C alloy Inorganic materials 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229910001128 Sn alloy Inorganic materials 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical group [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823412—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823418—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823807—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823814—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
- H01L29/0653—Dielectric regions, e.g. SiO2 regions, air gaps adjoining the input or output region of a field-effect device, e.g. the source or drain region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66636—Lateral single gate silicon transistors with source or drain recessed by etching or first recessed by etching and then refilled
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
- H01L29/7848—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being located in the source/drain region, e.g. SiGe source and drain
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/665—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using self aligned silicidation, i.e. salicide
Description
Claims (17)
- 半導体デバイスのトランジスタのゲート電極構造に隣接するシリコン含有結晶性半導体領域内にキャビティを形成するステップであって、前記ゲート電極構造はその側壁に隣接して形成されるオフセットスペーサを備えており、前記キャビティは少なくとも前記オフセットスペーサの下に延びるアンダーエッチングされた領域を備えているところのステップと、
前記アンダーエッチングされた領域を備えている前記キャビティを形成した後に、前記キャビティの露出させられた全ての表面上に保護層を形成するステップと、
前記保護層を形成した後に、昇温された第1の温度で前記半導体デバイスを処理するステップと、
前記昇温された第1の温度より低い第2の温度を有するプロセス環境に前記半導体デバイスを導入するステップと、
前記プロセス環境内で前記保護層を除去するステップと、
前記第2の温度にある前記プロセス環境内で前記キャビティ内に半導体合金を形成するステップとを備えた方法。 - 前記キャビティを形成するステップは、プラズマ環境を備えている第1のエッチングプロセスを実行することと、ウエットエッチング薬品を備えている第2のエッチングプロセスを実行することとを備えている、請求項1の方法。
- 前記ウエットエッチング薬品は結晶学的に異方性の除去速度を有している、請求項2の方法。
- 前記ウエットエッチング薬品はテトラメチルアンモニウムヒドロキシド(TMAH)を備えている、請求項3の方法。
- 前記保護層を形成することは前記キャビティの前記露出させられた表面上に酸化物層を形成することを備えている、請求項1の方法。
- 前記酸化物層は概ね700℃未満の温度の酸化性ガス雰囲気内で形成される、請求項5の方法。
- 前記酸化物層はウエット化学的酸化プロセスを実行することによって形成される、請求項5の方法。
- 前記半導体合金内に少なくとも部分的にドレイン及びソース領域を形成するステップを更に備えた、請求項1の方法。
- 前記半導体合金は前記トランジスタのチャネル領域内に圧縮歪を誘起するように形成される、請求項1の方法。
- 前記半導体合金はシリコン及びゲルマニウムから構成される、請求項9の方法。
- 前記昇温された第1の温度は概ね800℃以上である、請求項1の方法。
- プラズマ環境を備えている第1のエッチングプロセス及びウエットエッチング薬品を備えている第2のエッチングプロセスを実行することによってトランジスタのゲート電極構造に対して横方向にオフセットされるキャビティを結晶性半導体領域内に形成するステップであって、前記キャビティは少なくとも前記ゲート電極構造の側壁スペーサ構造の下に延びるアンダーエッチングされた領域を備えているところのステップと、
前記キャビティの露出させられた全ての表面上に保護層を形成するステップと、
前記保護層を形成した後に、昇温された第1の温度で前記結晶性半導体領域を処理するステップと、
前記保護層を形成した後に、前記昇温された第1の温度より低い第2の温度を有するプロセス環境であって、歪誘起半導体合金を形成するために用いられるプロセス環境内に前記トランジスタを導入するステップと、
前記プロセス環境内で前記保護層を除去するステップと、
前記キャビティ内に前記歪誘起半導体合金を形成するステップと、
前記半導体領域内にドレイン及びソース領域を形成するステップとを備えた方法。 - 前記保護層を除去するのに先立ち前記プロセス環境内の堆積温度を確立することを更に備えた、請求項12の方法。
- 前記堆積温度は概ね750℃以下である、請求項13の方法。
- 前記保護層は二酸化シリコン材質として形成される、請求項12の方法。
- 前記第2のエッチングプロセスの前記ウエットエッチング薬品は結晶学的に異方性のエッチング挙動を有している、請求項12の方法。
- 前記半導体合金はゲルマニウム及び錫の少なくとも一方を備えている、請求項12の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008049733.9 | 2008-09-30 | ||
DE102008049733A DE102008049733B3 (de) | 2008-09-30 | 2008-09-30 | Transistor mit eingebettetem Si/Ge-Material mit geringerem Abstand zum Kanalgebiet und Verfahren zur Herstellung des Transistors |
US12/552,642 US8071442B2 (en) | 2008-09-30 | 2009-09-02 | Transistor with embedded Si/Ge material having reduced offset to the channel region |
US12/552,642 | 2009-09-02 | ||
PCT/EP2009/007002 WO2010037523A1 (en) | 2008-09-30 | 2009-09-29 | A transistor with embedded si/ge material having reduced offset to the channel region |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012504327A JP2012504327A (ja) | 2012-02-16 |
JP2012504327A5 JP2012504327A5 (ja) | 2012-11-08 |
JP5795735B2 true JP5795735B2 (ja) | 2015-10-14 |
Family
ID=42056439
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011528256A Active JP5795735B2 (ja) | 2008-09-30 | 2009-09-29 | チャネル領域への減少させられたオフセットを有する埋め込みSi/Ge材質を伴うトランジスタ |
Country Status (6)
Country | Link |
---|---|
US (1) | US8071442B2 (ja) |
JP (1) | JP5795735B2 (ja) |
KR (1) | KR101608908B1 (ja) |
CN (1) | CN102282668B (ja) |
DE (1) | DE102008049733B3 (ja) |
WO (1) | WO2010037523A1 (ja) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011004474A1 (ja) * | 2009-07-08 | 2011-01-13 | 株式会社 東芝 | 半導体装置及びその製造方法 |
US8299564B1 (en) * | 2009-09-14 | 2012-10-30 | Xilinx, Inc. | Diffusion regions having different depths |
US8405160B2 (en) * | 2010-05-26 | 2013-03-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Multi-strained source/drain structures |
DE102010029532B4 (de) | 2010-05-31 | 2012-01-26 | Globalfoundries Dresden Module One Limited Liability Company & Co. Kg | Transistor mit eingebettetem verformungsinduzierenden Material, das in diamantförmigen Aussparungen auf der Grundlage einer Voramorphisierung hergestellt ist |
US8492234B2 (en) * | 2010-06-29 | 2013-07-23 | International Business Machines Corporation | Field effect transistor device |
DE102010063292B4 (de) * | 2010-12-16 | 2016-08-04 | Globalfoundries Dresden Module One Limited Liability Company & Co. Kg | Verfahren zur Herstellung gering diffundierter Drain- und Sourcegebiete in CMOS-Transistoren für Anwendungen mit hoher Leistungsfähigkeit und geringer Leistung |
KR20120073727A (ko) * | 2010-12-27 | 2012-07-05 | 삼성전자주식회사 | 스트레인드 반도체 영역을 포함하는 반도체 소자와 그 제조방법, 및 그것을 포함하는 전자 시스템 |
DE102010064284B4 (de) * | 2010-12-28 | 2016-03-31 | GLOBALFOUNDRIES Dresden Module One Ltd. Liability Company & Co. KG | Verfahren zur Herstellung eines Transistors mit einer eingebetteten Sigma-förmigen Halbleiterlegierung mit erhöhter Gleichmäßigkeit |
US8946064B2 (en) * | 2011-06-16 | 2015-02-03 | International Business Machines Corporation | Transistor with buried silicon germanium for improved proximity control and optimized recess shape |
US8476169B2 (en) | 2011-10-17 | 2013-07-02 | United Microelectronics Corp. | Method of making strained silicon channel semiconductor structure |
US8524563B2 (en) | 2012-01-06 | 2013-09-03 | GlobalFoundries, Inc. | Semiconductor device with strain-inducing regions and method thereof |
US8866230B2 (en) * | 2012-04-26 | 2014-10-21 | United Microelectronics Corp. | Semiconductor devices |
US8674447B2 (en) | 2012-04-27 | 2014-03-18 | International Business Machines Corporation | Transistor with improved sigma-shaped embedded stressor and method of formation |
KR101986534B1 (ko) | 2012-06-04 | 2019-06-07 | 삼성전자주식회사 | 내장된 스트레인-유도 패턴을 갖는 반도체 소자 및 그 형성 방법 |
KR101909204B1 (ko) | 2012-06-25 | 2018-10-17 | 삼성전자 주식회사 | 내장된 스트레인-유도 패턴을 갖는 반도체 소자 및 그 형성 방법 |
CN103594370B (zh) * | 2012-08-16 | 2016-07-06 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件的制造方法 |
US8541281B1 (en) | 2012-08-17 | 2013-09-24 | Globalfoundries Inc. | Replacement gate process flow for highly scaled semiconductor devices |
US8969190B2 (en) | 2012-08-24 | 2015-03-03 | Globalfoundries Inc. | Methods of forming a layer of silicon on a layer of silicon/germanium |
KR20140039544A (ko) | 2012-09-24 | 2014-04-02 | 삼성전자주식회사 | 반도체 소자 및 그 제조 방법 |
US9029919B2 (en) | 2013-02-01 | 2015-05-12 | Globalfoundries Inc. | Methods of forming silicon/germanium protection layer above source/drain regions of a transistor and a device having such a protection layer |
US9040394B2 (en) | 2013-03-12 | 2015-05-26 | Samsung Electronics Co., Ltd. | Method for fabricating a semiconductor device |
DE102013105705B4 (de) * | 2013-03-13 | 2020-03-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Halbleitervorrichtung und dessen Herstellung |
US8951877B2 (en) * | 2013-03-13 | 2015-02-10 | Globalfoundries Inc. | Transistor with embedded strain-inducing material formed in cavities based on an amorphization process and a heat treatment |
US20150048422A1 (en) * | 2013-08-16 | 2015-02-19 | International Business Machines Corporation | A method for forming a crystalline compound iii-v material on a single element substrate |
US9054217B2 (en) | 2013-09-17 | 2015-06-09 | Samsung Electronics Co., Ltd. | Method for fabricating semiconductor device having an embedded source/drain |
CN104517901B (zh) * | 2013-09-29 | 2017-09-22 | 中芯国际集成电路制造(上海)有限公司 | Cmos晶体管的形成方法 |
US9691898B2 (en) * | 2013-12-19 | 2017-06-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Germanium profile for channel strain |
US9831341B2 (en) * | 2014-06-16 | 2017-11-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and method for integrated circuit |
US10084063B2 (en) | 2014-06-23 | 2018-09-25 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor device and manufacturing method thereof |
US10026837B2 (en) * | 2015-09-03 | 2018-07-17 | Texas Instruments Incorporated | Embedded SiGe process for multi-threshold PMOS transistors |
US20170141228A1 (en) * | 2015-11-16 | 2017-05-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Field effect transistor and manufacturing method thereof |
US10141426B2 (en) * | 2016-02-08 | 2018-11-27 | International Business Macahines Corporation | Vertical transistor device |
CN113611736B (zh) * | 2020-05-29 | 2022-11-22 | 联芯集成电路制造(厦门)有限公司 | 半导体元件及其制作方法 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR0135147B1 (ko) * | 1994-07-21 | 1998-04-22 | 문정환 | 트랜지스터 제조방법 |
JP2701803B2 (ja) * | 1995-08-28 | 1998-01-21 | 日本電気株式会社 | 半導体装置の製造方法 |
US6071783A (en) * | 1998-08-13 | 2000-06-06 | Taiwan Semiconductor Manufacturing Company | Pseudo silicon on insulator MOSFET device |
JP3424667B2 (ja) * | 2000-10-13 | 2003-07-07 | 株式会社デンソー | 半導体基板の製造方法 |
US6812103B2 (en) * | 2002-06-20 | 2004-11-02 | Micron Technology, Inc. | Methods of fabricating a dielectric plug in MOSFETS to suppress short-channel effects |
CN1303672C (zh) * | 2003-11-11 | 2007-03-07 | 旺宏电子股份有限公司 | 氮化物只读存储器的制造方法 |
US7045407B2 (en) * | 2003-12-30 | 2006-05-16 | Intel Corporation | Amorphous etch stop for the anisotropic etching of substrates |
JP4797358B2 (ja) * | 2004-10-01 | 2011-10-19 | 富士電機株式会社 | 半導体装置の製造方法 |
US20060115949A1 (en) | 2004-12-01 | 2006-06-01 | Freescale Semiconductor, Inc. | Semiconductor fabrication process including source/drain recessing and filling |
JP4369359B2 (ja) * | 2004-12-28 | 2009-11-18 | 富士通マイクロエレクトロニクス株式会社 | 半導体装置 |
JP2006196910A (ja) | 2005-01-14 | 2006-07-27 | Samsung Electronics Co Ltd | 半導体基板のインサイチュ洗浄方法及びこれを採用する半導体素子の製造方法 |
US7078285B1 (en) | 2005-01-21 | 2006-07-18 | Sony Corporation | SiGe nickel barrier structure employed in a CMOS device to prevent excess diffusion of nickel used in the silicide material |
JP5055771B2 (ja) | 2005-02-28 | 2012-10-24 | 富士通セミコンダクター株式会社 | 半導体装置およびその製造方法 |
US7544576B2 (en) * | 2005-07-29 | 2009-06-09 | Freescale Semiconductor, Inc. | Diffusion barrier for nickel silicides in a semiconductor fabrication process |
WO2007049510A1 (ja) * | 2005-10-27 | 2007-05-03 | Tokyo Electron Limited | 処理方法及び記録媒体 |
US7422950B2 (en) * | 2005-12-14 | 2008-09-09 | Intel Corporation | Strained silicon MOS device with box layer between the source and drain regions |
US7525160B2 (en) | 2005-12-27 | 2009-04-28 | Intel Corporation | Multigate device with recessed strain regions |
JP4410195B2 (ja) * | 2006-01-06 | 2010-02-03 | 株式会社東芝 | 半導体装置及びその製造方法 |
JP5119604B2 (ja) * | 2006-03-16 | 2013-01-16 | ソニー株式会社 | 半導体装置の製造方法 |
US7528072B2 (en) | 2006-04-20 | 2009-05-05 | Texas Instruments Incorporated | Crystallographic preferential etch to define a recessed-region for epitaxial growth |
JP2007305730A (ja) * | 2006-05-10 | 2007-11-22 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法 |
DE102006030268B4 (de) | 2006-06-30 | 2008-12-18 | Advanced Micro Devices Inc., Sunnyvale | Verfahren zum Ausbilden einer Halbleiterstruktur, insbesondere eines FETs |
US20080220579A1 (en) * | 2007-03-07 | 2008-09-11 | Advanced Micro Devices, Inc. | Stress enhanced mos transistor and methods for its fabrication |
US7691752B2 (en) | 2007-03-30 | 2010-04-06 | Intel Corporation | Methods of forming improved EPI fill on narrow isolation bounded source/drain regions and structures formed thereby |
DE102007063229B4 (de) * | 2007-12-31 | 2013-01-24 | Advanced Micro Devices, Inc. | Verfahren und Teststruktur zur Überwachung von Prozesseigenschaften für die Herstellung eingebetteter Halbleiterlegierungen in Drain/Source-Gebieten |
KR100971414B1 (ko) * | 2008-04-18 | 2010-07-21 | 주식회사 하이닉스반도체 | 스트레인드 채널을 갖는 반도체 소자 및 그 제조방법 |
US7838372B2 (en) * | 2008-05-22 | 2010-11-23 | Infineon Technologies Ag | Methods of manufacturing semiconductor devices and structures thereof |
-
2008
- 2008-09-30 DE DE102008049733A patent/DE102008049733B3/de active Active
-
2009
- 2009-09-02 US US12/552,642 patent/US8071442B2/en active Active
- 2009-09-29 WO PCT/EP2009/007002 patent/WO2010037523A1/en active Application Filing
- 2009-09-29 KR KR1020117009991A patent/KR101608908B1/ko active IP Right Grant
- 2009-09-29 CN CN200980147114.6A patent/CN102282668B/zh active Active
- 2009-09-29 JP JP2011528256A patent/JP5795735B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
CN102282668B (zh) | 2014-09-24 |
WO2010037523A1 (en) | 2010-04-08 |
US20100078689A1 (en) | 2010-04-01 |
CN102282668A (zh) | 2011-12-14 |
US8071442B2 (en) | 2011-12-06 |
DE102008049733B3 (de) | 2010-06-17 |
JP2012504327A (ja) | 2012-02-16 |
KR20110082028A (ko) | 2011-07-15 |
KR101608908B1 (ko) | 2016-04-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5795735B2 (ja) | チャネル領域への減少させられたオフセットを有する埋め込みSi/Ge材質を伴うトランジスタ | |
JP5204645B2 (ja) | 強化した応力伝送効率でコンタクト絶縁層を形成する技術 | |
JP5795260B2 (ja) | 段階的な形状の構造を有する埋め込み歪誘起材質を伴うトランジスタ | |
JP4937253B2 (ja) | コンタクト絶縁層および異なる特性を有するシリサイド領域を形成するための技法 | |
US7879667B2 (en) | Blocking pre-amorphization of a gate electrode of a transistor | |
JP4979587B2 (ja) | ゲート及びチャネル内に歪を誘起させてcmosトランジスタの性能を向上させる方法 | |
US7586153B2 (en) | Technique for forming recessed strained drain/source regions in NMOS and PMOS transistors | |
US8460980B2 (en) | Transistor comprising an embedded semiconductor alloy in drain and source regions extending under the gate electrode | |
US7579262B2 (en) | Different embedded strain layers in PMOS and NMOS transistors and a method of forming the same | |
TWI387009B (zh) | 藉由偏斜式預非晶形化而減少受應變之電晶體中之晶體缺陷之技術 | |
US7344984B2 (en) | Technique for enhancing stress transfer into channel regions of NMOS and PMOS transistors | |
JP5544367B2 (ja) | トランジスタにおいて進歩したシリサイド形成と組み合わされる凹型のドレイン及びソース区域 | |
US9269631B2 (en) | Integration of semiconductor alloys in PMOS and NMOS transistors by using a common cavity etch process | |
JP2006332337A (ja) | 半導体装置及びその製造方法 | |
US20100078735A1 (en) | Cmos device comprising nmos transistors and pmos transistors having increased strain-inducing sources and closely spaced metal silicide regions | |
US7482219B2 (en) | Technique for creating different mechanical strain by a contact etch stop layer stack with an intermediate etch stop layer | |
JP5798923B2 (ja) | 基板全域にわたって高められた均一性を有する埋め込みSi/Ge材質を伴うトランジスタ | |
JP2009065020A (ja) | 半導体装置及びその製造方法 | |
KR101252262B1 (ko) | 서로 다른 특성들을 갖는 콘택 절연층 실리사이드 영역을형성하는 기술 | |
US7951662B2 (en) | Method of fabricating strained silicon transistor | |
WO2006118786A1 (en) | Technique for forming a contact insulation layer with enhanced stress transfer efficiency |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120924 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120924 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140131 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140226 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20140526 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20140602 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140626 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20150120 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150518 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20150525 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150728 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150814 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5795735 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |