JP5679014B2 - 弾性表面波装置 - Google Patents
弾性表面波装置 Download PDFInfo
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- JP5679014B2 JP5679014B2 JP2013160933A JP2013160933A JP5679014B2 JP 5679014 B2 JP5679014 B2 JP 5679014B2 JP 2013160933 A JP2013160933 A JP 2013160933A JP 2013160933 A JP2013160933 A JP 2013160933A JP 5679014 B2 JP5679014 B2 JP 5679014B2
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- film
- acoustic wave
- surface acoustic
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14538—Formation
- H03H9/14541—Multilayer finger or busbar electrode
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/0023—Balance-unbalance or balance-balance networks
- H03H9/0028—Balance-unbalance or balance-balance networks using surface acoustic wave devices
- H03H9/0047—Balance-unbalance or balance-balance networks using surface acoustic wave devices having two acoustic tracks
- H03H9/0066—Balance-unbalance or balance-balance networks using surface acoustic wave devices having two acoustic tracks being electrically parallel
- H03H9/0071—Balance-unbalance or balance-balance networks using surface acoustic wave devices having two acoustic tracks being electrically parallel the balanced terminals being on the same side of the tracks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14544—Transducers of particular shape or position
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14544—Transducers of particular shape or position
- H03H9/14576—Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger
- H03H9/14582—Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger the last fingers having a different pitch
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
2…圧電基板
3…電極
3a…Pt膜
3b…Al膜
4〜6…第1〜第3のIDT電極
7,8…反射器
9…密着層
10…誘電体層
Claims (5)
- LiTaO3からなりカット角が36°〜49°の範囲にある圧電基板と、
前記圧電基板上に形成されており、Ag膜と、Ag膜上に積層されたAl膜とを有する
IDT電極と、
前記圧電基板上において前記IDT電極を覆うように設けられた誘電体層とを備え、
弾性表面波の波長をλとしたときに、前記Al膜の規格化膜厚h/λが0.06≦h/λ≦0.17であり、前記Ag膜の規格化膜厚h/λが0.01≦h/λ≦0.03であり、前記誘電体層の規格化膜厚h/λが前記IDT電極の規格化膜厚≦h/λ<0.2とされている、弾性表面波装置。 - 前記誘電体層の規格化膜厚h/λが前記IDT電極の規格化膜厚≦h/λ≦0.16とされている、請求項1に記載の弾性表面波装置。
- LiTaO3からなりカット角が36°〜49°の範囲にある圧電基板と、
前記圧電基板上に形成されており、Cu膜と、Cu膜上に積層されたAl膜とを有する
IDT電極と、
前記圧電基板上において前記IDT電極を覆うように設けられた誘電体層とを備え、
弾性表面波の波長をλとしたときに、前記Al膜の規格化膜厚h/λが0.06≦h/λ≦0.164であり、前記Cu膜の規格化膜厚h/λが0.012≦h/λ≦0.036であり、前記誘電体層の規格化膜厚h/λが前記IDT電極の規格化膜厚≦h/λ<0.2とされている、弾性表面波装置。 - 前記誘電体層の規格化膜厚h/λが前記IDT電極の規格化膜厚≦h/λ≦0.16とされている、請求項3に記載の弾性表面波装置。
- 前記圧電基板がLiTaO3からなり、前記誘電体層が酸化珪素からなる、請求項1〜
4のいずれか1項に記載の弾性表面波装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013160933A JP5679014B2 (ja) | 2009-10-19 | 2013-08-02 | 弾性表面波装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009240202 | 2009-10-19 | ||
JP2009240202 | 2009-10-19 | ||
JP2013160933A JP5679014B2 (ja) | 2009-10-19 | 2013-08-02 | 弾性表面波装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011537249A Division JP5392353B2 (ja) | 2009-10-19 | 2010-10-19 | 弾性表面波装置 |
Publications (2)
Publication Number | Publication Date |
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JP2013240105A JP2013240105A (ja) | 2013-11-28 |
JP5679014B2 true JP5679014B2 (ja) | 2015-03-04 |
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Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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JP2011537249A Active JP5392353B2 (ja) | 2009-10-19 | 2010-10-19 | 弾性表面波装置 |
JP2013160933A Active JP5679014B2 (ja) | 2009-10-19 | 2013-08-02 | 弾性表面波装置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
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JP2011537249A Active JP5392353B2 (ja) | 2009-10-19 | 2010-10-19 | 弾性表面波装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8373329B2 (ja) |
EP (1) | EP2493073B1 (ja) |
JP (2) | JP5392353B2 (ja) |
CN (1) | CN102668375B (ja) |
WO (1) | WO2011049060A1 (ja) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6502263B2 (ja) | 2013-11-20 | 2019-04-17 | ローム株式会社 | スイッチングデバイスおよび電子回路 |
US10333494B2 (en) | 2014-12-24 | 2019-06-25 | Qorvo Us, Inc. | Simplified acoustic RF resonator parallel capacitance compensation |
JP2017157944A (ja) * | 2016-02-29 | 2017-09-07 | 株式会社村田製作所 | 弾性表面波装置およびそれを用いた送受信フィルタを有するデュプレクサ |
US10581156B2 (en) | 2016-05-04 | 2020-03-03 | Qorvo Us, Inc. | Compensation circuit to mitigate antenna-to-antenna coupling |
US10581403B2 (en) | 2016-07-11 | 2020-03-03 | Qorvo Us, Inc. | Device having a titanium-alloyed surface |
US11050412B2 (en) | 2016-09-09 | 2021-06-29 | Qorvo Us, Inc. | Acoustic filter using acoustic coupling |
US11165412B2 (en) | 2017-01-30 | 2021-11-02 | Qorvo Us, Inc. | Zero-output coupled resonator filter and related radio frequency filter circuit |
US11165413B2 (en) | 2017-01-30 | 2021-11-02 | Qorvo Us, Inc. | Coupled resonator structure |
JP6904719B2 (ja) * | 2017-02-13 | 2021-07-21 | 京セラ株式会社 | 弾性波素子、フィルタ素子および通信装置 |
CN110383687B (zh) * | 2017-03-01 | 2023-02-17 | 株式会社村田制作所 | 高频滤波器、多工器、高频前端电路以及通信装置 |
US10873318B2 (en) | 2017-06-08 | 2020-12-22 | Qorvo Us, Inc. | Filter circuits having acoustic wave resonators in a transversal configuration |
US11070193B2 (en) * | 2017-11-24 | 2021-07-20 | Murata Manufacturing Co., Ltd. | Elastic wave device, radio-frequency front-end circuit, and communication device |
JP7080671B2 (ja) * | 2018-02-27 | 2022-06-06 | NDK SAW devices株式会社 | 弾性表面波デバイス |
US11152913B2 (en) | 2018-03-28 | 2021-10-19 | Qorvo Us, Inc. | Bulk acoustic wave (BAW) resonator |
SG10201905013VA (en) * | 2018-06-11 | 2020-01-30 | Skyworks Solutions Inc | Acoustic wave device with spinel layer |
US11876501B2 (en) | 2019-02-26 | 2024-01-16 | Skyworks Solutions, Inc. | Acoustic wave device with multi-layer substrate including ceramic |
US11146247B2 (en) | 2019-07-25 | 2021-10-12 | Qorvo Us, Inc. | Stacked crystal filter structures |
US11757430B2 (en) | 2020-01-07 | 2023-09-12 | Qorvo Us, Inc. | Acoustic filter circuit for noise suppression outside resonance frequency |
US11146246B2 (en) | 2020-01-13 | 2021-10-12 | Qorvo Us, Inc. | Phase shift structures for acoustic resonators |
US11146245B2 (en) | 2020-01-13 | 2021-10-12 | Qorvo Us, Inc. | Mode suppression in acoustic resonators |
US11632097B2 (en) | 2020-11-04 | 2023-04-18 | Qorvo Us, Inc. | Coupled resonator filter device |
US11575363B2 (en) | 2021-01-19 | 2023-02-07 | Qorvo Us, Inc. | Hybrid bulk acoustic wave filter |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3407459B2 (ja) * | 1995-03-23 | 2003-05-19 | 株式会社村田製作所 | 表面波共振子フィルタ |
JP3402311B2 (ja) | 2000-05-19 | 2003-05-06 | 株式会社村田製作所 | 弾性表面波装置 |
JP3521864B2 (ja) * | 2000-10-26 | 2004-04-26 | 株式会社村田製作所 | 弾性表面波素子 |
JP3979279B2 (ja) * | 2001-12-28 | 2007-09-19 | 株式会社村田製作所 | 弾性表面波装置 |
JP2004172990A (ja) * | 2002-11-20 | 2004-06-17 | Murata Mfg Co Ltd | 表面波装置 |
JP3975924B2 (ja) | 2003-01-22 | 2007-09-12 | 株式会社村田製作所 | 表面波装置及びその製造方法 |
US7339304B2 (en) * | 2003-10-03 | 2008-03-04 | Murata Manufacturing Co., Ltd. | Surface acoustic wave device |
JP4297139B2 (ja) | 2003-10-03 | 2009-07-15 | 株式会社村田製作所 | 弾性表面波装置 |
DE102004058016B4 (de) * | 2004-12-01 | 2014-10-09 | Epcos Ag | Mit akustischen Oberflächenwellen arbeitendes Bauelement mit hoher Bandbreite |
JP2006203839A (ja) | 2005-01-23 | 2006-08-03 | Kazuhiko Yamanouchi | 温度高安定薄膜構造弾性表面波基板とその基板を用いた弾性表面波機能素子 |
JP2008235950A (ja) * | 2005-05-26 | 2008-10-02 | Murata Mfg Co Ltd | 弾性境界波装置 |
JP4636178B2 (ja) * | 2006-04-24 | 2011-02-23 | 株式会社村田製作所 | 弾性表面波装置 |
JP4947055B2 (ja) * | 2006-09-25 | 2012-06-06 | 株式会社村田製作所 | 弾性境界波装置 |
JP4931615B2 (ja) * | 2007-01-19 | 2012-05-16 | 京セラ株式会社 | 弾性表面波装置及び通信装置 |
JP4992968B2 (ja) * | 2007-03-12 | 2012-08-08 | 株式会社村田製作所 | 弾性表面波装置 |
WO2009139108A1 (ja) * | 2008-05-12 | 2009-11-19 | 株式会社村田製作所 | 弾性境界波装置 |
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2010
- 2010-10-19 CN CN201080046609.2A patent/CN102668375B/zh active Active
- 2010-10-19 EP EP10824909.5A patent/EP2493073B1/en active Active
- 2010-10-19 JP JP2011537249A patent/JP5392353B2/ja active Active
- 2010-10-19 WO PCT/JP2010/068315 patent/WO2011049060A1/ja active Application Filing
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2012
- 2012-03-28 US US13/432,006 patent/US8373329B2/en active Active
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2013
- 2013-08-02 JP JP2013160933A patent/JP5679014B2/ja active Active
Also Published As
Publication number | Publication date |
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CN102668375B (zh) | 2014-10-29 |
EP2493073A1 (en) | 2012-08-29 |
JP2013240105A (ja) | 2013-11-28 |
EP2493073A4 (en) | 2014-01-08 |
CN102668375A (zh) | 2012-09-12 |
WO2011049060A1 (ja) | 2011-04-28 |
JP5392353B2 (ja) | 2014-01-22 |
US8373329B2 (en) | 2013-02-12 |
EP2493073B1 (en) | 2018-11-28 |
US20120187799A1 (en) | 2012-07-26 |
JPWO2011049060A1 (ja) | 2013-03-14 |
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