JP5662314B2 - 保護コーティングおよび方法 - Google Patents

保護コーティングおよび方法 Download PDF

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Publication number
JP5662314B2
JP5662314B2 JP2011525013A JP2011525013A JP5662314B2 JP 5662314 B2 JP5662314 B2 JP 5662314B2 JP 2011525013 A JP2011525013 A JP 2011525013A JP 2011525013 A JP2011525013 A JP 2011525013A JP 5662314 B2 JP5662314 B2 JP 5662314B2
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Japan
Prior art keywords
layer
metal
certain embodiments
present
precursor
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Expired - Fee Related
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JP2011525013A
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English (en)
Japanese (ja)
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JP2012501384A (ja
Inventor
ビスワズ，サミル
カラジャベルリアン，スザンヌ
ビー サード マッティングリー，ウィリアム
ビー サード マッティングリー，ウィリアム
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Corning Inc
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Corning Inc
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
    • C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
    • C03B5/167—Means for preventing damage to equipment, e.g. by molten glass, hot gases, batches
    • C03B5/1672—Use of materials therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06—Forming glass sheets
    • C03B17/064—Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
    • C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
    • C03B5/167—Means for preventing damage to equipment, e.g. by molten glass, hot gases, batches
    • C03B5/1672—Use of materials therefor
    • C03B5/1675—Platinum group metals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/36—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including layers graded in composition or physical properties

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Glass (AREA)
JP2011525013A 2008-08-29 2009-08-28 保護コーティングおよび方法 Expired - Fee Related JP5662314B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US19048808P 2008-08-29 2008-08-29
US61/190,488 2008-08-29
PCT/US2009/004926 WO2010024940A2 (en) 2008-08-29 2009-08-28 Protective coating and method

Publications (2)

Publication Number Publication Date
JP2012501384A JP2012501384A (ja) 2012-01-19
JP5662314B2 true JP5662314B2 (ja) 2015-01-28

Family

ID=41722189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011525013A Expired - Fee Related JP5662314B2 (ja) 2008-08-29 2009-08-28 保護コーティングおよび方法

Country Status (5)

Country Link
JP (1) JP5662314B2 (ko)
KR (1) KR101639088B1 (ko)
CN (1) CN102187490B (ko)
TW (1) TWI405872B (ko)
WO (1) WO2010024940A2 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011136109A1 (ja) * 2010-04-28 2011-11-03 旭硝子株式会社 溶融ガラス処理装置、その製造方法、およびその用途
JP5610299B2 (ja) * 2011-03-08 2014-10-22 株式会社ディ・ビー・シー・システム研究所 耐酸化消耗性白金合金、耐酸化消耗性白金合金皮膜および耐酸化消耗性金属部材
EP2692703B1 (en) * 2011-03-28 2018-04-25 Asahi Glass Company, Limited Molten glass holding refractory, glass manufacturing apparatus using molten glass holding refractory and method for manufacturing glass using glass manufacturing apparatus
JP2016179925A (ja) * 2015-03-24 2016-10-13 旭硝子株式会社 ガラス製造用の白金構造体、ガラス製造装置、およびガラスの製造方法
EP3429969B1 (en) * 2016-05-06 2021-12-22 Corning Incorporated Glass tubing manufacturing apparatus
JP6641317B2 (ja) * 2017-03-02 2020-02-05 不二越機械工業株式会社 単結晶製造装置
KR20180125117A (ko) * 2017-05-12 2018-11-22 코닝 인코포레이티드 내화 물품, 내화 물품 코팅용 조성물 및 내화 물품의 제조 방법

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8005A (en) * 1851-04-01 He ne y bo o t
JPS62212228A (ja) * 1986-03-13 1987-09-18 Tanaka Kikinzoku Kogyo Kk 高温用白金容器
US6413589B1 (en) * 1988-11-29 2002-07-02 Chou H. Li Ceramic coating method
US5334263A (en) * 1991-12-05 1994-08-02 General Electric Company Substrate stabilization of diffusion aluminide coated nickel-based superalloys
CN1511199A (zh) * 2001-03-16 2004-07-07 日本板硝子株式会社 金属超薄膜、金属超薄膜叠层体以及金属超薄膜和金属超薄膜叠层体的制备方法
US6855212B2 (en) * 2002-02-15 2005-02-15 Honeywell International Inc. Elevated temperature oxidation protection coatings for titanium alloys and methods of preparing the same
US6746783B2 (en) * 2002-06-27 2004-06-08 General Electric Company High-temperature articles and method for making
BE1015823A3 (fr) * 2003-12-17 2005-09-06 Ct Rech Metallurgiques Asbl Procede de revetement d'une surface metallique par une couche ultrafine.
KR100587686B1 (ko) * 2004-07-15 2006-06-08 삼성전자주식회사 질화 티타늄막 형성방법 및 이를 이용한 커패시터 제조방법
US7531217B2 (en) * 2004-12-15 2009-05-12 Iowa State University Research Foundation, Inc. Methods for making high-temperature coatings having Pt metal modified γ-Ni +γ′-Ni3Al alloy compositions and a reactive element
KR100772099B1 (ko) * 2005-06-28 2007-11-01 주식회사 하이닉스반도체 반도체 소자의 캐패시터 형성방법
US20080057275A1 (en) * 2006-08-31 2008-03-06 Paul Richard Grzesik Method and apparatus for minimizing oxidation pitting of refractory metal vessels
CN101158041A (zh) * 2007-09-11 2008-04-09 太原理工大学 金属表面形成ZrO2陶瓷复合材料的方法

Also Published As

Publication number Publication date
WO2010024940A3 (en) 2010-07-08
CN102187490A (zh) 2011-09-14
TWI405872B (zh) 2013-08-21
JP2012501384A (ja) 2012-01-19
KR20110069792A (ko) 2011-06-23
WO2010024940A2 (en) 2010-03-04
CN102187490B (zh) 2014-03-12
TW201026897A (en) 2010-07-16
KR101639088B1 (ko) 2016-07-12

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