JP5646254B2 - 発光素子及びこれを備える発光素子パッケージ - Google Patents
発光素子及びこれを備える発光素子パッケージ Download PDFInfo
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- 229910052759 nickel Inorganic materials 0.000 claims description 7
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- VRIVJOXICYMTAG-IYEMJOQQSA-L iron(ii) gluconate Chemical compound [Fe+2].OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O.OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O VRIVJOXICYMTAG-IYEMJOQQSA-L 0.000 description 6
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- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 4
- 229910005540 GaP Inorganic materials 0.000 description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 4
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- 239000011651 chromium Substances 0.000 description 4
- JAONJTDQXUSBGG-UHFFFAOYSA-N dialuminum;dizinc;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Al+3].[Al+3].[Zn+2].[Zn+2] JAONJTDQXUSBGG-UHFFFAOYSA-N 0.000 description 4
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- 229910052733 gallium Inorganic materials 0.000 description 4
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- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- 150000004767 nitrides Chemical class 0.000 description 4
- 239000004417 polycarbonate Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- SKRWFPLZQAAQSU-UHFFFAOYSA-N stibanylidynetin;hydrate Chemical compound O.[Sn].[Sb] SKRWFPLZQAAQSU-UHFFFAOYSA-N 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000011162 core material Substances 0.000 description 3
- 229910052749 magnesium Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- DZLPZFLXRVRDAE-UHFFFAOYSA-N [O--].[O--].[O--].[O--].[Al+3].[Zn++].[In+3] Chemical compound [O--].[O--].[O--].[O--].[Al+3].[Zn++].[In+3] DZLPZFLXRVRDAE-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
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- YZZNJYQZJKSEER-UHFFFAOYSA-N gallium tin Chemical compound [Ga].[Sn] YZZNJYQZJKSEER-UHFFFAOYSA-N 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- HRHKULZDDYWVBE-UHFFFAOYSA-N indium;oxozinc;tin Chemical compound [In].[Sn].[Zn]=O HRHKULZDDYWVBE-UHFFFAOYSA-N 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
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- 229910052750 molybdenum Inorganic materials 0.000 description 2
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- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 2
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- 229910052712 strontium Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
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- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
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- 229910052755 nonmetal Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
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- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
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- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- 229910052714 tellurium Inorganic materials 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/075—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
- H01L25/0753—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
- H01L33/382—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape the electrode extending partially in or entirely through the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
- H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3025—Electromagnetic shielding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0093—Wafer bonding; Removal of the growth substrate
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Led Devices (AREA)
- Fastening Of Light Sources Or Lamp Holders (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Planar Illumination Modules (AREA)
- Led Device Packages (AREA)
Description
実施例による発光素子または発光素子パッケージはライトユニットに適用することができる。前記ライトユニットは複数の発光素子または発光素子パッケージがアレイされた構造、図16及び図17に図示された表示装置、図18に図示された照明装置を含み、照明灯、信号灯、車両前照灯、電光掲示板等を含むことができる。
Claims (20)
- 第1導電型半導体層、前記第1導電型半導体層の下に活性層及び前記活性層の下に第2導電型半導体層を含む複数の発光セルと、
前記複数の発光セルの第1発光セルの第1導電型半導体層に連結された第1電極層と、
前記各発光セルの下にそれぞれ配置され、一部は次の発光セルの第1導電型半導体層に連結された複数の第2電極層と、
前記複数の発光セルのうち最後の発光セルの下に配置された第3電極層と、
前記第1電極層に連結された第1電極と、
前記第3電極層に連結された第2電極と、
前記第1〜第3電極層の周りに第1絶縁層と、
前記第1絶縁層の下に配置された伝導性支持部材と、を含み、
前記伝導性支持部材は、前記複数の発光セルのうち、センタ側発光セルの下に配置された第2電極層に連結され、
前記複数の発光セルは、前記第1電極に複数個が連結された第1グループと、前記第2電極に複数個が連結された第2グループと、を含み、
前記複数の発光セルのセンタ側発光セルは、前記第1グループと第2グループとの間の領域に隣接した前記第1及び第2グループの発光セルの少なくとも一つの発光セルを含む発光素子。 - 前記複数の第2電極層のいずれか一つは、前記第1グループ及び第2グループの発光セルを連結させることを特徴とする請求項1に記載の発光素子。
- 前記複数の発光セルの周りに配置された第2絶縁層を含む請求項1または2に記載の発光素子。
- 前記各発光セルと前記第2及び第3電極層のいずれか1つの間に配置された複数の導電性接触層を含む請求項1〜3のいずれか一項に記載の発光素子。
- 前記導電性接触層の個数は前記発光セルの個数と同一である請求項4に記載の発光素子。
- 前記複数の発光セルはバー形態、またはn個(n>2)が相互平行するように配置される請求項1〜5のいずれか一項に記載の発光素子。
- 前記第1電極層は、前記第1発光セルと前記伝導性支持部材の間に配置され、
前記第1電極は、前記第1電極層の上に配置され、前記第1発光セルから離隔される請求項1〜6のいずれか一項に記載の発光素子。 - 前記第1電極は、前記複数の発光セルの第1発光セルの第1導電型半導体層の上に形成される請求項1〜6のいずれか一項に記載の発光素子。
- 前記第2電極は、前記第3電極層の上に配置され、前記最後の発光セルから離隔される請求項1〜8のいずれか一項に記載の発光素子。
- 前記第2電極層の一部は次の発光セルの第2導電型半導体層から第1導電型半導体層の下部まで延長され、前記第1絶縁層の一部は前記第2電極層の一部周りに延長される請求項1〜9のいずれか一項に記載の発光素子。
- 前記第1グループの複数の発光セルは、前記第1電極と前記伝導性支持部材の間に直列に連結され、
前記第2グループの複数の発光セルは、前記第2電極と前記伝導性支持部材の間に直列に連結される請求項1〜10のいずれか一項に記載の発光素子。 - 前記第1グループの発光セルは前記第2グループの発光セルと同一個数である請求項1〜11のいずれか一項に記載の発光素子。
- 前記第1グループの発光セルと前記第2グループの発光セルはAC電源の1/2周期ずつ駆動される請求項1〜12のいずれか一項に記載の発光素子。
- 前記第1〜第3電極層はAg、Ni、Al、Rh、Pd、Ir、Ru、Mg、Zn、Pt、Au、Hf、W、Ti、及びこれらの選択的な組合からなるグループから選択される請求項1〜13のいずれか一項に記載の発光素子。
- 前記伝導性支持部材は、金属またはキャリアウェハを含む請求項1〜14のいずれか一項に記載の発光素子。
- 前記伝導性支持部材と前記伝導性支持部材に連結された第2電極層の間に配置された接合層をさらに含む請求項1〜15のいずれか一項に記載の発光素子。
- 前記第1導電型半導体層はN型ドーパントを含み、
前記第2導電型半導体層はP型ドーパントを含む請求項1〜16のいずれか一項に記載の発光素子。 - 前記第1〜第3電極層は反射電極層である請求項1〜17のいずれか一項に記載の発光素子。
- 前記複数の第2電極層のそれぞれは、前記第1または第2グループ内に配置された隣接した二つの発光セルを直列に連結させる請求項1〜18のいずれか一項に記載の発光素子。
- ボディと、前記ボディの上に複数のリード電極と、前記複数のリード電極に連結された発光素子と、前記発光素子をモールディングするモールディング部材と、を含み、
前記発光素子は、
第1導電型半導体層、前記第1導電型半導体層の下に活性層及び前記活性層の下に第2導電型半導体層を含む複数の発光セルと、
前記複数の発光セルの第1発光セルの第1導電型半導体層に連結された第1電極層と、
前記各発光セルの下にそれぞれ配置され、一部は次の発光セルの第1導電型半導体層に連結された複数の第2電極層と、
前記複数の発光セルのうち最後の発光セルの下に配置された第3電極層と、
前記第1電極層に連結された第1電極と、
前記第3電極層に連結された第2電極と、
前記第1〜第3電極層の周りに形成された第1絶縁層と、
前記第1絶縁層の下に配置された伝導性支持部材と、を含み、
前記伝導性支持部材は、前記複数の発光セルのセンタ側発光セルの下に配置された第2電極層に連結され、
前記複数の発光セルは、前記第1電極に複数個が連結された第1グループと、前記第2電極に複数個が連結された第2グループと、を含み、
前記複数の発光セルのセンタ側発光セルは、前記第1グループと第2グループとの間の領域に隣接した前記第1及び第2グループの発光セルの少なくとも一つの発光セルを含む発光素子パッケージ。
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