JP5633508B2 - 圧電アクチュエータ及びレンズ鏡筒 - Google Patents

圧電アクチュエータ及びレンズ鏡筒 Download PDF

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Publication number
JP5633508B2
JP5633508B2 JP2011507033A JP2011507033A JP5633508B2 JP 5633508 B2 JP5633508 B2 JP 5633508B2 JP 2011507033 A JP2011507033 A JP 2011507033A JP 2011507033 A JP2011507033 A JP 2011507033A JP 5633508 B2 JP5633508 B2 JP 5633508B2
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JP
Japan
Prior art keywords
piezoelectric element
piezoelectric
rotor
phase
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2011507033A
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English (en)
Japanese (ja)
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JPWO2010113505A1 (ja
Inventor
邦宏 桑野
邦宏 桑野
容大 金満
容大 金満
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Nikon Corp
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Nikon Corp
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Publication date
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Priority to JP2011507033A priority Critical patent/JP5633508B2/ja
Publication of JPWO2010113505A1 publication Critical patent/JPWO2010113505A1/ja
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B13/00—Viewfinders; Focusing aids for cameras; Means for focusing for cameras; Autofocus systems for cameras
    • G03B13/32—Means for focusing
    • G03B13/34—Power focusing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B3/00—Focusing arrangements of general interest for cameras, projectors or printers
    • G03B3/10—Power-operated focusing
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Lens Barrels (AREA)
JP2011507033A 2009-03-31 2010-03-31 圧電アクチュエータ及びレンズ鏡筒 Expired - Fee Related JP5633508B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011507033A JP5633508B2 (ja) 2009-03-31 2010-03-31 圧電アクチュエータ及びレンズ鏡筒

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2009084114 2009-03-31
JP2009084113 2009-03-31
JP2009084114 2009-03-31
JP2009084113 2009-03-31
JP2011507033A JP5633508B2 (ja) 2009-03-31 2010-03-31 圧電アクチュエータ及びレンズ鏡筒
PCT/JP2010/002376 WO2010113505A1 (ja) 2009-03-31 2010-03-31 圧電アクチュエータ及びレンズ鏡筒

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014212110A Division JP2015008631A (ja) 2009-03-31 2014-10-16 圧電アクチュエータ及びレンズ鏡筒

Publications (2)

Publication Number Publication Date
JPWO2010113505A1 JPWO2010113505A1 (ja) 2012-10-04
JP5633508B2 true JP5633508B2 (ja) 2014-12-03

Family

ID=42827813

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2011507033A Expired - Fee Related JP5633508B2 (ja) 2009-03-31 2010-03-31 圧電アクチュエータ及びレンズ鏡筒
JP2014212110A Pending JP2015008631A (ja) 2009-03-31 2014-10-16 圧電アクチュエータ及びレンズ鏡筒

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2014212110A Pending JP2015008631A (ja) 2009-03-31 2014-10-16 圧電アクチュエータ及びレンズ鏡筒

Country Status (5)

Country Link
US (2) US8693116B2 (enExample)
JP (2) JP5633508B2 (enExample)
KR (1) KR20120004427A (enExample)
CN (2) CN102365815B (enExample)
WO (1) WO2010113505A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120004427A (ko) * 2009-03-31 2012-01-12 가부시키가이샤 니콘 압전 액추에이터 및 렌즈 경통
DE102012202945A1 (de) 2011-03-14 2012-12-13 Smaract Gmbh Verfahren zur Ansteuerung eines Trägheitsantriebs
US9692323B2 (en) 2011-03-30 2017-06-27 SmarAct Holding GmbH Method for actuating a multi-actuator drive device
CN105765853B (zh) * 2013-11-27 2019-03-08 株式会社村田制作所 驱动装置
JP6485118B2 (ja) 2015-03-04 2019-03-20 セイコーエプソン株式会社 圧電駆動装置及びロボット
JP2017073890A (ja) * 2015-10-07 2017-04-13 キヤノン株式会社 並進駆動装置、像ぶれ補正装置、レンズ鏡筒及び撮像装置
ITUB20156009A1 (it) * 2015-11-30 2017-05-30 St Microelectronics Srl Riflettore mems biassiale risonante con attuatori piezoelettrici e sistema mems proiettivo includente il medesimo
JP2018074723A (ja) 2016-10-27 2018-05-10 セイコーエプソン株式会社 駆動装置、圧電モーター、ロボット、電子部品搬送装置およびプリンター
JP6919275B2 (ja) * 2017-03-31 2021-08-18 セイコーエプソン株式会社 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置およびプリンター
JP6743081B2 (ja) * 2018-04-09 2020-08-19 キヤノン株式会社 レンズ装置及びこれを備えた光学機器
CN108705329B (zh) * 2018-08-22 2023-08-22 金陵科技学院 基于二自由度压电作动器的精密工作台及对应压电作动器
TW202028567A (zh) * 2018-11-26 2020-08-01 日商日本製紙股份有限公司 具備含有纖維素奈米纖維之塗佈層的紙
JP2023524183A (ja) * 2021-04-14 2023-06-09 北京小米移動軟件有限公司 カメラアクチュエータ
JP2023043037A (ja) * 2021-09-15 2023-03-28 エスゼット ディージェイアイ テクノロジー カンパニー リミテッド 超音波モータ
CN118884649B (zh) * 2024-07-05 2025-01-21 宁波舜宇光电信息有限公司 压电致动器及其潜望摄像模组

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59230473A (ja) * 1983-06-13 1984-12-25 Hitachi Ltd 駆動装置
JPH01264582A (ja) * 1988-04-15 1989-10-20 Olympus Optical Co Ltd 超音波リニアモータ
JPH0287981A (ja) * 1988-09-21 1990-03-28 Marcon Electron Co Ltd 圧電アクチュエータ
JPH02159982A (ja) * 1988-12-13 1990-06-20 Marcon Electron Co Ltd 圧電アクチュエータ
JP2005185094A (ja) * 2003-12-15 2005-07-07 Asml Netherlands Bv 圧電アクチュエータを使用してオブジェクトを移動させるシステムおよび方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63274894A (ja) 1987-05-01 1988-11-11 魚住　清彦 送り装置
JP2858877B2 (ja) 1990-05-28 1999-02-17 日本電気株式会社 圧電アクチュエータの駆動方法
JPH099651A (ja) * 1995-06-15 1997-01-10 Nikon Corp 超音波アクチュエータ
JP2003243282A (ja) 2002-02-14 2003-08-29 Nikon Corp ステージ装置及び露光装置
JP2007185056A (ja) 2006-01-10 2007-07-19 Sony Corp 弾性振動体の励振方法および振動型駆動装置
JP2007236138A (ja) 2006-03-02 2007-09-13 Konica Minolta Opto Inc 駆動装置および振動体
CN101206297B (zh) * 2006-12-20 2011-09-28 财团法人工业技术研究院 压电驱动式光学镜头
JP5304044B2 (ja) * 2008-06-12 2013-10-02 株式会社ニコン 圧電アクチュエータ、レンズ鏡筒、光学機器
KR20120004427A (ko) * 2009-03-31 2012-01-12 가부시키가이샤 니콘 압전 액추에이터 및 렌즈 경통
JP5071435B2 (ja) * 2009-05-11 2012-11-14 株式会社ニコン 圧電アクチュエータ、レンズ鏡筒およびカメラ
JP5668683B2 (ja) * 2009-06-15 2015-02-12 株式会社ニコン 圧電アクチュエータ、レンズ鏡筒およびカメラ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59230473A (ja) * 1983-06-13 1984-12-25 Hitachi Ltd 駆動装置
JPH01264582A (ja) * 1988-04-15 1989-10-20 Olympus Optical Co Ltd 超音波リニアモータ
JPH0287981A (ja) * 1988-09-21 1990-03-28 Marcon Electron Co Ltd 圧電アクチュエータ
JPH02159982A (ja) * 1988-12-13 1990-06-20 Marcon Electron Co Ltd 圧電アクチュエータ
JP2005185094A (ja) * 2003-12-15 2005-07-07 Asml Netherlands Bv 圧電アクチュエータを使用してオブジェクトを移動させるシステムおよび方法

Also Published As

Publication number Publication date
CN102365815A (zh) 2012-02-29
US20110317292A1 (en) 2011-12-29
CN102365815B (zh) 2015-09-23
JP2015008631A (ja) 2015-01-15
WO2010113505A1 (ja) 2010-10-07
KR20120004427A (ko) 2012-01-12
US8693116B2 (en) 2014-04-08
US20140104711A1 (en) 2014-04-17
US9154053B2 (en) 2015-10-06
CN103973158A (zh) 2014-08-06
JPWO2010113505A1 (ja) 2012-10-04

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