CN102365815B - 压电致动器以及透镜镜筒 - Google Patents

压电致动器以及透镜镜筒 Download PDF

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Publication number
CN102365815B
CN102365815B CN201080015449.5A CN201080015449A CN102365815B CN 102365815 B CN102365815 B CN 102365815B CN 201080015449 A CN201080015449 A CN 201080015449A CN 102365815 B CN102365815 B CN 102365815B
Authority
CN
China
Prior art keywords
piezoelectric
piezoelectric element
phase
group
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201080015449.5A
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English (en)
Chinese (zh)
Other versions
CN102365815A (zh
Inventor
桑野邦宏
金满容大
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of CN102365815A publication Critical patent/CN102365815A/zh
Application granted granted Critical
Publication of CN102365815B publication Critical patent/CN102365815B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B13/00—Viewfinders; Focusing aids for cameras; Means for focusing for cameras; Autofocus systems for cameras
    • G03B13/32—Means for focusing
    • G03B13/34—Power focusing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B3/00—Focusing arrangements of general interest for cameras, projectors or printers
    • G03B3/10—Power-operated focusing
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Lens Barrels (AREA)
CN201080015449.5A 2009-03-31 2010-03-31 压电致动器以及透镜镜筒 Expired - Fee Related CN102365815B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2009-084113 2009-03-31
JP2009084114 2009-03-31
JP2009084113 2009-03-31
JP2009-084114 2009-03-31
PCT/JP2010/002376 WO2010113505A1 (ja) 2009-03-31 2010-03-31 圧電アクチュエータ及びレンズ鏡筒

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201410162941.5A Division CN103973158A (zh) 2009-03-31 2010-03-31 压电致动器以及透镜镜筒

Publications (2)

Publication Number Publication Date
CN102365815A CN102365815A (zh) 2012-02-29
CN102365815B true CN102365815B (zh) 2015-09-23

Family

ID=42827813

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201080015449.5A Expired - Fee Related CN102365815B (zh) 2009-03-31 2010-03-31 压电致动器以及透镜镜筒
CN201410162941.5A Pending CN103973158A (zh) 2009-03-31 2010-03-31 压电致动器以及透镜镜筒

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201410162941.5A Pending CN103973158A (zh) 2009-03-31 2010-03-31 压电致动器以及透镜镜筒

Country Status (5)

Country Link
US (2) US8693116B2 (enExample)
JP (2) JP5633508B2 (enExample)
KR (1) KR20120004427A (enExample)
CN (2) CN102365815B (enExample)
WO (1) WO2010113505A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120004427A (ko) * 2009-03-31 2012-01-12 가부시키가이샤 니콘 압전 액추에이터 및 렌즈 경통
DE102012202945A1 (de) 2011-03-14 2012-12-13 Smaract Gmbh Verfahren zur Ansteuerung eines Trägheitsantriebs
US9692323B2 (en) 2011-03-30 2017-06-27 SmarAct Holding GmbH Method for actuating a multi-actuator drive device
CN105765853B (zh) * 2013-11-27 2019-03-08 株式会社村田制作所 驱动装置
JP6485118B2 (ja) 2015-03-04 2019-03-20 セイコーエプソン株式会社 圧電駆動装置及びロボット
JP2017073890A (ja) * 2015-10-07 2017-04-13 キヤノン株式会社 並進駆動装置、像ぶれ補正装置、レンズ鏡筒及び撮像装置
ITUB20156009A1 (it) * 2015-11-30 2017-05-30 St Microelectronics Srl Riflettore mems biassiale risonante con attuatori piezoelettrici e sistema mems proiettivo includente il medesimo
JP2018074723A (ja) 2016-10-27 2018-05-10 セイコーエプソン株式会社 駆動装置、圧電モーター、ロボット、電子部品搬送装置およびプリンター
JP6919275B2 (ja) * 2017-03-31 2021-08-18 セイコーエプソン株式会社 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置およびプリンター
JP6743081B2 (ja) * 2018-04-09 2020-08-19 キヤノン株式会社 レンズ装置及びこれを備えた光学機器
CN108705329B (zh) * 2018-08-22 2023-08-22 金陵科技学院 基于二自由度压电作动器的精密工作台及对应压电作动器
TW202028567A (zh) * 2018-11-26 2020-08-01 日商日本製紙股份有限公司 具備含有纖維素奈米纖維之塗佈層的紙
JP2023524183A (ja) * 2021-04-14 2023-06-09 北京小米移動軟件有限公司 カメラアクチュエータ
JP2023043037A (ja) * 2021-09-15 2023-03-28 エスゼット ディージェイアイ テクノロジー カンパニー リミテッド 超音波モータ
CN118884649B (zh) * 2024-07-05 2025-01-21 宁波舜宇光电信息有限公司 压电致动器及其潜望摄像模组

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1721993A (zh) * 2003-12-15 2006-01-18 Asml荷兰有限公司 采用压电致动器移动物体的系统和方法
CN101206297A (zh) * 2006-12-20 2008-06-25 财团法人工业技术研究院 压电驱动式光学镜头

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59230473A (ja) * 1983-06-13 1984-12-25 Hitachi Ltd 駆動装置
JPS63274894A (ja) 1987-05-01 1988-11-11 魚住　清彦 送り装置
JPH01264582A (ja) 1988-04-15 1989-10-20 Olympus Optical Co Ltd 超音波リニアモータ
JPH0287981A (ja) * 1988-09-21 1990-03-28 Marcon Electron Co Ltd 圧電アクチュエータ
JPH02159982A (ja) * 1988-12-13 1990-06-20 Marcon Electron Co Ltd 圧電アクチュエータ
JP2858877B2 (ja) 1990-05-28 1999-02-17 日本電気株式会社 圧電アクチュエータの駆動方法
JPH099651A (ja) * 1995-06-15 1997-01-10 Nikon Corp 超音波アクチュエータ
JP2003243282A (ja) 2002-02-14 2003-08-29 Nikon Corp ステージ装置及び露光装置
JP2007185056A (ja) 2006-01-10 2007-07-19 Sony Corp 弾性振動体の励振方法および振動型駆動装置
JP2007236138A (ja) 2006-03-02 2007-09-13 Konica Minolta Opto Inc 駆動装置および振動体
JP5304044B2 (ja) * 2008-06-12 2013-10-02 株式会社ニコン 圧電アクチュエータ、レンズ鏡筒、光学機器
KR20120004427A (ko) * 2009-03-31 2012-01-12 가부시키가이샤 니콘 압전 액추에이터 및 렌즈 경통
JP5071435B2 (ja) * 2009-05-11 2012-11-14 株式会社ニコン 圧電アクチュエータ、レンズ鏡筒およびカメラ
JP5668683B2 (ja) * 2009-06-15 2015-02-12 株式会社ニコン 圧電アクチュエータ、レンズ鏡筒およびカメラ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1721993A (zh) * 2003-12-15 2006-01-18 Asml荷兰有限公司 采用压电致动器移动物体的系统和方法
CN101206297A (zh) * 2006-12-20 2008-06-25 财团法人工业技术研究院 压电驱动式光学镜头

Also Published As

Publication number Publication date
CN102365815A (zh) 2012-02-29
US20110317292A1 (en) 2011-12-29
JP2015008631A (ja) 2015-01-15
WO2010113505A1 (ja) 2010-10-07
KR20120004427A (ko) 2012-01-12
US8693116B2 (en) 2014-04-08
US20140104711A1 (en) 2014-04-17
US9154053B2 (en) 2015-10-06
JP5633508B2 (ja) 2014-12-03
CN103973158A (zh) 2014-08-06
JPWO2010113505A1 (ja) 2012-10-04

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SE01 Entry into force of request for substantive examination
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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150923