JP5591776B2 - 窒化物半導体装置およびそれを用いた回路 - Google Patents
窒化物半導体装置およびそれを用いた回路 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 59
- 150000004767 nitrides Chemical class 0.000 title claims description 56
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 230000001939 inductive effect Effects 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 239000010410 layer Substances 0.000 description 236
- 229910002704 AlGaN Inorganic materials 0.000 description 93
- 229910002601 GaN Inorganic materials 0.000 description 77
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 77
- 230000005533 two-dimensional electron gas Effects 0.000 description 23
- 230000015556 catabolic process Effects 0.000 description 22
- 239000011229 interlayer Substances 0.000 description 18
- 239000000758 substrate Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- 239000007769 metal material Substances 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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Description
前記第1のゲート電極と前記ドレイン電極との間に設けられ、前記第2のInx2Ga1−x2−y2Aly2N層上にショットキー接合を介して設けられたショットキー電極と、
前記ショットキー電極と前記ドレイン電極との間の前記第2のInx2Ga1−x2−y2Aly2N層上に設けられた第2のゲート電極と、
前記ソース電極と、前記ショットキー電極と、前記第2のゲート電極と、を電気的に接続し、前記第2のゲート電極から前記ドレイン電極の方向に延伸する部分を有する配線層と、を備える。
図1及び図2を用いて、第1の実施形態に係る窒化物半導体装置について説明する。図1は、本実施形態に係る逆導通形HFET100の、要部の断面図を模式的に示したものである。図2は、図1に示したHFET100の等価回路図である。図1に示したとおり、本実施形態に係るHFET100は、基板1、バッファ層2、GaN電子走行層3、AlGaN電子供給層4、ソース電極5、ドレイン電極6、第1のゲート絶縁膜8、第1のゲート電極9、ショットキー電極10、第2のゲート絶縁膜11、第2のゲート電極12、層間絶縁膜13、及び配線層14を備える。
初めに、ローサイド側HFET100Lのゲート端子Gにノーマリオフ型FET20Lの閾値よりも低い電圧が印加され、ノーマリオフ型FET20Lはオフ状態である。ハイサイド側HFET100Hも同様に、ゲート端子Gにノーマリオフ型FET20Hの閾値よりも低い電圧が印加され、ノーマリオフ型FET20Hはオフ状態である。
次に、ローサイド側HFET100Lのゲート端子Gにノーマリオフ型FET20Lの閾値以上の電圧を印加して、ノーマリオフ型FET20Lをオン状態にする。ノーマリオン型FET21Lのゲートとソースは同電位となるので、ノーマリオン型FET21Lは、オフ状態からオン状態になる。従って、ローサイド側FET100Lは、オン状態となり、そのドレイン端子Dからソース端子Sに向かって、インダクタ31からの電流が流れる。この結果、ハイサイド側HFET100Hのソース端子Sの電位が接地電位に向かって低下する。この途中、ハイサイド側HFET100L中のノーマリオン型FET21Hのゲート電位が低下していき、閾値以下となったところで、ノーマリオン型FET21Hはオフ状態となる。
次に、ローサイド側HFET100Lのゲート端子Gにノーマリオフ型FET20Lの閾値以下の電圧を印加して、ノーマリオフ型FET20Lをオフ状態にする。そうすると、ノーマリオン型FET21Lのドレインとソースの電位に対してゲートの電位が低下していき、閾値以下に低下すると、ノーマリオン型FET21Lはオフ状態になる。この結果、ローサイド側FET100Lは、オフ状態になり、そのソース端子Sとドレイン端子Dには、直流電源30の電圧が印加される。
第2の実施形態に係る窒化物半導体装置について図4及び図5を用いて説明する。図4は、本実施形態に係るHFET200の要部模式断面図である。図5は、本実施形態に係る等価回路図である。なお、第1の実施形態で説明した構成と同じ構成の部分には同じ参照番号または記号を用いその説明は省略する。第1の実施形態との相異点について主に説明する。
第3の実施形態に係る半導体装置について図6及び図7を用いて説明する。図6は、本実施形態に係るHFET300の要部模式断面図である。図7は、本実施形態に係る等価回路図である。なお、第2の実施形態で説明した構成と同じ構成の部分には同じ参照番号または記号を用いその説明は省略する。第2の実施形態との相異点について主に説明する。
2 バッファ層
3 アンドープGaN層
4 アンドープAlGaN層
5 ソース電極
6 ドレイン電極
7、7A リセス
8 第1のゲート絶縁膜
9 第1のゲート電極
10 ショットキー電極
11 第2のゲート絶縁膜
12、12A 第2のゲート電極
13 層間絶縁膜
14 配線
20、20A、20B ノーマリオフ型FET
21、21A、21B ノーマリオン型FET
22 ショットキーバリアダイオード
31 インダクタンス
40、41 p形GaN層
100、200、300 窒化物半導体装置
S ソース端子
D ドレイン端子
G ゲート端子
Claims (9)
- 第1のInx1Ga1−x1−y1Aly1N(0≦x1≦1、0≦y1≦1)層と、
前記第1のInx1Ga1−x1−y1Aly1N層上に設けられ、前記第1のInx1Ga1−x1−y1Aly1N層よりも禁制帯幅が広い第2のInx2Ga1−x2−y2Aly2N(0≦x2≦1、0≦y2≦1)層と、
前記第2のInx2Ga1−x2−y2Aly2N層上に設けられたソース電極と、
前記ソース電極と離間して、前記第2のInx2Ga1−x2−y2Aly2N層上に設けられたドレイン電極と、
前記ソース電極と前記ドレイン電極との間において、前記第2のIn x2 Ga 1−x2−y2 Al y2 N層との間に第1のゲート絶縁膜を介して設けられ、前記第2のIn x2 Ga 1−x2−y2 Al y2 N層の前記ソース電極および前記ドレイン電極が設けられた表面よりも前記第1のIn x1 Ga 1−x1−y1 Al y1 N層側に位置する部分を含む第1のゲート電極と、
前記第1のゲート電極と前記ドレイン電極との間に設けられ、前記第2のInx2Ga1−x2−y2Aly2N層上にショットキー接合を介して設けられたショットキー電極と、
前記ショットキー電極と前記ドレイン電極との間の前記第2のInx2Ga1−x2−y2Aly2N層上に設けられた第2のゲート電極と、
前記ソース電極と、前記ショットキー電極と、前記第2のゲート電極と、を電気的に接続し、前記第2のゲート電極から前記ドレイン電極の方向に延伸する部分を有する配線層と、
を備えた窒化物半導体装置。 - 前記第1のゲート電極は、前記第1のゲート絶縁膜を介して前記第1のIn x1 Ga 1−x1−y1 Al y1 N層上に設けられる請求項1記載の窒化物半導体装置。
- 第1のIn x1 Ga 1−x1−y1 Al y1 N(0≦x1≦1、0≦y1≦1)層と、
前記第1のIn x1 Ga 1−x1−y1 Al y1 N層上に設けられ、前記第1のIn x1 Ga 1−x1−y1 Al y1 N層よりも禁制帯幅が広い第2のIn x2 Ga 1−x2−y2 Al y2 N(0≦x2≦1、0≦y2≦1)層と、
前記第2のIn x2 Ga 1−x2−y2 Al y2 N層上に設けられたソース電極と、
前記ソース電極と離間して、前記第2のIn x2 Ga 1−x2−y2 Al y2 N層上に設けられたドレイン電極と、
前記ソース電極と前記ドレイン電極との間に設けられた第1のゲート電極と、
前記第2のIn x2 Ga 1−x2−y2 Al y2 N層と、前記第1のゲート電極と、の間に設けられたp形窒化物半導体層と、
前記第1のゲート電極と前記ドレイン電極との間に設けられ、前記第2のIn x2 Ga 1−x2−y2 Al y2 N層上にショットキー接合を介して設けられたショットキー電極と、
前記ショットキー電極と前記ドレイン電極との間の前記第2のIn x2 Ga 1−x2−y2 Al y2 N層上に設けられた第2のゲート電極と、
前記ソース電極と、前記ショットキー電極と、前記第2のゲート電極と、を電気的に接続し、前記第2のゲート電極から前記ドレイン電極の方向に延伸する部分を有する配線層と、
を備えた窒化物半導体装置。 - 前記p形窒化物半導体層は、前記第2のIn x2 Ga 1−x2−y2 Al y2 N層の前記ソース電極および前記ドレイン電極が設けられた表面よりも前記第1のIn x1 Ga 1−x1−y1 Al y1 N層側に位置する部分を含む請求項3記載の窒化物半導体装置。
- 前記第2のゲート電極は、第2のゲート絶縁膜を介して前記第2のInx2Ga1−x2−y2Aly2N層上に形成される請求項1〜4のいずれか1つに記載の窒化物半導体装置。
- 前記第2のゲート電極は、p形の第3のInx3Ga1−x3−y3Aly3N(0≦x3≦1、0≦y3≦1)層を介して前記第2のInx2Ga1−x2−y2Aly2N層上に形成される請求項1〜4のいずれか1つに記載の窒化物半導体装置。
- 前記第2のゲート電極は、前記第2のInx2Ga1−x2−y2Aly2N層とショットキー接合を形成し、前記ショットキー電極よりも仕事関数が大きい金属により形成される請求項1〜4のいずれか1つに記載の窒化物半導体装置。
- 前記第2のInx2Ga1−x2−y2Aly2N層の導電形は、n形である請求項1〜7のいずれか1つに記載の窒化物半導体装置。
- 請求項1〜8のいずれか1つに記載の第1の窒化物半導体装置と、
請求項1〜8のいずれか1つに記載の第2の窒化物半導体装置と、
前記第1の窒化物半導体装置のドレイン電極と、前記第2の窒化物半導体装置のドレイン電極と、に電気的に接続された誘導負荷と、
を備え、
前記第1の窒化物半導体装置のソース電極と、前記第2の窒化物半導体装置のドレイン電極と、を電気的に接続した回路。
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CN201210320351.1A CN103022118B (zh) | 2011-09-21 | 2012-08-31 | 氮化物半导体装置 |
US13/619,560 US9082691B2 (en) | 2011-09-21 | 2012-09-14 | Nitride semiconductor device |
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US9773877B2 (en) | 2004-05-13 | 2017-09-26 | Cree, Inc. | Wide bandgap field effect transistors with source connected field plates |
US11791385B2 (en) | 2005-03-11 | 2023-10-17 | Wolfspeed, Inc. | Wide bandgap transistors with gate-source field plates |
KR101395026B1 (ko) * | 2012-10-16 | 2014-05-15 | 경북대학교 산학협력단 | 질화물 반도체 소자 및 그 소자의 제조 방법 |
US9087718B2 (en) | 2013-03-13 | 2015-07-21 | Transphorm Inc. | Enhancement-mode III-nitride devices |
US9755059B2 (en) * | 2013-06-09 | 2017-09-05 | Cree, Inc. | Cascode structures with GaN cap layers |
US9679981B2 (en) * | 2013-06-09 | 2017-06-13 | Cree, Inc. | Cascode structures for GaN HEMTs |
US9847411B2 (en) | 2013-06-09 | 2017-12-19 | Cree, Inc. | Recessed field plate transistor structures |
JP6038745B2 (ja) * | 2013-08-22 | 2016-12-07 | 株式会社東芝 | ダイオード回路およびdc−dcコンバータ |
US9343562B2 (en) * | 2013-12-06 | 2016-05-17 | Infineon Technologies Americas Corp. | Dual-gated group III-V merged transistor |
US9406673B2 (en) * | 2013-12-23 | 2016-08-02 | Infineon Technologies Austria Ag | Semiconductor component with transistor |
JP2016051759A (ja) * | 2014-08-29 | 2016-04-11 | サンケン電気株式会社 | 半導体装置 |
JP2016171259A (ja) * | 2015-03-13 | 2016-09-23 | 株式会社東芝 | 半導体装置およびその製造方法 |
JP2018081943A (ja) * | 2015-03-25 | 2018-05-24 | シャープ株式会社 | 窒化物半導体装置 |
US10276681B2 (en) | 2016-02-29 | 2019-04-30 | Infineon Technologies Austria Ag | Double gate transistor device and method of operating |
US10530360B2 (en) | 2016-02-29 | 2020-01-07 | Infineon Technologies Austria Ag | Double gate transistor device and method of operating |
JP6905395B2 (ja) * | 2017-06-16 | 2021-07-21 | 株式会社東芝 | 半導体装置 |
DE102017210165A1 (de) * | 2017-06-19 | 2018-12-20 | Robert Bosch Gmbh | Mehrfach-Transistor-Anordnung, Brückengleichrichter und Verfahren zur Herstellung einer Mehrfach-Transistor-Anordnung |
CN111886683B (zh) * | 2018-03-22 | 2024-01-02 | 松下控股株式会社 | 氮化物半导体装置 |
US11855198B2 (en) * | 2020-04-09 | 2023-12-26 | Qualcomm Incorporated | Multi-gate high electron mobility transistors (HEMTs) employing tuned recess depth gates for improved device linearity |
KR102486167B1 (ko) * | 2022-02-24 | 2023-01-09 | (주) 트리노테크놀로지 | 하이브리드 채널 구조를 가지는 실리콘 카바이드 전력 반도체 장치 및 그 제작 방법 |
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JP5597921B2 (ja) * | 2008-12-22 | 2014-10-01 | サンケン電気株式会社 | 半導体装置 |
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JP5037594B2 (ja) * | 2009-12-08 | 2012-09-26 | シャープ株式会社 | 電界効果トランジスタ |
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US20130069117A1 (en) | 2013-03-21 |
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