JP5581887B2 - 振動片、振動子、発振器、電子機器、および周波数調整方法 - Google Patents

振動片、振動子、発振器、電子機器、および周波数調整方法 Download PDF

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Publication number
JP5581887B2
JP5581887B2 JP2010180100A JP2010180100A JP5581887B2 JP 5581887 B2 JP5581887 B2 JP 5581887B2 JP 2010180100 A JP2010180100 A JP 2010180100A JP 2010180100 A JP2010180100 A JP 2010180100A JP 5581887 B2 JP5581887 B2 JP 5581887B2
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JP
Japan
Prior art keywords
frequency
vibrating arm
mass
resonator element
vibrating
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Expired - Fee Related
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JP2010180100A
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English (en)
Japanese (ja)
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JP2011155628A5 (enExample
JP2011155628A (ja
Inventor
宏紀 河合
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2010180100A priority Critical patent/JP5581887B2/ja
Priority to US12/976,163 priority patent/US8760041B2/en
Priority to EP10196457A priority patent/EP2341620A3/en
Priority to TW099145637A priority patent/TWI439047B/zh
Priority to CN2010106062978A priority patent/CN102111119A/zh
Priority to KR1020100136763A priority patent/KR101219211B1/ko
Publication of JP2011155628A publication Critical patent/JP2011155628A/ja
Publication of JP2011155628A5 publication Critical patent/JP2011155628A5/ja
Application granted granted Critical
Publication of JP5581887B2 publication Critical patent/JP5581887B2/ja
Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H03H2003/0414—Resonance frequency
    • H03H2003/0492—Resonance frequency during the manufacture of a tuning-fork

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
JP2010180100A 2009-12-29 2010-08-11 振動片、振動子、発振器、電子機器、および周波数調整方法 Expired - Fee Related JP5581887B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2010180100A JP5581887B2 (ja) 2009-12-29 2010-08-11 振動片、振動子、発振器、電子機器、および周波数調整方法
US12/976,163 US8760041B2 (en) 2009-12-29 2010-12-22 Resonator element with mass formed on vibrating arm
EP10196457A EP2341620A3 (en) 2009-12-29 2010-12-22 Vibrating reed, vibrator, oscillator, electronic device, and frequency adjustment method
TW099145637A TWI439047B (zh) 2009-12-29 2010-12-23 Vibration slices, vibrators, oscillators, electronic machines, and frequency adjustment methods
CN2010106062978A CN102111119A (zh) 2009-12-29 2010-12-24 振动片、振子、振荡器、电子设备以及频率调整方法
KR1020100136763A KR101219211B1 (ko) 2009-12-29 2010-12-28 진동편, 진동자, 발진기, 전자기기, 및 주파수 조정 방법

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009299045 2009-12-29
JP2009299045 2009-12-29
JP2010180100A JP5581887B2 (ja) 2009-12-29 2010-08-11 振動片、振動子、発振器、電子機器、および周波数調整方法

Publications (3)

Publication Number Publication Date
JP2011155628A JP2011155628A (ja) 2011-08-11
JP2011155628A5 JP2011155628A5 (enExample) 2013-08-29
JP5581887B2 true JP5581887B2 (ja) 2014-09-03

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JP2010180100A Expired - Fee Related JP5581887B2 (ja) 2009-12-29 2010-08-11 振動片、振動子、発振器、電子機器、および周波数調整方法

Country Status (6)

Country Link
US (1) US8760041B2 (enExample)
EP (1) EP2341620A3 (enExample)
JP (1) JP5581887B2 (enExample)
KR (1) KR101219211B1 (enExample)
CN (1) CN102111119A (enExample)
TW (1) TWI439047B (enExample)

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JP5685962B2 (ja) 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP2013062643A (ja) * 2011-09-13 2013-04-04 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
JP2014165573A (ja) * 2013-02-22 2014-09-08 Seiko Epson Corp 振動片、振動子、電子デバイス、電子機器、および移動体
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体
JP6292486B2 (ja) * 2014-01-17 2018-03-14 株式会社村田製作所 Ｍｅｍｓ素子
JP6855961B2 (ja) * 2017-06-30 2021-04-07 セイコーエプソン株式会社 振動素子の周波数調整方法、振動素子、振動子、電子機器および移動体
JP2021005783A (ja) * 2019-06-26 2021-01-14 セイコーエプソン株式会社 振動片、電子機器、および移動体
JP2021132315A (ja) * 2020-02-20 2021-09-09 セイコーエプソン株式会社 振動素子、振動デバイス、電子機器、移動体および振動素子の製造方法
JP2021132314A (ja) 2020-02-20 2021-09-09 セイコーエプソン株式会社 振動素子、振動デバイス、電子機器、移動体および振動素子の製造方法
KR20220050550A (ko) * 2020-10-16 2022-04-25 경희대학교 산학협력단 정전 발전기
CN116192087B (zh) * 2023-02-21 2024-03-19 泰晶科技股份有限公司 一种音叉晶片及音叉晶体谐振器

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Also Published As

Publication number Publication date
KR101219211B1 (ko) 2013-01-07
US8760041B2 (en) 2014-06-24
EP2341620A3 (en) 2012-10-10
CN102111119A (zh) 2011-06-29
TW201228224A (en) 2012-07-01
US20110156826A1 (en) 2011-06-30
KR20110076824A (ko) 2011-07-06
TWI439047B (zh) 2014-05-21
EP2341620A2 (en) 2011-07-06
JP2011155628A (ja) 2011-08-11

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