KR101219211B1 - 진동편, 진동자, 발진기, 전자기기, 및 주파수 조정 방법 - Google Patents

진동편, 진동자, 발진기, 전자기기, 및 주파수 조정 방법 Download PDF

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Publication number
KR101219211B1
KR101219211B1 KR1020100136763A KR20100136763A KR101219211B1 KR 101219211 B1 KR101219211 B1 KR 101219211B1 KR 1020100136763 A KR1020100136763 A KR 1020100136763A KR 20100136763 A KR20100136763 A KR 20100136763A KR 101219211 B1 KR101219211 B1 KR 101219211B1
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South Korea
Prior art keywords
vibration
frequency
mass
arm
piece
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KR1020100136763A
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English (en)
Korean (ko)
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KR20110076824A (ko
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히로키 가와이
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세이코 엡슨 가부시키가이샤
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H03H2003/0414—Resonance frequency
    • H03H2003/0492—Resonance frequency during the manufacture of a tuning-fork

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
KR1020100136763A 2009-12-29 2010-12-28 진동편, 진동자, 발진기, 전자기기, 및 주파수 조정 방법 Expired - Fee Related KR101219211B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2009-299045 2009-12-29
JP2009299045 2009-12-29
JP2010180100A JP5581887B2 (ja) 2009-12-29 2010-08-11 振動片、振動子、発振器、電子機器、および周波数調整方法
JPJP-P-2010-180100 2010-08-11

Publications (2)

Publication Number Publication Date
KR20110076824A KR20110076824A (ko) 2011-07-06
KR101219211B1 true KR101219211B1 (ko) 2013-01-07

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020100136763A Expired - Fee Related KR101219211B1 (ko) 2009-12-29 2010-12-28 진동편, 진동자, 발진기, 전자기기, 및 주파수 조정 방법

Country Status (6)

Country Link
US (1) US8760041B2 (enExample)
EP (1) EP2341620A3 (enExample)
JP (1) JP5581887B2 (enExample)
KR (1) KR101219211B1 (enExample)
CN (1) CN102111119A (enExample)
TW (1) TWI439047B (enExample)

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JP5685962B2 (ja) 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP2013062643A (ja) * 2011-09-13 2013-04-04 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
JP2014165573A (ja) * 2013-02-22 2014-09-08 Seiko Epson Corp 振動片、振動子、電子デバイス、電子機器、および移動体
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体
JP6292486B2 (ja) * 2014-01-17 2018-03-14 株式会社村田製作所 Ｍｅｍｓ素子
JP6855961B2 (ja) * 2017-06-30 2021-04-07 セイコーエプソン株式会社 振動素子の周波数調整方法、振動素子、振動子、電子機器および移動体
JP2021005783A (ja) * 2019-06-26 2021-01-14 セイコーエプソン株式会社 振動片、電子機器、および移動体
JP2021132315A (ja) * 2020-02-20 2021-09-09 セイコーエプソン株式会社 振動素子、振動デバイス、電子機器、移動体および振動素子の製造方法
JP2021132314A (ja) 2020-02-20 2021-09-09 セイコーエプソン株式会社 振動素子、振動デバイス、電子機器、移動体および振動素子の製造方法
KR20220050550A (ko) * 2020-10-16 2022-04-25 경희대학교 산학협력단 정전 발전기
CN116192087B (zh) * 2023-02-21 2024-03-19 泰晶科技股份有限公司 一种音叉晶片及音叉晶体谐振器

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JPS5799014A (en) * 1980-12-12 1982-06-19 Seiko Instr & Electronics Ltd Tuning fork type oscillator
JP2009118217A (ja) * 2007-11-07 2009-05-28 Seiko Epson Corp 圧電振動片
JP2009239860A (ja) * 2008-03-28 2009-10-15 Epson Toyocom Corp 圧電振動片及びその製造方法

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JPS5465496A (en) 1977-11-02 1979-05-26 Seiko Instr & Electronics Ltd Composite oscillator
FR2477803A1 (fr) * 1980-03-04 1981-09-11 Suwa Seikosha Kk Resonateur a quartz du type diapason a couplage de modes
US4498025A (en) * 1980-12-12 1985-02-05 Seiko Instruments & Electronics Ltd. Tuning fork
JPS58182311A (ja) * 1982-04-20 1983-10-25 Seiko Instr & Electronics Ltd 音叉型振動子
JPS63262911A (ja) 1987-04-20 1988-10-31 Matsushima Kogyo Co Ltd ガラス封止圧電振動子
JPH07120914B2 (ja) 1989-03-07 1995-12-20 ミヨタ株式会社 音叉型圧電振動子の周波数調整方法
JPH07212161A (ja) 1994-01-18 1995-08-11 Citizen Watch Co Ltd 水晶振動子の製造方法
US5918354A (en) 1996-04-02 1999-07-06 Seiko Epson Corporation Method of making a piezoelectric element
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US6339276B1 (en) 1999-11-01 2002-01-15 Agere Systems Guardian Corp. Incremental tuning process for electrical resonators based on mechanical motion
JP2001196891A (ja) * 2000-01-07 2001-07-19 Citizen Watch Co Ltd 振動子
JP4547788B2 (ja) 2000-03-15 2010-09-22 セイコーエプソン株式会社 圧電振動子のパッケージ構造
JP3460694B2 (ja) 2000-11-24 2003-10-27 株式会社大真空 音叉型振動子の周波数調整装置及び周波数調整方法並びにその方法によって周波数調整された音叉型振動子
JP2002261577A (ja) 2001-03-02 2002-09-13 Seiko Epson Corp 振動片、振動子、発振器及び携帯用電話装置
DE10124349A1 (de) 2001-05-18 2002-12-05 Infineon Technologies Ag Piezoelektrische Resonatorvorrichtung mit Verstimmungsschichtfolge
JP2003133885A (ja) * 2001-10-22 2003-05-09 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
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JP2006262456A (ja) 2005-02-21 2006-09-28 Seiko Instruments Inc 圧電振動片とその製造方法、圧電振動子、発振器、電子機器及び電波時計
JP2007258917A (ja) * 2006-03-22 2007-10-04 Epson Toyocom Corp 圧電デバイス
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CH700716B1 (fr) * 2006-10-09 2010-10-15 Suisse Electronique Microtech Résonateur en silicium de type diapason.
JP4389924B2 (ja) 2006-11-07 2009-12-24 エプソントヨコム株式会社 圧電デバイス
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JP5067033B2 (ja) 2007-06-20 2012-11-07 セイコーエプソン株式会社 音叉型振動子、発振器
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JPS5799014A (en) * 1980-12-12 1982-06-19 Seiko Instr & Electronics Ltd Tuning fork type oscillator
JP2009118217A (ja) * 2007-11-07 2009-05-28 Seiko Epson Corp 圧電振動片
JP2009239860A (ja) * 2008-03-28 2009-10-15 Epson Toyocom Corp 圧電振動片及びその製造方法

Also Published As

Publication number Publication date
US8760041B2 (en) 2014-06-24
EP2341620A3 (en) 2012-10-10
CN102111119A (zh) 2011-06-29
TW201228224A (en) 2012-07-01
JP5581887B2 (ja) 2014-09-03
US20110156826A1 (en) 2011-06-30
KR20110076824A (ko) 2011-07-06
TWI439047B (zh) 2014-05-21
EP2341620A2 (en) 2011-07-06
JP2011155628A (ja) 2011-08-11

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