JP5580300B2 - 放射線検出器、放射線検出器を製造する方法、x線検出器及び撮像システム - Google Patents
放射線検出器、放射線検出器を製造する方法、x線検出器及び撮像システム Download PDFInfo
- Publication number
- JP5580300B2 JP5580300B2 JP2011513102A JP2011513102A JP5580300B2 JP 5580300 B2 JP5580300 B2 JP 5580300B2 JP 2011513102 A JP2011513102 A JP 2011513102A JP 2011513102 A JP2011513102 A JP 2011513102A JP 5580300 B2 JP5580300 B2 JP 5580300B2
- Authority
- JP
- Japan
- Prior art keywords
- trench
- radiation detector
- pixel
- barrier material
- radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
- G01T1/2914—Measurement of spatial distribution of radiation
- G01T1/2921—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras
- G01T1/2928—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras using solid state detectors
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Radiation (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Solid State Image Pick-Up Elements (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP08158304 | 2008-06-16 | ||
| EP08158304.9 | 2008-06-16 | ||
| PCT/IB2009/052442 WO2010004453A2 (en) | 2008-06-16 | 2009-06-09 | Radiation detector and a method of manufacturing a radiation detector |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011525238A JP2011525238A (ja) | 2011-09-15 |
| JP2011525238A5 JP2011525238A5 (enExample) | 2012-07-26 |
| JP5580300B2 true JP5580300B2 (ja) | 2014-08-27 |
Family
ID=41507503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011513102A Active JP5580300B2 (ja) | 2008-06-16 | 2009-06-09 | 放射線検出器、放射線検出器を製造する方法、x線検出器及び撮像システム |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8564084B2 (enExample) |
| EP (1) | EP2291680B1 (enExample) |
| JP (1) | JP5580300B2 (enExample) |
| CN (2) | CN110398769B (enExample) |
| RU (1) | RU2493573C2 (enExample) |
| WO (1) | WO2010004453A2 (enExample) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011083392B3 (de) * | 2011-09-26 | 2012-12-27 | Siemens Aktiengesellschaft | Herstellungsverfahren für Wandlerschichten für Strahlungsdetektoren |
| JP6013715B2 (ja) * | 2011-09-26 | 2016-10-25 | 株式会社アールエフ | X線グリッド製造方法および放射線撮像装置 |
| CN103135121B (zh) * | 2011-11-28 | 2017-04-26 | Ge医疗系统环球技术有限公司 | 用于消除串扰的线段形模块ct探测器和方法 |
| JP5788859B2 (ja) * | 2012-12-28 | 2015-10-07 | 株式会社島津製作所 | 散乱x線除去用グリッド |
| KR101408138B1 (ko) | 2013-03-14 | 2014-06-17 | 한국원자력연구원 | 인쇄형 방사선 영상 센서, 이를 구비하는 방사선 영상 장치 및 이의 제조 방법 |
| RU2554889C2 (ru) * | 2013-06-11 | 2015-06-27 | Евгений Николаевич Галашов | Способ изготовления детектирующей матрицы рентгеновского излучения |
| DE102014201772B4 (de) | 2014-01-31 | 2017-10-12 | Siemens Healthcare Gmbh | Direktkonvertierender Röntgenstrahlungsdetektor, CT-System und Verfahren hierzu |
| US9459355B1 (en) * | 2015-06-30 | 2016-10-04 | General Electric Company | Radiation detector with stacked barrier layers and method of forming the same |
| WO2017063157A1 (en) | 2015-10-14 | 2017-04-20 | Shenzhen Xpectvision Technology Co., Ltd. | X-ray detectors capable of limiting diffusion of charge carriers |
| US10393891B2 (en) | 2016-05-03 | 2019-08-27 | Redlen Technologies, Inc. | Sub-pixel segmentation for semiconductor radiation detectors and methods of fabricating thereof |
| RU174187U1 (ru) * | 2016-12-29 | 2017-10-06 | Общество с ограниченной ответственностью "Научно-технический центр "МТ" (ООО "НТЦ-МТ") | Составное фотосчитывающее устройство с композитными дистанционерами для рентгеночувствительных панелей |
| CN207098052U (zh) * | 2017-02-17 | 2018-03-13 | 全普光电科技(上海)有限公司 | 一种天线结构以及超薄手机 |
| CN108186041B (zh) * | 2018-01-22 | 2020-12-04 | 苏州晶特晶体科技有限公司 | 一种一体化doi影像强化pet环形阵列结构及加工方法 |
| FR3079909B1 (fr) | 2018-04-05 | 2022-10-14 | Microoled | Dispositif electroluminescent a resolution et fiabilite ameliorees |
| US11169286B2 (en) | 2018-06-18 | 2021-11-09 | Redlen Technologies, Inc. | Methods of calibrating semiconductor radiation detectors using K-edge filters |
| CN112673286B (zh) * | 2018-09-10 | 2024-11-01 | 皇家飞利浦有限公司 | 双传感器子像素辐射探测器 |
| EP3620826A1 (en) * | 2018-09-10 | 2020-03-11 | Koninklijke Philips N.V. | Multi-piece mono-layer radiation detector |
| US10928527B2 (en) | 2018-11-09 | 2021-02-23 | Redlen Technologies, Inc. | Charge sharing correction methods for pixelated radiation detector arrays |
| WO2020198931A1 (en) * | 2019-03-29 | 2020-10-08 | Shenzhen Xpectvision Technology Co., Ltd. | Radiation detectors with scintillators |
| US11372120B2 (en) | 2019-08-26 | 2022-06-28 | Redlen Technologies, Inc. | Charge sharing correction methods for sub-pixellated radiation detector arrays |
| WO2023087123A1 (en) * | 2021-11-16 | 2023-05-25 | Shenzhen Xpectvision Technology Co., Ltd. | Image sensors with shielded electronics layers |
| KR102767167B1 (ko) * | 2022-11-30 | 2025-02-13 | 주식회사 비투지홀딩스 | 방사선 디텍터 |
| CN119213560A (zh) * | 2023-08-07 | 2024-12-27 | 深圳帧观德芯科技有限公司 | 用于侧面入射成像且具有位于辐射吸收层中的辐射阻挡板的图像传感器 |
Family Cites Families (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58142283A (ja) * | 1982-02-19 | 1983-08-24 | Toshiba Corp | 放射線検出器 |
| JPS58180068A (ja) * | 1982-04-15 | 1983-10-21 | Toshiba Corp | 半導体放射線検出器の製造方法 |
| JPS5964587A (ja) | 1982-10-05 | 1984-04-12 | Tohoku Metal Ind Ltd | 単結晶の製造方法 |
| JPS5965487A (ja) | 1982-10-07 | 1984-04-13 | Toshiba Corp | 高密度実装用放射線検出素子 |
| JPS6328076A (ja) | 1986-07-21 | 1988-02-05 | Matsushita Electric Ind Co Ltd | 半導体放射線検出器 |
| JP2611295B2 (ja) | 1987-12-28 | 1997-05-21 | 株式会社日立製作所 | 放射線検出器およびその製造方法 |
| JPH02218990A (ja) * | 1989-02-20 | 1990-08-31 | Shimadzu Corp | 放射線検出素子アレイおよび放射線画像撮影装置 |
| JPH05326572A (ja) * | 1992-05-25 | 1993-12-10 | Matsushita Electron Corp | 電荷転送装置 |
| JP3235717B2 (ja) * | 1995-09-28 | 2001-12-04 | キヤノン株式会社 | 光電変換装置及びx線撮像装置 |
| GB2318448B (en) * | 1996-10-18 | 2002-01-16 | Simage Oy | Imaging detector and method of production |
| US6236051B1 (en) * | 1998-03-27 | 2001-05-22 | Kabushiki Kaisha Toshiba | Semiconductor radiation detector |
| US6069362A (en) * | 1998-05-14 | 2000-05-30 | The University Of Akron | Multi-density and multi-atomic number detector media for applications |
| GB2350767A (en) * | 1999-06-03 | 2000-12-06 | Canon Res Ct Europ Ltd | X-ray CCD detector having a second scintillator layer on back-thinned substrate |
| JP2003505705A (ja) * | 1999-07-26 | 2003-02-12 | エッジ メディカル デバイシス リミティド | X線画像化用ディジタル検出器 |
| JP2001296363A (ja) * | 2000-04-14 | 2001-10-26 | Fuji Photo Film Co Ltd | 放射線検出装置 |
| JP2001305234A (ja) * | 2000-04-25 | 2001-10-31 | Nikon Corp | 半導体電子線検出器 |
| JP2001318153A (ja) * | 2000-05-01 | 2001-11-16 | Fuji Photo Film Co Ltd | 放射線画像変換スクリーンおよびその製造方法 |
| JP2002372586A (ja) * | 2001-06-13 | 2002-12-26 | Canon Inc | 放射線撮像ユニット、装置及びシステム |
| JP2003004855A (ja) * | 2001-06-26 | 2003-01-08 | Hamamatsu Photonics Kk | 放射線検出器 |
| JP4707885B2 (ja) * | 2001-06-26 | 2011-06-22 | 浜松ホトニクス株式会社 | 光検出素子 |
| JP4482253B2 (ja) * | 2001-09-12 | 2010-06-16 | 浜松ホトニクス株式会社 | ホトダイオードアレイ、固体撮像装置、及び、放射線検出器 |
| JP2003086827A (ja) | 2001-09-12 | 2003-03-20 | Hamamatsu Photonics Kk | ホトダイオードアレイ、固体撮像装置、及び、放射線検出器 |
| US20030178570A1 (en) * | 2002-03-25 | 2003-09-25 | Hitachi Metals, Ltd. | Radiation detector, manufacturing method thereof and radiation CT device |
| US6867862B2 (en) * | 2002-11-20 | 2005-03-15 | Mehrdad Nikoonahad | System and method for characterizing three-dimensional structures |
| EP1570528B1 (en) * | 2002-12-09 | 2019-05-29 | Quantum Semiconductor, LLC | Cmos image sensor |
| WO2005001457A1 (fr) * | 2003-06-27 | 2005-01-06 | Tsinghua University | Systeme d'imagerie a rayons gamma pour l'inspection non destructrice de bagages |
| EP1761954A1 (en) * | 2004-06-18 | 2007-03-14 | Koninklijke Philips Electronics N.V. | X-ray image detector |
| EP1779138A2 (en) * | 2004-08-12 | 2007-05-02 | Philips Intellectual Property & Standards GmbH | Anti-scatter-grid for a radiation detector |
| JP2006059901A (ja) * | 2004-08-18 | 2006-03-02 | Toshiba Corp | 放射線検出器 |
| US20080258067A1 (en) * | 2004-08-20 | 2008-10-23 | Koninklijke Philips Electronics N.V. | Microelectronic System with a Passivation Layer |
| US7260174B2 (en) * | 2004-09-13 | 2007-08-21 | General Electric Company | Direct conversion energy discriminating CT detector with over-ranging correction |
| JP2006145431A (ja) * | 2004-11-22 | 2006-06-08 | Ge Medical Systems Global Technology Co Llc | 放射線検出器、放射線撮像装置、放射線ct装置及び放射線検出器の製造方法 |
| US7193289B2 (en) * | 2004-11-30 | 2007-03-20 | International Business Machines Corporation | Damascene copper wiring image sensor |
| BRPI0610720B1 (pt) * | 2005-04-22 | 2018-01-16 | Koninklijke Philips N. V. | pixel detector para uso em conjunto com um cintilador que converte uma partícula de radiação para uma rajada de luz, detector de radiação, sistema de geração de imagem de tomografia por emissão de pósitron de duração de trajetória (tof-pet), 5 método executado em conjunto com um cintilador que converte uma partícula de radiação para uma rajada de luz, e detector de radiação que inclui um cintilador e circuitos |
| US7212604B2 (en) * | 2005-06-29 | 2007-05-01 | General Electric Company | Multi-layer direct conversion computed tomography detector module |
| US7259377B2 (en) * | 2005-12-15 | 2007-08-21 | General Electric Company | Diode design to reduce the effects of radiation damage |
| CN100483149C (zh) * | 2005-12-31 | 2009-04-29 | 同方威视技术股份有限公司 | 一种用于辐射成像的多阵列探测器模块结构 |
| DE102006027820B4 (de) * | 2006-06-16 | 2008-04-03 | All Welding Technologies Ag | Kammeranordnung zur Verwendung bei der Elektronenstrahlbearbeitung |
| TWI523209B (zh) * | 2006-07-03 | 2016-02-21 | 濱松赫德尼古斯股份有限公司 | 光二極體陣列 |
| DE102006033716A1 (de) * | 2006-07-20 | 2008-02-14 | Siemens Ag | Röntgendiagnostikeinrichtung mit einem digitalen Röntgendetektor und integrierter Dosismessung |
| DE102010004890A1 (de) * | 2010-01-18 | 2011-07-21 | Siemens Aktiengesellschaft, 80333 | Photodiodenarray, Strahlendetektor und Verfahren zur Herstellung eines solchen Photodiodenarrays und eines solchen Strahlendetektors |
-
2009
- 2009-06-09 US US12/996,400 patent/US8564084B2/en not_active Expired - Fee Related
- 2009-06-09 CN CN201910645070.5A patent/CN110398769B/zh active Active
- 2009-06-09 RU RU2011101443/28A patent/RU2493573C2/ru active
- 2009-06-09 WO PCT/IB2009/052442 patent/WO2010004453A2/en not_active Ceased
- 2009-06-09 EP EP20090786416 patent/EP2291680B1/en active Active
- 2009-06-09 JP JP2011513102A patent/JP5580300B2/ja active Active
- 2009-06-09 CN CN2009801225245A patent/CN102066976A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CN102066976A (zh) | 2011-05-18 |
| WO2010004453A2 (en) | 2010-01-14 |
| JP2011525238A (ja) | 2011-09-15 |
| CN110398769B (zh) | 2024-03-22 |
| RU2011101443A (ru) | 2012-07-27 |
| US20110079865A1 (en) | 2011-04-07 |
| RU2493573C2 (ru) | 2013-09-20 |
| US8564084B2 (en) | 2013-10-22 |
| WO2010004453A3 (en) | 2010-06-10 |
| EP2291680B1 (en) | 2015-05-06 |
| CN110398769A (zh) | 2019-11-01 |
| EP2291680A2 (en) | 2011-03-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5580300B2 (ja) | 放射線検出器、放射線検出器を製造する方法、x線検出器及び撮像システム | |
| US8581200B2 (en) | Radiation detector with multiple electrodes on a sensitive layer | |
| KR101716911B1 (ko) | X-선 영상화용 실리콘 디텍터 어셈블리 | |
| JP2011525238A5 (enExample) | ||
| US20100213381A1 (en) | Radiation detector with several conversion layers | |
| JP2008311651A (ja) | 半導体光電子増倍器の構造 | |
| CA2492587A1 (en) | Gamma ray detector for positron emission tomography (pet) and single photon emmission computed tomography (spect) | |
| US20080258067A1 (en) | Microelectronic System with a Passivation Layer | |
| US9864070B2 (en) | Scintillation detector | |
| JP4338938B2 (ja) | シンチレータ装置、x線検出器、x線検査装置、及び、シンチレータ装置を製造する方法 | |
| KR101444731B1 (ko) | 섬광체 일체형 그리드 및 그 제조 방법, 그리고 이를 이용한 그리드 일체형 x선 검출기 | |
| JP2016524701A (ja) | マルチスペクトルx線検出装置 | |
| KR20110115432A (ko) | 수직 적층형 섬광체 구조물을 이용한 방사선 검출 장치 | |
| KR20190036212A (ko) | 픽셀 구조형 고해상도 하이브리드 방사선 디텍터 | |
| KR20200009931A (ko) | 후면 조사 구조를 이용한 저선량 및 고해상도 방사선 디텍터 | |
| KR101969024B1 (ko) | 섬광체 구조 및 그 제조 방법, 그리고 이를 포함하는 엑스선 영상 검출기 | |
| JP4501238B2 (ja) | マルチスライス放射線検出器 | |
| KR102604256B1 (ko) | 하이브리드 섬광체 기반 엑스선 디텍터 | |
| RU131588U1 (ru) | Сцинтилляционный детектор | |
| US20100264318A1 (en) | Scintillator-block capable of efficient absorption of X-ray energy | |
| KR20210081146A (ko) | 후면 조사 구조를 이용한 저선량 및 고해상도 곡면형 방사선 디텍터 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120607 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120607 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130123 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130129 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130424 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130912 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20131212 |
|
| A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20131219 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140310 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140612 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140710 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5580300 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |