JP2011525238A5 - - Google Patents

Download PDF

Info

Publication number
JP2011525238A5
JP2011525238A5 JP2011513102A JP2011513102A JP2011525238A5 JP 2011525238 A5 JP2011525238 A5 JP 2011525238A5 JP 2011513102 A JP2011513102 A JP 2011513102A JP 2011513102 A JP2011513102 A JP 2011513102A JP 2011525238 A5 JP2011525238 A5 JP 2011525238A5
Authority
JP
Japan
Prior art keywords
trench
radiation detector
barrier material
pixel
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011513102A
Other languages
English (en)
Japanese (ja)
Other versions
JP5580300B2 (ja
JP2011525238A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/IB2009/052442 external-priority patent/WO2010004453A2/en
Publication of JP2011525238A publication Critical patent/JP2011525238A/ja
Publication of JP2011525238A5 publication Critical patent/JP2011525238A5/ja
Application granted granted Critical
Publication of JP5580300B2 publication Critical patent/JP5580300B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011513102A 2008-06-16 2009-06-09 放射線検出器、放射線検出器を製造する方法、ｘ線検出器及び撮像システム Active JP5580300B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP08158304.9 2008-06-16
EP08158304 2008-06-16
PCT/IB2009/052442 WO2010004453A2 (en) 2008-06-16 2009-06-09 Radiation detector and a method of manufacturing a radiation detector

Publications (3)

Publication Number Publication Date
JP2011525238A JP2011525238A (ja) 2011-09-15
JP2011525238A5 true JP2011525238A5 (enExample) 2012-07-26
JP5580300B2 JP5580300B2 (ja) 2014-08-27

Family

ID=41507503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011513102A Active JP5580300B2 (ja) 2008-06-16 2009-06-09 放射線検出器、放射線検出器を製造する方法、ｘ線検出器及び撮像システム

Country Status (6)

Country Link
US (1) US8564084B2 (enExample)
EP (1) EP2291680B1 (enExample)
JP (1) JP5580300B2 (enExample)
CN (2) CN102066976A (enExample)
RU (1) RU2493573C2 (enExample)
WO (1) WO2010004453A2 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011083392B3 (de) * 2011-09-26 2012-12-27 Siemens Aktiengesellschaft Herstellungsverfahren für Wandlerschichten für Strahlungsdetektoren
JP6013715B2 (ja) * 2011-09-26 2016-10-25 株式会社アールエフ Ｘ線グリッド製造方法および放射線撮像装置
CN103135121B (zh) * 2011-11-28 2017-04-26 Ge医疗系统环球技术有限公司 用于消除串扰的线段形模块ct探测器和方法
JP5788859B2 (ja) * 2012-12-28 2015-10-07 株式会社島津製作所 散乱ｘ線除去用グリッド
KR101408138B1 (ko) 2013-03-14 2014-06-17 한국원자력연구원 인쇄형 방사선 영상 센서, 이를 구비하는 방사선 영상 장치 및 이의 제조 방법
RU2554889C2 (ru) * 2013-06-11 2015-06-27 Евгений Николаевич Галашов Способ изготовления детектирующей матрицы рентгеновского излучения
DE102014201772B4 (de) 2014-01-31 2017-10-12 Siemens Healthcare Gmbh Direktkonvertierender Röntgenstrahlungsdetektor, CT-System und Verfahren hierzu
US9459355B1 (en) * 2015-06-30 2016-10-04 General Electric Company Radiation detector with stacked barrier layers and method of forming the same
CN108139488A (zh) 2015-10-14 2018-06-08 深圳帧观德芯科技有限公司 能够限制载流子扩散的x射线检测器
US10393891B2 (en) 2016-05-03 2019-08-27 Redlen Technologies, Inc. Sub-pixel segmentation for semiconductor radiation detectors and methods of fabricating thereof
RU174187U1 (ru) * 2016-12-29 2017-10-06 Общество с ограниченной ответственностью "Научно-технический центр "МТ" (ООО "НТЦ-МТ") Составное фотосчитывающее устройство с композитными дистанционерами для рентгеночувствительных панелей
CN207098052U (zh) * 2017-02-17 2018-03-13 全普光电科技(上海)有限公司 一种天线结构以及超薄手机
CN108186041B (zh) * 2018-01-22 2020-12-04 苏州晶特晶体科技有限公司 一种一体化doi影像强化pet环形阵列结构及加工方法
FR3079909B1 (fr) 2018-04-05 2022-10-14 Microoled Dispositif electroluminescent a resolution et fiabilite ameliorees
US11169286B2 (en) 2018-06-18 2021-11-09 Redlen Technologies, Inc. Methods of calibrating semiconductor radiation detectors using K-edge filters
WO2020052987A1 (en) * 2018-09-10 2020-03-19 Koninklijke Philips N.V. Dual-sensor subpixel radiation detector
EP3620826A1 (en) * 2018-09-10 2020-03-11 Koninklijke Philips N.V. Multi-piece mono-layer radiation detector
US10928527B2 (en) 2018-11-09 2021-02-23 Redlen Technologies, Inc. Charge sharing correction methods for pixelated radiation detector arrays
WO2020198931A1 (en) 2019-03-29 2020-10-08 Shenzhen Xpectvision Technology Co., Ltd. Radiation detectors with scintillators
US11372120B2 (en) 2019-08-26 2022-06-28 Redlen Technologies, Inc. Charge sharing correction methods for sub-pixellated radiation detector arrays
CN118215861A (zh) * 2021-11-16 2024-06-18 深圳帧观德芯科技有限公司 具有屏蔽电子器件层的图像传感器
CN119213560A (zh) * 2023-08-07 2024-12-27 深圳帧观德芯科技有限公司 用于侧面入射成像且具有位于辐射吸收层中的辐射阻挡板的图像传感器

Family Cites Families (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142283A (ja) 1982-02-19 1983-08-24 Toshiba Corp 放射線検出器
JPS58180068A (ja) * 1982-04-15 1983-10-21 Toshiba Corp 半導体放射線検出器の製造方法
JPS5964587A (ja) 1982-10-05 1984-04-12 Tohoku Metal Ind Ltd 単結晶の製造方法
JPS5965487A (ja) 1982-10-07 1984-04-13 Toshiba Corp 高密度実装用放射線検出素子
JPS6328076A (ja) 1986-07-21 1988-02-05 Matsushita Electric Ind Co Ltd 半導体放射線検出器
JP2611295B2 (ja) * 1987-12-28 1997-05-21 株式会社日立製作所 放射線検出器およびその製造方法
JPH02218990A (ja) * 1989-02-20 1990-08-31 Shimadzu Corp 放射線検出素子アレイおよび放射線画像撮影装置
JPH05326572A (ja) * 1992-05-25 1993-12-10 Matsushita Electron Corp 電荷転送装置
JP3235717B2 (ja) * 1995-09-28 2001-12-04 キヤノン株式会社 光電変換装置及びｘ線撮像装置
GB2318448B (en) * 1996-10-18 2002-01-16 Simage Oy Imaging detector and method of production
US6236051B1 (en) * 1998-03-27 2001-05-22 Kabushiki Kaisha Toshiba Semiconductor radiation detector
US6069362A (en) * 1998-05-14 2000-05-30 The University Of Akron Multi-density and multi-atomic number detector media for applications
GB2350767A (en) * 1999-06-03 2000-12-06 Canon Res Ct Europ Ltd X-ray CCD detector having a second scintillator layer on back-thinned substrate
JP2003505705A (ja) * 1999-07-26 2003-02-12 エッジ メディカル デバイシス リミティド Ｘ線画像化用ディジタル検出器
JP2001296363A (ja) * 2000-04-14 2001-10-26 Fuji Photo Film Co Ltd 放射線検出装置
JP2001305234A (ja) * 2000-04-25 2001-10-31 Nikon Corp 半導体電子線検出器
JP2001318153A (ja) * 2000-05-01 2001-11-16 Fuji Photo Film Co Ltd 放射線画像変換スクリーンおよびその製造方法
JP2002372586A (ja) * 2001-06-13 2002-12-26 Canon Inc 放射線撮像ユニット、装置及びシステム
JP2003004855A (ja) * 2001-06-26 2003-01-08 Hamamatsu Photonics Kk 放射線検出器
JP4707885B2 (ja) * 2001-06-26 2011-06-22 浜松ホトニクス株式会社 光検出素子
JP2003086827A (ja) * 2001-09-12 2003-03-20 Hamamatsu Photonics Kk ホトダイオードアレイ、固体撮像装置、及び、放射線検出器
JP4482253B2 (ja) * 2001-09-12 2010-06-16 浜松ホトニクス株式会社 ホトダイオードアレイ、固体撮像装置、及び、放射線検出器
US20030178570A1 (en) * 2002-03-25 2003-09-25 Hitachi Metals, Ltd. Radiation detector, manufacturing method thereof and radiation CT device
AU2003302049A1 (en) * 2002-11-20 2004-06-15 Mehrdad Nikoohahad System and method for characterizing three-dimensional structures
AU2003294822A1 (en) * 2002-12-09 2004-06-30 Quantum Semiconductor Llc Cmos image sensor
EP1645868A4 (en) * 2003-06-27 2007-03-28 Univ Tsinghua GAMMA RADIATION IMAGING SYSTEM FOR NON-DESTRUCTIVE INSPECTION OF LUGGAGE
US7601961B2 (en) * 2004-06-18 2009-10-13 Koninklijke Philips Electronics N.V. X-ray image detector
US7734017B2 (en) * 2004-08-12 2010-06-08 Koninklijke Philips Electronics N.V. Anti-scatter-grid for a radiation detector
JP2006059901A (ja) * 2004-08-18 2006-03-02 Toshiba Corp 放射線検出器
JP2008510960A (ja) * 2004-08-20 2008-04-10 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 保護層を有するマイクロエレクトロニクスシステム
US7260174B2 (en) * 2004-09-13 2007-08-21 General Electric Company Direct conversion energy discriminating CT detector with over-ranging correction
JP2006145431A (ja) * 2004-11-22 2006-06-08 Ge Medical Systems Global Technology Co Llc 放射線検出器、放射線撮像装置、放射線ｃｔ装置及び放射線検出器の製造方法
US7193289B2 (en) * 2004-11-30 2007-03-20 International Business Machines Corporation Damascene copper wiring image sensor
JP5345383B2 (ja) * 2005-04-22 2013-11-20 コーニンクレッカ フィリップス エヌ ヴェ 検出器画素、放射線検出器および方法、陽電子放出断層撮影システム、撮像検出器およびその較正方法、検出器セルの無効化方法
US7212604B2 (en) * 2005-06-29 2007-05-01 General Electric Company Multi-layer direct conversion computed tomography detector module
US7259377B2 (en) * 2005-12-15 2007-08-21 General Electric Company Diode design to reduce the effects of radiation damage
CN100483149C (zh) * 2005-12-31 2009-04-29 同方威视技术股份有限公司 一种用于辐射成像的多阵列探测器模块结构
DE102006027820B4 (de) 2006-06-16 2008-04-03 All Welding Technologies Ag Kammeranordnung zur Verwendung bei der Elektronenstrahlbearbeitung
TWI443817B (zh) * 2006-07-03 2014-07-01 濱松赫德尼古斯股份有限公司 Photodiode array
DE102006033716A1 (de) * 2006-07-20 2008-02-14 Siemens Ag Röntgendiagnostikeinrichtung mit einem digitalen Röntgendetektor und integrierter Dosismessung
DE102010004890A1 (de) * 2010-01-18 2011-07-21 Siemens Aktiengesellschaft, 80333 Photodiodenarray, Strahlendetektor und Verfahren zur Herstellung eines solchen Photodiodenarrays und eines solchen Strahlendetektors

Similar Documents

Publication Publication Date Title
JP2011525238A5 (enExample)
RU2011101443A (ru) Детектор излучений и способ изготовления детектора излучений
US9395453B2 (en) Photodiode and other sensor structures in flat-panel x-ray imagers and method for improving topological uniformity of the photodiode and other sensor structures in flat-panel x-ray imagers based on thin-film electronics
US10656290B2 (en) Direct photon conversion detector
US10222486B2 (en) Radiation detector and radiographic apparatus including the same
CN106461796B (zh) 具有可具有高纵横比的光敏元件的辐射探测器
JP6133055B2 (ja) フォトダイオード・アレイ、検出器及び製造方法
JP2010503985A (ja) シンチレーターに基づき空乏化した電子ドリフト領域を持つｘ線検出集積回路素子
DE102012112981A1 (de) Fotodiodenanordnungen und Verfahren zur Herstellung
JP2021536580A (ja) マルチピース単層放射線検出器
KR20200075227A (ko) 고해상도 하이브리드 방사선 디텍터
JP2012163396A5 (enExample)
CN109342465A (zh) 具有光电二极管的集成闪烁体网格
Lee et al. Performance evaluation of a small CZT pixelated semiconductor gamma camera system with a newly designed stack-up parallel-hole collimator
US20140161229A1 (en) Radiographic imaging device and radiographic imaging method
JP2012047557A (ja) 放射線検出器
CN102576715B (zh) 平板x射线成像器中的光电二极管和其他传感器结构以及用于基于薄膜电子器件来改进平板x射线成像器中的光电二极管和其他传感器结构的拓扑均匀性的方法
JPWO2013140444A1 (ja) シンチレータ及びその製造方法、並びに放射線検出器及びその製造方法