CN110398769B - 辐射探测器和制造辐射探测器的方法 - Google Patents
辐射探测器和制造辐射探测器的方法 Download PDFInfo
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- CN110398769B CN110398769B CN201910645070.5A CN201910645070A CN110398769B CN 110398769 B CN110398769 B CN 110398769B CN 201910645070 A CN201910645070 A CN 201910645070A CN 110398769 B CN110398769 B CN 110398769B
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- 230000005855 radiation Effects 0.000 title claims abstract description 80
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 239000000463 material Substances 0.000 claims abstract description 59
- 230000004888 barrier function Effects 0.000 claims abstract description 36
- 239000004065 semiconductor Substances 0.000 claims abstract description 21
- 238000006243 chemical reaction Methods 0.000 claims abstract description 6
- 238000011049 filling Methods 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 18
- 238000002955 isolation Methods 0.000 claims description 8
- 230000000873 masking effect Effects 0.000 claims description 6
- 238000003384 imaging method Methods 0.000 claims description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 238000012633 nuclear imaging Methods 0.000 claims description 2
- 238000012831 peritoneal equilibrium test Methods 0.000 claims description 2
- 238000012636 positron electron tomography Methods 0.000 claims description 2
- 238000012877 positron emission topography Methods 0.000 claims description 2
- 238000002603 single-photon emission computed tomography Methods 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 230000003595 spectral effect Effects 0.000 description 6
- 238000000708 deep reactive-ion etching Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000002285 radioactive effect Effects 0.000 description 4
- 229910004613 CdTe Inorganic materials 0.000 description 3
- 230000003321 amplification Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000013170 computed tomography imaging Methods 0.000 description 2
- 229920006335 epoxy glue Polymers 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000005429 filling process Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
- G01T1/2914—Measurement of spatial distribution of radiation
- G01T1/2921—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras
- G01T1/2928—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras using solid state detectors
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Radiation (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Apparatus For Radiation Diagnosis (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910645070.5A CN110398769B (zh) | 2008-06-16 | 2009-06-09 | 辐射探测器和制造辐射探测器的方法 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP08158304.9 | 2008-06-16 | ||
| EP08158304 | 2008-06-16 | ||
| CN2009801225245A CN102066976A (zh) | 2008-06-16 | 2009-06-09 | 辐射探测器和制造辐射探测器的方法 |
| PCT/IB2009/052442 WO2010004453A2 (en) | 2008-06-16 | 2009-06-09 | Radiation detector and a method of manufacturing a radiation detector |
| CN201910645070.5A CN110398769B (zh) | 2008-06-16 | 2009-06-09 | 辐射探测器和制造辐射探测器的方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009801225245A Division CN102066976A (zh) | 2008-06-16 | 2009-06-09 | 辐射探测器和制造辐射探测器的方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110398769A CN110398769A (zh) | 2019-11-01 |
| CN110398769B true CN110398769B (zh) | 2024-03-22 |
Family
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Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009801225245A Pending CN102066976A (zh) | 2008-06-16 | 2009-06-09 | 辐射探测器和制造辐射探测器的方法 |
| CN201910645070.5A Active CN110398769B (zh) | 2008-06-16 | 2009-06-09 | 辐射探测器和制造辐射探测器的方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009801225245A Pending CN102066976A (zh) | 2008-06-16 | 2009-06-09 | 辐射探测器和制造辐射探测器的方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8564084B2 (enExample) |
| EP (1) | EP2291680B1 (enExample) |
| JP (1) | JP5580300B2 (enExample) |
| CN (2) | CN102066976A (enExample) |
| RU (1) | RU2493573C2 (enExample) |
| WO (1) | WO2010004453A2 (enExample) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6013715B2 (ja) * | 2011-09-26 | 2016-10-25 | 株式会社アールエフ | Ｘ線グリッド製造方法および放射線撮像装置 |
| DE102011083392B3 (de) * | 2011-09-26 | 2012-12-27 | Siemens Aktiengesellschaft | Herstellungsverfahren für Wandlerschichten für Strahlungsdetektoren |
| CN103135121B (zh) * | 2011-11-28 | 2017-04-26 | Ge医疗系统环球技术有限公司 | 用于消除串扰的线段形模块ct探测器和方法 |
| JP5788859B2 (ja) * | 2012-12-28 | 2015-10-07 | 株式会社島津製作所 | 散乱ｘ線除去用グリッド |
| KR101408138B1 (ko) | 2013-03-14 | 2014-06-17 | 한국원자력연구원 | 인쇄형 방사선 영상 센서, 이를 구비하는 방사선 영상 장치 및 이의 제조 방법 |
| RU2554889C2 (ru) * | 2013-06-11 | 2015-06-27 | Евгений Николаевич Галашов | Способ изготовления детектирующей матрицы рентгеновского излучения |
| DE102014201772B4 (de) * | 2014-01-31 | 2017-10-12 | Siemens Healthcare Gmbh | Direktkonvertierender Röntgenstrahlungsdetektor, CT-System und Verfahren hierzu |
| US9459355B1 (en) * | 2015-06-30 | 2016-10-04 | General Electric Company | Radiation detector with stacked barrier layers and method of forming the same |
| WO2017063157A1 (en) * | 2015-10-14 | 2017-04-20 | Shenzhen Xpectvision Technology Co., Ltd. | X-ray detectors capable of limiting diffusion of charge carriers |
| US10393891B2 (en) | 2016-05-03 | 2019-08-27 | Redlen Technologies, Inc. | Sub-pixel segmentation for semiconductor radiation detectors and methods of fabricating thereof |
| RU174187U1 (ru) * | 2016-12-29 | 2017-10-06 | Общество с ограниченной ответственностью "Научно-технический центр "МТ" (ООО "НТЦ-МТ") | Составное фотосчитывающее устройство с композитными дистанционерами для рентгеночувствительных панелей |
| CN107369896A (zh) * | 2017-02-17 | 2017-11-21 | 全普光电科技(上海)有限公司 | 天线结构及其制备方法、超薄手机及其制备方法 |
| CN108186041B (zh) * | 2018-01-22 | 2020-12-04 | 苏州晶特晶体科技有限公司 | 一种一体化doi影像强化pet环形阵列结构及加工方法 |
| FR3079909B1 (fr) | 2018-04-05 | 2022-10-14 | Microoled | Dispositif electroluminescent a resolution et fiabilite ameliorees |
| US11169286B2 (en) | 2018-06-18 | 2021-11-09 | Redlen Technologies, Inc. | Methods of calibrating semiconductor radiation detectors using K-edge filters |
| WO2020052987A1 (en) * | 2018-09-10 | 2020-03-19 | Koninklijke Philips N.V. | Dual-sensor subpixel radiation detector |
| EP3620826A1 (en) * | 2018-09-10 | 2020-03-11 | Koninklijke Philips N.V. | Multi-piece mono-layer radiation detector |
| US10928527B2 (en) | 2018-11-09 | 2021-02-23 | Redlen Technologies, Inc. | Charge sharing correction methods for pixelated radiation detector arrays |
| CN113614574B (zh) | 2019-03-29 | 2025-03-14 | 深圳帧观德芯科技有限公司 | 带有闪烁体的辐射检测器 |
| US11372120B2 (en) | 2019-08-26 | 2022-06-28 | Redlen Technologies, Inc. | Charge sharing correction methods for sub-pixellated radiation detector arrays |
| WO2023087123A1 (en) * | 2021-11-16 | 2023-05-25 | Shenzhen Xpectvision Technology Co., Ltd. | Image sensors with shielded electronics layers |
| KR102767167B1 (ko) * | 2022-11-30 | 2025-02-13 | 주식회사 비투지홀딩스 | 방사선 디텍터 |
| WO2025030310A1 (en) * | 2023-08-07 | 2025-02-13 | Shenzhen Xpectvision Technology Co., Ltd. | Image sensors for side incident imaging with radiation blocking plates in radiation absorption layers |
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2009
- 2009-06-09 CN CN2009801225245A patent/CN102066976A/zh active Pending
- 2009-06-09 EP EP20090786416 patent/EP2291680B1/en active Active
- 2009-06-09 JP JP2011513102A patent/JP5580300B2/ja active Active
- 2009-06-09 RU RU2011101443/28A patent/RU2493573C2/ru active
- 2009-06-09 CN CN201910645070.5A patent/CN110398769B/zh active Active
- 2009-06-09 US US12/996,400 patent/US8564084B2/en not_active Expired - Fee Related
- 2009-06-09 WO PCT/IB2009/052442 patent/WO2010004453A2/en not_active Ceased
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Also Published As
| Publication number | Publication date |
|---|---|
| JP5580300B2 (ja) | 2014-08-27 |
| RU2493573C2 (ru) | 2013-09-20 |
| RU2011101443A (ru) | 2012-07-27 |
| JP2011525238A (ja) | 2011-09-15 |
| CN110398769A (zh) | 2019-11-01 |
| EP2291680B1 (en) | 2015-05-06 |
| US20110079865A1 (en) | 2011-04-07 |
| EP2291680A2 (en) | 2011-03-09 |
| CN102066976A (zh) | 2011-05-18 |
| WO2010004453A3 (en) | 2010-06-10 |
| WO2010004453A2 (en) | 2010-01-14 |
| US8564084B2 (en) | 2013-10-22 |
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