JP5562076B2 - 光学式エンコーダおよび変位計測装置 - Google Patents

光学式エンコーダおよび変位計測装置 Download PDF

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Publication number
JP5562076B2
JP5562076B2 JP2010052575A JP2010052575A JP5562076B2 JP 5562076 B2 JP5562076 B2 JP 5562076B2 JP 2010052575 A JP2010052575 A JP 2010052575A JP 2010052575 A JP2010052575 A JP 2010052575A JP 5562076 B2 JP5562076 B2 JP 5562076B2
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Japan
Prior art keywords
light
grating
pitch
optical encoder
optical
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Expired - Fee Related
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JP2010052575A
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Japanese (ja)
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JP2011185806A (ja
JP2011185806A5 (https=
Inventor
公 石塚
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2010052575A priority Critical patent/JP5562076B2/ja
Priority to US13/039,651 priority patent/US20110222073A1/en
Priority to EP11157480.2A priority patent/EP2365292A3/en
Publication of JP2011185806A publication Critical patent/JP2011185806A/ja
Publication of JP2011185806A5 publication Critical patent/JP2011185806A5/ja
Application granted granted Critical
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Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP2010052575A 2010-03-10 2010-03-10 光学式エンコーダおよび変位計測装置 Expired - Fee Related JP5562076B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010052575A JP5562076B2 (ja) 2010-03-10 2010-03-10 光学式エンコーダおよび変位計測装置
US13/039,651 US20110222073A1 (en) 2010-03-10 2011-03-03 Optical encoder and displacement measurement apparatus having the same
EP11157480.2A EP2365292A3 (en) 2010-03-10 2011-03-09 Optical encoder and displacement measurement apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010052575A JP5562076B2 (ja) 2010-03-10 2010-03-10 光学式エンコーダおよび変位計測装置

Publications (3)

Publication Number Publication Date
JP2011185806A JP2011185806A (ja) 2011-09-22
JP2011185806A5 JP2011185806A5 (https=) 2013-04-25
JP5562076B2 true JP5562076B2 (ja) 2014-07-30

Family

ID=44196056

Family Applications (1)

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JP2010052575A Expired - Fee Related JP5562076B2 (ja) 2010-03-10 2010-03-10 光学式エンコーダおよび変位計測装置

Country Status (3)

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US (1) US20110222073A1 (https=)
EP (1) EP2365292A3 (https=)
JP (1) JP5562076B2 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6178854A (ja) * 1984-09-25 1986-04-22 Takemoto Oil & Fat Co Ltd ポリオレフイン樹脂への帯電防止性及び防曇性付与方法
JP6071181B2 (ja) * 2011-10-14 2017-02-01 キヤノン株式会社 エンコーダおよびこれを備えた装置
JP5984364B2 (ja) * 2011-11-22 2016-09-06 キヤノン株式会社 光学式エンコーダおよびこれを備えた装置
JP6113021B2 (ja) * 2013-08-09 2017-04-12 株式会社キーエンス 接触式変位計
JP6359254B2 (ja) * 2013-09-03 2018-07-18 株式会社ミツトヨ 光電式エンコーダ
JP6263965B2 (ja) * 2013-11-05 2018-01-24 株式会社安川電機 エンコーダ、エンコーダ付きモータ、サーボシステム
JP6312505B2 (ja) 2014-04-08 2018-04-18 キヤノン株式会社 光学式エンコーダおよびこれを備えた装置
JP5925365B1 (ja) * 2015-05-13 2016-05-25 株式会社メルテック 光学式エンコーダ用格子板および光学式エンコーダ用格子板の製造方法
JPWO2018163424A1 (ja) * 2017-03-10 2019-03-22 三菱電機株式会社 アブソリュートエンコーダ
US10295648B2 (en) * 2017-06-29 2019-05-21 Mitutoyo Corporation Contamination and defect resistant optical encoder configuration including a normal of readhead plane at a non-zero pitch angle relative to measuring axis for providing displacement signals
KR102239911B1 (ko) * 2019-02-21 2021-04-13 하이윈 마이크로시스템 코포레이션 광학 인코더 및 그의 제어방법

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4078173A (en) * 1976-06-24 1978-03-07 Pertec Computer Corporation Light amplitude control system for position and motion transducers
US4912322A (en) * 1986-08-15 1990-03-27 Mitutoyo Mfg. Co., Ltd. Optical type displacement detecting device
JPS6350722A (ja) * 1986-08-20 1988-03-03 Mitsutoyo Corp 光学式変位検出器
JPH07888Y2 (ja) * 1988-02-22 1995-01-11 株式会社ミツトヨ 光学式変位検出器
US4979827A (en) * 1988-02-26 1990-12-25 Kabushiki Kaisha Okuma Tekkosho Optical linear encoder
JP2539269B2 (ja) * 1989-07-17 1996-10-02 オークマ株式会社 光学式エンコ―ダ
JPH0625675B2 (ja) * 1989-08-30 1994-04-06 オ−クマ株式会社 平均化回折モアレ位置検出器
US5073710A (en) * 1989-09-21 1991-12-17 Copal Company Limited Optical displacement detector including a displacement member's surface having a diffractive pattern and a holographic lens pattern
US5155355A (en) * 1991-04-25 1992-10-13 Mitutoyo Corporation Photoelectric encoder having a grating substrate with integral light emitting elements
DE69320716T3 (de) * 1992-06-30 2011-05-19 Canon K.K. Gerät zur Detektion von Verschiebungsinformation
JP3210111B2 (ja) * 1992-12-24 2001-09-17 キヤノン株式会社 変位検出装置
JPH09196705A (ja) * 1996-01-23 1997-07-31 Mitsutoyo Corp 変位測定装置
JPH102761A (ja) * 1996-06-14 1998-01-06 Mitsutoyo Corp 光電式エンコーダ
DE19859669A1 (de) * 1998-12-23 2000-06-29 Heidenhain Gmbh Dr Johannes Integrierter optoelektronischer Sensor und Verfahren zu dessen Herstellung
US7064842B1 (en) * 1999-01-13 2006-06-20 Olympus Optical Co., Ltd. Optical displacement sensor and optical encoder
DE19918101A1 (de) * 1999-04-22 2000-10-26 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
US6635863B1 (en) * 1999-08-06 2003-10-21 Mitutoyo Corporation Optical encoder
JP5345269B2 (ja) * 1999-10-26 2013-11-20 シチズンホールディングス株式会社 光学式変位測定装置
GB9928483D0 (en) * 1999-12-03 2000-02-02 Renishaw Plc Opto-electronic scale reading apparatus
JP2002009328A (ja) * 2000-06-21 2002-01-11 Mitsutoyo Corp 受光素子アレイ及びその製造方法
JP3589621B2 (ja) * 2000-07-03 2004-11-17 株式会社ミツトヨ 光電式エンコーダ及びそのセンサヘッドの製造方法
GB0103582D0 (en) * 2001-02-14 2001-03-28 Renishaw Plc Position determination system
JP4703059B2 (ja) * 2001-08-28 2011-06-15 株式会社ミツトヨ 光電式エンコーダ
US7186969B2 (en) * 2003-02-12 2007-03-06 Mitutoyo Corporation Optical configuration for imaging-type optical encoders
JP4315323B2 (ja) * 2003-03-06 2009-08-19 株式会社ハーモニック・ドライブ・システムズ 投影型ロータリエンコーダ
JP2005017116A (ja) * 2003-06-26 2005-01-20 Sharp Corp 光学式エンコーダ用受光素子
JP4021382B2 (ja) * 2003-07-28 2007-12-12 オリンパス株式会社 光学式エンコーダ及びその製造方法並びに光学レンズモジュール
JP4416544B2 (ja) * 2004-03-12 2010-02-17 株式会社ミツトヨ 光学式変位測定装置
US7763875B2 (en) * 2005-09-07 2010-07-27 Romanov Nikolai L System and method for sensing position utilizing an uncalibrated surface
JP5087239B2 (ja) * 2006-06-26 2012-12-05 株式会社ミツトヨ 光電式エンコーダ
JP4912801B2 (ja) * 2006-09-11 2012-04-11 オリンパス株式会社 光学式エンコーダ
WO2010089824A1 (ja) * 2009-02-06 2010-08-12 株式会社ニコン エンコーダ
US8094323B2 (en) * 2009-06-26 2012-01-10 Mitutoyo Corporation Displacement encoder including phosphor illumination source
US8188420B2 (en) * 2009-11-14 2012-05-29 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. High resolution optical encoder systems having a set of light detecting elements each comprising a pair of complementary detectors (as amended)
US8493572B2 (en) * 2010-05-05 2013-07-23 Mitutoyo Corporation Optical encoder having contamination and defect resistant signal processing

Also Published As

Publication number Publication date
US20110222073A1 (en) 2011-09-15
EP2365292A2 (en) 2011-09-14
JP2011185806A (ja) 2011-09-22
EP2365292A3 (en) 2013-11-13

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